Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/1993
05/25/1993US5213249 Ultrasonic adhesion/dehesion monitoring apparatus with power feedback measuring means
05/25/1993US5213248 Bonding tool and its fabrication
05/25/1993US5213118 Treatment apparatus
05/25/1993US5212910 Composite polishing pad for semiconductor process
05/25/1993US5212880 Apparatus for packaging a semiconductor device
05/25/1993CA2014934C Fabrication of semiconductor devices using phosphosilicate glasses
05/25/1993CA1318418C Heterostructure bipolar transistor
05/25/1993CA1318417C Polycrystalline or microcrystalline thin film transistor
05/25/1993CA1318415C Compression method of electrically interconnecting circuit assemblies and interconnected circuit assemblies produced thereby
05/25/1993CA1318400C Magnetic device integrated circuit interconnection system
05/25/1993CA1318224C System for controlling apparatus for growing tubular crystalline bodies
05/19/1993EP0542659A1 Fast diazoquinone positive resists
05/19/1993EP0542656A1 Pattern propagation by blanket illumination of patterned thermal conductors and patterned thermal insulator on a thermal conductor
05/19/1993EP0542647A1 Process for etching a deep trench
05/19/1993EP0542575A2 Method for fabricating a semiconductor memory device having a floating gate with improved insulation film quality
05/19/1993EP0542572A1 Negative type radiation-sensitive resin composition
05/19/1993EP0542560A1 Scanning control system for an ion-implantation apparatus
05/19/1993EP0542546A1 Substrate to heatsink interface apparatus and method
05/19/1993EP0542523A1 Positive resist material
05/19/1993EP0542519A1 Undercut membrane mask for high energy photon patterning
05/19/1993EP0542481A2 Method for reducing dielectric contamination in integrated circuits
05/19/1993EP0542477A1 Method of forming an integrated circuit with self-aligned contact between closely spaced features
05/19/1993EP0542475A1 Bonding method using solder composed of multiple alternating gold and tin layers
05/19/1993EP0542465A1 Smart indexing head for universal lead frame work station
05/19/1993EP0542448A2 Charge transfer device with junction type output transistor
05/19/1993EP0542323A1 Signal processing device
05/19/1993EP0542279A1 Thin-film transistor with a protective layer and method of manufacturing the same
05/19/1993EP0542263A1 Semiconductor device having low resistance values at connection points of conductor layers
05/19/1993EP0542262A1 Method for forming a metal conductor in semiconductor device
05/19/1993EP0542225A2 Voltage control circuit
05/19/1993EP0542008A1 Antihalation compositions
05/19/1993EP0541993A1 High power semiconductor device with integral on-state voltage detection structure
05/19/1993EP0541971A2 A graded bandgap single-crystal emitter heterojunction bipolar transistor
05/19/1993EP0541969A1 Method and compositions for diffusion patterning
05/19/1993EP0541916A1 Process for passiveting the surface of sensors
05/19/1993EP0541905A1 Light-sensitive mixture containing o-naphthoquinone diazide sulfonic acid esters and recording material prepared therefrom
05/19/1993EP0500690A4 Multi-layer lead frames for integrated circuit packages
05/19/1993EP0401211B1 Semiconductor component, manufacturing process, device and assembly station
05/19/1993EP0371147B1 Abrasive composition for silicon wafer
05/19/1993EP0365666B1 Wafer carrier
05/19/1993EP0243499B1 Electronic device having a power supply input circuit in which noise from static electricity is suppressed
05/19/1993EP0222787B1 Method and device for aligning, controlling and/or measuring bidimensional objects
05/19/1993DE4238834A1 Robotic semiconductor wafer transporter with vertical photodetector array - scans detectors to determine which slots are occupied by wafers illuminated from emitter on robot arm
05/19/1993DE4238404A1 Semiconductor memory mfr. with increased cell storage capacity - forming dynamic random-access memory with metallisation lines on borophosphosilicate glass or oxide film coated structure
05/19/1993DE4237267A1 Plug-type casing for semiconductor IC - has semiconductor chip with bondable coupling faces and plug for casing mounting on circuit board.
05/19/1993DE4234700A1 Compact SOJ semiconductor module with coupling frame - has semiconductor chip with contact points connectable to inner frame terminals.
