| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/21/2013 | US8445322 Method of fabricating semiconductor package |
| 05/21/2013 | US8445321 Semiconductor device and method of manufacturing the same |
| 05/21/2013 | US8445320 Graphene channel-based devices and methods for fabrication thereof |
| 05/21/2013 | US8445318 Phase change memory devices including phase change layer formed by selective growth methods and methods of manufacturing the same |
| 05/21/2013 | US8445317 Methods of fabricating semiconductor devices |
| 05/21/2013 | US8445316 Non-lithographic method of patterning contacts for a photovoltaic device |
| 05/21/2013 | US8445315 Thin-film solar battery module manufacturing method |
| 05/21/2013 | US8445314 Method of creating reusable template for detachable thin film substrate |
| 05/21/2013 | US8445313 Method for forming a self-aligned bit line for PCRAM and self-aligned etch back process |
| 05/21/2013 | US8445312 Method of manufacturing crystalline silicon solar cells using co diffusion of Boron and Phosphorus |
| 05/21/2013 | US8445311 Method of fabricating a differential doped solar cell |
| 05/21/2013 | US8445310 Thin film solar cell and manufacturing method thereof |
| 05/21/2013 | US8445309 Anti-reflective photovoltaic module |
| 05/21/2013 | US8445308 Fabrication of phosphor dots and application of phosphor dots to arrays of lighting elements |
| 05/21/2013 | US8445307 Monolithic IC and MEMS microfabrication process |
| 05/21/2013 | US8445306 Hybrid MEMS RF switch and method of fabricating same |
| 05/21/2013 | US8445305 Method for manufacturing 3-dimensional structures using thin film with columnar nano pores and manufacture thereof |
| 05/21/2013 | US8445304 Semi-conductor sensor fabrication |
| 05/21/2013 | US8445303 Method of manufacturing semiconductor device and semiconductor device |
| 05/21/2013 | US8445302 Method for producing group III nitride semiconductor light-emitting device, group III nitride semiconductor light-emitting device, and lamp |
| 05/21/2013 | US8445301 Thin-film transistor substrate, method of manufacturing the same, and display device including the same |
| 05/21/2013 | US8445300 Method of fabricating display device using plastic substrate |
| 05/21/2013 | US8445298 Process of producing liquid discharge head base material |
| 05/21/2013 | US8445297 Method of fabricating a chip |
| 05/21/2013 | US8445296 Apparatus and methods for end point determination in reactive ion etching |
| 05/21/2013 | US8445189 Developing device and developing method |
| 05/21/2013 | US8445122 Data storage medium and associated method |
| 05/21/2013 | US8444988 Cancer treatment method |
| 05/21/2013 | US8444926 Processing chamber with heated chamber liner |
| 05/21/2013 | US8444913 Method of assembling a member on a support by sintering a mass of conductive powder |
| 05/21/2013 | US8444869 Simultaneous front side ash and backside clean |
| 05/21/2013 | US8444806 Plasma generator, plasma control method and method of producing substrate |
| 05/21/2013 | US8444791 Method for manufacturing ceramic capacitor |
| 05/21/2013 | US8444766 System and method for recycling a gas used to deposit a semiconductor layer |
| 05/21/2013 | US8444456 Electrode securing platens and electrode polishing assemblies incorporating the same |
| 05/21/2013 | US8444363 Substrate processing apparatus |
| 05/21/2013 | US8444194 Substrate transport hand and substrate transport robot |
| 05/21/2013 | US8443756 Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses |
| 05/16/2013 | WO2013071227A1 Gas flow system, device and method |
| 05/16/2013 | WO2013071178A1 Metal- semiconductor wafer bonding for high-q capacitors |
| 05/16/2013 | WO2013071171A1 Low-k dielectric protection spacer for patterning through substrate vias through a low-k wiring layer |
| 05/16/2013 | WO2013071110A1 Magnetic field reduction apparatus and magnetic plasma flood system for ion beam processing |
| 05/16/2013 | WO2013071033A1 A system for use in the formation of semiconductor crystalline materials |
| 05/16/2013 | WO2013070980A1 Fiber delivery for metrology systems used in lithography tools |
| 05/16/2013 | WO2013070978A2 Substrate processing system and method |
| 05/16/2013 | WO2013070965A1 Thermally stable optical sensor mount |
| 05/16/2013 | WO2013070931A1 Damascene template for directed assembly and transfer of nanoelements |
| 05/16/2013 | WO2013070917A1 Apparatus and method to measure temperature of 3d semiconductor structures via laser diffraction |
| 05/16/2013 | WO2013070702A1 Deposition of metal films using alane-based precursors |
| 05/16/2013 | WO2013070685A1 Interlayer polysilicon dielectric cap and method of forming thereof |
| 05/16/2013 | WO2013070570A1 Methods of removing a material layer from a substrate using water vapor treatment |
