| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/29/1997 | EP0756327A1 Semiconductor memory device with bit line contact areas and storage capacitor contact areas |
| 01/29/1997 | EP0756326A1 Capacitor for semiconductor device and method for producing the same |
| 01/29/1997 | EP0756325A2 Semiconductor device having a base |
| 01/29/1997 | EP0756324A2 Bump electrode for transistor and method for producing the same |
| 01/29/1997 | EP0756323A2 Substrate having an electrical conductor for an electronic component |
| 01/29/1997 | EP0756322A1 Semiconductor device with integrated heat sink |
| 01/29/1997 | EP0756321A1 Process for manufacturing complementary MOS transistors |
| 01/29/1997 | EP0756320A2 Semiconductor device and method for manufacturing the same |
| 01/29/1997 | EP0756319A2 Reduced stress isolation for SOI devices and a method for fabricating |
| 01/29/1997 | EP0756318A1 Method for real-time in-situ monitoring of a trench formation process |
| 01/29/1997 | EP0756317A2 MOS field effect transistor with improved pocket regions and method for fabricating the same |
| 01/29/1997 | EP0756316A1 Vacuum processing apparatus and semiconductor manufacturing line using the same |
| 01/29/1997 | EP0756315A1 A resist processing apparatus and a resist processing method |
| 01/29/1997 | EP0756314A2 Semiconductor wafer loading and unloading apparatus, and semiconductor wafer transport containers for use therewith |
| 01/29/1997 | EP0756309A1 Plasma systems for processing substrates |
| 01/29/1997 | EP0756284A2 High density two port memory cell |
| 01/29/1997 | EP0756207A2 Process for positioning of a mask relative to another mask or a workpiece and device for executing the process |
| 01/29/1997 | EP0756203A1 Radiation-sensitive composition |
| 01/29/1997 | EP0756164A2 Method for making diaphragm-based sensors and apparatus constructed therewith |
| 01/29/1997 | EP0756159A1 A method and apparatus for infrared pyrometer calibration in a thermal processing system |
| 01/29/1997 | EP0756024A2 Method for preparing molten silicon melt from polycrystalline silicon charge |
| 01/29/1997 | EP0755574A1 Semiconductor element with a passivated surface and method of producing it |
| 01/29/1997 | EP0755573A1 Electronic component and process for producing same |
| 01/29/1997 | EP0755572A1 Method for making an inverted-type thin-film transistor |
| 01/29/1997 | EP0755571A1 Process and device for chemically treating substrates |
| 01/29/1997 | EP0755568A1 Vacuum microelectronic device and methodology for fabricating same |
| 01/29/1997 | EP0614567B1 Nonvolatile random access memory device |
| 01/29/1997 | EP0474810B1 System for controlling crystal growth apparatus and melt replenishment system therefor |
| 01/29/1997 | CN1141510A Semiconductor device and process of fabrication thereof |
| 01/29/1997 | CN1141509A Fet with stable threshold voltage and method of mfg. the same |
| 01/29/1997 | CN1141508A Semiconductor memory device having hierarchical bit line structure |
| 01/29/1997 | CN1141507A Method for forming bumps on substrate |
| 01/29/1997 | CN1141506A Method of forming metal interconnects in semiconductor devices |
| 01/29/1997 | CN1141504A Method of mfg. semiconductor device and apparatus for same |
| 01/29/1997 | CN1141503A Method for producing semiconductor device |
| 01/29/1997 | CN1141502A Method of forming internallic insulating layers in semiconductor devices |
| 01/29/1997 | CN1141501A High speed ashing method |
| 01/29/1997 | CN1141500A Methods for forming contact in semiconductor device |
| 01/29/1997 | CN1141434A Contact structure of treatment device used for IC testing apparatus |
| 01/29/1997 | CN1141353A Sputtering apparatus for depositing materials on substrate |
| 01/28/1997 | US5598452 Method of evaluating a silicon single crystal |
| 01/28/1997 | US5598373 Semiconductor memory system |
| 01/28/1997 | US5598367 Trench EPROM |
| 01/28/1997 | US5598363 Semiconductor device having an improved reliability |
| 01/28/1997 | US5598347 Layout method for designing an integrated circuit device by using standard cells |
| 01/28/1997 | US5598341 Real-time in-line defect disposition and yield forecasting system |
| 01/28/1997 | US5598317 Laser patterned semiconductor capacitor |
| 01/28/1997 | US5598250 Prefabricated modified illumination apparatus for forming fine patterns in a semiconductor device |
| 01/28/1997 | US5598189 Bipolar integrated ink jet printhead driver |
| 01/28/1997 | US5598106 Semiconductor integrated circuit for preventing deterioration of the characteristics of an N-channel type transistor |
| 01/28/1997 | US5598096 Method and apparatus for testing an integrated circuit using controlled wirebonding and wirebonding removal |
