| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/05/1993 | EP0540321A1 A method for fabricating an interlayer-dielectric film of semiconductor device |
| 05/05/1993 | EP0540312A1 Bump electrode structure and semiconductor chip having the same |
| 05/05/1993 | EP0540304A1 An apparatus for manufacturing a nitrogen-containing compound thin film |
| 05/05/1993 | EP0540302A1 X-ray exposure apparatus and semiconductor-device manufacturing method |
| 05/05/1993 | EP0540277A2 Method for planarized isolation for CMOS devices |
| 05/05/1993 | EP0540276A2 A self-aligned contact process |
| 05/05/1993 | EP0540262A2 Trench isolation region |
| 05/05/1993 | EP0540261A2 Process of removing polymers in semiconductor vias |
| 05/05/1993 | EP0540240A1 Method for forming a dielectric film of a capacitor in semiconductor device |
| 05/05/1993 | EP0540233A1 Planar FET-SEED integrated circuits |
| 05/05/1993 | EP0540230A2 Method for forming patterned tungsten layers |
| 05/05/1993 | EP0540189A2 Control system |
| 05/05/1993 | EP0540163A2 Switched capacitor analog circuits |
| 05/05/1993 | EP0540157A1 Method for submicron isolation for CMOS devices |
| 05/05/1993 | EP0540149A1 Method of forming isolated regions of oxide |
| 05/05/1993 | EP0540082A1 LPCVD reactor for high efficiency, high uniformity deposition and a method of such deposition |
| 05/05/1993 | EP0540070A1 Method for forming an electrical connection for an integrated circuit |
| 05/05/1993 | EP0540050A1 Increasing adhesion of dry-film photopolymerizable compositions to carriers |
| 05/05/1993 | EP0540032A1 Photoresist composition and etching method |
| 05/05/1993 | EP0539984A2 Method and apparatus for precise temperature measurement |
| 05/05/1993 | EP0539973A2 A surface-protection method during etching |
| 05/05/1993 | EP0539963A2 Dry etching method of GaAs |
| 05/05/1993 | EP0539949A2 High electron mobility transistor having improved electron controllability |
| 05/05/1993 | EP0539948A2 Apparatus for forming metal film and process for forming metal film |
| 05/05/1993 | EP0539896A1 Method of chucking semiconductor wafers |
| 05/05/1993 | EP0539884A1 Integrated circuit and electronic apparatus |
| 05/05/1993 | EP0539813A1 Circuit configuration for the protection of integrated circuits |
| 05/05/1993 | EP0539778A1 Positive type radiation-sensitive resist composition |
| 05/05/1993 | EP0539741A1 Anodic bonding process with light irradiation |
| 05/05/1993 | EP0539690A2 Compound semiconductor device |
| 05/05/1993 | EP0539688A2 Compound semiconductor device and production method therefor |
| 05/05/1993 | EP0539686A1 Process for producing metrological structures particularly useful for analyzing the accuracy of instruments for measuring alignment on processed substrates |
| 05/05/1993 | EP0539685A1 High area capacitor formation using material dependent etching |
| 05/05/1993 | EP0539681A1 High area capacitor formation using dry etching |
| 05/05/1993 | EP0539607A1 Vacuum drying apparatus |
| 05/05/1993 | EP0539574A1 Tilt box |
| 05/05/1993 | EP0539559A1 HIGH DURABILITY MASK FOR DRY ETCHING OF GaAs |
| 05/05/1993 | EP0539555A1 Arrangement for encasing a functional device, and a process for the production of same. |
| 05/05/1993 | EP0539481A1 Method of producing microchips |
| 05/05/1993 | EP0539384A1 Process for producing a marker indicating the orientation of the crystal lattice of a wafer |
| 05/05/1993 | EP0528995A4 Semiconductor processor apparatus with dynamic wafer vapor treatment and particle volatilization |
| 05/05/1993 | EP0513185A4 Mosfet structure having reduced gate capacitance and method of forming same |
| 05/05/1993 | EP0211938B1 System and method for depositing plural thin film layers on a substrate |
| 05/05/1993 | CN1020526C Silicon film capacitor pressure sensor and its making method |
| 05/05/1993 | CN1020482C System for controlling apparatus for growing tubular crystalline bodies |
| 05/05/1993 | CN1020481C Manufacturing equipment for single silicon crystal |
| 05/04/1993 | US5208773 Semiconductor memory device having bit lines and word lines different in data reading and data writing |
| 05/04/1993 | US5208772 Gate EEPROM cell |
| 05/04/1993 | US5208765 Computer-based method and system for product development |
| 05/04/1993 | US5208764 Method for optimizing automatic place and route layout for full scan circuits |
| 05/04/1993 | US5208726 Metal-insulator-metal (MIM) capacitor-around-via structure for a monolithic microwave integrated circuit (MMIC) and method of manufacturing same |
