| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/23/2013 | WO2013073889A1 Substrate-processing device comprising auxiliary gas supply port |
| 05/23/2013 | WO2013073888A1 Apparatus comprising heat-blocking plate for treating substrate |
| 05/23/2013 | WO2013073887A1 Method and apparatus comprising a plurality of exhaust ports for treating substrate |
| 05/23/2013 | WO2013073886A1 Apparatus for treating substrate for supplying reaction gas with phase difference |
| 05/23/2013 | WO2013073873A1 Linear light source generating device, exposure having linear light source generating device, and lenticular system used for linear light source generating device |
| 05/23/2013 | WO2013073837A1 Apparatus for contactlessly inspecting a light-emitting diode |
| 05/23/2013 | WO2013073786A1 Method for manufacturing a thin film |
| 05/23/2013 | WO2013073714A1 Infrared ray shielding composition, infrared ray shielding film, pattern forming method and solid-state imaging device |
| 05/23/2013 | WO2013073694A1 Method and device for drawing patterns |
| 05/23/2013 | WO2013073671A1 Semiconductor device and method for manufacturing same |
| 05/23/2013 | WO2013073638A1 Curable composition, composition for application, cured film, laser processing method, and manufacturing method for multi-layer wiring structure |
| 05/23/2013 | WO2013073635A1 Semiconductor device and display device |
| 05/23/2013 | WO2013073623A1 Semiconductor device and method for manufacturing semiconductor device |
| 05/23/2013 | WO2013073619A1 Semiconductor device, display device, and method for producing semiconductor device |
| 05/23/2013 | WO2013073618A1 Method of processing used cutting oil composition for fixed abrasive wire saw |
| 05/23/2013 | WO2013073601A1 Thin-film transistor and manufacturing method for thin-film transistor |
| 05/23/2013 | WO2013073591A1 Decoupling circuit and semiconductor integrated circuit |
| 05/23/2013 | WO2013073583A1 Cyclic compound, method for producing same, radiation-sensitive composition, and method for forming resist pattern |
| 05/23/2013 | WO2013073582A1 Cyclic compound, method for producing same, radiation-sensitive composition, and method for forming resist pattern |
| 05/23/2013 | WO2013073574A1 Semiconductor device, method for manufacturing same, and electronic component |
| 05/23/2013 | WO2013073573A1 Semiconductor device and fabrication method for same, and electronic component |
| 05/23/2013 | WO2013073563A1 Anisotropic conductive film, connection method and connector |
| 05/23/2013 | WO2013073542A1 Electronic module and method for producing electronic module |
| 05/23/2013 | WO2013073539A1 High-voltage-resistance semiconductor device |
| 05/23/2013 | WO2013073538A1 Encoder device, movement amount measurement method, optical device, and exposure method and device |
| 05/23/2013 | WO2013073482A1 Temperature control device, processing device, and temperature control method |
| 05/23/2013 | WO2013073468A1 Substrate for forming element, and method for manufacturing substrate for forming element |
| 05/23/2013 | WO2013073459A1 Automatic visual inspection device |
| 05/23/2013 | WO2013073440A1 Transfer substrate for forming metal wiring line and method for forming metal wiring line by means of said transfer substrate |
| 05/23/2013 | WO2013073417A1 Etching method |
| 05/23/2013 | WO2013073379A1 Industrial robot |
| 05/23/2013 | WO2013073378A1 Industrial robot |
| 05/23/2013 | WO2013073365A1 Wafer-related data management method and wafer-related data creation device |
| 05/23/2013 | WO2013073347A1 Laminated structure, ferroelectric gate thin film transistor, and ferroelectric thin film capacitor |
| 05/23/2013 | WO2013073339A1 Treatment method and template for substrate |
| 05/23/2013 | WO2013073315A1 Field-effect transistor and method of manufacturing thereof |
| 05/23/2013 | WO2013073293A1 Method for manufacturing semiconductor device, and semiconductor device |
| 05/23/2013 | WO2013073216A1 Silicon carbide substrate, semiconductor device and methods for producing same |
| 05/23/2013 | WO2013073202A1 Polishing system |
| 05/23/2013 | WO2013073193A1 Semiconductor device manufacturing method |
| 05/23/2013 | WO2013073160A1 Method and device for detecting termination of etching |
| 05/23/2013 | WO2013073156A1 Board material transfer system |
| 05/23/2013 | WO2013073127A1 Semiconductor device and method for manufacturing same |
| 05/23/2013 | WO2013073090A1 Thin-film transistor device and method for manufacturing same, organic electroluminescent display element, and organic electroluminescent display device |
| 05/23/2013 | WO2013073089A1 Thin-film transistor device and method for manufacturing same, organic electroluminescent display element, and organic electroluminescent display device |
| 05/23/2013 | WO2013073088A1 Thin-film transistor device and method for manufacturing same, organic electroluminescent display element, and organic electroluminescent display device |
| 05/23/2013 | WO2013073087A1 Thin-film transistor element and method for manufacturing same, organic electroluminescent display element, and organic electroluminescent display device |
