Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/1993
05/18/1993CA1318015C Customizable circuitry
05/18/1993CA1317822C Multilayer ceramics coatings from the ceramification of hydrogen silsesquioxane resin in the presence of ammonia
05/13/1993WO1993009599A2 Analog-to-digital converter and method of fabrication
05/13/1993WO1993009569A1 Method for producing opto-electronic components by selective epitaxy in a groove
05/13/1993WO1993009568A1 Process for making ohmic contacts and photovoltaic cell with ohmic contact
05/13/1993WO1993009567A1 Auxiliary gate lightly doped drain (agldd) structure with dielectric sidewalls
05/13/1993WO1993009566A1 Method for moisture sealing integrated circuits using silicon nitride spacer protection of oxide passivation edges
05/13/1993WO1993009565A1 Apparatus for and method of manufacturing semiconductor wafer
05/13/1993WO1993009564A1 PROCESS FOR PRODUCING A Si/FeSi2-HETEROSTRUCTURE
05/13/1993WO1993009563A1 Method and apparatus for controlled spray etching
05/13/1993WO1993009561A1 Electron beam exposure method
05/13/1993WO1993009472A1 Light exposure device
05/13/1993WO1993009470A1 Positive photoresists containing solubility enhancers
05/13/1993WO1993009469A1 Exposure device
05/13/1993WO1993009167A1 Process for preparing a polyimide film with a preselected value for cte
05/13/1993WO1993009128A1 Hybridization of polynucleotides conjugated with chromophores and fluorophores to generate donor-to-donor energy transfer system
05/13/1993WO1993008931A2 System for supplying ultrapure water and method of washing substrate, and system for producing ultrapure water and method of producing ultrapure water
05/13/1993DE4238080A1 Through hole connection structure mfr. for multilayer integrated circuit - selectively etching insulating layer and using CVD process with gas containing titanium and forming conducting layers for coupling to connecting layer
05/13/1993DE4237100A1 Storage cell capacitors prodn. for DRAM technology - by forming capacitor electrode contact hole, depositing doped poly-silicon@ layer, depositing silicon nitride, poly-silicon@ and silica layers, etching,etc.
05/13/1993DE4233248A1 Flash-EEPROM with blockwise erase capability - controls Y-decoder and transfer circuit so that source-line latch circuit potential is applied via bit line to memory block field
05/13/1993DE4205347A1 Wet nitrogen process and assembly - used to generate ultra-clean conditions within a chemical process space
05/13/1993CA2123115A1 Method and apparatus for controlled spray etching
05/12/1993EP0541436A2 Conductive pattern layer structure and method of producing the conductive pattern layer structure
05/12/1993EP0541405A1 Bond pad for semiconductor device
05/12/1993EP0541400A2 Anti-stick electrostatic chuck for a low pressure environment
05/12/1993EP0541382A1 Process for making ohmic contacts and photovoltaic cell with ohmic contact
05/12/1993EP0541288A2 Circuit module redundacy architecture
05/12/1993EP0541282A2 Method of soldering including removal of flux residue
05/12/1993EP0541240A1 High speed testing of field-effect transistors
05/12/1993EP0541212A2 Process for fabricating semiconductor metal oxide device
05/12/1993EP0541205A2 Method to produce complementary heterojunction bipolar transistors
05/12/1993EP0541170A2 Method and device for tracking down a prespecified subcircuit in an electrical circuit, method for constructing integrated circuit masks using the method
05/12/1993EP0541160A1 Method of manufacturing a semiconductor device whereby contact windows are provided in an insulating layer comprising silicon nitride in two etching steps
05/12/1993EP0541122A1 Method of fabricating a semiconductor device with a polycrystalline silicon resistive layer
05/12/1993EP0541116A2 Method for bonding lead with electrode of electronic device
05/12/1993EP0541112A1 Positive type light-senstitive composition
05/12/1993EP0541066A2 Isolation region in a group III-V semiconductor device and method of making the same
05/12/1993EP0541033A2 Process of fabrication of thin-film polycristalline silicon solar cells
05/12/1993EP0540994A1 Structure of high dielectric constant metal/dielectric/ semiconductor capacitor for use as a storage capacitor in memory devices
05/12/1993EP0540965A1 Positive light sensitive composition and process for the formation of relief pattern
05/12/1993EP0540930A2 Bit line configuration for semiconductor memory
05/12/1993EP0540578A1 Compact sram cell layout
05/12/1993EP0540522A1 Solder interconnections and methods for making same
05/12/1993EP0540519A1 Metal bump for a thermal compression bond and method for making same.
