| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/15/1997 | EP0753796A1 Scanning exposure apparatus and device for manufacturing method using the same |
| 01/15/1997 | EP0753764A1 Improvements in or relating to semiconductor devices |
| 01/15/1997 | EP0753763A1 Improvements in or relating to semiconductor devices |
| 01/15/1997 | EP0753671A1 Method of manufacturing elements of floating, rigid microstructures and apparatus equipped with such elements |
| 01/15/1997 | EP0753600A1 Small size sputtering target and high vacuum sputtering apparatus using the same |
| 01/15/1997 | EP0753201A1 Sputtering target erosion profile control for collimated deposition |
| 01/15/1997 | EP0753193A1 Improvements in an apparatus and method of use of radiofrequency identification tags |
| 01/15/1997 | EP0753180A1 Method of manufacturing a chip card, and chip card thus produced |
| 01/15/1997 | EP0753178A1 Timing model and characterization system for logic simulation of integrated circuits which takes into account process, temperature and power supply variations |
| 01/15/1997 | EP0753101A1 Engine components including ceramic-metal composites |
| 01/15/1997 | EP0721514A4 Magnetically enhanced multiple capacitive plasma generation apparatus and related method |
| 01/15/1997 | EP0665814B1 Precursors and processes for making metal oxides |
| 01/15/1997 | EP0454837B1 Separation of diode array chips during fabrication thereof |
| 01/15/1997 | CN1140467A Cleaning agent and method |
| 01/15/1997 | CN1140389A Method for making electronic circuit |
| 01/15/1997 | CN1140337A Active matrix electro-optical device |
| 01/15/1997 | CN1140336A Semiconductor device and manufacturing method thereof |
| 01/15/1997 | CN1140335A Protecting diode for semiconductor device |
| 01/15/1997 | CN1140334A Semiconductor device which dissipates heat |
| 01/15/1997 | CN1140333A Method of manufacturing semiconductor device |
| 01/15/1997 | CN1140332A Method of forming tungsten plug in semiconductor device |
| 01/15/1997 | CN1140331A Cleaning method and system of semiconductor substrate and production method of cleaning liquid |
| 01/15/1997 | CN1140330A Method for forming impurity junction regions of semiconductor device |
| 01/15/1997 | CN1140317A Resistor trimming method |
| 01/14/1997 | USRE35423 Method and apparatus for performing automated circuit board solder quality inspections |
| 01/14/1997 | US5594693 Matrix device with redundancy fuses for integrated memory |
| 01/14/1997 | US5594692 Semiconductor integrated circuit |
| 01/14/1997 | US5594688 Nonvolatile semiconductor memory device and method of producing the same |
| 01/14/1997 | US5594684 Polysilicon programming memory cell |
| 01/14/1997 | US5594682 High density self-aligned stack in trench DRAM technology |
| 01/14/1997 | US5594587 Illumination device with allowable error amount of telecentricity on the surface of the object to be illuminated and exposure apparatus using the same |
| 01/14/1997 | US5594549 Position detecting method and projection exposure apparatus using the same |
| 01/14/1997 | US5594526 Optical integrator and projection exposure apparatus using the same |
| 01/14/1997 | US5594349 Dielecrtric breakdown prediction apparatus and method, and dielectric breakdown life-time prediction apparatus and method |
| 01/14/1997 | US5594330 Movement actuator/sensor systems |
| 01/14/1997 | US5594328 Passive probe employing cluster of charge monitors for determining simultaneous charging characteristics of wafer environment inside IC process equipment |
| 01/14/1997 | US5594281 Semiconductor apparatus having wiring structure of an integrated circuit in which a plurality of logic circuits of the same structure are arranged in the same direction |
| 01/14/1997 | US5594280 Method of forming a thin film and apparatus of forming a metal thin film utilizing temperature controlling means |
| 01/14/1997 | US5594279 Semiconductor device having shield wiring for noise suppression |
| 01/14/1997 | US5594275 J-leaded semiconductor package having a plurality of stacked ball grid array packages |
| 01/14/1997 | US5594274 Lead frame for use in a semiconductor device and method of manufacturing the semiconductor device using the same |
| 01/14/1997 | US5594273 Apparatus for performing wafer-level testing of integrated circuits where test pads lie within integrated circuit die but overly no active circuitry for improved yield |
| 01/14/1997 | US5594272 Bipolar transistor with base and emitter contact holes having shorter central portions |
| 01/14/1997 | US5594271 Load current detecting device including a multi-emitter bipolar transistor |
| 01/14/1997 | US5594270 Semiconductor memory device |
| 01/14/1997 | US5594269 Resistive load for integrated circuit devices |
| 01/14/1997 | US5594268 Method of manufacturing high performance bipolar transistors in a BICMOS process |
| 01/14/1997 | US5594266 Integrated circuit (IC) with a two-terminal diode device to protect metal-oxide-metal capacitors from ESD damage |
