| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 06/16/1993 | EP0546685A2 Megasonic cleaning system |
| 06/16/1993 | EP0546493A1 Photochemical dry etching method |
| 06/16/1993 | EP0546443A1 Soldering by conduction of heat from a plasma |
| 06/16/1993 | EP0546435A2 Protection device for integrated circuit associated with relative supports |
| 06/16/1993 | EP0546353A2 Method for forming thin oxide portions particularly in electrically erasable and programmable read-only memory cells |
| 06/16/1993 | EP0546325A1 Series ferroelectric capacitor structure for monolithic integrated circuits and method of fabrication |
| 06/16/1993 | EP0546178A1 Equipment for neutralizing charged material |
| 06/16/1993 | EP0495887A4 Improved routing system and method for integrated circuits |
| 06/16/1993 | CN1073300A Semiconductor device and method for forming the same |
| 06/15/1993 | US5220587 Output circuit for a CCD with a D.C. restoration circuit integrated together with the CCD in a monolithic semiconductor chip |
| 06/15/1993 | US5220534 Substrate bias generator system |
| 06/15/1993 | US5220530 Semiconductor memory element and method of fabricating the same |
| 06/15/1993 | US5220517 Process gas distribution system and method with supervisory control |
| 06/15/1993 | US5220515 Flow verification for process gas in a wafer processing system apparatus and method |
| 06/15/1993 | US5220486 Ic packing device |
| 06/15/1993 | US5220483 Tri-level capacitor structure in switched-capacitor filter |
| 06/15/1993 | US5220482 Thin film capacitor |
| 06/15/1993 | US5220405 Interferometer for in situ measurement of thin film thickness changes |
| 06/15/1993 | US5220305 Semiconductor pressure sensor |
| 06/15/1993 | US5220279 Probe apparatus |
| 06/15/1993 | US5220278 Fixing card for use with high frequency |
| 06/15/1993 | US5220277 Arrangement for testing semiconductor wafers or the like |
| 06/15/1993 | US5220216 Programmable driving power of a CMOS gate |
| 06/15/1993 | US5220210 Linear image sensor |
| 06/15/1993 | US5220202 Memory device and memory apparatus using the same suitable for neural network |
| 06/15/1993 | US5220200 Provision of substrate pillars to maintain chip standoff |
| 06/15/1993 | US5220196 Semiconductor device |
| 06/15/1993 | US5220193 Variable-capacitance diode device with common electrode |
| 06/15/1993 | US5220192 Radiation hardened CMOS structure using an implanted P guard structure and method for the manufacture thereof |
| 06/15/1993 | US5220191 Semiconductor device having a well electrically insulated from the substrate |
| 06/15/1993 | US5220190 Device having a charge transfer device, MOSFETs, and bipolar transistors--al |
| 06/15/1993 | US5220188 Integrated micromechanical sensor element |
| 06/15/1993 | US5220187 Semiconductor integrated circuit with bipolar transistors and mosfets |
| 06/15/1993 | US5220186 Semiconductor device with a mushroom-shaped gate electrode |
| 06/15/1993 | US5220185 Ccd shift register |
| 06/15/1993 | US5220182 Semiconductor device having conductive sidewall structure between adjacent elements |
| 06/15/1993 | US5220176 Apparatus and method for detecting alignment marks having alignment optical systems' driving means |
| 06/15/1993 | US5220171 Wafer holding device in an exposure apparatus |
| 06/15/1993 | US5219798 Method of heating a semiconductor substrate capable of preventing defects in crystal from occurring |
| 06/15/1993 | US5219797 Exposing to silicon monoxide vapor under vacuum prior to passivation |
| 06/15/1993 | US5219796 Method of fabricating image sensor dies and the like for use in assembling arrays |
| 06/15/1993 | US5219794 Semiconductor integrated circuit device and method of fabricating same |
| 06/15/1993 | US5219793 Method for forming pitch independent contacts and a semiconductor device having the same |
| 06/15/1993 | US5219792 Method for forming multilevel interconnection in a semiconductor device |
| 06/15/1993 | US5219791 To remove polymer film and promote adhesion of photoresist |
| 06/15/1993 | US5219790 Fusing AL or alloy film in high pressure atmosphere, vibration |
| 06/15/1993 | US5219789 Boring contact hole in dielectric layer on silicon substrate, depositing titanium-tungsten film, deposition tungsten in contact hole |
| 06/15/1993 | US5219788 Bilayer metallization cap for photolithography |
| 06/15/1993 | US5219787 Trenching techniques for forming channels, vias and components in substrates |
| 06/15/1993 | US5219786 Preheating wafer, heating small portion by pulse of laser, repeating |
| 06/15/1993 | US5219784 Spacer formation in a bicmos device |
| 06/15/1993 | US5219783 Method of making semiconductor well structure |
