Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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02/04/1997 | US5600177 Semiconductor device having an electrically conductive layer including a polycrystalline layer containing an impurity and a metallic silicide layer |
02/04/1997 | US5600176 Integrated voltage divider |
02/04/1997 | US5600171 Mask ROM device |
02/04/1997 | US5600170 Interconnection structure of semiconductor device |
02/04/1997 | US5600169 Minimum charge FET fabricated on an ultrathin silicon on sapphire wafer |
02/04/1997 | US5600168 Semiconductor element and method for fabricating the same |
02/04/1997 | US5600167 Semiconductor device having low contact resistance |
02/04/1997 | US5600166 EPROM cell with a readily scalable interpoly dielectric |
02/04/1997 | US5600165 Semiconductor device with antireflection film |
02/04/1997 | US5600164 Non-volatile semiconductor memory device |
02/04/1997 | US5600163 Semiconductor element and semiconductor memory device using the same |
02/04/1997 | US5600162 DRAM-type memory cell arrangement on a substrate |
02/04/1997 | US5600161 Sub-micron diffusion area isolation with Si-SEG for a DRAM array |
02/04/1997 | US5600158 Semiconductor light emitting device with current spreading layer |
02/04/1997 | US5600154 Thin film transistor with particular nitrogen concentration |
02/04/1997 | US5600153 Conductive polysilicon lines and thin film transistors |
02/04/1997 | US5600151 Ultraviolet radiation transparent |
02/04/1997 | US5600150 Method for obtaining three-dimensional data from semiconductor devices in a row/column array and control of manufacturing of same with data to eliminate manufacturing errors |
02/04/1997 | US5599748 Method of passivating group III-V surfaces |
02/04/1997 | US5599746 Method to eliminate polycide peeling at wafer edge using extended scribe lines |
02/04/1997 | US5599745 Method to provide a void between adjacent conducting lines in a semiconductor device |
02/04/1997 | US5599744 Method of forming a microcircuit via interconnect |
02/04/1997 | US5599743 Method of manufacturing a semiconductor device |
02/04/1997 | US5599742 Interconnection forming method |
02/04/1997 | US5599741 Method for making semiconductor device with metal deposited on electron donating surface of gate electrode |
02/04/1997 | US5599740 Deposit-etch-deposit ozone/teos insulator layer method |
02/04/1997 | US5599739 Barrier layer treatments for tungsten plug |
02/04/1997 | US5599738 Methods of fabrication of submicron features in semiconductor devices |
02/04/1997 | US5599737 Forming a blanket of conductive material over dielectric substrate, performing blanket etchback procedure to reduce thickness, and patterning |
02/04/1997 | US5599736 Fabrication method for polysilicon contact plugs |
02/04/1997 | US5599735 Exposure of semiconductor surface to dopant gas mixture containing a halide of a dopant, and a silicon halide etch suppressant |
02/04/1997 | US5599734 Method for fabricating MOS transistor utilizing doped disposable layer |
02/04/1997 | US5599733 Method using cadmium-rich CdTe for lowering the metal vacancy concentrations of HgCdTe surfaces |
02/04/1997 | US5599731 Selectively doping exposed polysilicon film with nitrogen to form oxidation resistant areas at pattern edges prior to thermal oxidation |
02/04/1997 | US5599730 Poly-buffered LOCOS |
02/04/1997 | US5599729 Static random access memory cell and method of fabricating the same |
02/04/1997 | US5599728 Method of fabricating a self-aligned high speed MOSFET device |
02/04/1997 | US5599727 Method for producing a floating gate memory device including implanting ions through an oxidized portion of the silicon film from which the floating gate is formed |
02/04/1997 | US5599726 Method of making a conductive spacer lightly doped drain (LDD) for hot carrier effect (HCE) control |
02/04/1997 | US5599725 Method for fabricating a MOS transistor with two-layer inverse-T tungsten gate structure |
02/04/1997 | US5599724 FET having part of active region formed in semiconductor layer in through hole formed in gate electrode and method for manufacturing the same |
02/04/1997 | US5599723 Method for manufacturing bipolar transistor having reduced base-collector parasitic capacitance |
02/04/1997 | US5599722 SOI semiconductor device and method of producing same wherein warpage is reduced in the semiconductor device |
02/04/1997 | US5599655 Crosslinking by radiation a coated copolymer of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane, 3,3',4,4'-tetracarboxy-benzophenone and 2,3,4,5-p-phenylenediamine; |
02/04/1997 | US5599654 Process for forming patterned layer of fluorinated resin and devices containing same |
02/04/1997 | US5599582 Adhesive layer in multi-level packaging and organic material as a metal diffusion barrier |
02/04/1997 | US5599465 Masking portion of magnesium oxide substrate, then immersion in aqueous solution of phosphoric and sulfuric acids (having controlled ratios) yields step at boundary between masked and unmasked regions |
02/04/1997 | US5599464 Formation of atomic scale vertical features for topographic instrument calibration |
