| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 10/05/2004 | US6800336 Atmospheric plasma is generated in the form of a jet, which has a significantly greater range than the discharge zone of a corona discharge, plasma jet brushes over the surface of the substrate to be coated |
| 10/05/2004 | US6800256 Scaleable inter-digitized tine non-thermal plasma reactor |
| 10/05/2004 | US6799532 Stabilized oscillator circuit for plasma density measurement |
| 09/30/2004 | WO2004084394A1 Power supply unit for a gas discharge process |
| 09/30/2004 | WO2004083486A1 Method and apparatus for plasma cdv by use of ultrashort wave |
| 09/30/2004 | US20040191949 Zinc oxide film treatment method and method of manufacturing photovoltaic device utilizing the same |
| 09/30/2004 | US20040191932 Plasma Processing method |
| 09/30/2004 | US20040189325 Method and apparatus for electron density measurement |
| 09/30/2004 | US20040188019 Device for treating a surface of a substrate, and a plasma source |
| 09/30/2004 | DE10310623A1 Verfahren und Vorrichtung zum Erzeugen eines Plasmas durch eletrische Entladung in einem Entladungsraum Method and apparatus for generating a plasma by eletrische discharge in a discharge space |
| 09/30/2004 | DE102004013321A1 Thermoelektrischer Torusmagnet für Kernfussionsreaktoren Thermoelectric Torusmagnet for Kernfussionsreaktoren |
| 09/29/2004 | EP1461820A2 Device for applying an electromagnetic microwave to a plasma container |
| 09/29/2004 | EP1461521A2 Fuel vaporization systems for vaporizing liquid fuel |
| 09/29/2004 | EP1281296B1 Twin plasma torch apparatus |
| 09/29/2004 | CN1533596A Plasma treatment device |
| 09/29/2004 | CN1533587A 抬升及支撑装置 Lifting and supporting device |
| 09/29/2004 | CN1533364A Method and apparatus for under water decomposition of organic content of electrically conductive aqueous waste solutions |
| 09/29/2004 | CN1532951A Treating method of zinc oxide film and method for producing photoelectric element using it |
| 09/29/2004 | CN1169410C 等离子喷涂枪 Plasma spray gun |
| 09/29/2004 | CN1169409C Plasma vacuum pump |
| 09/29/2004 | CN1169191C Method for implanting negative hydrogen ion and implanting apparatus |
| 09/29/2004 | CN1168369C Electromagnetic wave generating composite |
| 09/28/2004 | US6798141 Plasma accelarator arrangement |
| 09/28/2004 | US6797939 Method for monitoring plasma or flame-spray processes |
| 09/28/2004 | US6797112 Plasma treatment apparatus and method of producing semiconductor device using the apparatus |
| 09/28/2004 | US6797111 Plasma processing apparatus |
| 09/28/2004 | US6797110 Glass, plasma resisting component, component for electromagnetic wave-transparent window and plasma processing apparatus |
| 09/28/2004 | US6796270 Device for producing PCVD coated glass tubes for the drawing of optical fibers |
| 09/28/2004 | US6796268 Microwave plasma processing system |
| 09/23/2004 | WO2004082340A1 Method and device for the generation of a plasma through electric discharge in a discharge space |
| 09/23/2004 | WO2004082008A1 Cvd apparatus and method for cleaning cvd apparatus |
| 09/23/2004 | WO2004081503A2 Discharge produced plasma euv light source |
| 09/23/2004 | WO2004081258A2 Apparatus and method for non-contact cleaning of a surface |
| 09/23/2004 | WO2004081254A1 Microwave plasma processing device and plasma processing gas supply member |
| 09/23/2004 | WO2004062326A3 Low power plasma generator |
| 09/23/2004 | WO2003107382A3 Plasma apparatus and method for processing a substrate |
| 09/23/2004 | US20040183481 Microwave powered lamphead having external shutter |
| 09/23/2004 | US20040183454 Method of and apparatus for electrostatic fluid acceleration control of a fluid flow |
| 09/23/2004 | US20040183453 Plasma processing apparatus |
| 09/23/2004 | US20040183452 Plasma-accelerator configuration |
| 09/23/2004 | US20040183038 Extreme UV radiation source and semiconductor exposure device |
| 09/23/2004 | US20040183037 Method and device for producing extreme ultraviolet radiation and soft x-ray radiation |
| 09/23/2004 | US20040183008 Plasma torch |
| 09/23/2004 | US20040182832 Fast pulse nonthermal plasma reactor |
| 09/22/2004 | EP1460886A2 Extreme UV radiation source and semiconductor exposure device |
| 09/22/2004 | EP1460147A1 Plasma jet chemical vapor deposition system having a plurality of distribution heads |
| 09/22/2004 | EP1460146A1 Plasma jet chemical vapor deposition system having a plurality of distribution heads |
| 09/22/2004 | EP1459351A2 Plasma reactor with overhead rf electrode tuned to the plasma with arcing suppression |
| 09/22/2004 | EP1399284A4 Dual mode plasma arc torch for use with a plasma arc treatment system and method of use thereof |
| 09/22/2004 | EP1092228B1 Electrode for plasma processes and method for manufacture and use thereof |
| 09/22/2004 | CN1531840A Method and device for producing extreme ultraviolet radiation and soft X-radiation |