05/12/1993EP0272280B1 A process for the manufacture of iii-v semiconductor devices
05/12/1993CN1072040A Nand type mask readonly memory
05/12/1993CN1071977A Electrochemical process
05/11/1993US5210779 Apparatus and method for focusing hard x-rays
05/11/1993US5210716 Semiconductor nonvolatile memory
05/11/1993US5210696 Electron beam exposure data processing method, electron beam exposure method and apparatus
05/11/1993US5210599 Semiconductor device having a built-in capacitor and manufacturing method thereof
05/11/1993US5210597 Non-volatile semiconductor memory device and a method for fabricating the same
05/11/1993US5210487 Double-gated integrating scheme for electron beam tester
05/11/1993US5210446 Substrate potential generating circuit employing Schottky diodes
05/11/1993US5210440 Semiconductor chip cooling apparatus
05/11/1993US5210438 Semiconductor resistance element and process for fabricating same
05/11/1993US5210437 MOS device having a well layer for controlling threshold voltage
05/11/1993US5210436 Semiconductor device with input protection circuit of high withstand voltage
05/11/1993US5210435 ITLDD transistor having a variable work function
05/11/1993US5210431 Ohmic connection electrodes for p-type semiconductor diamonds
05/11/1993US5210375 Electronic device package--carrier assembly ready to be mounted onto a substrate
05/11/1993US5210056 Method for forming a gate oxide film of a semiconductor device
05/11/1993US5210055 Method for the plasma treatment of semiconductor devices
05/11/1993US5210054 Reliability without causing peeling
05/11/1993US5210053 Having wirings with good step coverage on contacts
05/11/1993US5210052 Method for fabricating a semiconductor substrate
05/11/1993US5210051 P-n junctions
05/11/1993US5210047 Process for fabricating a flash EPROM having reduced cell size
05/11/1993US5210046 Method of fabricating eprom device with metallic source connections
05/11/1993US5210044 Method of manufacturing a floating gate type nonvolatile memory cell having an offset region
05/11/1993US5210043 Wiring made from silicide film
05/11/1993US5210042 Method of producing semiconductor device
05/11/1993US5210041 Process for manufacturing semiconductor integrated circuit device
05/11/1993US5210006 Process for preparing mounting tapes for automatic mounting of electronic components
05/11/1993US5210003 Acid labile dissolution inhibitors and positive- and negative-acting photosensitive composition based thereon
05/11/1993US5209944 Process for coating a substrate using a pulsed laser beam
05/11/1993US5209833 Method and apparatus for large-area electrical contacting of a semiconductor crystal body with the assistance of electrolytes
05/11/1993US5209818 Manufacture of a micromechanical element with two degrees of freedom
05/11/1993US5209816 Method of chemical mechanical polishing aluminum containing metal layers and slurry for chemical mechanical polishing
05/11/1993US5209815 Semiconductors, polyether sulfone release layer
05/11/1993US5209814 Applying a layer in a solvent, heat treatment and washing
05/11/1993US5209803 Parallel plate reactor and method of use
05/11/1993US5209699 Magnetic drive device
05/11/1993US5209180 Spin coating apparatus with an upper spin plate cleaning nozzle
05/11/1993US5209132 Semiconductor handling device having a self-check function and method of self-checking a semiconductor handling device
05/11/1993US5209028 Apparatus to clean solid surfaces using a cryogenic aerosol
05/11/1993US5208976 Apparatus and method for assembling circuit structures
05/11/1993CA1317664C Semiconductor light detector and method of manufacturing the same
05/06/1993DE4236625A1 Plastics encapsulated semiconductor device - has resin-filled space above element and under parallel plane in which internal wiring is arranged in proximity to surface electrode connections
05/06/1993DE4226200C1 Forming air bridges to cross conductor paths on semiconductor integrated circuit - covering conducting path to be bridged with photo-resist layers, creating air gap in second layer using etching process and adding top conductive layer
05/06/1993DE4136089A1 Crystal orientation determination in wafer having zinc blende structure - performing reflectometry of four angles between edges of etched groove and longer sides of mask opening
05/06/1993DE4136075A1 Anodic bonding of insulating and conductive discs to sandwich - involves using two hot plates for heating and applying pressure to minimise distortion and allow more than two discs to be bonded
05/06/1993DE4135903A1 Vapour deposition of high-conductivity aluminium@ - on semiconductor substrate with independent control of crystal structure
05/05/1993EP0540451A2 Structure and process for thin film interconnect
05/05/1993EP0540448A1 Base developable discharge toplayer for E-beam resists
05/05/1993EP0540447A1 A material-saving resist spinner and process
05/05/1993EP0540446A2 Self-aligned contact studs for semiconductor structures
05/05/1993EP0540444A1 CVD diamond or diamond-like carbon for chemical-mechanical polish etch stop
05/05/1993EP0540443A2 Complementary subcollectors with silicon epitaxial layers
05/05/1993EP0540420A2 Heat sink fin and production process therefor