02/04/1997 | US5599438 Controlling electricity |
02/04/1997 | US5599425 Vapor cleaning, (rapid) thermal oxidation, polishing |
02/04/1997 | US5599424 Method of manufacturing semiconductor devices |
02/04/1997 | US5599414 Method of manufacturing multilayered ceramic structures |
02/04/1997 | US5599413 Method of producing a ceramic electronic device |
02/04/1997 | US5599397 Semiconductor wafer process chamber with suspector back coating |
02/04/1997 | US5599394 Apparatus for delivering a silica film forming solution |
02/04/1997 | US5599390 Apparatus for crystal pulling |
02/04/1997 | US5599389 Epitaxial growth of semiinsulating single crystal layer on doped semiconductor substrate, forming isolated active elements in undoped layer |
02/04/1997 | US5599159 Pellet conveying device |
02/04/1997 | US5598775 Centering lid seal clip apparatus |
02/04/1997 | CA2111367C Semiconductor integrated circuit device |
02/04/1997 | CA2077359C X-ray mask and semiconductor device manufacturing method using the same |
01/30/1997 | WO1997003495A1 Electrostatic chuck assembly |
01/30/1997 | WO1997003482A1 Separable electrical connector assembly having a planar array of conductive protrusions |
01/30/1997 | WO1997003470A1 Process for self-aligned source for high density memory |
01/30/1997 | WO1997003469A1 Electrically erasable programmable rom memory cell array and a method of producing the same |
01/30/1997 | WO1997003468A1 Dielectric capacitor and process for preparing the same |
01/30/1997 | WO1997003465A1 Semiconductor pellet, method of its packaging, and bump electrode |
01/30/1997 | WO1997003464A1 Integrated circuit contacts with secured stringers |
01/30/1997 | WO1997003463A1 Integrated circuit arrangement with at least two components insulated from one another and a process for producing the said circuit arrangement |
01/30/1997 | WO1997003462A1 Process for manufacturing an integrated cmos circuit |
01/30/1997 | WO1997003461A1 Semiconductor wafer processing adhesives and tapes |
01/30/1997 | WO1997003460A1 Bare chip mounted board, method of manufacturing the board, and method of forming electrode of bare chip |
01/30/1997 | WO1997003459A1 On-chip vacuum package technology for micromechanical devices |
01/30/1997 | WO1997003458A1 Method of manufacturing semiconductor device |
01/30/1997 | WO1997003457A1 Support for wafer-shaped objects, in particular silicon wafers |
01/30/1997 | WO1997003456A1 Support for wafer-shaped objects, in particular silicon wafers |
01/30/1997 | WO1997003236A2 System and method for thermal processing of a semiconductor substrate |
01/30/1997 | WO1997003225A1 Programmable ultraclean electromagnetic substrate rotation apparatus and method for microelectronics manufacturing equipment |
01/30/1997 | WO1997003224A1 A plasma enhanced chemical processing reactor and method |
01/30/1997 | WO1997003222A1 Cassette support and rotation assembly |
01/30/1997 | WO1997003197A1 Novel secretion factors for gram-positive microorganisms, genes encoding them and methods of using it |
01/30/1997 | WO1997003175A1 Redox reagent-containing post-etch residue cleaning composition |
01/30/1997 | WO1997003131A1 Composition for forming ceramic substances and process for producing ceramic substances |
01/30/1997 | WO1997003005A1 Method and apparatus for vertical transfer of a semiconductor wafer cassette |
01/30/1997 | WO1997003004A1 Straight line wafer transfer system |
01/30/1997 | WO1997003003A1 Wafer transfer system having rotational capability |
01/30/1997 | WO1997003001A1 Sealable, transportable container having a breather assembly |
01/30/1997 | WO1997002958A1 Organic amine/hydrogen fluoride etchant composition and method |
01/30/1997 | WO1997002917A1 Highly efficient processing method based on high density radical reaction and using rotary electrode, apparatus therefor and rotating electrode used therefor |
01/30/1997 | WO1997002905A1 Method and apparatus for washing silicon ingot with water to remove particulate matter |
01/30/1997 | WO1997002733A2 Microwave/millimeter wave circuit structure with discrete flip-chip mounted elements, and method of fabricating the same |
01/30/1997 | WO1996036176A3 Image display apparatus with line number conversion |
01/30/1997 | WO1996036071A3 Method of manufacturing a semiconductor device suitable for surface mounting |
01/30/1997 | DE19628702A1 Flußmittelfreie Kontaktierung von Bauelementen Flux-contacting devices |
01/30/1997 | DE19540010A1 Anlage und Verfahren zur Halbleiterbauelementherstellung System and method for semiconductor device fabrication |
01/30/1997 | DE19527146A1 Verfahren zur Herstellung eines selbstjustierten Kontaktes und eines dotierten Bereichs A method for producing a self-aligned contact and a doped region |
01/30/1997 | CA2224774A1 Semiconductor wafer processing adhesives and tapes |
01/29/1997 | EP0756332A2 MOS capacitor of a semiconductor device |
01/29/1997 | EP0756330A2 Power semiconductor device with insulated trench gate and manufacturing method thereof |
01/29/1997 | EP0756329A1 Vertical PNP transistor and relative fabrication method |