Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1993
10/13/1993EP0565391A1 Method and device for encapsulation of three-dimensional semi-conductor chips
10/13/1993EP0565278A1 Wafer handling apparatus and method
10/13/1993EP0565259A1 Method and apparatus for producing variable spatial frequency control in plasma assisted chemical etching
10/13/1993EP0565231A2 Method of fabricating a polysilicon thin film transistor
10/13/1993EP0565212A2 Iodine etch process for silicon and silicides
10/13/1993EP0565179A2 A semiconductor device including protection means
10/13/1993EP0565156A2 Voltage burn-in scheme for BICMOS circuits
10/13/1993EP0565151A2 Manufacture of multi-layer ceramic interconnect structures
10/13/1993EP0565089A1 Ion implanting apparatus
10/13/1993EP0565079A1 Semiconductor device including voltage stress test shunting circuit
10/13/1993EP0565054A2 N-type antimony-based strained layer superlattice and fabrication method
10/13/1993EP0565030A1 Apparatur for treatment of special waste
10/13/1993EP0565024A2 Row decoder for driving word line at a plurality of points thereof
10/13/1993EP0565001A1 Closed container to be used in a clean room
10/13/1993EP0564918A2 Light-curable elastomeric mixture and recording material for flexographic printing plates obtained therefrom
10/13/1993EP0564917A2 Light-curable elastomeric mixture and recording material for flexographic printing plates obtained therefrom
10/13/1993EP0564915A2 Methods for growing compound semiconductor layers
10/13/1993EP0564897A1 Method for fabricating diodes for electrostatic discharge protection and voltage references
10/13/1993EP0564866A2 Method for making a semiconductor device having an anhydrous ferroelectric thin film
10/13/1993EP0564865A1 Semiconductor device with test-only contacts and method for making the same
10/13/1993EP0564848A1 Process for fabricating multiple pillar trench capacitor for DRAM
10/13/1993EP0564791A1 Potential-free data interface
10/13/1993EP0564720A1 Method of manufacturing x-ray exposure mask
10/13/1993EP0564693A1 Film carrier type substrate and method of manufacturing the same
10/13/1993EP0564679A1 Gate array base cell
10/13/1993EP0564660A1 Tray for integrated circuits
10/13/1993EP0564652A1 Manufacture of multilayer ceramic part, and multilayer ceramic part
10/13/1993EP0564473A1 Piso electrostatic discharge protection device
10/13/1993EP0564467A1 Circuit for protecting a semiconductor device from voltage produced by discharges of static electricity.
10/13/1993EP0424375B1 Monolithic channeling mask having amorphous/single crystal construction
10/13/1993CN1077313A Method for preparing visible photoluminescent silicon quantum point
10/12/1993US5253324 Conical rapid thermal processing apparatus
10/12/1993US5253266 MBE effusion source with asymmetrical heaters
10/12/1993US5253202 Word line driver circuit for dynamic random access memories
10/12/1993US5253156 Semiconductor integrated circuit unit
10/12/1993US5253012 Substrate holding apparatus for vertically holding a substrate in an exposure apparatus
10/12/1993US5252909 Constant-voltage generating circuit
10/12/1993US5252868 CMOS amplifier circuit and CCD delay line with CMOS amplifier
10/12/1993US5252858 Glass frit fired with metal oxide filler and binder
10/12/1993US5252854 Semiconductor device having stacked lead structure
10/12/1993US5252853 Packaged semiconductor device having tab tape and particular power distribution lead structure
10/12/1993US5252850 Apparatus for contouring a semiconductor, light responsive array with a prescribed physical profile
10/12/1993US5252849 Transistor useful for further vertical integration and method of formation
10/12/1993US5252847 Low break-down voltage; forming gate electrodes in presence of ethyl acetate and tetrahydrofuran
10/12/1993US5252844 Semiconductor device having a redundant circuit and method of manufacturing thereof
10/12/1993US5252843 Semiconductor device having overlapping conductor layers
10/12/1993US5252842 Low-loss semiconductor device and backside etching method for manufacturing same
10/12/1993US5252841 Heterojunction bipolar transistor structure having low base-collector capacitance, and method of fabricating the same
10/12/1993US5252840 Semiconductor device having differently doped diamond layers
10/12/1993US5252807 Heated plate rapid thermal processor
