| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/24/1993 | DE4242578A1 Emitter switched thyristor - has transistor zone with alternative diffusion layers and diffusion zone formed above insulating film |
| 06/24/1993 | DE4142654A1 P-channel or N-channel permeable base transistor - has screen-type laterally structured layer for controlling space charge zone |
| 06/24/1993 | DE4142595A1 P-channel or N-channel permeable base transistor - has laterally structured base layer forming part of PN junction acting as controlled charge zone |
| 06/24/1993 | DE4142466A1 Accelerating cooling in rapid thermal annealing of semiconductor wafer - using rows of light sources by moving reflector plates to reduce reflection |
| 06/24/1993 | CA2126189A1 Thermal transfer posts for high density multichip substrates and formation method |
| 06/23/1993 | EP0547989A2 Alpha particle disturb reduction techniques |
| 06/23/1993 | EP0547908A2 Method of forming an improved poly-buffered locos process |
| 06/23/1993 | EP0547907A2 Method of forming a gate overlap LDD structure |
| 06/23/1993 | EP0547906A1 Method for forming contact vias in integrated circuits |
| 06/23/1993 | EP0547902A2 Epitaxial method for fabricating semiconductor devices and semiconductor devices fabricated by that method |
| 06/23/1993 | EP0547894A1 An automatic wafer lapping apparatus |
| 06/23/1993 | EP0547884A1 Method of selectively etching a metal oxide on a material including Tantalum |
| 06/23/1993 | EP0547815A2 Pseudo-electroless, followed by electroless, metallization of nickel on metallic wires, as for semiconductor chip-to-chip interconnections |
| 06/23/1993 | EP0547711A2 Electrically erasable and programmable read-only memory with source and drain regions along sidewalls of a trench structure |
| 06/23/1993 | EP0547694A1 Method of manufacturing an opto-electronic semiconductor device, whereby a semiconductor body having a top layer of GaAs and a subjacent layer comprising InP is etched in a plasma generated in SiCl4, and Ar |
| 06/23/1993 | EP0547684A2 Method of manufacturing a semiconductor body comprising a carrier wafer and a monocrystalline semiconducting top layer |
| 06/23/1993 | EP0547677A2 Use of vapor-phase etching in fabrication of semiconductor-on-insulator structure |
| 06/23/1993 | EP0547673A2 Semiconductor device comprising at least one memory cell |
| 06/23/1993 | EP0547600A1 Refractory metal silicide deposition process and apparatus |
| 06/23/1993 | EP0547543A1 Process for producing metrological structures particularly for direct measurement of errors introduced by alignment systems |
| 06/23/1993 | EP0547488A1 Stripping method for photopolymerised resist patterns |
| 06/23/1993 | EP0547399A1 Frangible semiconductor wafer dicing method which employs scribing and breaking |
| 06/23/1993 | EP0292136B1 Method and process for testing the reliability of integrated circuit (ic) chips and novel ic circuitry for accomplishing same |
| 06/23/1993 | EP0285051B1 Method for bonding integrated circuit chips |
| 06/23/1993 | CN1073551A Method to form interlamination insulation film of semiconductor device |
| 06/23/1993 | CN1073550A Method for the manufacture of semiconductor substrate material |
| 06/23/1993 | CN1073385A Method for making thick film/solder joints |
| 06/22/1993 | USRE34291 Hybrid module electronics package |
| 06/22/1993 | US5222091 Structure for indium phosphide/indium gallium arsenide phosphide buried heterostructure semiconductor |
| 06/22/1993 | US5222074 Thermal decomposition cell |
| 06/22/1993 | US5222031 Logic cell placement method for semiconductor integrated circuit |
| 06/22/1993 | US5221865 Programmable input/output buffer circuit with test capability |
| 06/22/1993 | US5221857 Bipolar transistor structure with polycrystalline resistor layer |
| 06/22/1993 | US5221856 Bipolar transistor with floating guard region under extrinsic base |
| 06/22/1993 | US5221855 Monolithic vertical-type semiconductor power device with a protection against parasitic currents |
| 06/22/1993 | US5221853 MOSFET with a refractory metal film, a silicide film and a nitride film formed on and in contact with a source, drain and gate region |
| 06/22/1993 | US5221852 Charge coupled device and method of producing the same |
| 06/22/1993 | US5221812 System for protecting leads to a semiconductor chip package during testing, burn-in and handling |
| 06/22/1993 | US5221643 Enables deposition of uniform layers at low temperature |
| 06/22/1993 | US5221640 Method of producing wiring structures for electronic materials |
| 06/22/1993 | US5221639 Method of fabricating resistive conductive patterns on aluminum nitride substrates |
| 06/22/1993 | US5221638 Method of manufacturing a Schottky barrier semiconductor device |
| 06/22/1993 | US5221637 Mesa release and deposition (MRD) method for stress relief in heteroepitaxially grown GaAs on Si |
| 06/22/1993 | US5221636 Process and apparatus for the deposition of anti-reflection coatings and the checking of their thickness |
| 06/22/1993 | US5221635 P-type semiconductor substrate which is barrier between two n-type regions |
| 06/22/1993 | US5221634 Method of making semiconductor device employing self diffusion of dopant from contact member for augmenting electrical connection to doped region in substrate |
| 06/22/1993 | US5221633 Method of manufacturing a distributed drive optoelectronic integrated circuit |
| 06/22/1993 | US5221632 Method of proudcing a MIS transistor |
| 06/22/1993 | US5221630 Using gate electrode as mask |
| 06/22/1993 | US5221595 Printing plates, photoresist; high photosensitivity, acid resistance |
| 06/22/1993 | US5221561 Process for the photochemical treatment of a material using a flash tube light source |
