Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/1998
05/26/1998US5757029 Triangular pyramidal semiconductor structure and optical device using the same
05/26/1998US5757028 Thin film transistor with reduced leakage current
05/26/1998US5757025 Infrared photodetector using delta-doped semiconductors
05/26/1998US5757024 Buried porous silicon-germanium layers in monocrystalline silicon lattices
05/26/1998US5757019 Pattern drawing apparatus
05/26/1998US5757017 Imaging system and apparatus for ultraviolet lithography
05/26/1998US5757003 Measuring concentration of interstitial oxygen and substitutional carbon in silicon using spectrometer
05/26/1998US5756964 Thermal processing apparatus
05/26/1998US5756850 Argon fluoride excimer laser lithography with acid generating resins with sulfonium salts
05/26/1998US5756786 High purity trimethylindium, method of synthesis
05/26/1998US5756404 Depositing first nitride layer, pumping out chamber, purging with nitrous oxide, depositing second nitride layer
05/26/1998US5756403 Immersing semiconductor portion to be etched in mixture of solvent, etchant, and complexing agents
05/26/1998US5756402 Method of etching silicon nitride film
05/26/1998US5756401 Dry etching double-layer films composed of polycrystal silicon film and metal silicide film
05/26/1998US5756400 Method and apparatus for cleaning by-products from plasma chamber surfaces
05/26/1998US5756399 Process for making semiconductor wafer
05/26/1998US5756398 Composition and method for polishing a composite comprising titanium
05/26/1998US5756397 Method of fabricating a wiring in a semiconductor device
05/26/1998US5756396 Forming wiring layer having sidewalls on substrate, forming electroconductive spacers, depositing tungsten layer, forming dielectric layer, etching, forming via opening, forming plug. forming tungsten plug filling
05/26/1998US5756394 Self-aligned silicide strap connection of polysilicon layers
05/26/1998US5756392 Method of formation of polycide in a semiconductor IC device
05/26/1998US5756391 Plasma carbon treatment of silicon surface to form carbon-containing silicon surface, oxidation
05/26/1998US5756390 Modified LOCOS process for sub-half-micron technology
05/26/1998US5756389 Method for forming trench isolation for semiconductor device
05/26/1998US5756388 Covering tetraethyl orthosilicate layer with dielectric layers having window containing conductive polysilicon plug (to contact substrate), then adding grained silicon layer and removing exposed portions of dielectric layer
05/26/1998US5756387 Method for forming zener diode with high time stability and low noise
05/26/1998US5756386 Fabricating high current discrete insulated-gate field-effect transistors; metal oxide semiconductors
05/26/1998US5756385 Dense flash EEPROM cell array and peripheral supporting circuits formed in deposited field oxide with the use of spacers
05/26/1998US5756384 Method of fabricating an EPROM cell with a high coupling ratio
05/26/1998US5756383 Method of manufacturing an active region of a semiconductor by diffusing a counterdopant out of a sidewall spacer
05/26/1998US5756382 Manufacturing method of CMOS transistor
05/26/1998US5756381 Method providing, an enriched source side extension and a lightly doped extension
05/26/1998US5756378 Method of and apparatus for laser processing
05/26/1998US5756377 Lead frame and manufacturing method thereof
05/26/1998US5756376 Using a plasma asher, solving problem of contact resistance
05/26/1998US5756375 Semiconductor growth method with thickness control
05/26/1998US5756373 Integrating semiconductor laser and optical waveguide with reducing propagation loss of waveguide and coupling efficiency
05/26/1998US5756372 Method of making liquid crystal display
05/26/1998US5756371 For use in liquid crystal display
05/26/1998US5756369 Rapid thermal processing using a narrowband infrared source and feedback
05/26/1998US5756367 Method of making a spacer based antifuse structure for low capacitance and high reliability
05/26/1998US5756365 Method of manufacturing MOS-type semiconductor device having electrode structure capable of coping with short-channel effects
05/26/1998US5756364 Laser processing method of semiconductor device using a catalyst
05/26/1998US5756266 Process for manufacturing devices using maleimide containing resist polymers
05/26/1998US5756259 With polymer having bound photoabsorber
