| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 07/20/1993 | US5229872 Exposure device including an electrically aligned electronic mask for micropatterning |
| 07/20/1993 | US5229711 Reference voltage generating circuit |
| 07/20/1993 | US5229710 Cmos band gap reference circuit |
| 07/20/1993 | US5229667 Delay unit implemented by inverting circuits associated with capacitive load for increasing delay |
| 07/20/1993 | US5229646 Semiconductor device with a copper wires ball bonded to aluminum electrodes |
| 07/20/1993 | US5229645 Semiconductor device and manufacturing method thereof |
| 07/20/1993 | US5229638 Integrated circuit lead frame having Z-shape step portion |
| 07/20/1993 | US5229637 Semiconductor device |
| 07/20/1993 | US5229634 Vertical power mosfet |
| 07/20/1993 | US5229633 High voltage lateral enhancement IGFET |
| 07/20/1993 | US5229632 Electrically erasable memory device having erase-electrode connected to substrate junction |
| 07/20/1993 | US5229631 Erase performance improvement via dual floating gate processing |
| 07/20/1993 | US5229630 Charge transfer and/or amplifying device of low noise to detect signal charges at a high conversion efficiency |
| 07/20/1993 | US5229629 Semiconductor integrated circuit having improved cell layout |
| 07/20/1993 | US5229625 Boron-doped resistant silicon carbide layer on a silicon substrate, single crystal |
| 07/20/1993 | US5229615 End station for a parallel beam ion implanter |
| 07/20/1993 | US5229576 Heating apparatus |
| 07/20/1993 | US5229549 Aluminum nitride insulation |
| 07/20/1993 | US5229334 Method of forming a gate insulating film involving a step of cleaning using an ammonia-peroxide solution |
| 07/20/1993 | US5229333 Method for improving the interface characteristics of CaF2 on silicon |
| 07/20/1993 | US5229332 Method for the growth of epitaxial metal-insulator-metal-semiconductor structures |
| 07/20/1993 | US5229331 Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology |
| 07/20/1993 | US5229328 Method for bonding dielectric mounted conductors to semiconductor chip contact pads |
| 07/20/1993 | US5229326 Forming conductive runners on semiconductor wafer, providing spacers, an active region, an oxide layer, and a planarized dielectric layer, patterning, etching, providing conductive material plug, patterning and etching, and coating |
| 07/20/1993 | US5229325 Forming insulation, metal layers with apertures; photolitho-graphic process, etchback; wire pitches at submicron dimensions |
| 07/20/1993 | US5229324 Method for forming contacts to p-type HgCdTe semiconductor material using lead and tin |
| 07/20/1993 | US5229323 Sputtering, etching of gallium arsenide substrate; nitriding with refractory nitride |
| 07/20/1993 | US5229322 Method of making low resistance substrate or buried layer contact |
| 07/20/1993 | US5229321 Method of diffusing mercury into a crystalline semiconductor material including mercury |
| 07/20/1993 | US5229320 Method for forming quantum dots |
| 07/20/1993 | US5229319 Method for producing compound semiconductors and apparatus therefor |
| 07/20/1993 | US5229318 Sealing oxidation-free areas by controlled growth of silicon nitride layer, then forming trench to receive oxidation, sealing parts of trench, exposure of trench areas to be oxidized |
| 07/20/1993 | US5229317 Method for preventing out-diffusion of phosphorous and boron in a bpsg-buried trench |
| 07/20/1993 | US5229316 Semiconductor processing method for forming substrate isolation trenches |
| 07/20/1993 | US5229315 Method for forming an isolated film on a semiconductor device |
| 07/20/1993 | US5229313 Forming second electrode region serving as upper layer electrode region on second semiconductor region, forming insulating film on first electrode serving as underlayer electrode region, second region contacts second semiconductor |
| 07/20/1993 | US5229312 Nonvolatile trench memory device and self-aligned method for making such a device |
| 07/20/1993 | US5229310 Method for making a self-aligned vertical thin-film transistor in a semiconductor device |
| 07/20/1993 | US5229309 Method of manufacturing semiconductor device using a ferroelectric film over a source region |
| 07/20/1993 | US5229308 Bipolar transistors with high voltage MOS transistors in a single substrate |
| 07/20/1993 | US5229307 Method of making extended silicide and external contact |
| 07/20/1993 | US5229306 Backside gettering method employing a monocrystalline germanium-silicon layer |
| 07/20/1993 | US5229305 Method for making intrinsic gettering sites in bonded substrates |
| 07/20/1993 | US5229258 High resolution resist structures |
| 07/20/1993 | US5229257 Process for forming multi-level coplanar conductor/insulator films employing photosensitive polymide polymer compositions |
| 07/20/1993 | US5229255 Pattern delineation; destructive phase interference; integrated circuits |
| 07/20/1993 | US5229254 Positive-working radiation-sensitive mixtures, and radiation-sensitive recording materials produced with these mixtures |
