Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2013
05/14/2013US8438990 Multi-electrode PECVD source
05/14/2013US8438727 Multilayer printed circuit board and multilayer printed circuit board manufacturing method
05/14/2013US8438724 Method for producing substrate for mounting device and method for producing a semiconductor module
05/10/2013WO2013067490A1 A PROCESS OF FORMING AN ALUMINUM p-DOPED SURFACE REGION OF A SEMICONDUCTOR SUBSTRATE
05/10/2013WO2013067307A1 Workpiece handling system and methods of workpiece handling
05/10/2013WO2013067270A1 Bonding wedge
05/10/2013WO2013067214A1 Robot systems, apparatus, and methods adapted to transport dual substrates in electronic device manufacturing
05/10/2013WO2013067212A1 Epitaxial film growth in retrograde wells for semiconductor devices
05/10/2013WO2013067201A2 System architecture for plasma processing solar wafers
05/10/2013WO2013067064A1 Overlay target geometry for measuring multiple pitches
05/10/2013WO2013066977A1 Methods for wafer bonding and for nucleating bonding nanophases using wet and steam pressurization
05/10/2013WO2013066967A1 Monolithically integrated vertical jfet and schottky diode
05/10/2013WO2013066886A1 Method and apparatus for floating or applying voltage to a well of an integrated circuit
05/10/2013WO2013066884A1 Interdigitated foil interconnect for rear-contact solar cells
05/10/2013WO2013066820A1 Method and system for controlling a spike anneal process
05/10/2013WO2013066799A1 Semiconductor substrate with molded support layer
05/10/2013WO2013066767A1 Process variation-based model optimization for metrology
05/10/2013WO2013066758A1 Clamping apparatus for cleaving a bonded wafer structure and methods for cleaving
05/10/2013WO2013066667A1 Dry etch processes
05/10/2013WO2013066666A1 Atomic layer deposition of films using precursors containing hafnium or zirconium
05/10/2013WO2013066652A1 Rapid thermal processing chamber
05/10/2013WO2013066600A1 Optical design for line generation using microlens array
05/10/2013WO2013066551A1 Method to fabricate multicrystal solar cell with light trapping surface using nanopore copolymer
05/10/2013WO2013066504A1 Low cte interposer
05/10/2013WO2013066455A2 Flattened substrate surface for substrate bonding
05/10/2013WO2013066356A1 Methods and apparatuses to form self-aligned caps
05/10/2013WO2013066342A1 Structure of a switching device in an array
05/10/2013WO2013066336A1 Etchstop layers and capacitors
05/10/2013WO2013066300A1 A getter reticle
05/10/2013WO2013066162A1 Method and device for encapsulating electronic components using a reduction material which undergoes a phase change
05/10/2013WO2013066015A1 Apparatus and method for treating a substrate
05/10/2013WO2013065981A1 Adhesive film having good machinability for protecting the surface of a semiconductor wafer
05/10/2013WO2013065895A1 Method for manufacturing a fanout semiconductor package using a lead frame, and semiconductor package and package-on-package for same
05/10/2013WO2013065878A1 Method of forming pattern and composition for crosslinked layer formation to be used in the method
05/10/2013WO2013065788A1 Die bonding agent
05/10/2013WO2013065786A1 Oxide sintered compact and sputtering target, and method for producing same
05/10/2013WO2013065784A1 Oxide sintered compact and sputtering target, and method for producing same
05/10/2013WO2013065771A1 Production method for semiconductor device, production device for semiconductor device, and storage medium
05/10/2013WO2013065666A1 Gas nozzle, plasma device using same, and method for manufacturing gas nozzle
05/10/2013WO2013065600A1 Thin-film transistor, method for manufacturing same, and display device
05/10/2013WO2013065582A1 Method for producing organic semiconductor element, organic semiconductor element, method for growing organic single crystal thin film, organic single crystal thin film, electronic device and group of organic single crystal thin films
05/10/2013WO2013065531A1 Ion beam etching method for magnetic films and ion beam etching apparatus
05/10/2013WO2013065522A1 Photovoltaic device and manufacturing method thereof
05/10/2013WO2013065493A1 Impact detection and recording device
05/10/2013WO2013065470A1 Coating process device, coating process method and computer storage medium
05/10/2013WO2013065451A1 Substrate processing unit and method for processing substrate
05/10/2013WO2013065420A1 Electronic component, assembly substrate, and method for manufacturing electronic component
05/10/2013WO2013065417A1 Adhesive composition for bonding water and supporting body for said wafer, adhesive film, and laminate
05/10/2013WO2013065384A1 Method for producing concave-convex substrate using sol-gel method, sol solution used in same, method for producing organic el element using same, and organic el element obtained thereby