| 06/15/1993 | US5219780 Simultaneously etching polysilicon pad and polysilicon storage node using self-alignment method |
| 06/15/1993 | US5219779 Plurality of memory cells; each has a semiconductor substrate, storage capacitor and transistor connected to one side of capacitor; reduced size |
| 06/15/1993 | US5219778 Modified fabrication process; polysilicon structure located at buried contact, extending to adjacent storage node, overlaid by polysilicon with dielectric sandwiched in between; increased storage capability |
| 06/15/1993 | US5219777 Metal oxide semiconductor field effect transistor and method of making the same |
| 06/15/1993 | US5219776 Method of manufacturing semiconductor device |
| 06/15/1993 | US5219775 Manufacturing method for a floating gate semiconductor memory device by forming cell slits |
| 06/15/1993 | US5219774 Deposited tunneling oxide |
| 06/15/1993 | US5219773 Method of making reoxidized nitrided oxide MOSFETs |
| 06/15/1993 | US5219772 Method for making field effect devices with ultra-short gates |
| 06/15/1993 | US5219771 Method of producing a thin film transistor device |
| 06/15/1993 | US5219770 Method for fabricating a MISFET including a common contact window |
| 06/15/1993 | US5219769 Method for forming Schottky diode |
| 06/15/1993 | US5219768 Method for fabricating a semiconductor device |
| 06/15/1993 | US5219767 Low temperaure molecular beam epitaxial growth; high concentration of dopes |
| 06/15/1993 | US5219766 Semiconductor device having a radiation resistance and method for manufacturing same |
| 06/15/1993 | US5219765 Method for manufacturing a semiconductor device including wafer aging, probe inspection, and feeding back the results of the inspection to the device fabrication process |
| 06/15/1993 | US5219713 Multi-layer photoresist air bridge fabrication method |
| 06/15/1993 | US5219712 Method of forming a solid article |
| 06/15/1993 | US5219686 Photomask |
| 06/15/1993 | US5219669 Layer thin film wiring process featuring self-alignment of vias |
| 06/15/1993 | US5219639 Multilayer structure and its fabrication method |
| 06/15/1993 | US5219613 Oxidation; exposure to organosilicon compound |
| 06/15/1993 | US5219608 Spraying molding die, resin pot, runner with fluorine-based release agent, spraying only cavities for semiconductor chips with silicone-based release agent |
| 06/15/1993 | US5219485 Materials and methods for etching silicides, polycrystalline silicon and polycides |
| 06/15/1993 | US5219464 Clean air apparatus |
| 06/15/1993 | US5219264 Mobile robot on-board vision system |
| 06/15/1993 | US5219117 Method of transferring solder balls onto a semiconductor device |
| 06/15/1993 | US5219112 Wire bonding apparatus |
| 06/15/1993 | US5219079 Wafer jig |
| 06/15/1993 | US5218759 Method of making a transfer molded semiconductor device |
| 06/15/1993 | CA2006745C Cross-point lightly-doped drain-source trench transistor and fabrication process therefor |
| 06/15/1993 | CA2006175C Method of forming patterned silicone rubber layer |
| 06/15/1993 | CA1319043C Dust-proof film |
| 06/14/1993 | CA2082729A1 Method for producing cvd diamond film substantially free of thermal stress-induced cracks |
| 06/14/1993 | CA2082728A1 Method for producing flat cvd diamond film |
| 06/14/1993 | CA2082711A1 Cvd diamond growth on hydride-forming metal substrates |
| 06/13/1993 | CA2079828A1 Plasma based soldering by indirect heating |
| 06/12/1993 | CA2084147A1 Metallized paths on diamond surfaces |
| 06/10/1993 | WO1993011563A1 Semiconductor arrangement with a metal layer system and device for producing it |
| 06/10/1993 | WO1993011562A1 Method of making semiconductor components with electrochemical recovery of the substrate |
| 06/10/1993 | WO1993011561A1 Process for manufacturing a power integrated circuit with a vertical power component |
| 06/10/1993 | WO1993011560A1 Method and apparatus for transportation of highly clean material |
| 06/10/1993 | WO1993011559A1 METHOD FOR MANUFACURING SEMICONDUCTER COMPONENTS, PARTICULARLY ON GaAs OR InP, WITH CHEMICAL RECOVERY OF THE SUBSTRAT |
| 06/10/1993 | WO1993011558A1 Method of modifying contact resistance in semiconductor devices and articles produced thereby |
| 06/10/1993 | WO1993011540A1 Nonvolatile random access memory device |
| 06/10/1993 | WO1993011409A1 Method and apparatus for positioning and biasing an electro-optic modulator of an electro-optic imaging system |
| 06/10/1993 | WO1993011061A1 Ic stocker, ic positioning apparatus and ic feed system |
| 06/10/1993 | WO1993010917A1 Process for removing coatings from sensitive substrates, and sodium sulfate-containing blasting media useful therein |