Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1993
03/04/1993DE4128964A1 Defined adhesive area prodn. esp. for micro-mechanics or integrated sensor - using photoresist adhesive soln. of lacquer, photosensitive cpd. and hardener, etc.
03/04/1993DE4128804A1 Lead-free low melting glass - contains silver oxide, vanadium oxide and tellurium oxide, used as soldering paste for electrical components
03/04/1993DE4128602A1 Mfg. reflecting surface on semiconductor substrate - inclining surface at specified angle w.r.t. certain crystal face
03/04/1993DE4128333A1 Silicon@-on-insulator layer Getter process - produces directed redistribution of heavy metal contaminations out of active areas of SOI layer into areas acting as lateral dielectric insulation
03/04/1993CA2115744A1 Method and apparatus for cleaving semiconductor wafers
03/04/1993CA2114716A1 Process for forming low resistivity titanium nitride films
03/03/1993EP0530148A1 Positive photo resist with increased dissolving power and reduced crystallisation tendency as well as new tetra(hydroxyphenyl)alkane
03/03/1993EP0530054A1 A semiconductor wafer basket
03/03/1993EP0530053A1 A wafer basket for containing semiconductor wafers
03/03/1993EP0530051A2 A semiconductor device and a method for producing the same
03/03/1993EP0530046A1 Integrated circuit transistor
03/03/1993EP0529990A1 Semiconductor laser device and method of manufacturing the same
03/03/1993EP0529982A1 Exhaust apparatus for epitaxial growth system.
03/03/1993EP0529969A1 Novolak resin compositions with high Tg and high sensitivity for photoresist applications
03/03/1993EP0529954A1 Method for making a planarized semiconductor device
03/03/1993EP0529952A1 Improved silicide formation on polysilicon
03/03/1993EP0529951A2 Improved dielectrics formed on a deposited semiconductor
03/03/1993EP0529888A1 Removal of substrate perimeter material
03/03/1993EP0529862A2 Non-volatile memories
03/03/1993EP0529860A2 Method of making isolated vertical PNP transistor in a complementary BICMOS process with EEPROM memory
03/03/1993EP0529827A1 Process and apparatus for controllably separating framed working area from remainder of the membrane
03/03/1993EP0529826A1 Optical pellicle holder
03/03/1993EP0529820A1 Elevated metal-to-metal antifuse structures and fabrication processes
03/03/1993EP0529772A1 Method of producing high reliability heterjunction bipolar transistors
03/03/1993EP0529752A2 Via metallization for A1N ceramic electronic package
03/03/1993EP0529717A2 Method of manufacturing a semiconductor device having overlapping contacts
03/03/1993EP0529687A2 Molecular beam epitaxy apparatus
03/03/1993EP0529656A2 Interconnection forming method
03/03/1993EP0529643A1 Aqueous-developable dry film photoresist
03/03/1993EP0529620A1 Semiconductor integrated circuit comprising an oscillator and a selectable frequency divider
03/03/1993EP0529554A1 Method for fabricating a semiconductor device
03/03/1993EP0529503A1 Flexible attachment flip-chip assembly
03/03/1993EP0529417A1 CCD shift register
03/03/1993EP0529338A1 Photomask and method of fabricating the same
03/03/1993EP0529322A1 MOS-controlled thyristor (MCT)
03/03/1993EP0529321A1 Metallic material deposition method for integrated circuit manufacturing
03/03/1993EP0529298A2 Method for making thick film/solder joints
03/03/1993EP0529234A2 Semiconductor memory device
03/03/1993EP0529157A1 Alternating current magnetic levitation transport system
03/03/1993EP0529114A1 Disc handling device, method of use and package
03/03/1993EP0529097A1 Method of manufacturing two-layer tab tape
03/03/1993EP0528995A1 Semiconductor processor apparatus with dynamic wafer vapor treatment and particle volatilization
03/03/1993EP0528956A1 BASIC CELL FOR BiCMOS GATE ARRAY
03/03/1993EP0528795A1 Apparatus for low temperature cvd of metals
03/03/1993CN1020029C 半导体器件 Semiconductor devices
03/03/1993CN1020028C Method of fabricating implanted wells and islands of cmos integrated circuits
03/03/1993CN1020027C Lateral PNP Transistor using latch voltage of NPN transistor
03/03/1993CN1020026C Integrated bipolar and cmos transistor fabrication process
03/03/1993CN1020025C Process for producing substrate for selective crystal growth