| 05/16/2013 | WO2013070511A1 Hybrid photoresist composition and pattern forming method using thereof |
| 05/16/2013 | WO2013070482A1 Method and apparatus for determining grain size of a surface |
| 05/16/2013 | WO2013070472A2 System, method and apparatus for plasma sheath voltage control |
| 05/16/2013 | WO2013070438A1 Precursor distribution features for improved deposition uniformity |
| 05/16/2013 | WO2013070437A1 Adsorption site blocking method for co-doping ald films |
| 05/16/2013 | WO2013070436A1 Methods of reducing substrate dislocation during gapfill processing |
| 05/16/2013 | WO2013070427A1 Blocking layers for leakage current reduction in dram devices |
| 05/16/2013 | WO2013070424A1 A method of testing data retention of a non-volatile memory cell having a floating gate |
| 05/16/2013 | WO2013070394A1 Nanowire field effect transistor device |
| 05/16/2013 | WO2013070341A1 Integrated semiconductor devices with amorphous silicon beam, methods of manufacture and design structure |
| 05/16/2013 | WO2013070289A1 Brush box module for chemical mechanical polishing cleaner |
| 05/16/2013 | WO2013070221A1 Recessed bottom-electrode capacitors and methods of assembling same |
| 05/16/2013 | WO2013070013A1 Mems sensor packaging and method thereof |
| 05/16/2013 | WO2013069938A1 Surface treatment method of polishing pad and polishing method of wafer using the same |
| 05/16/2013 | WO2013069921A1 Polysiloxazane hydroxide thin-film rinse solution, and polysiloxazane hydroxide thin-film pattern-forming method using same |
| 05/16/2013 | WO2013069857A1 Automatic capillary exchange system |
| 05/16/2013 | WO2013069812A1 Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film, mask blank and method of forming pattern |
| 05/16/2013 | WO2013069811A1 Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, manufacturing method of electronic device, and electronic device |
| 05/16/2013 | WO2013069794A1 Colloidal dispersion, method for producing same, and use of same |
| 05/16/2013 | WO2013069789A1 Negative-type photosensitive resin composition, partition wall, black matrix, and optical element |
| 05/16/2013 | WO2013069750A1 Composition for forming resist upper layer film, method for forming resist pattern, compound, method for producing compound, and polymer |
| 05/16/2013 | WO2013069739A1 Dielectric window for plasma treatment device, and plasma treatment device |
| 05/16/2013 | WO2013069729A1 Semiconductor element and method for manufacturing same |
| 05/16/2013 | WO2013069722A1 Sample positioning apparatus, sample stage, and charged particle beam apparatus |
| 05/16/2013 | WO2013069716A1 Load port and efem |
| 05/16/2013 | WO2013069714A1 Polishing composition and polishing method using same, and substrate manufacturing method |
| 05/16/2013 | WO2013069686A1 Method for producing functional device and apparatus for producing functional device |
| 05/16/2013 | WO2013069672A1 Semiconductor device and method for producing semiconductor device |
| 05/16/2013 | WO2013069623A1 Polishing composition |
| 05/16/2013 | WO2013069544A1 Self-organization composition for pattern formation and pattern formation method |
| 05/16/2013 | WO2013069522A1 Connection device, method for manufacturing connection structure, method for manufacturing stacked chip component and method for mounting electronic component |
| 05/16/2013 | WO2013069511A1 Photo-curable composition and patterning method using the same |
| 05/16/2013 | WO2013069510A1 Temperature control method, control device, and plasma treatment device |
| 05/16/2013 | WO2013069507A1 Die push-up operation management system |
| 05/16/2013 | WO2013069499A1 Wafer surface-treatment method and surface-treatment liquid, and surface-treatment agent, surface-treatment liquid, and surface-treatment method for silicon-nitride-containing wafers |
| 05/16/2013 | WO2013069496A1 Resin sealing device |
| 05/16/2013 | WO2013069471A1 Solid-state electronic device |
| 05/16/2013 | WO2013069470A1 Solid-state electronic device |
| 05/16/2013 | WO2013069466A1 Pattern-forming method |
| 05/16/2013 | WO2013069448A1 Method for producing die-pressed structural body, thin-film transistor, thin-film capacitor, actuator, piezoelectric inkjet head, and optical device |
| 05/16/2013 | WO2013069424A1 Plasma processing method and plasma processing device |
| 05/16/2013 | WO2013069408A1 Semiconductor device |
| 05/16/2013 | WO2013069385A1 Method for etching semiconductor substrate |
| 05/16/2013 | WO2013069366A1 Organic thin film transistor and method for manufacturing same |
| 05/16/2013 | WO2013069333A1 Variable capacitance apparatus |
| 05/16/2013 | WO2013069315A1 Semiconductor integrated circuit device |
| 05/16/2013 | WO2013069213A1 Wireless apparatus and method for manufacturing same |
| 05/16/2013 | WO2013069198A1 Double-sided polishing method |
| 05/16/2013 | WO2013069184A1 Inverting head |