| 01/14/1997 | US5594264 LDD semiconductor device with peak impurity concentrations |
| 01/14/1997 | US5594262 Elevated temperature gallium arsenide field effect transistor with aluminum arsenide to aluminum gallium arsenide mole fractioned buffer layer |
| 01/14/1997 | US5594259 Semiconductor device and a method for producing the same |
| 01/14/1997 | US5594258 Semiconductor device with reticle specific implant verification indicator |
| 01/14/1997 | US5594247 Apparatus and method for depositing charge on a semiconductor wafer |
| 01/14/1997 | US5594098 Passing formaldehyde solution through ion exchange resin |
| 01/14/1997 | US5593928 Method of making a semiconductor device having floating source and drain regions |
| 01/14/1997 | US5593926 Method of manufacturing semiconductor device |
| 01/14/1997 | US5593925 Semiconductor device capable of preventing humidity invasion |
| 01/14/1997 | US5593924 Use of a capping layer to attain low titanium-silicide sheet resistance and uniform silicide thickness for sub-micron silicon and polysilicon lines |
| 01/14/1997 | US5593923 Method of fabricating semiconductor device having refractory metal silicide layer on impurity region using damage implant and single step anneal |
| 01/14/1997 | US5593922 Method for buried contact isolation in SRAM devices |
| 01/14/1997 | US5593921 Method of forming vias |
| 01/14/1997 | US5593920 Method for forming contact structures in integrated circuits |
| 01/14/1997 | US5593919 Process for forming a semiconductor device including conductive members |
| 01/14/1997 | US5593918 Techniques for forming superconductive lines |
| 01/14/1997 | US5593917 Method of making semiconductor components with electrochemical recovery of the substrate |
| 01/14/1997 | US5593916 Etch resistant polyether ether ketone resin |
| 01/14/1997 | US5593915 Method of manufacturing semiconductor device |
| 01/14/1997 | US5593914 Method for constructing ferroelectric capacitor-like structures on silicon dioxide surfaces |
| 01/14/1997 | US5593912 SOI trench DRAM cell for 256 MB DRAM and beyond |
| 01/14/1997 | US5593910 Charge detection device, a method for producing the same, and a charge transfer and detection apparatus including such a charge detection device |
| 01/14/1997 | US5593909 Method for fabricating a MOS transistor having an offset resistance |
| 01/14/1997 | US5593908 Lateral resonant tunneling |
| 01/14/1997 | US5593907 Large tilt angle boron implant methodology for reducing subthreshold current in NMOS integrated circuit devices |
| 01/14/1997 | US5593906 Method of processing a polysilicon film on a single-crystal silicon substrate |
| 01/14/1997 | US5593905 Method of forming stacked barrier-diffusion source and etch stop for double polysilicon BJT with patterned base link |
| 01/14/1997 | US5593904 Method for manufacturing NAND type semiconductor memory device |
| 01/14/1997 | US5593815 Cleaving process in manufacturing a semiconductor laser |
| 01/14/1997 | US5593813 Method for forming submicroscopic patterns |
| 01/14/1997 | US5593812 Photoresist having increased sensitivity and use thereof |
| 01/14/1997 | US5593799 Phase shifting, diffraction grating |
| 01/14/1997 | US5593774 Polyimide base film; thermoplastic or thermosetting adhesive layers; tear strength; semiconductors |
| 01/14/1997 | US5593761 Electron beam shaping mask for an electron beam system with pattern writing capability |
| 01/14/1997 | US5593741 Method and apparatus for forming silicon oxide film by chemical vapor deposition |
| 01/14/1997 | US5593725 Anti-reflective layer and method for manufacturing semiconductor device using the same |
| 01/14/1997 | US5593722 Method of producing thick multi-layer substrates |
| 01/14/1997 | US5593601 Etching recipe for the CrSi film |
| 01/14/1997 | US5593551 Magnetron sputtering source for low pressure operation |
| 01/14/1997 | US5593538 Method for etching a dielectric layer on a semiconductor |
| 01/14/1997 | US5593537 Apparatus for processing semiconductor wafers |
| 01/14/1997 | US5593511 Method of nitridization of titanium thin films |
| 01/14/1997 | US5593505 Method for cleaning semiconductor wafers with sonic energy and passing through a gas-liquid-interface |
| 01/14/1997 | US5593498 Apparatus for rotating a crucible of a crystal pulling machine |
| 01/14/1997 | US5593497 Method for forming a deposited film |
| 01/14/1997 | US5593494 Precision controlled precipitation of oxygen in silicon |
| 01/14/1997 | US5593465 Mounting for carrier bodies in an apparatus for the deposition of semiconductor material |
| 01/14/1997 | US5593344 Wafer polishing machine with fluid bearings and drive systems |
| 01/14/1997 | US5593083 Castellated nozzle and method of use therof |
| 01/14/1997 | US5592734 Method and apparatus for framing a film mounted integrated circuit |
| 01/14/1997 | CA2149929C Devices using metallized magnetic substrates |
| 01/14/1997 | CA2068816C Apparatus and method for assembling circuit structures |