| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/10/1993 | WO1993008931A3 System for supplying ultrapure water and method of washing substrate, and system for producing ultrapure water and method of producing ultrapure water |
| 06/09/1993 | EP0545859A1 Radiation-sensitive compositions |
| 06/09/1993 | EP0545809A1 Device for mounting wideband microwave monolithic integrated circuits |
| 06/09/1993 | EP0545748A1 Device for supplying a voltage to a substrate holder |
| 06/09/1993 | EP0545700A1 Method of compensating for non-uniform illumination in an X-ray lithography beamline |
| 06/09/1993 | EP0545694A2 Image display device with reduced cell gap variation and method of manufacturing the same |
| 06/09/1993 | EP0545604A2 High-withstand voltage integrated circuit |
| 06/09/1993 | EP0545602A1 Method for forming barrier metal layers |
| 06/09/1993 | EP0545585A2 Integrated circuit fabrication comprising a LOCOS process |
| 06/09/1993 | EP0545542A1 Apparatus for depositing a material on a substrate by chemical vapour deposition |
| 06/09/1993 | EP0545523A2 Method for evaluation of spatial distribution of deep level concentration in semiconductor crystal |
| 06/09/1993 | EP0545521A2 Schottky diode structure and fabrication process |
| 06/09/1993 | EP0545488A1 Semiconductor device comprising at least one power transistor and at least one control circuit with dynamic insulation circuit integrated monolithically in the same chip |
| 06/09/1993 | EP0545487A2 Semiconductor device encapsulated in resin and electrically insulated having improved insulation characteristics and related manufacturing process |
| 06/09/1993 | EP0545484A2 Manufacturing process for insulated gate field effect transistors (igfet) with low short circuit density between gate and source and devices obtained thereby |
| 06/09/1993 | EP0545411A2 Method for improving the step coverage at contact windows |
| 06/09/1993 | EP0545381A2 Tunneling transistor |
| 06/09/1993 | EP0545363A1 Integrated circuit fabrication process and structure |
| 06/09/1993 | EP0545359A2 Partial isolation of power rails for output buffer circuits |
| 06/09/1993 | EP0545263A2 Method of forming trench isolation having polishing step and method of manufacturing semiconductor device |
| 06/09/1993 | EP0545262A1 Strained quantum well laser diode |
| 06/09/1993 | EP0545256A1 Arrangement of bitlines for integrated circuits |
| 06/09/1993 | EP0545238A2 Method of epitaxially growing a semiconductor crystal |
| 06/09/1993 | EP0545082A2 Process for manufacturing MOS-type integrated circuits comprising LOCOS isolation regions |
| 06/09/1993 | EP0545081A1 Carboxyl-containing plasticizers in dry-film photopolymerizable compositions |
| 06/09/1993 | EP0545074A2 Method for producing electrically erasable and programmable read-only memory cells with a single polysilicon level |
| 06/09/1993 | EP0545070A1 Membrane probe contact bump compliancy system |
| 06/09/1993 | EP0545007A1 A semiconductor device structure having a heat-sink and a plastics body, and highly reliable means of electrical connection to the heat-sink |
| 06/09/1993 | EP0544995A1 Apparatus for transporting substrates |
| 06/09/1993 | EP0544934A1 Method of stabilizing the surface properties of objects to be thermally treated in a vacuum |
| 06/09/1993 | DE4140387A1 Appts. for processing semiconductor wafers in rapid thermal process - comprising substrate support plate with wafer arranged on it |
| 06/09/1993 | DE4139908A1 Halbleiteranordnung mit metallschichtsystem sowie verfahren zur herstellung A semiconductor device comprising metal layer system and process for production |
| 06/09/1993 | CN1073045A Superconducting field-effect transistors with inverted misfet structure and method for making the same |
| 06/09/1993 | CN1073044A Method of processing a semiconductor chip package |
| 06/09/1993 | CN1021174C Semiconductor module |
| 06/09/1993 | CN1021122C Apparatus for treating gaseous effluents coming from manufacture of electronic components |
| 06/08/1993 | US5218568 Electrically-erasable, electrically-programmable read-only memory cell, an array of such cells and methods for making and using the same |
| 06/08/1993 | US5218551 Timing driven placement |
| 06/08/1993 | US5218512 Ferroelectric device |
| 06/08/1993 | US5218511 Inter-silicide capacitor |
| 06/08/1993 | US5218506 Protection of analog reference and bias voltage inputs |
| 06/08/1993 | US5218421 Wavelength detecting apparatus |
| 06/08/1993 | US5218247 CMIS circuit and its driver |
| 06/08/1993 | US5218242 Pulldown resistance control input circuit and output circuit |
| 06/08/1993 | US5218234 Semiconductor device with controlled spread polymeric underfill |
| 06/08/1993 | US5218232 Semiconductor device having two-level wiring |
| 06/08/1993 | US5218231 Mold-type semiconductor device |
| 06/08/1993 | US5218228 High voltage MOS transistors with reduced parasitic current gain |
| 06/08/1993 | US5218227 Semiconductor device and method of manufacturing same |
| 06/08/1993 | US5218224 Semiconductor device including inversion preventing layers having a plurality of impurity concentration peaks in direction of depth |
| 06/08/1993 | US5218221 Semiconductor device and manufacturing method thereof |