| 05/04/1993 | US5208725 High capacitance structure in a semiconductor device |
| 05/04/1993 | US5208690 Liquid crystal display having a plurality of pixels with switching transistors |
| 05/04/1993 | US5208657 DRAM Cell with trench capacitor and vertical channel in substrate |
| 05/04/1993 | US5208656 Multilayer wiring substrate and production thereof |
| 05/04/1993 | US5208648 Apparatus and a method for high numerical aperture microscopic examination of materials |
| 05/04/1993 | US5208644 Interference removal |
| 05/04/1993 | US5208481 Lead-frame for manufacturing semiconductor devices |
| 05/04/1993 | US5208480 Dynamic latch circuit |
| 05/04/1993 | US5208479 Method of increasing capacitance of polycrystalline silicon devices by surface roughening and polycrystalline silicon devices |
| 05/04/1993 | US5208476 Low leakage current offset-gate thin film transistor structure |
| 05/04/1993 | US5208474 Input circuit of a semiconductor device |
| 05/04/1993 | US5208473 Lightly doped MISFET with reduced latchup and punchthrough |
| 05/04/1993 | US5208472 Double spacer salicide MOS device and method |
| 05/04/1993 | US5208471 Semiconductor device and manufacturing method therefor |
| 05/04/1993 | US5208470 Semiconductor memory device with a stacked capacitor |
| 05/04/1993 | US5208469 Wafer scale integrated circuit and method of forming signal propagation path therein |
| 05/04/1993 | US5208464 Device for detecting errors in top/bottom/front/back orientation of a lead frame |
| 05/04/1993 | US5208463 Method and apparatus for detecting deformations of leads of semiconductor device |
| 05/04/1993 | US5208437 Method of cutting interconnection pattern with laser and apparatus thereof |
| 05/04/1993 | US5208189 Process for plugging defects in a dielectric layer of a semiconductor device |
| 05/04/1993 | US5208188 Process for making a multilayer lead frame assembly for an integrated circuit structure and multilayer integrated circuit die package formed by such process |
| 05/04/1993 | US5208187 Monocrystalline aluminum film, heating |
| 05/04/1993 | US5208186 Aluminum bonding pad, gold and tin eutectic |
| 05/04/1993 | US5208185 From pytolytic boron nitride, less lattice defects |
| 05/04/1993 | US5208184 Zinc, carbon, silicon, gallium arsenide |
| 05/04/1993 | US5208182 Dislocation density reduction in gallium arsenide on silicon heterostructures |
| 05/04/1993 | US5208181 Locos isolation scheme for small geometry or high voltage circuit |
| 05/04/1993 | US5208180 Method of forming a capacitor |
| 05/04/1993 | US5208179 Method of fabricating programmable read only memory device having trench isolation structure |
| 05/04/1993 | US5208177 Etching trench between access lines; severing underlying diffusion region; integrated circuits, semiconductors |
| 05/04/1993 | US5208176 Method of fabricating an enhanced dynamic random access memory (DRAM) cell capacitor using multiple polysilicon texturization |
| 05/04/1993 | US5208175 Forming pattern of floating and control gate electrodes; thickened edge of dielectric film |
| 05/04/1993 | US5208174 Method for manufacturing a nonvolatile semiconductor memory device |
| 05/04/1993 | US5208173 FLOTOX EEPROM, thin oxide film |
| 05/04/1993 | US5208172 Method for forming a raised vertical transistor |
| 05/04/1993 | US5208171 Process for preparing BiCMOS semiconductor device |
| 05/04/1993 | US5208170 Method for fabricating bipolar and CMOS devices in integrated circuits using contact metallization for local interconnect and via landing |
| 05/04/1993 | US5208169 Method of forming high voltage bipolar transistor for a BICMOS integrated circuit |
| 05/04/1993 | US5208168 Semiconductor device having punch-through protected buried contacts and method for making the same |
| 05/04/1993 | US5208167 Epitaxial crystal |
| 05/04/1993 | US5208133 Photosensitive resin composition |
| 05/04/1993 | US5208124 Photolithography patterns |
| 05/04/1993 | US5208066 Process of forming a patterned polyimide film and articles including such a film |
| 05/04/1993 | US5207868 Etching process for films of aluminum or its alloys |
| 05/04/1993 | US5207866 Anisotropic single crystal silicon etching solution and method |
| 05/04/1993 | US5207865 Multilayer structure and method for fabricating the same |
| 05/04/1993 | US5207864 Integrated circuits |
| 05/04/1993 | US5207863 Crystal growth method and crystalline article obtained by said method |
| 05/04/1993 | US5207836 Cleaning process for removal of deposits from the susceptor of a chemical vapor deposition apparatus |