| 07/20/1993 | US5229253 Mixture of polymeric binder, free-radical polymerizable compound, photoreducible dye and dicyclopentadienyl bis-(2,4,6-trifluorophenyl)titanium or zirconium |
| 07/20/1993 | US5229251 Dry developable photoresist containing an epoxide, organosilicon and onium salt |
| 07/20/1993 | US5229230 Improved accuracy in transferring patterns to photoresist, interaction of diffraction light to increase intensity |
| 07/20/1993 | US5229213 Laminated structure, printed circuits |
| 07/20/1993 | US5229193 Substrate of silicon carbide containing free silicon coated with silicon carbide having inner layer with free silicon and outer layer with none |
| 07/20/1993 | US5229171 Coating semiconductor with photoresist and processing at subatmospheric pressure |
| 07/20/1993 | US5228967 Apparatus and method for electroplating wafers |
| 07/20/1993 | US5228966 Gilding apparatus for semiconductor substrate |
| 07/20/1993 | US5228950 Dry process for removal of undesirable oxide and/or silicon residues from semiconductor wafer after processing |
| 07/20/1993 | US5228949 Panels for printed circuits |
| 07/20/1993 | US5228948 Method for fabricating recrystallized semiconductor film |
| 07/20/1993 | US5228940 Fine pattern forming apparatus |
| 07/20/1993 | US5228568 Semiconductor wafer basket |
| 07/20/1993 | US5228501 Physical vapor deposition clamping mechanism and heater/cooler |
| 07/20/1993 | US5228341 Capacitive acceleration detector having reduced mass portion |
| 07/20/1993 | US5228208 Method of and apparatus for controlling thermal gradient in a load lock chamber |
| 07/20/1993 | US5228206 Cluster tool dry cleaning system |
| 07/20/1993 | CA2034650C Ellipsometric control of material growth |
| 07/20/1993 | CA2010414C Electron beam direct printing apparatus |
| 07/20/1993 | CA1320546C Electrical connectors and ic chip tester embodying same |
| 07/20/1993 | CA1320507C Thermal writing on glass or glass-ceramic substrates and copper-exuding glasses |
| 07/20/1993 | CA1320375C Optical reduction system |
| 07/16/1993 | CA2086211A1 Field effect transistor and method of fabricating |
| 07/15/1993 | DE4238438A1 Semiconductor component - comprises chip with bonding sites, base with hollow to house chip and lid on upper surface of chip |
| 07/15/1993 | DE4200382A1 Material application on surface of Gp=III-V semiconductor - by dipping in hydrogen halide alcohol soln., withdrawing, drying, and applying in inert atmos., for aluminium gallium arsenide surfaces |
| 07/15/1993 | DE4140404A1 Micro mechanical components prodn. bonding for semiconductor - by mechanically contacting components contg. ion plating applied adhesive layer on contact surfaces, avoiding high temp. |
| 07/15/1993 | CA2086981A1 Mixer circuit using pulse-doped gaas mesfet |
| 07/14/1993 | EP0551185A2 Heterojunction bipolar transistor |
| 07/14/1993 | EP0551140A2 Charged coupled device (CCD) having high transfer efficiency at low temperature operation |
| 07/14/1993 | EP0551117A2 Large scale integrated circuit device and thin film forming method and apparatus for the same |
| 07/14/1993 | EP0551110A2 Compound semiconductor devices |
| 07/14/1993 | EP0551089A1 Solid solution semiconductor laser element material and laser element |
| 07/14/1993 | EP0550962A2 Heterojunction bipolar transistor |
| 07/14/1993 | EP0550910A1 Advanced low RC multi-level interconnect technology for high performance integrated circuits |
| 07/14/1993 | EP0550893A1 Light sensitive layer for positive-negative copying material |
| 07/14/1993 | EP0550888A2 Method of forming a single crystal aluminum conductor on a single crystal substrate |
| 07/14/1993 | EP0550870A1 Trench DRAM cell array |
| 07/14/1993 | EP0550859A1 Tube apparatus for manufacturing semiconductor device |
| 07/14/1993 | EP0550850A2 Monolithically integratable temperature sensor for power semiconductor devices and method of making the same |
| 07/14/1993 | EP0550770A1 Method of producing vertical mosfet |
| 07/14/1993 | EP0550751A1 Nonvolatile semiconductor memory |
| 07/14/1993 | EP0550750A1 Semiconductor wafer heat treatment method |
| 07/14/1993 | EP0550734A1 Apparatus and method for focusing hard x-rays |
| 07/14/1993 | EP0550726A1 Method for producing a charge-transfer integrated circuit having an antiglare system |
| 07/14/1993 | EP0550432A1 Improved interconnection structure and test method. |
| 07/14/1993 | EP0250479B1 Current metering apparatus |
| 07/14/1993 | CA2082869A1 Self-aligned phase-shifting mask |
| 07/13/1993 | USRE34311 Semiconductor slice cassette transport unit |
| 07/13/1993 | US5228114 Heat-treating apparatus with batch scheme having improved heat controlling capability |
| 07/13/1993 | US5228067 Semiconductor integrated circuit |
| 07/13/1993 | US5227999 Semiconductor memory device capable of replacing faulty bit lines with redundant bit lines |
| 07/13/1993 | US5227996 Semiconductor memory device having word line driver |
| 07/13/1993 | US5227855 Semiconductor memory device having a ferroelectric substance as a memory element |