| 06/08/1993 | US5218220 Power fet having reduced threshold voltage |
| 06/08/1993 | US5218219 Semiconductor memory device having a peripheral wall at the boundary region of a memory cell array region and a peripheral circuit region |
| 06/08/1993 | US5218218 Semiconductor device and manufacturing method thereof |
| 06/08/1993 | US5218217 Dynamic random access memory device and method of manufacturing |
| 06/08/1993 | US5218216 Gallium nitride group semiconductor and light emitting diode comprising it and the process of producing the same |
| 06/08/1993 | US5218214 Integrated circuit |
| 06/08/1993 | US5218213 SOI wafer with sige |
| 06/08/1993 | US5218210 Broad beam flux density control |
| 06/08/1993 | US5218209 Ion implanter |
| 06/08/1993 | US5218193 Double-focus measurement apparatus utilizing chromatic aberration by having first and second bodies illuminated respectively by a single wavelength ray and a ray having a plurality of wavelengths |
| 06/08/1993 | US5218172 Metallized frame which interconnects etched wirings for integrated circuits |
| 06/08/1993 | US5217926 Etching the photoresist and first dielectric layer at selected location, overlapping the second dielectric layer to form thick film |
| 06/08/1993 | US5217925 Apparatus and method for cleaning semiconductor wafers |
| 06/08/1993 | US5217924 Doping with low energy into metal layer and semiconductor substrate, depositing second metal layer, annealing to form metal silicide |
| 06/08/1993 | US5217923 Method of fabricating a semiconductor device having silicided source/drain regions |
| 06/08/1993 | US5217922 Method for forming a silicide layer and barrier layer on a semiconductor device rear surface |
| 06/08/1993 | US5217920 Method of forming substrate contact trenches and isolation trenches using anodization for isolation |
| 06/08/1993 | US5217919 Method of forming island with polysilicon-filled trench isolation |
| 06/08/1993 | US5217915 Method of making gate array base cell |
| 06/08/1993 | US5217914 Producing cell having larger capacitance in same area |
| 06/08/1993 | US5217912 Doping the surface with impurity ions, laminating dielectric film, heating to diffuse, etching the dielectric film to reduce crystal defects |
| 06/08/1993 | US5217911 Method of producing a semiconductor structure including a Schottky junction |
| 06/08/1993 | US5217910 Method of fabricating semiconductor device having sidewall spacers and oblique implantation |
| 06/08/1993 | US5217909 Forming the base, emitter and receiver terminals from a single layer polycrystalline silicon |
| 06/08/1993 | US5217908 Semiconductor device having an insulator film of silicon oxide in which oh ions are incorporated |
| 06/08/1993 | US5217849 Plating copper layers onto both surfaces of polyimide film, then forming photoresist layers on both sides, masking, exposure, development, baking, etching |
| 06/08/1993 | US5217843 Positive radiation-sensitive mixture, and radiation-sensitive recording material produced therefrom for high-energy radiation |
| 06/08/1993 | US5217834 Measuring wafer temperature and exposing to a beam to form a pattern when temperature reaches specified value |
| 06/08/1993 | US5217831 Controlled heating, melting of material surrounding apertures in mask for backflow filling gives improved edge resolution, image quality |
| 06/08/1993 | US5217597 Using a transfer plate to electrodeposit solder and subsequently reflow the deposits onto the substrate |
| 06/08/1993 | US5217570 Dry etching method |
| 06/08/1993 | US5217568 Using an alkaline resistant coating |
| 06/08/1993 | US5217567 Exposing film to plasma formed from oxygen-containing gas and fluorine-containing gas |
| 06/08/1993 | US5217566 Depositing a glass passivation layer over a silicon wafer while heating, densification and polishing to smooth without reflowing glass |
| 06/08/1993 | US5217564 Method of producing sheets of crystalline material and devices made therefrom |
| 06/08/1993 | US5217560 A reaction tube is to house semiconductor wafers with high frequency plasma generating electrode unit located outside; purity, uniformity; film forming, etching |
| 06/08/1993 | US5217559 Apparatus and method for in-situ deep ultraviolet photon-assisted semiconductor wafer processing |
| 06/08/1993 | US5217550 Alignment transfer method |
| 06/08/1993 | US5217501 Vertical wafer heat treatment apparatus having dual load lock chambers |
| 06/08/1993 | US5217341 Method for aligning wafers within a semiconductor wafer cassette |
| 06/08/1993 | US5217340 Wafer transfer mechanism in vertical CVD diffusion apparatus |
| 06/08/1993 | US5217273 Serial pumping for portable handling tool of electronic workpieces |
| 06/08/1993 | US5217216 HTCC/LTCC substrate blanker/multi-layer collation die |
| 06/08/1993 | US5217120 Apparatus for loading and unloading sleeves for integrated circuit ester |
| 06/08/1993 | US5217107 Apparatus for feeding plate-form parts |
| 06/08/1993 | US5217053 Vented vacuum semiconductor wafer cassette |
| 06/08/1993 | US5216933 Tool holding mechanism for use in a bonder |
| 06/08/1993 | US5216843 Polishing pad conditioning apparatus for wafer planarization process |
| 06/08/1993 | US5216807 Method of producing electrical connection members |