| 06/22/1993 | US5221450 Placing substrate on chucking material continaing electrode, chucking by supplying electrical potential to electrode, remove substrate, eliminate residual charges by supttering with plasma gas |
| 06/22/1993 | US5221449 Forming a seed layer of Ta doped with nitrogen, depositing a layer of alpha-Ta in a nitrogen-free atmosphere |
| 06/22/1993 | US5221430 Dry etching method |
| 06/22/1993 | US5221429 Method of manufacturing phase-shifted diffraction grating |
| 06/22/1993 | US5221428 Production of lead frame |
| 06/22/1993 | US5221427 Plasma generating device and method of plasma processing |
| 06/22/1993 | US5221426 Laser etch-back process for forming a metal feature on a non-metal substrate |
| 06/22/1993 | US5221425 Method for reducing foreign matter on a wafer etched in a reactive ion etching process |
| 06/22/1993 | US5221424 Method for removal of photoresist over metal which also removes or inactivates corosion-forming materials remaining from previous metal etch |
| 06/22/1993 | US5221423 Process for cleaning surface of semiconductor substrate |
| 06/22/1993 | US5221422 Lithographic technique using laser scanning for fabrication of electronic components and the like |
| 06/22/1993 | US5221421 Controlled etching process for forming fine-geometry circuit lines on a substrate |
| 06/22/1993 | US5221420 Etching method for increased circuitized line width and uniformity |
| 06/22/1993 | US5221417 Conductive adhesive film techniques |
| 06/22/1993 | US5221415 Method of forming microfabricated cantilever stylus with integrated pyramidal tip |
| 06/22/1993 | US5221414 Process and system for stabilizing layer deposition and etch rates while simultaneously maintaining cleanliness in a water processing reaction chamber |
| 06/22/1993 | US5221413 Method for making low defect density semiconductor heterostructure and devices made thereby |
| 06/22/1993 | US5221412 Vapor-phase epitaxial growth process by a hydrogen pretreatment step followed by decomposition of disilane to form monocrystalline Si film |
| 06/22/1993 | US5221403 Support table for plate-like body and processing apparatus using the table |
| 06/22/1993 | US5221367 Strained defect-free epitaxial mismatched heterostructures and method of fabrication |
| 06/22/1993 | US5221360 Removing and replacing detachable bowl and rotor parts of centrifugal processing equipment to clean |
| 06/22/1993 | US5221356 Apparatus for manufacturing semiconductor wafers |
| 06/22/1993 | US5221175 Transport device for the transfer of a workpiece carrier |
| 06/22/1993 | US5221037 Wire bonding method and apparatus |
| 06/22/1993 | US5220997 Pushing mechanism in a lead frame conveying apparatus |
| 06/22/1993 | US5220726 Method for manufacturing an electrically connectable module |
| 06/22/1993 | CA1319340C Method and apparatus for production of three-dimensional objects by photosolidification |
| 06/21/1993 | CA2084918A1 Method for wiring a laser array and array wired according to said method |
| 06/17/1993 | DE4242408A1 Connecting liquid crystal displays to IC substrate - using patterned conducting photoresist and UV hardened resin to prevent electrodes from being short-circuited |
| 06/17/1993 | DE4241932A1 CVD to deliver reaction gas to form film of given compsn. - in which reaction zone is insulated from ambient air and reaction zone is linked to outlet channel |
| 06/17/1993 | DE4241840A1 Semiconductor and insulator film production method - uses gas source, U-V lamp and mask to deposit thin films on cooled substrates selectively |
| 06/17/1993 | DE4241333A1 Semiconductor sensor for flow meter - contains semiconducting chip with sensor element contg. flow detector element with heating and temp. sensitive elements. |
| 06/17/1993 | DE4239318A1 System for identifying application of supply voltage esp. for electronic circuit - has identifying unit connected to supply voltage lead for identifying application and interruption of supply voltage across supply voltage lead also signal prodn. unit |
| 06/17/1993 | DE4232277A1 Non-contact semiconductor wafer height measuring appts. for circuit testing system - has platform for carrying semiconductor wafer and platform driving system for driving platform in determined direction and distance measuring unit |
| 06/16/1993 | EP0547030A2 Step-cut insulated gate static induction transistors and method of manufacturing the same |
| 06/16/1993 | EP0546978A2 Electronic parallel raster dual image registration device |
| 06/16/1993 | EP0546976A1 Trench capacitor |
| 06/16/1993 | EP0546946A2 Film deposition apparatus |
| 06/16/1993 | EP0546921A1 Gas photonanograph for fabrication and optical analysis of nanometer scale patterns |
| 06/16/1993 | EP0546919A1 Heterojunction bipolar transistor insensitive to external temperature variation and associated integrated circuit |
| 06/16/1993 | EP0546852A1 Methods and apparatus for generating a plasma for "downstream" rapid shaping of surfaces of substrates and films |
| 06/16/1993 | EP0546842A1 Methods and apparatus for confinement of a plasma etch region for precision shaping of surfaces of substances |
| 06/16/1993 | EP0546824A1 Metallized paths on diamond surfaces |
| 06/16/1993 | EP0546814A1 A polyimide photosensitive cover coating agent |
| 06/16/1993 | EP0546754A1 Method for producing CVD diamond film |
| 06/16/1993 | EP0546752A1 CVD diamond growth on hydride-forming metal substrates |
| 06/16/1993 | EP0546703A1 Lithographic material and processes involved in their use |
| 06/16/1993 | EP0546702A1 CMOS input buffer with high speed and low power |
| 06/16/1993 | EP0546698A1 An electrostatic discharge protection structure |