| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 01/28/1997 | US5597738 Method for forming isolated CMOS structures on SOI structures |
| 01/28/1997 | US5597670 Exposure method and apparatus |
| 01/28/1997 | US5597669 Dustproof protection of a photomask |
| 01/28/1997 | US5597667 Photomask and photomask blank |
| 01/28/1997 | US5597666 Method for fabrication of a mask |
| 01/28/1997 | US5597644 Glass glaze |
| 01/28/1997 | US5597643 Multi-tier laminate substrate with internal heat spreader |
| 01/28/1997 | US5597623 Vapor deposition of films on substrate |
| 01/28/1997 | US5597610 Method for coating electric component with resin |
| 01/28/1997 | US5597470 Method for making a flexible lead for a microelectronic device |
| 01/28/1997 | US5597469 Process for selective application of solder to circuit packages |
| 01/28/1997 | US5597458 Method for producing alloy films using cold sputter deposition process |
| 01/28/1997 | US5597444 Exposing to a plasma comprising a mixture of a reduced carbon compound and a non-chlorofluorocarbon halogen compound; reducing toxicity and carcinogenic effects |
| 01/28/1997 | US5597443 Method and system for chemical mechanical polishing of semiconductor wafer |
| 01/28/1997 | US5597442 Determining endpoint for polishing semiconductor wafer surface |
| 01/28/1997 | US5597439 Process gas inlet and distribution passages |
| 01/28/1997 | US5597411 Method of forming a single crystal material |
| 01/28/1997 | US5597410 Method to make a SOI wafer for IC manufacturing |
| 01/28/1997 | US5597346 Method and apparatus for holding a semiconductor wafer during a chemical mechanical polish (CMP) process |
| 01/28/1997 | US5597341 Semiconductor planarizing apparatus |
| 01/28/1997 | US5597110 Method for forming a solder bump by solder-jetting or the like |
| 01/28/1997 | CA2052543C Ion implantation and surface processing method and apparatus |
| 01/23/1997 | WO1997002609A1 Photodetector involving a mosfet having a floating gate |
| 01/23/1997 | WO1997002605A1 Method of fabricating a fast programming flash e2prom cell |
| 01/23/1997 | WO1997002604A1 Semiconductor device and its manufacture |
| 01/23/1997 | WO1997002603A1 Thyristor with a layer of charge carriers having a reduced lifetime |
| 01/23/1997 | WO1997002601A1 Process for packaging a pressure-sensitive electronic circuit in a protective housing sealed all around |
| 01/23/1997 | WO1997002599A1 Method of producing a read-only storage cell arrangement |
| 01/23/1997 | WO1997002598A1 Semi-insulating wafer |
| 01/23/1997 | WO1997002597A1 A method of manufacturing a monolithic linear optocoupler |
| 01/23/1997 | WO1997002596A1 Electronic component and method of production thereof |
| 01/23/1997 | WO1997002595A1 Semiconductor device and its manufacture |
| 01/23/1997 | WO1997002594A1 Low damage source and drain doping technique |
| 01/23/1997 | WO1997002593A1 An improved method and apparatus for detecting optimal endpoints in plasma etch processes |
| 01/23/1997 | WO1997002589A1 Power segmented electrode |
| 01/23/1997 | WO1997002588A1 Low inductance large area coil for an inductively coupled plasma source |
| 01/23/1997 | WO1997002466A1 Optical distance sensor |
| 01/23/1997 | WO1997002199A1 Door drive mechanisms for substrate carrier and load lock |
| 01/23/1997 | WO1997002195A1 Load arm for load lock |
| 01/23/1997 | WO1997002184A1 Smif port interface adaptor |
| 01/23/1997 | DE19629286A1 Polishing pad device for chemical mechanical polishing of semiconductor wafer |
| 01/23/1997 | DE19629251A1 Method for manufacturing specimens for analysing semi-conductor wafers |
| 01/23/1997 | DE19629250A1 Method for manufacturing test specimens for analysing semi-conductor wafers |
| 01/23/1997 | DE19629249A1 Three=dimensional defect analysis method for semiconductor wafer |
| 01/23/1997 | DE19629088A1 Vertical silicon carbide field effect transistor for use in extreme environment |
| 01/23/1997 | DE19628376A1 Integrated circuit device, e.g. chip scale package |
| 01/23/1997 | DE19628264A1 Formation of finely-detailed printed circuits esp. for semiconductor component mounting plates |
| 01/23/1997 | DE19626026A1 Rückbearbeitungsverfahren zum Analysieren eines Fehlverhaltens in einer Halbleitervorrichtung Back processing method for analyzing a misconduct in a semiconductor device |
| 01/23/1997 | DE19606226A1 Vapour phase esp. MOCVD growth appts. |
| 01/23/1997 | DE19530858C1 Suction plate for handling semiconductor wafer |
