Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/1998
05/06/1998EP0840133A2 Probe card integrated with dummy components equivalent to parasitic components coupled to bare chip sealed in package
05/06/1998EP0839930A1 Apparatus for vacuum line cleaning in substrate processing equipment
05/06/1998EP0839929A1 Method and apparatus for minimizing deposition in an exhaust line
05/06/1998EP0839927A2 Method of forming films comprising TiN and Al
05/06/1998EP0839926A1 Sputtering processes and apparatus
05/06/1998EP0839925A2 Deposition of a thin film on a substrate using a multi-beam source
05/06/1998EP0839817A2 Method for purifying mono-alkyl-arsines or mono-alkyl-phosphines
05/06/1998EP0839597A1 Method of cleaving a brittle material using a point heat source for providing a thermal stress
05/06/1998EP0839586A2 A cleaning apparatus and a cleaning method
05/06/1998EP0839404A1 Electrostatic chuck assembly
05/06/1998EP0839391A1 Method and apparatus for monolithic optoelectronic integrated circuit using selective epitaxy
05/06/1998EP0839390A1 Electrically erasable and programmable non-volatile storage location
05/06/1998EP0839389A1 Integrated circuit
05/06/1998EP0839387A1 Method for forming high resistance resistors for limiting cathode current in field emission displays
05/06/1998EP0839386A1 Method of producing an mos transistor
05/06/1998EP0839385A1 Docking and environmental purging system for integrated circuit wafer transport assemblies
05/06/1998EP0839359A1 Method and apparatus for cycle time costing
05/06/1998EP0839323A1 Microelectronic spring contact elements
05/06/1998EP0839322A1 Microelectronic contact structure and method of making same
05/06/1998EP0839321A1 Contact tip structures for microelectronic interconnection elements and methods of making same
05/06/1998EP0839217A1 A plasma enhanced chemical processing reactor and method
05/06/1998EP0818055A4 Self-alignment technique for semiconductor devices
05/06/1998EP0809814A4 Arbitrarily wide lens array with an image field to span the width of a substrate
05/06/1998EP0752157A4 Group iv semiconductor thin films formed at low temperature using nanocrystal precursors
05/06/1998EP0715763B1 Process of manufacturing SiCr thin film resistors having improved temperature coefficient of resistance and sheet resistance
05/06/1998CN2281000Y Hand-driven plastering-machine plumb plate ensuring verticality
05/06/1998CN1180933A Integrated circuit and fabricating method and evaluating method of integrated circuit
05/06/1998CN1180931A Method for forming field region of semiconductor device
05/06/1998CN1180930A Decision method for semiconductor integrated circuit whether or not qualified and semiconductor integrated circuit
05/06/1998CN1180929A Semiconductor device and its wire welding method and apparatus
05/06/1998CN1180928A Sealing method for power semiconductor module tube core
05/06/1998CN1180926A Method of depositing films on semiconductor wafers using partial deposition and reloading techniques
05/06/1998CN1180925A Semiconductor device including insulation film and fabrication method thereof
05/06/1998CN1180924A Method of forming power semiconductor devices with controllable integrated buffer
05/06/1998CN1180849A Radiation sensitve composition
05/06/1998CN1180848A Novel photoresist copolymer
05/06/1998CN1180726A Sawing suspension and method for cutting wafers from crystal
05/05/1998USRE35785 Low-pressure chemical vapor deposition process for depositing high-density highly-conformal, titanium nitride films of low bulk resistivity
05/05/1998US5748872 Direct replacement cell fault tolerant architecture
05/05/1998US5748827 Two-stage kinematic mount
05/05/1998US5748641 Test circuit of semiconductor memory device having data scramble function
05/05/1998US5748550 Multiple power line arrangement for a semiconductor memory device
05/05/1998US5748532 Semiconductor nonvolatile memory device and computer system using the same
05/05/1998US5748528 EEPROM memory device with simultaneous read and write sector capabilities
05/05/1998US5748523 Integrated circuit magnetic memory element having a magnetizable member and at least two conductive winding
05/05/1998US5748521 Metal plug capacitor structures for integrated circuit devices and related methods
05/05/1998US5748519 Method of selecting a memory cell in a magnetic random access memory device
05/05/1998US5748470 Semiconductor processing backup system
05/05/1998US5748436 Ceramic electrostatic chuck and method
05/05/1998US5748435 Apparatus for controlling backside gas pressure beneath a semiconductor wafer
