Patents
Patents for B24B 49 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation (8,827)
05/1998
05/13/1998EP0841122A1 Endpoint detector for a chemical mechanical polishing system
05/13/1998CA2220775A1 Automatic in-process gauging of ground shafts
05/07/1998WO1998018596A1 Improved elg wiring configuration
05/06/1998EP0839604A1 Apparatus and method for grinding eyeglass lenses
05/06/1998CN1181032A Computer vision inspection station
05/05/1998US5746645 Working a natural or synthetic hard stone such as a gemstone
05/05/1998US5746644 Centerless grinder assembly and method of operating the same
04/1998
04/28/1998US5743784 Apparatus and method to determine the coefficient of friction of a chemical mechanical polishing pad during a pad conditioning process and to use it to control the process
04/28/1998US5742995 Method to predict an accurate MR sensor dimension when viewed from abs
04/21/1998US5741172 Drive and control device and related process for a grinding machine
04/21/1998US5741171 Precision polishing system
04/14/1998US5738562 Apparatus and method for planar end-point detection during chemical-mechanical polishing
04/09/1998WO1998014306A1 A method and system for controlling chemical mechanical polishing thickness removal
04/09/1998WO1998014305A1 Methods and apparatus for measuring and dispensing processing solutions to a cmp machine
04/09/1998DE19743139A1 Grinding machine control arrangement
04/08/1998EP0713438B1 Improved x-axis accuracy in two axis machine tools
03/1998
03/31/1998US5733171 Apparatus for the in-process detection of workpieces in a CMP environment
03/26/1998WO1998012739A1 Semiconductor wafer polishing device
03/24/1998US5730643 Machine tool
03/24/1998US5730642 System for real-time control of semiconductor wafer polishing including optical montoring
03/19/1998WO1998010891A1 Improvements in and relating to workpiece grinding
03/18/1998EP0829327A1 Polishing pad control method and apparatus
03/18/1998CN2276394Y Mouting structure for boom and rod of roll numerically controlled grinder measuring boom
03/12/1998WO1998009771A1 Method and apparatus for computer numerically controlled pin grinder gauge
03/11/1998EP0827808A2 Apparatus for applying an urging force to a wafer
03/11/1998EP0785839B1 Lateral evening process and device
03/05/1998WO1998005066A3 Methods and apparatus for the in-process detection and measurement of thin film layers
03/04/1998EP0827193A2 Polishing endpoint determination method and apparatus
03/03/1998US5722875 Method and apparatus for polishing
03/03/1998US5722155 Machining guide method for magnetic recording reproduce heads
02/1998
02/25/1998EP0824995A1 Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
02/24/1998US5720845 Wafer polisher head used for chemical-mechanical polishing and endpoint detection
02/18/1998CN1173733A Radiant polishing block heater
02/17/1998US5718620 Polishing machine and method of dissipating heat therefrom
02/17/1998US5718617 Grinding force measurement system for computer controlled grinding operations
02/17/1998US5718615 Semiconductor wafer dicing method
02/17/1998US5718614 Control apparatus for grinder
02/12/1998WO1998005473A1 Microfinishing machine
02/12/1998DE19632340A1 Contour grinding method for spectacles lens peripheral edge
02/11/1998EP0823310A1 Machine tool for combined working
02/11/1998EP0823309A1 Method and apparatus for controlling flatness of polished semiconductor wafers
02/05/1998WO1998005066A2 Methods and apparatus for the in-process detection and measurement of thin film layers
02/05/1998WO1998004379A1 Machine for machining workpieces with cutting teeth, in particular saw blades
02/04/1998EP0822031A1 Method and apparatus for chucked work piece recognition
01/1998
01/29/1998WO1998003305A1 Methods and apparatus for the in-process detection of workpieces
01/28/1998EP0713441B1 Control of 2-axis machine tool
01/27/1998US5711697 Robot control system
01/27/1998US5711696 Apparatus for machining a workpiece to non-revolute symmetric and aspherical surface
01/22/1998DE19652839A1 Level sensor for chemical-mechanical polishing device for semiconductor wafer
01/22/1998DE19629284A1 Device for sanding blocks, especially of brick or stone
01/21/1998CN1170655A Automated wafer lapping system
01/14/1998EP0713437B1 Improved machine tool