| 05/23/2013 | WO2013073086A1 Thin-film transistor device and method for manufacturing same, organic electroluminescent display elements and organic electroluminescent display device |
| 05/23/2013 | WO2013073084A1 Method for producing display panels, and display panel |
| 05/23/2013 | WO2013073042A1 Semiconductor device and method for manufacturing semiconductor device |
| 05/23/2013 | WO2013073025A1 Polishing liquid composition for semiconductor wafers |
| 05/23/2013 | WO2013072966A1 Thin film semiconductor device and method for manufacturing same |
| 05/23/2013 | WO2013072820A1 Device and method for processing wafer-shaped articles |
| 05/23/2013 | WO2013072819A1 Method and device for processing wafer shaped articles |
| 05/23/2013 | WO2013071959A1 A mos device assembly |
| 05/23/2013 | WO2013071943A1 Measuring form changes of a substrate |
| 05/23/2013 | WO2013071911A1 Etching process and semiconductor component |
| 05/23/2013 | WO2013071811A1 Method for forming low-temperature polysilicon thin film |
| 05/23/2013 | WO2013071804A1 Method for manufacturing cmos field effect transistor |
| 05/23/2013 | WO2013071656A1 Semiconductor structure and method for manufacturing same |
| 05/23/2013 | WO2013071650A1 Cmos device capable of reducing charge collection collected by radiation and preparation method thereof |
| 05/23/2013 | WO2013071578A1 Chip-on-film structure for liquid crystal panel |
| 05/23/2013 | WO2013071343A1 Metal contact scheme for solar cells |
| 05/23/2013 | WO2013049578A3 Group iii-v substrate material with particular crystallographic features and methods of making |
| 05/23/2013 | WO2013049512A3 Methods for monitoring a flow controller coupled to a process chamber |
| 05/23/2013 | WO2013049511A3 Methods for in-situ calibration of a flow controller |
| 05/23/2013 | WO2013049223A3 Insensitive dry removal process for semiconductor integration |
| 05/23/2013 | WO2013049142A3 Apparatus and method for speckle reduction in laser processing equipment |
| 05/23/2013 | WO2013048016A3 Substrate supporting unit and substrate processing device, and method for producing substrate supporting unit |
| 05/23/2013 | WO2013043831A3 Process aware metrology |
| 05/23/2013 | WO2013041214A3 Process for the continual and/or sequential deposition of a dielectric layer from the gas phase onto a substrate |
| 05/23/2013 | WO2013032232A9 Substrate processing apparatus, method for forming an amorphous carbon film using same, and method for filling a gap of a semiconductor device |
| 05/23/2013 | WO2013017993A3 Method and apparatus for estimating the efficiency of a solar cell |
| 05/23/2013 | WO2013017924A3 Method for correcting misalignment of positions on a first wafer bonded to a second wafer |
| 05/23/2013 | WO2012174432A3 Solar cell process carrier |
| 05/23/2013 | WO2012061277A3 Rapid and uniform gas switching for a plasma etch process |
| 05/23/2013 | US20130130514 Crystallization method of amorphous silicon layer |
| 05/23/2013 | US20130130513 Interlayer insulating layer forming method and semiconductor device |
| 05/23/2013 | US20130130512 Film deposition method and film deposition apparatus |
| 05/23/2013 | US20130130511 Coarse Grid Design Methods and Structures |
| 05/23/2013 | US20130130510 Semiconductor Substrate Transfer/Processing-tunnel -arrangement, with Successive Semiconductor Substrate - Sections |
| 05/23/2013 | US20130130509 Combinatorial spot rastering for film uniformity and film tuning in sputtered films |
| 05/23/2013 | US20130130508 Compositions and Methods for Texturing of Silicon Wafers |
| 05/23/2013 | US20130130507 Dry-etch for silicon-and-nitrogen-containing films |
| 05/23/2013 | US20130130506 Selective suppression of dry-etch rate of materials containing both silicon and nitrogen |
| 05/23/2013 | US20130130505 Method for the purification of fluorine |
| 05/23/2013 | US20130130504 Method of manufacturing non-photosensitive polyimide passivation layer |
| 05/23/2013 | US20130130503 Method for fabricating ultra-fine nanowire |
| 05/23/2013 | US20130130502 Micromechanical membranes and related structures and methods |
| 05/23/2013 | US20130130501 Slurry, polishing liquid set, polishing liquid, method for polishing substrate, and substrate |
| 05/23/2013 | US20130130500 Composition for removal of nickel-platinum alloy-based metals |
| 05/23/2013 | US20130130499 Substrate processing method and substrate processing apparatus |
| 05/23/2013 | US20130130498 Reducing patterning variability of trenches in metallization layer stacks with a low-k material by reducing contamination of trench dielectrics |
| 05/23/2013 | US20130130497 Production method for semiconductor device |
| 05/23/2013 | US20130130496 Semiconductor apparatus |
| 05/23/2013 | US20130130495 Method For Fabricating A Metal Silicide Interconnect In 3D Non-Volatile Memory |
| 05/23/2013 | US20130130494 Embedded semiconductor device substrate and production method thereof |
| 05/23/2013 | US20130130492 System and method for improving solder joint reliability in an integrated circuit package |
| 05/23/2013 | US20130130491 Display panel manufacturing method, display panel, and display apparatus |
| 05/23/2013 | US20130130490 Combinatorial approach for screening of ald film stacks |