| 01/28/1997 | US5598052 Vacuum microelectronic device and methodology for fabricating same |
| 01/28/1997 | US5598038 Resin encapsulated semiconductor device |
| 01/28/1997 | US5598036 Ball grid array having reduced mechanical stress |
| 01/28/1997 | US5598030 Semiconductor device having multilevel tab leads |
| 01/28/1997 | US5598029 Power supply wiring for semiconductor device |
| 01/28/1997 | US5598028 Highly-planar interlayer dielectric thin films in integrated circuits |
| 01/28/1997 | US5598027 Semiconductor device and method of fabricating the same |
| 01/28/1997 | US5598026 Low dielectric constant insulation layer for integrated circuit structure and method of making same |
| 01/28/1997 | US5598025 Semiconductor device comprises an impurity layer having boron ions in the form of clusters of icosahedron structure |
| 01/28/1997 | US5598023 Photoelectric converting apparatus |
| 01/28/1997 | US5598021 MOS structure with hot carrier reduction |
| 01/28/1997 | US5598020 Semiconductor integrated circuit device and method of manufacturing the same |
| 01/28/1997 | US5598019 Semiconductor device having trench isolation structure and method of manufacturing the same |
| 01/28/1997 | US5598015 Hetero-junction bipolar transistor and semiconductor devices using the same |
| 01/28/1997 | US5598013 Semiconductor device having a source-drain region of a load transistor that is formed by implanting an impurity using an insulation layer as a mask |
| 01/28/1997 | US5598011 Thin film transistor and method of making the same |
| 01/28/1997 | US5598010 Semiconductor integrated circuit device having dummy pattern effective against micro loading effect |
| 01/28/1997 | US5598009 Hot carrier injection test structure and testing technique for statistical evaluation |
| 01/28/1997 | US5598002 Electron beam apparatus |
| 01/28/1997 | US5597983 In an integrated circuit |
| 01/28/1997 | US5597768 Method of forming a Ga2 O3 dielectric layer |
| 01/28/1997 | US5597767 Separation of wafer into die with wafer-level processing |
| 01/28/1997 | US5597766 Method for detaching chips from a wafer |
| 01/28/1997 | US5597765 Method for making termination structure for power MOSFET |
| 01/28/1997 | US5597764 Integrated circuits |
| 01/28/1997 | US5597763 Method for manufacturing a semiconductor wiring structure including a self-aligned contact hole |
| 01/28/1997 | US5597762 Field-enhanced diffusion using optical activation |
| 01/28/1997 | US5597761 Semiconductor light emitting device and methods of manufacturing it |
| 01/28/1997 | US5597760 Process of fabricating semiconductor device having capacitor increased in capacitance by roughening surface of accumulating electrode |
| 01/28/1997 | US5597759 Method of fabricating a semiconductor integrated circuit device having a capacitor and a resistor |
| 01/28/1997 | US5597758 Method for forming an electrostatic discharge protection device |
| 01/28/1997 | US5597757 Method of manufacturing a semiconductor device including bipolar and MOS transistors |
| 01/28/1997 | US5597756 Process for fabricating a cup-shaped DRAM capacitor using a multi-layer partly-sacrificial stack |
| 01/28/1997 | US5597755 Method of manufacturing a stacked capacitor in a dram |
| 01/28/1997 | US5597754 Increased surface area for DRAM, storage node capacitors, using a novel polysilicon deposition and anneal process |
| 01/28/1997 | US5597753 CVD oxide coding method for ultra-high density mask read-only-memory (ROM) |
| 01/28/1997 | US5597752 Method for manufacturing LDD type semiconductor device with complete self-alignment |
| 01/28/1997 | US5597751 Single-side oxide sealed salicide process for EPROMs |
| 01/28/1997 | US5597750 Method of manufacturing a matrix of memory cells having control gates |
| 01/28/1997 | US5597749 Method of making nonvolatile memory cell with crystallized floating gate |
| 01/28/1997 | US5597748 Method of manufacturing NAND type EEPROM |
| 01/28/1997 | US5597747 Method of making inverted thin film transistor using backsick exposure and negative photoresist |
| 01/28/1997 | US5597746 Method of forming field effect transistors relative to a semiconductor substrate and field effect transistors produced according to the method |
| 01/28/1997 | US5597745 Method for forming TiN film and TiN film/thin TiSi2 film, and method for fabricating semiconductor element utilizing the same |
| 01/28/1997 | US5597744 Method of producing a silicon carbide semiconductor device |
| 01/28/1997 | US5597743 Method of manufacturing a field effect transistor with improved isolation between electrode |
| 01/28/1997 | US5597742 Semiconductor device and method |
| 01/28/1997 | US5597741 Process for forming a recrystallized layer and diffusing impurities |
| 01/28/1997 | US5597739 Semiconductors |