| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/27/1993 | WO1993010555A1 Polycristalline silicon thin film and process for forming it at low temperature |
| 05/27/1993 | WO1993009906A1 Superhigh purity fluid supply pipe system and method of installing the same |
| 05/27/1993 | DE4239463A1 Semiconductor device with semiconductor elements in substrate - has metal wiring layer in region between semiconductor elements and evaluation device insulated from wiring layer for investigation of electrical characteristics |
| 05/27/1993 | DE4239324A1 Protective coating for electronic device contg. fluorinated acrylate] - and/or fluorinated polyurethane and opt. acrylic] resin, applied as organic soln. |
| 05/27/1993 | DE4238678A1 Prodn. of strontium titanate thin films on substrate - comprises dipping substrate into aq. soln. contg. strontium ions and titanium alkoxide(s) |
| 05/27/1993 | DE4238114A1 Reference voltage generator IC with serial integrated resistances - uses FETs to short-circuit selected resistances of resistance chain to obtain required IC resistance value |
| 05/27/1993 | DE4230687A1 Semiconductor device - comprises substrate contg. two wells of different conducting types |
| 05/27/1993 | CA2123877A1 Die mounting with uniaxial conductive adhesive |
| 05/27/1993 | CA2083760A1 Epitaxial magnesium oxide as a buffer layer for formation of subsequent layers on tetrahedral semiconductors |
| 05/27/1993 | CA2083623A1 Radiation-sensitive compositions |
| 05/26/1993 | EP0543762A1 Dry developable photoresist compositions and method for use thereof |
| 05/26/1993 | EP0543761A1 Crosslinkable aqueous developable photoresist compositions and method for use thereof |
| 05/26/1993 | EP0543759A2 A poly-emitter structure with improved interface control |
| 05/26/1993 | EP0543742A1 Monolithic low-voltage protection diode with low capacity |
| 05/26/1993 | EP0543703A1 Single-transistor electrically programmable integrated memory |
| 05/26/1993 | EP0543673A2 A method for the production of semiconductor memories |
| 05/26/1993 | EP0543656A2 Flash-erasable semiconductor memory device having an improved reliability |
| 05/26/1993 | EP0543635A2 A method for mounting a wiring board on a liquid crystal display substrate |
| 05/26/1993 | EP0543616A2 A capacitor and method for making a capacitor |
| 05/26/1993 | EP0543569A1 Fabrication of phase-shifting lithographic masks |
| 05/26/1993 | EP0543489A1 Semiconductor device and manufacturing method thereof |
| 05/26/1993 | EP0543449A2 Method of manufacturing a semiconductor device with aluminium tracks mutually insulated in lateral direction by an aluminium compound |
| 05/26/1993 | EP0543411A2 A wiring board and a method for producing the same |
| 05/26/1993 | EP0543392A2 Diamond semiconductor device and method of producing the same |
| 05/26/1993 | EP0543382A1 Semiconductor integrated circuit device having voltage level converting circuits |
| 05/26/1993 | EP0543364A2 Method for manufacturing polyimide multilayer wiring substrate |
| 05/26/1993 | EP0543361A2 Semiconductor device and method of manufacturing the same |
| 05/26/1993 | EP0543313A1 Field effect transistor having back gate held in contact with source electrode without variation in source contact resistance |
| 05/26/1993 | EP0543268A2 Transistor device with a gate structure and method of forming the same |
| 05/26/1993 | EP0543257A2 Method of manufacturing a power-MISFET |
| 05/26/1993 | EP0543254A2 A method of forming high-stability metallic contacts in an integrated circuit with one or more metallized layers |
| 05/26/1993 | EP0543223A2 Method of forming shallow junctions in field effect transistors |
| 05/26/1993 | EP0543158A2 Method of conducting strap formation in a semiconductor device |
| 05/26/1993 | EP0543121A2 Method of manufacturing a metal/ceramic substrate with an interface region |
| 05/26/1993 | EP0543009A1 Process for purifying nitrogen trifluoride gas |
| 05/26/1993 | EP0542983A1 SHALLOW OHMIC CONTACTS TO n-AlxGa(1-x)As |
| 05/26/1993 | EP0542783A1 Dispensing process and apparatus particularly for a sealing/adhesive product. |
| 05/26/1993 | EP0542768A1 Process for producing microstructures with locally different structural heights. |
| 05/26/1993 | EP0502992A4 Conductive adhesive useful for bonding a semiconductor die to a conductive support base |
| 05/26/1993 | EP0404789B1 Assembly process for producing led rows |
| 05/26/1993 | CN1020991C Isolation method of semiconductor device |
| 05/26/1993 | CN1020976C Method and device for sub-micron processing surface |
| 05/26/1993 | CA2082317A1 Method of manufacturing and testing integrated optical components |
| 05/25/1993 | US5214683 Charge detecting device controlling reset transistor operation |
| 05/25/1993 | US5214657 Method for fabricating wafer-scale integration wafers and method for utilizing defective wafer-scale integration wafers |
| 05/25/1993 | US5214606 Non-volatile semiconductor memory and method for driving the same |
| 05/25/1993 | US5214603 Folded bitline, ultra-high density dynamic random access memory having access transistors stacked above trench storage capacitors |
| 05/25/1993 | US5214493 Reduction exposure apparatus with correction for alignment light having inhomogeneous intensity distribution |