05/10/2013WO2013065315A1 N-type semiconductor comprising amorphous silicon carbide doped with nitrogen, and process for producing n-type semiconductor element
05/10/2013WO2013065267A1 Thin film transistor substrate, liquid crystal display device, and method for manufacturing thin film transistor substrate
05/10/2013WO2013065243A1 Semiconductor device and method for manufacturing same
05/10/2013WO2013065101A1 Semiconductor device and manufacturing method thereof
05/10/2013WO2013065094A1 Device and method for testing of quantum cell by semiconductor probe
05/10/2013WO2013065080A1 Semiconductor integrated circuit device
05/10/2013WO2013064613A2 Cvd-reactor and substrate holder for a cvd reactor
05/10/2013WO2013064025A1 Method for improving gate photo-etching key size uniformity on wafer
05/10/2013WO2013064023A1 Method for forming metal loop
05/10/2013WO2013064015A1 Dmos device and manufacturing method for same
05/10/2013WO2013064014A1 Method for forming contact hole
05/10/2013WO2013064009A1 Method for manufacturing semiconductor thick metal structure
05/10/2013WO2013063975A1 Tunneling field effect transistor structure and forming method thereof
05/10/2013WO2013063918A1 Wafer support apparatus and semiconductor processing device having same
05/10/2013WO2013063838A1 Method for preparing superfine line
05/10/2013WO2013063815A1 Thin film transistor array substrate and manufacturing method thereof
05/10/2013WO2013063728A1 Transistor, transistor manufacturing method and semiconductor device including such transistor
05/10/2013WO2013063726A1 Semiconductor device and manufacturing method thereof
05/10/2013WO2013063719A1 Method for die-bonding pressure sensor die into pre-plastic packaged lead box, and device thereof
05/10/2013WO2013063652A1 Method of producing a silicon-on-insulator article
05/10/2013WO2013040365A3 Highly luminescent semiconductor nanocrystals
05/10/2013WO2013040285A3 Leakage measurement of through silicon vias
05/10/2013WO2013040083A3 Electro-mechanical diode non-volatile memory cell for cross-point memory arrays
05/10/2013WO2013039866A3 Activated silicon precursors for low temperature deposition
05/10/2013WO2013039862A3 Methods for depositing metal-polymer composite materials atop a substrate
05/10/2013WO2013032855A3 Method for forming resistive switching memory elements
05/10/2013WO2013032786A3 Plasma activated conformal dielectric film deposition
05/10/2013WO2013022992A3 Thin film structures and devices with integrated light and heat blocking layers for laser patterning
05/10/2013WO2013022753A3 Semiconductor devices having fin structures and fabrication methods thereof
05/10/2013WO2013016215A3 Electrochemical liquid-liquid-solid deposition processes for production of group iv semiconductor materials
05/10/2013WO2013009575A3 Wafer dicing using hybrid split-beam laser scribing process with plasma etch
05/10/2013WO2013006803A3 Integrated solar collectors using epitaxial lift off and cold weld bonded semiconductor solar cells
05/10/2013WO2013006770A3 Test apparatus having a probe card and connector mechanism
05/10/2013WO2013006703A3 Power mosfet with integrated gate resistor and diode-connected mosfet
05/10/2013WO2013006442A3 Method for handling a wafer
05/10/2013WO2013006241A3 Pedestal with edge gas deflector for edge profile control
05/10/2013WO2013003420A3 A semiconductor substrate and method of manufacturing
05/10/2013WO2012177555A3 Cohesive assembly of carbon and its application
05/10/2013WO2012170567A3 Pulse circulator
05/10/2013WO2012166727A3 Substrate freeze dry apparatus and method
05/10/2013WO2012127738A9 COMPOUND GaN SUBSTRATE AND METHOD FOR PRODUCING SAME, AND GROUP III NITRIDE SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SAME
05/10/2013WO2012111616A9 Composite substrate with protection film and method of manufacturing semiconductor device
05/10/2013WO2011032068A3 Edge grip end effector
05/10/2013CA2853620A1 Testing device and testing method for quantum battery using semiconductor probe
05/10/2013CA2853603A1 Method for producing concave-convex substrate using sol-gel method, sol solution used in same, method for producing organic el element using same, and organic el element obtained thereby
05/09/2013US20130115861 Processing method for wafer having chamfered portion along the outer circumference thereof
05/09/2013US20130115858 Substrate Retainer
05/09/2013US20130115783 Method for depositing cyclic thin film
05/09/2013US20130115782 Process for removing material from substrates
05/09/2013US20130115781 Plasma processing apparatus and plasma processing method
05/09/2013US20130115780 Plasma processing apparatus and plasma processing method