| 09/22/2004 | CN1531739A Conductive collar surrounding semiconductor workpiece in plasma chamber |
| 09/21/2004 | US6795462 Gas laser |
| 09/21/2004 | US6794601 Plasma arc torch system with pilot re-attach circuit and method |
| 09/21/2004 | US6794600 Plasma torch used for heating molten steel |
| 09/21/2004 | US6793982 Electrode of green compact for discharge surface treatment, method of producing the same, method of discarge surface treatment, apparatus therefor, and method of recycling electrode of green compact for discharge surface treatment |
| 09/21/2004 | US6793975 Fine atomizing, vaporization; powder coating |
| 09/21/2004 | US6793834 Apparatus for and method of processing an object to be processed |
| 09/21/2004 | US6793832 Plasma etching method |
| 09/21/2004 | US6793768 Plasma-assisted processing apparatus |
| 09/16/2004 | WO2004079812A1 Improved method and apparatus for removing contaminants from the surface of a substrate |
| 09/16/2004 | WO2004079811A1 Plasma processing apparatus and method |
| 09/16/2004 | WO2004079188A2 Drive device pertaining to a space missile and method for controlling the position of a space missile comprising one such drive device |
| 09/16/2004 | WO2004079040A1 A method and special apparatus for modifying the internal surface of tubular workpiece |
| 09/16/2004 | WO2003077254A3 Solenoid control and safety circuit system and method |
| 09/16/2004 | US20040180158 Chamber having components with textured surfaces and method of manufacture |
| 09/16/2004 | US20040179182 Lithographic apparatus with debris suppression, and device manufacturing method |
| 09/16/2004 | US20040178151 Launching electromagnetic wave into cylindrical chamber to create ionization zone; creating radially oriented electric field |
| 09/16/2004 | US20040177992 Grounding cable and semiconductor manufacturing apparatus using the same |
| 09/16/2004 | DE10318925A1 Antriebsvorrichtung eines Raumflugkörpers und Verfahren zur Lagesteuerung eines Raumflugkörpers mit einer solchen Antriebsvorrichtung Drive device of a spacecraft attitude control and method for a spacecraft having such a drive device |
| 09/16/2004 | CA2517133A1 Plasma processing apparatus and method |
| 09/15/2004 | EP1458008A2 High frequency wave heated plasma mass filter |
| 09/15/2004 | EP1458006A1 Continuous deposition of insulating material using multiple anodes alternated between positive and negative voltages |
| 09/15/2004 | CN1167103C Elastomer bonded parts for plasma processes and method for manufacture and use thereof |
| 09/14/2004 | US6792076 Target steering system for EUV droplet generators |
| 09/14/2004 | US6790487 Active control of electron temperature in an electrostatically shielded radio frequency plasma source |
| 09/14/2004 | US6790326 Magnetron for a vault shaped sputtering target having two opposed sidewall magnets |
| 09/14/2004 | US6790311 Plasma reactor having RF power applicator and a dual-purpose window |
| 09/10/2004 | WO2004077894A2 Method and system for providing impedance matching network and network assembly |
| 09/10/2004 | WO2004077540A1 Plasma process device |
| 09/10/2004 | WO2004076113A2 Vented shield system for a plasma arc torch |
| 09/10/2004 | WO2004076052A2 Method and apparatus for non-thermal pasteurization of living-mammal-instillable liquids |
| 09/10/2004 | WO2004008502A3 Multirate processing for metrology of plasma rf source |
| 09/09/2004 | US20040175953 Apparatus for generating planar plasma using concentric coils and ferromagnetic cores |
| 09/09/2004 | US20040173584 Glass-processing method and glass-processing apparatus for the method |
| 09/09/2004 | US20040173583 Plasma processing apparatus |
| 09/09/2004 | US20040173582 Tip gas distributor |
| 09/09/2004 | US20040173580 Apparatus for non-contact cleaning of a surface |
| 09/09/2004 | US20040173579 Apparatus and method for non-contact cleaning of a surface |
| 09/09/2004 | US20040173571 Method for etching structures in an etching body by means of a plasma |
| 09/09/2004 | US20040173316 Apparatus and method using a microwave source for reactive atom plasma processing |
| 09/09/2004 | US20040173309 Plasma processing apparatus and plasma processing method |
| 09/09/2004 | US20040173159 Semiconductor process chamber electrode |
| 09/08/2004 | EP1454889A1 Glass-processing method and glass-processing apparatus for the method |
| 09/08/2004 | CN1527363A Control method of semiconductor processing device |
| 09/08/2004 | CN1526852A Method and special apparatus for modifying inner surface of tubular workpiece |
| 09/08/2004 | CN1526672A Glass treating method and glass treating apparatus utilizing the same method |
| 09/08/2004 | CN1166263C Ion source for ion implanter and method for ion formation in ion implanter |
| 09/08/2004 | CN1165969C Plasma processing device |
| 09/07/2004 | US6787730 Device for plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator |