| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/22/1998 | EP0837503A2 Reference plane metallization on an integrated circuit |
| 04/22/1998 | EP0837501A2 Method of manufacturing an isolation region in a SOI substrate |
| 04/22/1998 | EP0837500A2 Apparatus and method for actively controlling the DC potential of a cathode pedestal |
| 04/22/1998 | EP0837499A1 Semiconductor DRAM device having monitor element for monitoring capacitance |
| 04/22/1998 | EP0837498A1 Semiconductor device and its manufacture |
| 04/22/1998 | EP0837497A2 Method for etching transistor gates using a hardmask |
| 04/22/1998 | EP0837496A2 Reduction of undesired moisture retention in dielectric films to avoid subsequent H2 out-diffusion |
| 04/22/1998 | EP0837494A2 Method and apparatus for priority based scheduling of wafer processing within a multiple chamber semiconductor wafer processing tool |
| 04/22/1998 | EP0837493A2 Cleaning apparatus |
| 04/22/1998 | EP0837490A2 A method to eliminate coil sputtering in an inductively coupled plasma (ICP) source |
| 04/22/1998 | EP0837489A2 Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna |
| 04/22/1998 | EP0837474A2 Memory cells matrix for a semiconductor integrated microcontroller |
| 04/22/1998 | EP0837408A2 Simulation method of sputtering |
| 04/22/1998 | EP0837371A2 Line width insensitive wafer target detection |
| 04/22/1998 | EP0837365A1 Membrane mask structure, fabrication and use |
| 04/22/1998 | EP0837335A1 Method and apparatus for temperature control of a device during testing |
| 04/22/1998 | EP0837160A1 Crystal pulling method |
| 04/22/1998 | EP0837159A1 Process and apparatus for controlling the oxygen content in silicon wafers heavily doped with antimony or arsenic |
| 04/22/1998 | EP0837155A1 Forming TiN thin films using remote activated species generation |
| 04/22/1998 | EP0837115A1 Slicing slurry and method for cutting wafers from a crystal |
| 04/22/1998 | EP0836895A2 Residue removal by supercritical fluids |
| 04/22/1998 | EP0836749A1 Thyristor with a layer of charge carriers having a reduced lifetime |
| 04/22/1998 | EP0836748A1 Insulating film for use in semiconductor device |
| 04/22/1998 | EP0836747A1 Method of producing a read-only storage cell arrangement |
| 04/22/1998 | EP0836746A1 Removal rate behavior of spin-on dielectrics with chemical mechanical polish |
| 04/22/1998 | EP0836745A1 An improved method and apparatus for detecting optimal endpoints in plasma etch processes |
| 04/22/1998 | EP0836577A1 Load arm for load lock |
| 04/22/1998 | EP0753101A4 Engine components including ceramic-metal composites |
| 04/22/1998 | EP0740859A4 Electrostatic discharge circuit for high speed, high voltage circuitry |
| 04/22/1998 | EP0730787B1 Electrical interconnects |
| 04/22/1998 | EP0727045A4 Self-addressable self-assembling microelectronic systems and devices for molecular biological analysis and diagnostics |
| 04/22/1998 | CN1179696A Method of and apparatus for mounting electronic parts on board |
| 04/22/1998 | CN1179629A Fabrication process of solar cell |
| 04/22/1998 | CN1179627A Complementary bipolar transistors and manufacturing method thereof |
| 04/22/1998 | CN1179626A Improved surface-mount high power semiconductor package and method of manufacture |
| 04/22/1998 | CN1179625A Semiconductor element, semiconductor element fabricating methd, semiconductor device, and semiconductor device fabricating method |
| 04/22/1998 | CN1179624A Method of processing workpiece |
| 04/22/1998 | CN1179623A Specific part searching method and device for memory LSI |
| 04/22/1998 | CN1179622A Apparatus for wire bonding |
| 04/22/1998 | CN1179621A Method for forming pattern |
| 04/21/1998 | US5742898 Tuning system with DC-DC converter |
| 04/21/1998 | US5742658 Apparatus and method for determining the elemental compositions and relative locations of particles on the surface of a semiconductor wafer |
| 04/21/1998 | US5742540 Semiconductor memory and layout/circuit information generating apparatus |
| 04/21/1998 | US5742487 IC carrier |
| 04/21/1998 | US5742472 Stacked capacitors for integrated circuit devices and related methods |
| 04/21/1998 | US5742465 Protection circuit for a CMOS integrated circuit |
| 04/21/1998 | US5742397 Control device of the position and slope of a target |
| 04/21/1998 | US5742395 Method for checking semiconductor wafers and apparatuses for carrying out the method |
| 04/21/1998 | US5742393 Optical position calibration system |
| 04/21/1998 | US5742386 Apparatus for detecting foreign matter on a substrate, and an exposure apparatus including the same |
| 04/21/1998 | US5742376 Projection exposure apparatus and projection exposure method |