| 01/23/1997 | DE19526902A1 Monolithisch integrierte planare Halbleiteranordnung Monolithically integrated planar semiconductor device |
| 01/23/1997 | DE19526734A1 Optische Struktur und Verfahren zu deren Herstellung Optical structure and process for their preparation |
| 01/23/1997 | DE19526015A1 Thin-film characterisation method for esp. hydrogen content in semiconductor prodn. |
| 01/23/1997 | DE19526012A1 Elektrisch lösch- und programmierbare nicht-flüchtige Speicherzelle Electrically erasable and programmable non-volatile memory cell |
| 01/23/1997 | CA2226015A1 Method of fabricating a fast programming flash e2prom cell |
| 01/23/1997 | CA2225926A1 Low damage source and drain doping technique |
| 01/23/1997 | CA2225751A1 A method of manufacturing a monolithic linear optocoupler |
| 01/22/1997 | EP0755078A1 Metal semiconductor contact |
| 01/22/1997 | EP0755077A2 High power MOS guided devices and methods of manufacturing them |
| 01/22/1997 | EP0755076A2 Vertical MOS semiconductor with recessed gate and method of manufacturing the same |
| 01/22/1997 | EP0755075A2 A tape carrier package |
| 01/22/1997 | EP0755073A1 Method of producing semiconductor wells of different doping level |
| 01/22/1997 | EP0755072A1 CMOS circuit with field plate and method of production |
| 01/22/1997 | EP0755071A2 Semiconductor probe card device with a ball-bump |
| 01/22/1997 | EP0755070A2 A semiconductor device and its manufacturing method |
| 01/22/1997 | EP0755069A1 Method of making In-containing III/V semiconductor devices |
| 01/22/1997 | EP0755068A2 Semiconductor substrate and process for production thereof |
| 01/22/1997 | EP0755067A1 Method of fabrication for sublithographic etching masks |
| 01/22/1997 | EP0755066A1 Electrostatic chuck |
| 01/22/1997 | EP0754975A2 Process of reducing trace levels of metal impurities from resist components |
| 01/22/1997 | EP0754953A1 Method of manufacturing a structure with an usable layer, which is kept at a distance from a substrate by limit stops, and method for disjoining such a layer |
| 01/22/1997 | EP0754932A2 Optical film thickness measurement method, film formation method, and semiconductor laser fabrication method |
| 01/22/1997 | EP0754785A1 Method of manufacturing semiconductor mirror wafers |
| 01/22/1997 | EP0754776A2 Method of producing dielectric thin film element |
| 01/22/1997 | EP0754525A1 Method of and apparatus for dressing polishing cloth |
| 01/22/1997 | EP0754351A1 Integrated circuits with borderless vias |
| 01/22/1997 | EP0754350A1 Cavity filled metal electronic package |
| 01/22/1997 | EP0754349A1 Semiconductor devices and methods |
| 01/22/1997 | EP0754289A1 Cantilever deflection sensor and use thereof |
| 01/22/1997 | EP0754248A1 An improved module in an integrated delivery system for chemical vapors from liquid sources |
| 01/22/1997 | EP0721643A4 Spacer flash cell process |
| 01/22/1997 | EP0662222B1 Positive-working photoresist composition |
| 01/22/1997 | EP0656149A4 Improved back-side hydrogenation technique for defect passivation in silicon solar cells. |
| 01/22/1997 | EP0566591B1 Semiconductor device |
| 01/22/1997 | EP0422250B1 Semiconductor device and method of producing the same |
| 01/22/1997 | CN1141078A Self-addressable self-assembling microelectronic system and devices for molecular biological analysis and diagnostics |
| 01/22/1997 | CN1140902A Connection leads for electronic component |
| 01/22/1997 | CN1140901A Resin sealing type semiconductor device and method of making the same |
| 01/22/1997 | CN1140900A Monolithic high frequency integrated circuit structure and method of manufacturing the same |
| 01/22/1997 | CN1140899A Method for making semiconductor devices having electroplated leads |
| 01/22/1997 | CN1140898A Method of forming sog film in semiconductor device |
| 01/22/1997 | CN1140897A Method for forming cylindrical stacked capacitor in semiconductor device |
| 01/22/1997 | CN1140832A Optical film thickness measurement method, film formation method, and semiconductor laser fabrication method |
| 01/21/1997 | US5596618 Exposure apparatus and device manufacturing method using the same |
| 01/21/1997 | US5596585 Performance driven BIST technique |
| 01/21/1997 | US5596544 Very large scale integrated planar read only memory |
| 01/21/1997 | US5596542 Semiconductor memory device having dual word line configuration |
| 01/21/1997 | US5596541 Synchronous dynamic random access memory |
| 01/21/1997 | US5596535 Semiconductor storage device |
| 01/21/1997 | US5596529 Nonvolatile semiconductor memory device |