03/02/1993USH1145 Rapid temperature response wafer chuck
03/02/1993US5191599 Control device for a charge detection circuit
03/02/1993US5191551 Non-volatile semiconductor memory device with transistor paralleling floating gate transistor
03/02/1993US5191550 Dual antifuse memory device
03/02/1993US5191542 Automatic floorplan operation apparatus
03/02/1993US5191535 Mask control system
03/02/1993US5191510 Use of palladium as an adhesion layer and as an electrode in ferroelectric memory devices
03/02/1993US5191509 Textured polysilicon stacked trench capacitor
03/02/1993US5191506 Ceramic electrostatic chuck
03/02/1993US5191453 Active matrix substrate for liquid-crystal display and method of fabricating the active matrix substrate
03/02/1993US5191402 Semiconductor device having an inter-layer insulating film disposed between two wiring layers
03/02/1993US5191397 SOI semiconductor device with a wiring electrode contacts a buried conductor and an impurity region
03/02/1993US5191394 Amorphous silicon photodiode with sloped sidewalls and method of fabrication
03/02/1993US5191244 N-channel pull-up transistor with reduced body effect
03/02/1993US5191240 Bicmos driver circuits with improved low output level
03/02/1993US5191235 Semiconductor integrated circuit device having substrate potential detection circuit
03/02/1993US5191218 Vacuum-attraction holding device
03/02/1993US5191213 Integrated circuit structure analysis
03/02/1993US5191200 Imaging apparatus having a focus-error and/or tilt detection device
03/02/1993US5190894 Photoresists
03/02/1993US5190893 Process for fabricating a local interconnect structure in a semiconductor device
03/02/1993US5190892 Method for forming pattern using lift-off
03/02/1993US5190889 Method of forming trench isolation structure with germanium silicate filling
03/02/1993US5190888 Method for producing a doped polycide layer on a semiconductor substrate
03/02/1993US5190887 Method of making electrically erasable and electrically programmable memory cell with extended cycling endurance
03/02/1993US5190886 Semiconductor device and method of production
03/02/1993US5190836 Reflection type photomask with phase shifter
03/02/1993US5190835 Electroless deposition of palladium or gold
03/02/1993US5190793 Refractory covercoat for semicondutor devices and methods of making and using the same
03/02/1993US5190792 High-throughput, low-temperature process for depositing oxides
03/02/1993US5190637 Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers
03/02/1993US5190613 Method for forming crystals
03/02/1993US5190601 Surface structure of ceramics substrate and method of manufacturing the same
03/02/1993US5190590 Vacuum coating apparatus
03/02/1993US5190463 High performance metal cone contact
03/02/1993US5190205 Bonding head assembly
03/02/1993US5190064 Apparatus for washing semiconductor materials
03/02/1993US5189843 Wafer slicing and grinding machine and a method of slicing and grinding wafers
03/02/1993CA1314088C Process for the selective growth of gaas
03/02/1993CA1314077C Bicmos power transition circuit
03/01/1993CA2076727A1 Alkaline-etch resistant dry film photoresist
02/1993
02/27/1993CA2071778A1 Low dielectric inorganic composition for multilayer ceramic package
02/25/1993DE4227251A1 Delay time calculator for logic block contg. MOS transistor - uses layout memory and stores delay times according to input signal gradient for each layout
02/25/1993DE4206278A1 Integriertes schaltkreis-bauelement mit unterdrueckten stromversorgungsstoerungen Integrated-circuit-component-with oppressed stromversorgungsstoerungen
02/25/1993DE4127925A1 Mfr. of insulating, monocrystalline silicon@ island for microelectronic IC - by oxygen implanting doped monocrystalline silicon@ region, depositing epitaxial silicon@ layer, forming trench, forming mask on silicon@ wafer etc.
02/24/1993EP0528785A1 Ion optical imaging system
02/24/1993EP0528778A1 Method for microwave plasma assisted CVD diamond coating
02/24/1993EP0528744A2 Latch assisted fuse testing for customized integrated circuits
02/24/1993EP0528742A1 Field effect transistor formed with wide-submicron gate
02/24/1993EP0528736A1 Plate transfer device, in particular for silicon wafers
02/24/1993EP0528715A1 Low-noise field effect transistor