Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1993
03/30/1993US5198326 Process for forming fine pattern
03/30/1993US5198322 Positively operating radiation-sensitive mixture containing a polyfunctional α-diazo-β-keto ester and radiation-sensitive recording material containing this mixture
03/30/1993US5198298 Etch stop layer using polymers
03/30/1993US5198269 Process for making sol-gel deposited ferroelectric thin films insensitive to their substrates
03/30/1993US5198153 Dope Precursor, Electron and Photoresists
03/30/1993US5198071 Process for inhibiting slip and microcracking while forming epitaxial layer on semiconductor wafer
03/30/1993US5198069 Method for fabricating buttable epitaxial infrared detector arrays by dimensionally controlled cleaving of single crystal substrates
03/30/1993US5198066 Mounting of the lids of capsules for solid state integrated circuits
03/30/1993US5198034 Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment
03/30/1993US5197655 Fine pitch solder application
03/30/1993US5197654 Melting a multilayer composite for solders
03/30/1993US5197652 Wire bonding method and apparatus with lead pressing means
03/30/1993US5197650 Die bonding apparatus
03/30/1993US5197271 Method and apparatus for back side damage of silicon wafers
03/30/1993US5197185 Process of forming electrical connections between conductive layers using thermosonic wire bonded bump vias and thick film techniques
03/30/1993US5197183 Modified lead frame for reducing wire wash in transfer molding of IC packages
03/30/1993CA1315420C Modification of interfacial fields between dielectrics and semi-conductors
03/30/1993CA1315419C Cmos integrated circuit having improved isolation
03/28/1993CA2078726A1 Position detector
03/25/1993DE4131360A1 Mikroskophandlingssystem Microscope handling system
03/25/1993DE4131170A1 Vorrichtung zur erzeugung von zwischenspannungen Apparatus for generating intermediate voltages
03/25/1993DE4131129A1 Clocked burn-in of thick-film integrated circuits - heating cassette by hot-air blowers in different temp. zones sepd. by moving hollow partitions
03/24/1993EP0533640A1 Electrostatic discharge protective device having a reduced current leakage
03/24/1993EP0533589A1 A semiconductor device
03/24/1993EP0533551A1 Process for manufacturing thin film layers of semiconductor material
03/24/1993EP0533497A2 Dry etching method
03/24/1993EP0533481A1 Regulated BICMOS output buffer
03/24/1993EP0533439A2 Constant-voltage diode, power converter using the same and process of producing constant-voltage diode
03/24/1993EP0533438A2 Cleaning of cvd reactor used in the production of polycrystalline silicon
03/24/1993EP0533339A2 CMOS output buffer circuits
03/24/1993EP0533336A1 Electrostatic discharge detection and clamp control circuit
03/24/1993EP0533332A1 CMOS self-boost circuit
03/24/1993EP0533269A2 Test structure for multi-layer, thin-film modules
03/24/1993EP0533254A2 Method of manufacturing a semiconductor device whereby a layer comprising aluminium is deposited on a surface for a semiconductor body
03/24/1993EP0533203A2 Method for selectively etching a III-V semiconductor, in the production of a field effect transistor
03/24/1993EP0533201A1 Liquid vaporization valve
03/24/1993EP0533164A2 Ball bonding method and apparatus for using the same
03/24/1993EP0533158A2 Power conversion device and semiconductor module suitable for use in the device
03/24/1993EP0533137A2 Leadframe and resin-sealed semiconductor device
03/24/1993EP0533113A2 Method of manufacturing a thin Hg1-xCdxTe film
03/24/1993EP0532968A1 Projection type x-ray lithography apparatus
03/24/1993EP0532898A2 Flex tape protective coating
03/24/1993EP0532897A2 Method of reworking circuit panels, and circuit panels reworked thereby
03/24/1993EP0532842A1 Low dielectric inorganic composition for multilayer ceramic package
03/24/1993EP0532758A1 Cvd semiconductor manufacturing equipment
03/24/1993EP0532543A1 Sog with moisture resistant protective capping layer.
