| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 12/02/2004 | DE10320700A1 Vacuum housing for x-ray tube esp. rotating anode tube having a protective layer made of a material which compensates for thermal shock wear effect on the tube material |
| 12/02/2004 | DE10319057A1 Plasmabehandelte textile Flächengebilde, Verfahren zu deren Herstellung und deren Verwendung Plasma-treated textile fabric, to processes for their preparation and their use |
| 12/01/2004 | EP1481574A2 Electrode element for a plasma torch and method for the production |
| 12/01/2004 | EP1481573A1 Gas generator for a sterilizing system |
| 12/01/2004 | EP1481112A2 Method for the plasma cleaning of the surface of a material coated with an organic substance and the installation for carrying out said method |
| 12/01/2004 | EP1480776A1 Method for plasma-oxyacetylene cutting ferrous metals |
| 12/01/2004 | EP1207550B1 Method of etching and method of plasma treatment |
| 12/01/2004 | CN1552082A Novel electrode for use with atmospheric pressure plasma emitter apparatus and method for using the same |
| 12/01/2004 | CN1551305A Plasma processing apparatus and control method thereof |
| 12/01/2004 | CN1551302A Upper electrode and plasma processing device |
| 12/01/2004 | CN1178560C Plasma accelerator arrangement |
| 11/30/2004 | US6825920 Method and system of determining chamber seasoning condition by optical emission |
| 11/30/2004 | US6825618 Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply |
| 11/30/2004 | US6825597 Ion source, ion implanting device, and manufacturing method of semiconductor devices |
| 11/30/2004 | US6825464 Method and apparatus to produce ions and nanodrops from Taylor cones of volatile liquids at reduced pressures |
| 11/30/2004 | US6824363 Linear inductive plasma pump for process reactors |
| 11/30/2004 | US6823816 Plasma processing system |
| 11/30/2004 | US6823815 Wafer area pressure control for plasma confinement |
| 11/30/2004 | CA2325880C Container with material coating having barrier effect and method and apparatus for making same |
| 11/25/2004 | WO2004103035A1 Plasma processing apparatus and method for producing same |
| 11/25/2004 | WO2004102650A1 Plasma processing device |
| 11/25/2004 | US20040235304 Plasma treatment apparatus |
| 11/25/2004 | US20040234779 Fluorinated aromatic precursors |
| 11/25/2004 | US20040233027 Apparatus for manipulating magnetic fields |
| 11/25/2004 | US20040232415 Vacuum processing method, vacuum processing apparatus, semiconductor device manufacturing method and semiconductor device |
| 11/25/2004 | US20040232118 Torch with rotational start |
| 11/25/2004 | US20040232114 Electrodes and nozzles having improved connection and quick release |
| 11/25/2004 | US20040231797 Apparatus for manufacturing semiconductor device |
| 11/25/2004 | DE10323014A1 Düse für Plasmabrenner Nozzle for plasma torch |
| 11/25/2004 | CA2524484A1 Plasma processing apparatus and method for producing same |
| 11/24/2004 | EP1480499A1 Plasma surface treating method and apparatus therefor |
| 11/24/2004 | EP1480250A1 A high density plasma reactor and RF-antenna therefor |
| 11/24/2004 | EP1479090A2 Channel spark source for generating a stable, focussed electron beam |
| 11/24/2004 | EP1478485A1 Dual mode plasma arc torch |
| 11/24/2004 | EP0952957B1 Method and devices for producing hydrogen by plasma reformer |
| 11/24/2004 | CN1550031A Shielding system for plasma chamber |
| 11/24/2004 | CN1550027A Configurable plasma volume etch chamber |
| 11/24/2004 | CN1549309A Method for etching a semiconductor wafer |
| 11/24/2004 | CN1549308A Plasma etching reactor |
| 11/24/2004 | CN1176636C Method for plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator |
| 11/23/2004 | US6822396 Apparatus including vacuum chamber surrounded by electrical transformer to induce electromagnetic field, having primary winding, plasma loop in chamber coupled as secondary winding, auxiliary secondary winding coupled to ignition circuit |
| 11/23/2004 | US6821500 Thermal synthesis apparatus and process |
| 11/23/2004 | US6821493 Non-thermal plasma reactor substrate design-E-shape with low loss electrode pattern |
| 11/23/2004 | US6821379 Portable apparatus and method for treating a workpiece |
| 11/23/2004 | US6821377 Plasma processing apparatus |
| 11/23/2004 | US6820564 System and method for removing blockages in a waste converting apparatus |
| 11/18/2004 | WO2004100622A1 Apparatus for injecting plasma gas in atmosphere |
| 11/18/2004 | WO2004100621A1 Laser plasma producing method and device |
| 11/18/2004 | WO2004099490A1 Plasma treatment apparatus and method |
| 11/18/2004 | WO2004099070A1 System for producing hydrogen using hydrocarbon, organic compound containing oxygen as material, and discharge electrode for use therein |
| 11/18/2004 | WO2004077894A3 Method and system for providing impedance matching network and network assembly |
