Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/1998
05/12/1998US5750417 Method of manufacturing a device having a support bar with conductor tracks for electrically contacting a semiconductor element
05/12/1998US5750416 Method of forming a lateral field effect transistor having reduced drain-to-source on-resistance
05/12/1998US5750415 Low dielectric constant layers via immiscible sol-gel processing
05/12/1998US5750403 Method of forming multi-layer wiring utilizing hydrogen silsesquioxane resin
05/12/1998US5750316 Light exposure of a photoresist coated on an amorphous carbon film on the surface of a transparent film covering a light reflecting surface, the thicknesses of which provide a standing wave
05/12/1998US5750312 Process for fabricating a device
05/12/1998US5750294 Best focus determining method
05/12/1998US5750290 Forming an integrated circuit on a semiconductor wafer
05/12/1998US5750211 Process for depositing a SiOx film having reduced intrinsic stress and/or reduced hydrogen content
05/12/1998US5750208 Method for plasma downstream processing
05/12/1998US5750199 Apparatus and method for mounting soldering balls onto surfaces of electronic components
05/12/1998US5750194 Process for producing a metal paste
05/12/1998US5750154 Resin sealing/molding apparatus for electronic parts
05/12/1998US5750153 Mold device and process for resin-packaging semiconductor devices
05/12/1998US5750031 Washing with deionized water; ion exchanging
05/12/1998US5750016 Process for plating palladium or palladium alloy onto iron-nickel alloy substrate
05/12/1998US5750012 Bombarding target with both low and high mass ions, packing target with both low and high mass implanted ions; high sputter rate
05/12/1998US5750000 Semiconductor member, and process for preparing same and semiconductor device formed by use of same
05/12/1998US5749999 Method for making a surface-mount technology plastic-package ball-grid array integrated circuit
05/12/1998US5749997 Composite bump tape automated bonding method and bonded structure
05/12/1998US5749988 Integrated circuits
05/12/1998US5749975 Adding chlorine; irradiation
05/12/1998US5749974 Method of chemical vapor deposition and reactor therefor
05/12/1998US5749772 Method and apparatus for polishing wafer
05/12/1998US5749771 Polishing apparatus for finishing semiconductor wafer at high polishing rate under economical running cost
05/12/1998US5749723 Heat treatment apparatus
05/12/1998US5749698 Substrate transport apparatus and substrate transport path adjustment method
05/12/1998US5749510 Semiconductor chip bonding method
05/12/1998US5749469 Wafer carrier
05/12/1998US5749467 Wafer suspension box
05/12/1998US5749442 Lead frame magazine fastening structure
05/12/1998US5749159 Method for precision cleaning and drying surfaces
05/07/1998WO1998019344A1 Threshold adjust in vertical dmos transistor
05/07/1998WO1998019343A1 Memory redundancy circuit using single polysilicon floating gate transistors as redundancy elements
05/07/1998WO1998019342A1 Controllable semiconductor structure with improved switching properties
05/07/1998WO1998019337A1 Integrated circuits and methods for their fabrication
05/07/1998WO1998019336A1 Uv/halogen treatment for dry oxide etching
05/07/1998WO1998019335A1 Vertical type heat treatment apparatus
05/07/1998WO1998019334A1 Heat treatment apparatus
05/07/1998WO1998019333A1 Processor and processing method, and robot device
05/07/1998WO1998019332A1 Dry etching method
05/07/1998WO1998019331A1 Gas composition for dry etching and process of dry etching
05/07/1998WO1998019330A1 Doped silicon diffusion barrier region
05/07/1998WO1998019328A1 Substrate-treating device
05/07/1998WO1998019256A1 Method and system for configuring an array of logic devices
05/07/1998WO1998019218A1 Improved process for 3d chip stacking
05/07/1998WO1998018570A1 Process for making a parylene coating
05/07/1998WO1998002905A3 Wafer spin dryer and method of drying a wafer
05/07/1998DE19748856A1 Cutting procedure for object to be mechanically machined held on table esp. ceramic wafer, chip
05/07/1998DE19748847A1 Semiconductor component with multilayer composite structure
05/07/1998DE19748278A1 Apparatus for a plasma CVD process
05/07/1998DE19747159A1 Halbleiterbauteil mit MOS-Gatesteuerung und Verfahren zu seiner Herstellung A semiconductor device comprising MOS gated and process for its preparation