03/24/1993EP0368854B1 Silicon electroluminescent device
03/24/1993CN1070287A Multichip module and integrated circuit substrates having planarized patterned surfaces
03/23/1993US5197089 Pin chuck for lithography system
03/23/1993US5197029 Common-line connection for integrated memory array
03/23/1993US5196997 Method and apparatus for quality measure driven process control
03/23/1993US5196996 High voltage generating circuit for semiconductor devices having a charge pump for eliminating diode threshold voltage losses
03/23/1993US5196919 Use of a contamination shield during the manufacture of semiconductor packages
03/23/1993US5196918 Integrated circuit device and method for manufacturing the same
03/23/1993US5196917 Carrier tape
03/23/1993US5196916 Integrated circuit wiring, titanium, hafnium, zirconium
03/23/1993US5196910 Semiconductor memory device with recessed array region
03/23/1993US5196909 Capacitor for DRAM cell
03/23/1993US5196908 Micro MIS type FET and manufacturing process therefor
03/23/1993US5196907 Metal insulator semiconductor field effect transistor
03/23/1993US5196786 Method for inspecting an electronic state of a surface of a semiconductor substrate and an apparatus therefor
03/23/1993US5196740 Integrated circuit for analogue system
03/23/1993US5196726 Substrate for packaging a semiconductor device having particular terminal and bump structure
03/23/1993US5196724 Programmable interconnect structures and programmable integrated circuits
03/23/1993US5196723 Integrated circuit screen arrangement and a method for its manufacture
03/23/1993US5196716 Method and apparatus for measuring internal defects for position and depth
03/23/1993US5196711 Deviation measuring device including a mask having a grating pattern and a zone plate pattern
03/23/1993US5196707 Low aberration field emission electron gun
03/23/1993US5196549 Dielectric films
03/23/1993US5196500 Tetrapolyimide film containing benzophenone tetracarboxylic dianhydride
03/23/1993US5196384 Method for preparing green sheets
03/23/1993US5196378 Method of fabricating an integrated circuit having active regions near a die edge
03/23/1993US5196377 Etching cavities into wafer; integrated circuits
03/23/1993US5196376 Laser lithography for integrated circuit and integrated circuit interconnect manufacture
03/23/1993US5196375 Heat treatment
03/23/1993US5196372 Process for forming metal deposited film containing aluminum as main component by use of alkyl hydride
03/23/1993US5196371 Flip chip bonding method using electrically conductive polymer bumps
03/23/1993US5196370 Method of manufacturing an arsenic-including compound semiconductor device
03/23/1993US5196369 Method of producing a light emitting diode array device
03/23/1993US5196368 Selective removal of epitaxially grown material
03/23/1993US5196367 Semiconductors
03/23/1993US5196366 Method of manufacturing electric devices
03/23/1993US5196365 Method of making semiconductor memory device having stacked capacitor
03/23/1993US5196364 Method of making a stacked capacitor dram cell
03/23/1993US5196363 Method of forming mist type dynamic random access memory cell
03/23/1993US5196362 Multilayer wiring method of on-chip modification for an lsi
03/23/1993US5196361 Doping part of the channel adjacent to the source
03/23/1993US5196360 Methods for inhibiting outgrowth of silicide in self-aligned silicide process
03/23/1993US5196358 Method of manufacturing InP junction FETS and junction HEMTS using dual implantation and double nitride layers
03/23/1993US5196357 Method of making extended polysilicon self-aligned gate overlapped lightly doped drain structure for submicron transistor
03/23/1993US5196356 Method for manufacturing BICMOS devices
03/23/1993US5196355 Simox materials through energy variation
03/23/1993US5196354 Passivation layer, packages, moisture resistant
03/23/1993US5196353 Method for controlling a semiconductor (CMP) process by measuring a surface temperature and developing a thermal image of the wafer
03/23/1993US5196285 Method for control of photoresist develop processes
03/23/1993US5196268 Integrated circuit interconnect leads releasably mounted on film
03/23/1993US5196251 Ceramic substrate having a protective coating thereon and a method for protecting a ceramic substrate
03/23/1993US5196233 esistive load element
03/23/1993US5196173 Apparatus for process for growing crystals of semiconductor materials
03/23/1993US5196089 Multilayer ceramic substrate for mounting of semiconductor device