| 11/18/2004 | US20040229078 Plasma resistant article and method of manufacture |
| 11/18/2004 | US20040226921 Centralized control architecture for a plasma arc system |
| 11/18/2004 | US20040226920 Electrodes and nozzles having improved connection and quick release |
| 11/18/2004 | US20040226815 Plasma processing apparatus and control method thereof |
| 11/18/2004 | DE102004019026A1 Dielektrische keramische Zusammensetzung für Hochfrequenzanwendungen, dielektrischer Resonator, dielektrisches Filter, dielektrischer Duplexer und Kommunikationssystem A dielectric ceramic composition for high-frequency applications, dielectric resonator, dielectric filter, dielectric duplexer, and communication system |
| 11/17/2004 | EP1476891A1 Sputtering cathode and device and method for coating a substrate with several layers |
| 11/17/2004 | EP1476588A1 Method of cleaning the surface of a material coated with an organic substance and a generator and device for carrying out said method |
| 11/17/2004 | EP1476497A1 Method and apparatus for applying material to glass |
| 11/17/2004 | CN2657277Y Plasma high frequency power supply for lightning arrester |
| 11/17/2004 | CN1547225A Technology and equipment for preparing magnetic carbon nanometer tube by plasma |
| 11/16/2004 | US6818912 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 11/16/2004 | US6818853 Vacuum arc plasma thrusters with inductive energy storage driver |
| 11/16/2004 | US6818560 Plasma processing apparatus and plasma processing method |
| 11/16/2004 | US6818193 Segmented electrode capillary discharge, non-thermal plasma apparatus and process for promoting chemical reactions |
| 11/16/2004 | US6818097 Highly heat-resistant plasma etching electrode and dry etching device including the same |
| 11/11/2004 | WO2004098246A1 Apparatus and method for forming a plasma |
| 11/11/2004 | WO2004097843A2 Apparatus and method for ignition of high-gain thermonuclear microexplosions with electric-pulse power |
| 11/11/2004 | US20040224128 Low contamination plasma chamber components and methods for making the same |
| 11/11/2004 | US20040224125 Ceramic members, a method of producing the same and corrosion resistant members |
| 11/11/2004 | US20040224100 Plasma-treated planar textile structures and method for the manufacture thereof |
| 11/11/2004 | US20040223579 Antenna structure for inductively coupled plasma generator |
| 11/11/2004 | US20040223531 High efficiency collector for laser plasma EUV source |
| 11/11/2004 | US20040222367 Beam source and beam processing apparatus |
| 11/11/2004 | US20040222190 Plasma processing method |
| 11/11/2004 | US20040222189 Apparatus and method for radio frequency decoupling and bias voltage control in a plasma reactor |
| 11/11/2004 | US20040221816 Plasma processing apparatus |
| 11/11/2004 | US20040221815 Beam source and beam processing apparatus |
| 11/11/2004 | US20040221814 Inductively coupled plasma processing apparatus having internal linear antenna for large area processing |
| 11/11/2004 | DE10317027A1 Hochfrequenz-Plasmastrahlquelle und Verfahren zum Bestrahlen einer Oberfläche High-frequency plasma jet source and method for irradiating a surface |
| 11/11/2004 | DE102004009881A1 Mikrowellenbetriebener Leuchtkopf mit einem externen Verschluss Microwave-powered lamp head with an external shutter |
| 11/11/2004 | CA2523057A1 Apparatus and method for ignition of high-gain thermonuclear microexplosions with electric-pulse power |
| 11/10/2004 | EP1475820A1 Electrode for plasma processes and method for manufacture and use thereof |
| 11/10/2004 | EP1475807A2 High efficiency collector for laser plasma EUV source |
| 11/10/2004 | EP1474958A1 Microwave plasma source |
| 11/10/2004 | EP1474264A1 A plasma processing apparatus and method |
| 11/10/2004 | CN1545722A Plasma reactor coil magnet |
| 11/10/2004 | CN1545636A Method for removing organic alignment film coated on substrate using plasma |
| 11/10/2004 | CN1175477C Plasma treatment device and plasma treatment method |
| 11/10/2004 | CN1175127C Microwave plasma exciter |
| 11/10/2004 | CN1174917C Nanometer carbon pipe material and its preparation |
| 11/09/2004 | US6816029 RF matching unit |
| 11/09/2004 | US6815899 Remote plasma generator |
| 11/09/2004 | US6815700 Plasma focus light source with improved pulse power system |
| 11/09/2004 | US6815632 Contact start plasma torch |
| 11/09/2004 | US6815369 Method for monitoring deposition reaction during processing the surface of a semiconductor substrate |
| 11/09/2004 | US6815352 Silicon focus ring and method for producing the same |
| 11/09/2004 | US6814838 Induction coil generates treatment plasma in discharge chamber located in interior of coil; with slotted screen; semiconductors |
| 11/04/2004 | WO2004095896A1 Nozzle for plasma torches |
| 11/04/2004 | WO2004095895A1 Debris collector for euv light generator |