05/07/1998DE19740948A1 Phase shifting mask for semiconductor device manufacture
05/07/1998DE19723096A1 Connecting line formation method for integrated circuit
05/07/1998DE19717358A1 Insulation film formation method for semiconductor component
05/07/1998DE19715926A1 Ball grid array component external connection production
05/07/1998DE19700867A1 Semiconductor processing apparatus for film growing on wafer surface
05/07/1998DE19645425A1 Vorrichtung zum Behandeln von Substraten Apparatus for processing substrates
05/07/1998DE19644972A1 Halbleiterspeicher Semiconductor memory
05/07/1998DE19644779A1 Vorrichtung zum Behandeln von Substraten Apparatus for processing substrates
05/07/1998DE19644256A1 Vorrichtung zum Behandeln von Substraten Apparatus for processing substrates
05/07/1998DE19644254A1 Vorrichtung zum Behandeln von Substraten Apparatus for processing substrates
05/07/1998DE19644253A1 Vorrichtung zum Behandeln von Substraten Apparatus for processing substrates
05/07/1998DE19643911A1 Opto-electronic integrated circuit arrangement
05/07/1998DE19643763A1 Mask forming method for semiconductor wafer processing
05/07/1998DE19643185A1 Speicherzelle und Verfahren zur Herstellung einer nichtflüchtigen Speicherzelle Memory cell and method for manufacturing a non-volatile memory cell
05/06/1998EP0840434A2 Improved topographical structure of an electrostatic chuck and method of fabricating same
05/06/1998EP0840378A1 Read-only memory and manufacturing method in MOS-technology
05/06/1998EP0840377A1 Semiconductor device using diode place-holders and method of manufacture thereof
05/06/1998EP0840376A1 Alternating invertors for capacitive coupling reduction in transmission lines
05/06/1998EP0840375A2 Chip-lead interconnection structure in a semiconductor device
05/06/1998EP0840371A2 Method for manufacturing a semiconductor memory device
05/06/1998EP0840370A1 Low temperature aluminum reflow for multilevel metallization
05/06/1998EP0840369A1 Electronic component and method of production thereof
05/06/1998EP0840368A2 Product and method for placing particles on contact pads of electronic devices
05/06/1998EP0840367A2 Method for fabricating a semiconductor device using lateral gettering
05/06/1998EP0840366A2 Method of forming a phosphorus doped silica glass film
05/06/1998EP0840365A2 High pressure plasma oxide etch process
05/06/1998EP0840364A1 Method of forming a semiconductor device
05/06/1998EP0840363A1 Method for fabricating a conductive diffusion barrier layer by PECVD
05/06/1998EP0840362A1 Fabrication of tungsten gate electrodes by means of tungsten carbonyl
05/06/1998EP0840361A2 Method and apparatus for depositing a film over a substrate
05/06/1998EP0840360A2 Wafer support with improved temperature control
05/06/1998EP0840359A2 Thermal processor for semiconductor wafers
05/06/1998EP0840358A2 Sloped substrate support
05/06/1998EP0840357A2 Method and apparatus for removing particles from surface of article
05/06/1998EP0840356A2 Ion implantation system and method adapted for serial wafer processing
05/06/1998EP0840355A1 Apparatus and method for processing substrate
05/06/1998EP0840351A2 Method of reducing generation of particulate matter in a sputtering chamber
05/06/1998EP0840350A2 Plasma apparatus and process with filtering of plasma sheath-generated harmonics
05/06/1998EP0840349A2 RF tuning method for an RF plasma reactor using frequency servoing power, voltage, current or dI/dt control
05/06/1998EP0840346A1 Cathode mounting for ion source with indirectly heated cathode
05/06/1998EP0840328A2 Method and device for testing memory circuits
05/06/1998EP0840325A2 Improvements in or relating to memory devices
05/06/1998EP0840323A2 Static semiconductor memory device with precharging circuits having similar configuration of memory cells
05/06/1998EP0840243A2 Method capable of accurately simulating ion implantation at a high speed
05/06/1998EP0840227A1 Method and apparatus for determining IDDQ
05/06/1998EP0840220A1 An integrated circuit device and method of communication therewith
05/06/1998EP0840206A1 Threshold logic circuits with limited area
05/06/1998EP0840169A1 Optical pellicle and package
1 ... 5807 5808 5809 5810 5811 5812 5813 5814 5815 5816 5817 5818 5819 5820 5821 5822 5823 5824 5825 5826 5827 ... 6590