01/14/1998EP0713434B1 Z-axis drive for 2-axis machine tool
01/13/1998US5708506 Apparatus and method for detecting surface roughness in a chemical polishing pad conditioning process
01/08/1998WO1998000264A1 Machine for machining tooth flanks of a cutting tool
01/08/1998DE19626879A1 Method for preventing overstress in workpiece or wheel during grinding
01/07/1998EP0816017A1 Method and apparatus for dressing polishing cloth
01/07/1998EP0814940A1 Computer vision inspection station
01/06/1998US5705435 Detecting endpoint without removing substrate
01/06/1998US5704826 Machine for grinding rotor blades provided with a multiwheel head
01/02/1998DE19626189A1 Peripheral grinding method for rotary workpiece e.g. crank-shaft crank pins
12/1997
12/24/1997WO1997048526A1 Grinding machine spindle flexibly attached to platform
12/24/1997WO1997048525A1 Workpiece inspection and handling
12/24/1997WO1997048522A1 Improvements in and relating to grinding machines
12/23/1997US5700180 System for real-time control of semiconductor wafer polishing
12/16/1997US5698455 Method for predicting process characteristics of polyurethane pads
12/16/1997US5697834 Remote repair appliance
12/11/1997DE19622374A1 Method for controlling electrically-driven saw
12/09/1997US5695660 Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
12/09/1997US5695601 Method for planarizing a semiconductor body by CMP method and an apparatus for manufacturing a semiconductor device using the method
12/03/1997EP0810635A1 Method and apparatus for mounting a semiconductor wafer on a polishing block by applying radiant heat
12/03/1997EP0810067A1 Method of and instrument for measuring roll diameter in roll grinder
12/03/1997EP0810066A2 Automated wafer lapping system
12/03/1997EP0810064A2 Polishing apparatus having interlock function
12/03/1997EP0809798A2 Method and apparatus for predicting process characteristics of polyurethane pads
12/03/1997EP0809557A1 Determining the coefficient of friction of a polishing pad
11/1997
11/27/1997WO1997044160A1 Method for chemical-mechanical planarization of stop-on-feature semiconductor wafers
11/26/1997EP0808693A1 Method and apparatus for dressing the CBN or diamond ring layer of a grinding wheel
11/26/1997CN2268600Y Accurate feeding contorller of bearing grinder
11/25/1997US5691253 Forming layer over patterned substrate, wherein the layer has first exposed surface lying in a first elevation, and a second elevation that is different from the first elevation, polishing to form second exposed surface, analyzing
11/12/1997EP0806266A2 Polishing method and polishing apparatus using the same
11/11/1997US5685766 Polishing control method
10/1997
10/30/1997WO1997040432A1 Method and apparatus for grinding composite workpieces
10/29/1997EP0803325A2 Shaped grinding process for the circumferential edge of spectacle lenses and if necessary subsequently bevelling grinding and spectacle lens edge grinding machine
10/29/1997EP0803323A1 Method and apparatus for measuring the diameter of excentrically rotating workpieces
10/29/1997EP0743891A4 Method and apparatus for correcting diametrical taper on a workpiece
10/28/1997US5681212 Polishing device and correcting method therefor
10/23/1997WO1997038822A1 System for deburring or grinding a workpiece using a robot or manipulator, method of using said system, and use of said system and method
10/21/1997US5679061 System for grinding rings with hydraulic holding
10/21/1997US5679055 Automated wafer lapping system
10/21/1997US5679053 Method and apparatus for grinding a workpiece
10/16/1997WO1997038292A1 Acoustic condition monitoring of objects
10/15/1997EP0800896A2 Endpoint detection for chemical mechanical polishing using frequency or amplitude mode
10/15/1997EP0800439A1 Checking device for a microfinishing machine tool
10/15/1997EP0713436B1 Protective covers for 2-axis machine tool
10/08/1997EP0799110A1 Method and device for polishing gemstones
10/07/1997US5674106 Centerless grinder assembly and method of operating the same
09/1997
09/30/1997US5672093 Specimen load control mechanism for automatic polishing apparatus
09/30/1997US5672091 Polishing apparatus having endpoint detection device
09/24/1997EP0713440B1 Radial force compensation in 2-axis machine tool
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