| 04/21/1998 | US5742365 Liquid crystal display device and method for manufacturing the same in which a light shielding layer is over the gate electrode or a gate electrode is in a trench |
| 04/21/1998 | US5742363 Liquid crystal display and method for fabricating the same in which the gate electrode is formed from two layers having differing widths |
| 04/21/1998 | US5742195 Semiconductor integrated circuit with MOS Transistors compensated of characteristic and performance deviations and deviation compensation system therein |
| 04/21/1998 | US5742181 Programmable logic device |
| 04/21/1998 | US5742177 Method for testing a semiconductor device by measuring quiescent currents (IDDQ) at two different temperatures |
| 04/21/1998 | US5742176 Method of measuring a Fe-B concentration of a silicon wafer |
| 04/21/1998 | US5742175 Method of evaluating a density of oxygen-precipitation defects in a silicon wafer |
| 04/21/1998 | US5742158 IC test handler having a planet rotating mechanism for cooling or heating ICs |
| 04/21/1998 | US5742100 Electronic component |
| 04/21/1998 | US5742098 Semiconductor component with plastic sheath and method for producing the same |
| 04/21/1998 | US5742095 Method of fabricating planar regions in an integrated circuit |
| 04/21/1998 | US5742090 Narrow width trenches for field isolation in integrated circuits |
| 04/21/1998 | US5742088 Process having high tolerance to buried contact mask misalignment by using a PSG spacer |
| 04/21/1998 | US5742084 Punchthrough-triggered ESD protection circuit through gate-coupling |
| 04/21/1998 | US5742082 Stable FET with shielding region in the substrate |
| 04/21/1998 | US5742081 Charge transfer image pickup device |
| 04/21/1998 | US5742078 Integrated circuit SRAM cell layouts |
| 04/21/1998 | US5742076 Silicon carbide switching devices having near ideal breakdown voltage capability and ultralow on-state resistance |
| 04/21/1998 | US5742075 Amorphous silicon on insulator VLSI circuit structures |
| 04/21/1998 | US5742074 Thin film transistor matrix device and method for fabricating the same |
| 04/21/1998 | US5742067 Exposure method and apparatus therefor |
| 04/21/1998 | US5742065 Heater for membrane mask in an electron-beam lithography system |
| 04/21/1998 | US5742062 Arrangement for masked beam lithography by means of electrically charged particles |
| 04/21/1998 | US5742048 Sucking failure detecting device |
| 04/21/1998 | US5742021 High thermal conductivity substrate and the method of brazing a cap thereto |
| 04/21/1998 | US5742007 Electronic device package and method for forming the same |
| 04/21/1998 | US5741988 Lead frame detection apparatus |
| 04/21/1998 | US5741985 Electronic assembly pallet |
| 04/21/1998 | US5741742 Formation of aluminum-alloy pattern |
| 04/21/1998 | US5741741 Method for making planar metal interconnections and metal plugs on semiconductor substrates |
| 04/21/1998 | US5741740 Shallow trench isolation (STI) method employing gap filling silicon oxide dielectric layer |
| 04/21/1998 | US5741739 Manufacturing method of a charge storage electrode by using cylindrical oxide patterns |
| 04/21/1998 | US5741738 Method of making corner protected shallow trench field effect transistor |
| 04/21/1998 | US5741737 MOS transistor with ramped gate oxide thickness and method for making same |
| 04/21/1998 | US5741736 Process for forming a transistor with a nonuniformly doped channel |
| 04/21/1998 | US5741735 Local ground and VCC connection in an SRAM cell |
| 04/21/1998 | US5741734 Capacitor structure for semiconductor device and method of manufacturing the same |
| 04/21/1998 | US5741733 Method for the production of a three-dimensional circuit arrangement |
| 04/21/1998 | US5741732 Method for detecting implantation mask misalignment |
| 04/21/1998 | US5741731 Semiconductor device wired with fuse |
| 04/21/1998 | US5741728 Method for manufacturing charge-coupled device with polygates having the same resistances |
| 04/21/1998 | US5741727 Circuit modification and repair using a low resistance conducting metal bridge and a focused ion beam |
| 04/21/1998 | US5741725 Fabrication process for semiconductor device having MOS type field effect transistor |
| 04/21/1998 | US5741724 Buffer layers |
| 04/21/1998 | US5741723 Dielectrically isolated semiconductor device and a method for its manufacture |
| 04/21/1998 | US5741722 Method for manufacturing DRAM device using high dielectric constant |
| 04/21/1998 | US5741721 Method of forming capacitors and interconnect lines |
| 04/21/1998 | US5741720 Method of programming an improved metal-to-metal via-type antifuse |
| 04/21/1998 | US5741719 Nonvolatile memory device and method of manufacturing the same |