10/12/1993US5252783 Semiconductor package
10/12/1993US5252781 Substrate member having electric lines and apertured insulating film
10/12/1993US5252520 Integrated circuit interlevel dielectric wherein the first and second dielectric layers are formed with different densities
10/12/1993US5252518 Method for forming a mixed phase TiN/TiSi film for semiconductor manufacture using metal organometallic precursors and organic silane
10/12/1993US5252517 Method of conductor isolation from a conductive contact plug
10/12/1993US5252516 Reducing defects
10/12/1993US5252515 Method for field inversion free multiple layer metallurgy VLSI processing
10/12/1993US5252512 TEOV doping of gallium arsenide
10/12/1993US5252511 Isolation method in a semiconductor device
10/12/1993US5252510 Method for manufacturing a CMOS device having twin wells and an alignment key region
10/12/1993US5252508 Apparatus and method for the fabrication of semiconductor circuits
10/12/1993US5252507 Very high density wafer scale device architecture
10/12/1993US5252506 Method to eliminate gate filaments on field plate isolated devices
10/12/1993US5252504 Reverse polysilicon CMOS fabrication
10/12/1993US5252503 Techniques for forming isolation structures
10/12/1993US5252502 Method of making MOS VLSI semiconductor device with metal gate
10/12/1993US5252501 Self-aligned single-mask CMOS/BiCMOS twin-well formation with flat surface topography
10/12/1993US5252500 Method of fabricating a semiconductor device
10/12/1993US5252499 Introducing atomic hydrogen to neutralize a portion of the compensators; compensation free wide band-gap semiconductor with low bipolar resistivity
10/12/1993US5252497 Method of characterizing optical parameters of opto-electronic components and apparatus for carrying out the method, particularly during a coating operation
10/12/1993US5252433 Method of forming and removing resist pattern
10/12/1993US5252414 Evaluation method of resist coating
10/12/1993US5252383 Metallized fluororesin with hydrophilic macromolecular film adhered
10/12/1993US5252181 Method for cleaning the surface of a substrate with plasma
10/12/1993US5252179 Using diaphragm to control fluid flow of etchant
10/12/1993US5252178 Multi-zone plasma processing method and apparatus
10/12/1993US5252177 Method for forming a multilayer wiring of a semiconductor device
10/12/1993US5252137 System and method for applying a liquid
10/12/1993US5252133 Vertically oriented CVD apparatus including gas inlet tube having gas injection holes
10/12/1993US5252132 Apparatus for producing semiconductor film
10/12/1993US5252131 Apparatus for gas source molecular beam epitaxy
10/12/1993US5252062 Thermal processing furnace
10/12/1993US5252052 Mold for manufacturing plastic integrated circuits incorporating a heat sink
10/12/1993US5252051 Resin-seal apparatus for semiconductor element
10/12/1993US5251806 Method of forming dual height solder interconnections
10/12/1993US5251805 Wire bonding method and apparatus
10/12/1993US5251803 Controlled heating and pressing of ceramic base and copper(or alloy) layer having thin film of active metal between, in presence of inert gases, simplification, bonding strength
10/12/1993US5251679 Apparatus for shaping outboard terminals of surface-mountable circuit modules
10/12/1993US5251372 Method and apparatus for framing a film mounted integrated circuit
10/12/1993CA2066193C Method of producing a thin silicon-on-insulator layer
10/12/1993CA2024383C Hermetic package for an electronic device and method of manufacturing same
10/12/1993CA1323095C Photosensor
10/12/1993CA1322999C Wafer carrier
10/12/1993CA1322937C Process for selective formation of ii-vi group compound film
10/12/1993CA1322898C Solder delivery systems
10/11/1993CA2093405A1 Apparatus for reprocessing special waste
10/11/1993CA2092783A1 Cyclic carbonate compounds, method for producing the same and positive photoresist composition using the same
10/08/1993CA2092895A1 Complementary transistor semiconductor device
10/08/1993CA2092050A1 Method for fabricating diodes for electrostatic discharge protection and voltage references
10/07/1993DE4311173A1 Electrode structures prodn on semicondcutor body - by masking, immersing in palladium hydrogen fluoride soln., depositing nickel@ layer, and depositing other metals
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