05/26/1998US5756255 Undercoating composition for photolithography
05/26/1998US5756254 Containing photosensitive acid generator
05/26/1998US5756237 Production of projection mask
05/26/1998US5756235 Phase shift mask and method for fabricating the same
05/26/1998US5756234 High accuracy fabrication of X-ray masks with optical and E-beam lithography
05/26/1998US5756222 Corrosion-resistant aluminum article for semiconductor processing equipment
05/26/1998US5756216 Highly selective nitride spacer etch
05/26/1998US5756157 Method for processing flat panel displays and large wafers
05/26/1998US5756154 Masking methods during semiconductor device fabrication
05/26/1998US5755989 Wet etching composition having excellent wetting property for semiconductors
05/26/1998US5755938 Single chamber for CVD and sputtering film manufacturing
05/26/1998US5755934 Point-of-use ammonia purification for electronic component manufacture
05/26/1998US5755914 Silicon doped interface
05/26/1998US5755888 Method and apparatus of forming thin films
05/26/1998US5755887 Metal working apparatus comprising aluminum or aluminum alloy
05/26/1998US5755886 Apparatus for preventing deposition gases from contacting a selected region of a substrate during deposition processing
05/26/1998US5755878 Method for vapor phase growth
05/26/1998US5755877 Controlling growth of upper thin film on basis of measured fluorescent x-ray values from impinged x-rays incident on film
05/26/1998US5755859 Solution comprising cobalt salt plus tin salt, complexing agent, phosphorus-bearing reducing agent, and buffer
05/26/1998US5755511 Method and apparatus for measuring substrate temperatures
05/26/1998US5755473 Substrate carrier system
05/26/1998US5755469 Wafer transfer blade
05/26/1998US5755373 Die push-up device
05/26/1998US5755332 Enclosed sealable purgible semiconductor wafer holder
05/26/1998US5755278 Heat sink attached to a heat plate
05/26/1998CA2191260A1 Stabilization of the interface between tin and a1 alloys
05/25/1998CA2222110A1 Illumination system with spatially controllable partial coherence
05/25/1998CA2222109A1 Reduction of pattern noise in scanning lithographic system illuminators
05/22/1998WO1998021780A2 A connection between two contacts and a process for producing such a connection
05/22/1998WO1998021755A2 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
05/22/1998WO1998021753A1 Lateral bipolar field effect mode hybrid transistor and method for the same
05/22/1998WO1998021751A2 Optimizing the power connection between chip and circuit board for a power switch
05/22/1998WO1998021750A1 Substrate flattening method, and film-coated substrate and semiconductor device manufacturing method
05/22/1998WO1998021748A1 Semiconductor device and its manufacturing method
05/22/1998WO1998021747A1 Plasma film forming method and plasma film forming apparatus
05/22/1998WO1998021746A1 Method of plasma treatment
05/22/1998WO1998021745A1 Process for the production of semiconductor device
05/22/1998WO1998021744A2 Gas panel
05/22/1998WO1998020987A1 Sponge roller for cleaning
05/22/1998WO1997049133A3 Integrated circuit device with embedded flash memory and method for manufacturing same
05/22/1998EP0852813A3 Integrated circuit device with embedded flash memory and method for manufacturing same
05/22/1998CA2271313A1 Lateral bipolar field effect mode hybrid transistor and method for the same
05/20/1998EP0843402A1 BiCMOS negative charge pump
05/20/1998EP0843365A2 Light source and technique for mounting light emitting diodes
05/20/1998EP0843361A1 Memory device
05/20/1998EP0843360A1 Memory device
05/20/1998EP0843359A2 Method for chemical mechanical polishing a semiconductor device using slurry
05/20/1998EP0843358A2 Electronic flat-pack module and chipcard
05/20/1998EP0843357A1 Method of manufacturing a grid array semiconductor package
05/20/1998EP0843356A2 Lead-on-chip semiconductor device
05/20/1998EP0843355A1 Manufacture of integrated bipolar/CMOS circuits and a capacitor
05/20/1998EP0843354A1 Manufacture of integrated bipolar/CMOS circuits
05/20/1998EP0843353A1 Method of manufacturing an electrically erasable and programmable non-volatile memory cells arrangement
05/20/1998EP0843352A1 Method for removing a semiconductor chip bonded to a wire-bonded multichip module
05/20/1998EP0843351A1 Method for fabricating a NPN transistor in a BICMOS technology
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