| 05/25/1993 | US5214489 Aligning device for exposure apparatus |
| 05/25/1993 | US5214318 Semiconductor integrated circuit device having a signal transmission line pair interconnected by propagation delay time control resistance |
| 05/25/1993 | US5214308 Substrate for packaging a semiconductor device |
| 05/25/1993 | US5214305 Polycide gate MOSFET for integrated circuits |
| 05/25/1993 | US5214304 Multilayer insulating films and polycrystalline silicon films |
| 05/25/1993 | US5214303 Semiconductor device ROM having an offset region |
| 05/25/1993 | US5214301 Field effect transistor having control and current electrodes positioned at a planar elevated surface |
| 05/25/1993 | US5214298 Complementary heterostructure field effect transistors |
| 05/25/1993 | US5214296 Thin-film semiconductor device and method of fabricating the same |
| 05/25/1993 | US5214295 Thin film field effect transistor, CMOS inverter, and methods of forming thin film field effect transistors and CMOS inverters |
| 05/25/1993 | US5214291 Pattern forming method |
| 05/25/1993 | US5214290 Electron beam lithography and workpiece supporting apparatus having supporting means for workpiece stage and moving means detachably mounted to cover opening in vacuum chamber |
| 05/25/1993 | US5214289 Charged particle beam deflector |
| 05/25/1993 | US5214284 Method and arrangement for testing and repairing an integrated circuit |
| 05/25/1993 | US5214283 Demetallizaion of multilayer elements with dielectric layers |
| 05/25/1993 | US5214261 Method and apparatus for dicing semiconductor substrates using an excimer laser beam |
| 05/25/1993 | US5214259 Method and apparatus for forming a ball at a bonding wire end |
| 05/25/1993 | US5214250 Method of reworking circuit panels, and circuit panels reworked thereby |
| 05/25/1993 | US5214003 Multilayer semiconductor oxide layer formed by oxidation a substrate in an ampoule and heating |
| 05/25/1993 | US5214002 Vapor deposition a multilayer element for semiconductors from silanes and hydrogenation |
| 05/25/1993 | US5214001 Method of manufacturing semiconductor device having planar single crystal semiconductor surface |
| 05/25/1993 | US5214000 Thermal transfer posts for high density multichip substrates and formation method |
| 05/25/1993 | US5213999 Method of metal filled trench buried contacts |
| 05/25/1993 | US5213996 Forming patterns, etching with halogen gas and irradiation with ultraviolet light |
| 05/25/1993 | US5213995 Method of making an article comprising a periodic heteroepitaxial semiconductor structure |
| 05/25/1993 | US5213993 Method of manufacturing semiconductor substrate dielectric isolating structure |
| 05/25/1993 | US5213992 Photoresists layers on silicon, masking, shifting, development and etching |
| 05/25/1993 | US5213991 Method of manufacturing semiconductor device |
| 05/25/1993 | US5213990 Multilayer transistors formed by vapor deposition, channels and patterns |
| 05/25/1993 | US5213989 Method for forming a grown bipolar electrode contact using a sidewall seed |
| 05/25/1993 | US5213988 Method of manufacturing bipolar transistor with self-aligned base regions |
| 05/25/1993 | US5213987 Method of integrating heterojunction bipolar transistors with PIN diodes |
| 05/25/1993 | US5213986 Wafers with boron dopes and bonding surface to oxide layer, etching, crystallization and annealing |
| 05/25/1993 | US5213985 Temperature measurement in a processing chamber using in-situ monitoring of photoluminescence |
| 05/25/1993 | US5213983 Method for the preparation of electronic and electro-optical components and circuits using conductive polymers |
| 05/25/1993 | US5213946 Containing iminosulfonic acid group which generates sulfonic acid, solubility in alkaline developer |
| 05/25/1993 | US5213916 Photolithography, integrated circuits, layers with different optical transmissivities |
| 05/25/1993 | US5213907 Dense, smooth, ductile, hard, reflective, corrosion resistant, heat resistant, wear resistant |
| 05/25/1993 | US5213906 Composite material comprising a layer of a iii-v compound and a layer of rare earth pnictide, production process and application |
| 05/25/1993 | US5213748 Joining leads with dam to form a ring and joining the ring to the leads and forming a ring of liquid anisotropic liquid crystal |
| 05/25/1993 | US5213676 Integrated circuits |
| 05/25/1993 | US5213670 Method for manufacturing a polycrystalline layer on a substrate |
| 05/25/1993 | US5213659 Combination usage of noble gases for dry etching semiconductor wafers |
| 05/25/1993 | US5213658 Plasma processing method |
| 05/25/1993 | US5213657 Method for making uniform the thickness of a si single crystal thin film |
| 05/25/1993 | US5213655 Device and method for detecting an end point in polishing operation |
| 05/25/1993 | US5213650 Apparatus for removing deposits from backside and end edge of semiconductor wafer while preventing removal of materials from front surface of wafer |
| 05/25/1993 | US5213622 Cleaning agents for fabricating integrated circuits and a process for using the same |
| 05/25/1993 | US5213621 Complexing with metal impurities; vapor phase |
| 05/25/1993 | US5213451 Apparatus and method of automatically separating stacked wafers |
| 05/25/1993 | US5213416 For semiconductor devices |
| 05/25/1993 | US5213349 Electrostatic chuck |