Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/1993
04/06/1993US5200016 Semiconductor device manufacturing apparatus
04/06/1993US5199994 Impurity doping apparatus
04/06/1993US5199889 Leadless grid array socket
04/06/1993US5199630 Method and apparatus for measuring the vibration amplitude on an energy transducer
04/06/1993US5199629 Wire bonding system
04/06/1993US5199628 Wire bonding device
04/06/1993US5199483 Method and apparatus for cooling wafers
04/06/1993US5199163 Metal transfer layers for parallel processing
04/06/1993CA2032266C Integrated circuit solder die-attach design and method
04/06/1993CA2023712C Selective etching process
04/06/1993CA1315865C Semiconductor super lattice heterostructure fabrication methods, structures and devices
04/06/1993CA1315648C Polysilicon thin film process and product
04/06/1993CA1315616C Method for forming deposited film
04/06/1993CA1315615C Method for forming a deposited film
04/06/1993CA1315614C Method for forming deposited film
04/01/1993WO1993006703A1 Flat module
04/01/1993WO1993006622A1 Complementary bipolar transistors having high early voltage, high frequency performance and high breakdown voltage characteristics and method of making same
04/01/1993WO1993006620A1 Solder bump fabrication method and solder bumps formed thereby
04/01/1993WO1993006617A1 Method and apparatus for protecting ultraclean surfaces
04/01/1993WO1993006541A1 Device for generating intermediate voltages
04/01/1993WO1993006516A1 Microscope handling system
04/01/1993DE4133150A1 Cross cutting semiconductor optical waveguide strip - using linear bottom support and upper pressure plate with spring loaded cutting wedge fitting into etched separating groove
03/1993
03/31/1993EP0534872A1 Precision resistor and method of manufacturing
03/31/1993EP0534759A1 Position detector
03/31/1993EP0534758A1 Method and device for measuring positional deviation
03/31/1993EP0534746A2 Method of fabricating a trench structure in a semiconductor substrate
03/31/1993EP0534737A1 Ion beam profiling method and apparatus
03/31/1993EP0534720A1 Register marks
03/31/1993EP0534676A2 EEPROM with improved endurance properties
03/31/1993EP0534647A1 Isopropyl alcohol vapor dryer system
03/31/1993EP0534631A1 Method of forming vias structure obtained
03/31/1993EP0534604A1 Method of making fine-wire low-profile interconnections
03/31/1993EP0534598A1 Exposure apparatus for forming image
03/31/1993EP0534530A2 Method of manufacturing a device whereby a substance is implanted into a body
03/31/1993EP0534497A1 Semiconductor wafer surface treatment method
03/31/1993EP0534474A2 Si substrate and method of processing the same
03/31/1993EP0534404A1 Electron beam lithography apparatus
03/31/1993EP0534329A2 Notched insulation gate static induction transistor integrated circuit
03/31/1993EP0534324A1 Radiation sensitive compositions comprising polymer having acid labile groups
03/31/1993EP0534273A1 Method for producing a bottom-resist
03/31/1993EP0534271A2 Semiconductor device having improved frequency response
03/31/1993EP0534240A1 Method for etching metal thin film consisting essentially of aluminum and for producing thin film transistor
03/31/1993EP0534204A1 Base developable negative photoresist and use thereof
03/31/1993EP0534203A2 Semiconductor device
03/31/1993EP0534133A1 Insulating sealing device for lead-in layers of a protection housing
03/31/1993EP0534131A2 MOS technique in SOI technique
03/31/1993EP0534130A1 Method of fabricating a self-aligned contact hole structure
03/31/1993EP0534068A2 Equipment used in plasma- and surface-treatment-technique
03/31/1993EP0533859A1 Polypropylene wafer carrier
03/31/1993EP0533678A1 Ellipsometric control of material growth
03/31/1993EP0311605B1 Transistor arrangement with an output transistor
03/31/1993EP0292568B1 Hetero-junction bipolar transistor
03/31/1993CN1070535A Process and apparatus for ignition of CVD plasmas
03/31/1993CN1070515A Process for formation of delta-doped quantum well field effect transistor
03/31/1993CN1020224C Three-D magnetic-vector sensor and its production method
03/31/1993CN1020221C Non-crystalline silicon camera target
03/30/1993US5199055 X-ray lithographic mask blank with reinforcement
03/30/1993US5199035 Logic circuit for reliability and yield enhancement
03/30/1993US5198998 Erasable programmable read only memory
03/30/1993US5198987 Wiring-pattern-determination system
03/30/1993US5198986 Crosstalk verification device
03/30/1993US5198963 Multiple integrated circuit module which simplifies handling and testing
03/30/1993US5198905 Image sensor having an electrical interference reducing wire structure
03/30/1993US5198886 Semiconductor device having a clamping support
03/30/1993US5198885 Ceramic base power package
03/30/1993US5198879 Heterojunction semiconductor device
03/30/1993US5198837 Laser beam harmonics generator and light exposing device
03/30/1993US5198781 Custom integrated circuit composed of a combination of analog circuit cells designed to operate in current mode
03/30/1993US5198757 Method and apparatus for testing semiconductor integrated circuit
03/30/1993US5198754 Testing apparatus for high frequency integrated circuit chip
03/30/1993US5198753 Integrated circuit test fixture and method
03/30/1993US5198724 Plasma processing method and plasma generating device
03/30/1993US5198718 Filamentless ion source for thin film processing and surface modification
03/30/1993US5198694 Multilayer thin film transistors with gate metallization layer for semiconductors
03/30/1993US5198692 Semiconductor device including bipolar transistor with step impurity profile having low and high concentration emitter regions
03/30/1993US5198690 Electroluminescent device of II-IV compound semiconductor
03/30/1993US5198689 Silicon layer and tungsten layer, germanium dopes and emitter layers
03/30/1993US5198683 Integrated circuit memory device and structural layout thereof
03/30/1993US5198676 Ion beam profiling method and apparatus
03/30/1993US5198634 Plasma contamination removal process
03/30/1993US5198402 Aryl triflate compound, radiologically acid producing agent, radiologically acid producing agent system, and radiosensitive composition
03/30/1993US5198392 Method of forming a nitrided silicon dioxide (SiOx Ny) film
03/30/1993US5198390 RIE process for fabricating submicron, silicon electromechanical structures
03/30/1993US5198389 Method of metallizing contact holes in a semiconductor device
03/30/1993US5198388 Corrosion resistance
03/30/1993US5198387 Vapor deposition dopes on substrates from silane gas mixture
03/30/1993US5198386 Dynamic random access memory
03/30/1993US5198384 Process for manufacturing a ferroelectric dynamic/non-volatile memory array using a disposable layer above storage-node junction
03/30/1993US5198383 Dynamic random access memory
03/30/1993US5198382 Semiconductor element and manufacture thereof
03/30/1993US5198381 Method of making an E2 PROM cell with improved tunneling properties having two implant stages
03/30/1993US5198380 Electrically (erasable and) programmable read only memories
03/30/1993US5198379 Method of making a MOS thin film transistor with self-aligned asymmetrical structure
03/30/1993US5198378 Process of fabricating elevated source/drain transistor
03/30/1993US5198377 Thin film transistor for liquid crystal display
03/30/1993US5198376 Method of forming high performance lateral PNP transistor with buried base contact
03/30/1993US5198375 Method for forming a bipolar transistor structure
03/30/1993US5198373 Boron ion concentration
03/30/1993US5198372 Multilayer semiconductors
03/30/1993US5198371 Integrated circuit
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