05/19/1993DE4223129A1 Optical beam induced current detection appts. - comprising light emission and scanning, detecting and depicting of current
05/18/1993US5212653 Method for producing a layout of element portions for a semiconductor integrated circuit using a computer
05/18/1993US5212620 Method for isolating SiO2 layers from PZT, PLZT, and platinum layers
05/18/1993US5212593 Broad band optical reduction system using matched multiple refractive element materials
05/18/1993US5212576 Insulating material with coefficient linear expansion matching that of one substrate over connection between two conductive patterns
05/18/1993US5212573 Input protection circuit of electro-optical device
05/18/1993US5212542 Semiconductor device having at least two field effect transistors and method of manufacturing the same
05/18/1993US5212541 Contactless, 5v, high speed eprom/flash eprom array utilizing cells programmed using source side injection
05/18/1993US5212425 Ion implantation and surface processing method and apparatus
05/18/1993US5212404 Semiconductor device having a vertical channel of carriers
05/18/1993US5212403 Integrated circuit device having an ic chip mounted on the wiring substrate and having suitable mutual connections between internal circuits
05/18/1993US5212400 Method of depositing tungsten on silicon in a non-self-limiting CVD process and semiconductor device manufactured thereby
05/18/1993US5212399 Low cost polysilicon active p-channel load
05/18/1993US5212374 Method and apparatus for positioning and biasing an electro-optic modulator of an electro-optic imaging system
05/18/1993US5212361 Method and apparatus for forming balls at the ends of wires
05/18/1993US5212352 Self-aligned tungsten-filled via
05/18/1993US5212307 Light-sensitive bis-trichloromethyl-s-triazines, and process for their preparation
05/18/1993US5212119 Method for maintaining the resistance of a high resistive polysilicon layer for a semiconductor device
05/18/1993US5212118 Air and space craft
05/18/1993US5212117 Patterns
05/18/1993US5212116 Semiconductors
05/18/1993US5212114 Back etching
05/18/1993US5212113 Semiconductors
05/18/1993US5212112 Selective epitaxy of silicon in silicon dioxide apertures with suppression of unwanted formation of facets
05/18/1993US5212111 Local-oxidation of silicon (LOCOS) process using ceramic barrier layer
05/18/1993US5212110 Silicon-germanium
05/18/1993US5212109 Method for forming PN junction isolation regions by forming buried regions of doped polycrystalline or amorphous semiconductor
05/18/1993US5212108 Fabrication of stabilized polysilicon resistors for SEU control
05/18/1993US5212107 Wiring method for semiconductor integrated circuits
05/18/1993US5212106 Miniaturization, semiconductors
05/18/1993US5212105 Semiconductor device manufacturing method and semiconductor device manufactured thereby
05/18/1993US5212104 Integrated circuits
05/18/1993US5212103 Method of making a heterojunction bipolar transistor
05/18/1993US5212101 Doping
05/18/1993US5212028 Fabrication of fine patterns by selective surface reaction and inspection method therefor
05/18/1993US5211994 Apparatus for and method of forming thin film
05/18/1993US5211987 Method and apparatus for forming refractory metal films
05/18/1993US5211986 Semiconductors
05/18/1993US5211825 Plasma processing apparatus and the method of the same
05/18/1993US5211804 Method for dry etching
05/18/1993US5211796 Integrated circuits
05/18/1993US5211795 Plasma etching apparatus and transporting device used in the same
05/18/1993US5211794 Wafer etching apparatus
05/18/1993US5211790 Growing sulfur from vapor phase on interior of chamber and etching a layer of silicon based wafers
05/18/1993US5211786 Use of permeable materials to improve hot pressing process
05/18/1993US5211758 Chemical vapor deposition apparatus
05/18/1993US5211717 Sawtooth container for semiconductor wafers
05/18/1993US5211328 Method of applying solder
05/18/1993US5211324 Composite boat transport providing clipless securement of semiconductor device assembly to boat transport, and of lid to package body
05/18/1993US5210959 Ambient-free processing system
05/18/1993US5210939 Lead grid array integrated circuit
05/18/1993US5210938 Method of assembling an electronic part device
05/18/1993US5210936 Method and apparatus for the excise and lead form of TAB devices
05/18/1993CA2007199C Single atmosphere for firing copper compatible thick film materials