05/05/1998US5748434 Shield for an electrostatic chuck
05/05/1998US5748320 Wiring pattern line width measuring apparatus
05/05/1998US5748319 Method for sensing complete removal of oxide layer from substrate by thermal etching with real time
05/05/1998US5748305 Method and apparatus for particle inspection
05/05/1998US5748297 Endpoint detecting apparatus in a plasma etching system
05/05/1998US5748296 Method and device for in situ quantification, by reflectometry, of the morphology of a localized region during etching of the surface layer of a thin-film structure
05/05/1998US5748032 Charge pumping circuit for generating a high output voltage
05/05/1998US5748029 MOS transistor switching circuit without body effect
05/05/1998US5748006 High-frequency-transmission printed wiring board, probe card, and probe apparatus
05/05/1998US5747999 Feed control element used in substrate inspection and method and apparatus for inspecting substrates
05/05/1998US5747994 Board exchange mechanism for semiconductor test system
05/05/1998US5747993 Movement actuator/sensor systems
05/05/1998US5747936 Ion implantation apparatus with improved post mass selection deceleration
05/05/1998US5747935 Method and apparatus for stabilizing switch-mode powered RF plasma processing
05/05/1998US5747917 Double-walled mircrowave plasma based applicator
05/05/1998US5747881 Semiconductor device, method of fabricating the same and copper leads
05/05/1998US5747880 Interconnect structure with an integrated low density dielectric
05/05/1998US5747879 Interface between titanium and aluminum-alloy in metal stack for integrated circuit
05/05/1998US5747878 Ohmic electrode, its fabrication method and semiconductor device
05/05/1998US5747872 Fast power diode
05/05/1998US5747871 Bipolar transistor having a self-aligned base electrode and method for manufacturing the same
05/05/1998US5747869 Reduced pitch laser redundancy fuse bank structure
05/05/1998US5747867 Integrated circuit structure with interconnect formed along walls of silicon island
05/05/1998US5747866 Application of thin crystalline Si3 N4 liners in shallow trench isolation (STI) structures
05/05/1998US5747856 Vertical channel masked ROM memory cell with epitaxy
05/05/1998US5747855 CMOS integrated circuitry with Halo and LDD regions
05/05/1998US5747854 Semiconductor device and manufacturing method thereof
05/05/1998US5747852 LDD MOS transistor with improved uniformity and controllability of alignment
05/05/1998US5747851 Semiconductor device with reduced breakdown voltage between the gate electrode and semiconductor surface
05/05/1998US5747850 Extended drain resurf lateral DMOS devices
05/05/1998US5747849 Nonvolatile memory device having buried data lines and floating gate electrode on buried data lines
05/05/1998US5747848 Nonvolatile memory devices including arrays of discrete floating gate isolation regions
05/05/1998US5747847 Semiconductor integrated circuit device, method for manufacturing the same, and logical circuit
05/05/1998US5747846 Programmable non-volatile memory cell
05/05/1998US5747845 Semiconductor memory device with memory cells each having transistor and capacitor and method of making the same
05/05/1998US5747844 Dynamic semiconductor memory device with higher density bit line/word line layout
05/05/1998US5747843 Semiconductor memory device
05/05/1998US5747842 Epitaxial overgrowth method and devices
05/05/1998US5747841 Circuit arrangement, and junction field effect transistor suitable for use in such a circuit arrangement
05/05/1998US5747838 Ultra-low phase noise GaAs MOSFETs
05/05/1998US5747837 Semiconductor device having input protective function
05/05/1998US5747836 Semiconductor integrated circuit provided with thyristor
05/05/1998US5747834 Adjustable Bipolar SCR holding voltage for ESD protection circuits in high speed Bipolar/BiCMOS circuits
05/05/1998US5747832 Light-emitting gallium nitride-based compound semiconductor device
05/05/1998US5747831 SIC field-effect transistor array with ring type trenches and method of producing them
05/05/1998US5747830 Semiconductor display device with a hydrogen supply and hydrogen diffusion barrier layers
05/05/1998US5747829 Dielectric isolated high voltage semiconductor device
05/05/1998US5747828 Semiconductor device with increased distance between channel edges and a gate electrode
05/05/1998US5747819 Charged particle beam transfer device exhibiting low aberration
05/05/1998US5747816 Charged particle beam apparatus
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