Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1999
12/02/1999CA2333539A1 Molecular coatings
12/02/1999CA2333530A1 Method and apparatus for increasing wafer throughput between cleanings in semiconductor processing reactors
12/01/1999EP0961328A2 Gallium nitride-type semiconductor device
12/01/1999EP0961323A2 Integrated CMOS circuit for use at high frequencies
12/01/1999EP0961320A2 Semiconductor wafer comprising an epitaxial layer and an alignment mark
12/01/1999EP0961319A2 Integrated flexible interconnection
12/01/1999EP0961318A1 Integrated circuit with etch stop layer
12/01/1999EP0961317A2 A method of encapsulating an electronic component
12/01/1999EP0961316A2 Method of making an integrated vertical bipolar transistor
12/01/1999EP0961315A1 Chemical mechanical polishing process for integrated circuits using a patterned stop layer
12/01/1999EP0961314A1 Highly even silicon wafer and process for manufacturing semiconductor wafers
12/01/1999EP0961313A1 Epitaxial deposition of a silicon layer on a heavily doped silicon substrate
12/01/1999EP0961312A2 SOI Substrate formed by bonding
12/01/1999EP0961311A2 Capacitor and method for fabricating the same
12/01/1999EP0961310A2 Apparatus for processing silicon devices with improved temperature control
12/01/1999EP0961309A2 A tool for the contact-free support of plate-like substrates
12/01/1999EP0961308A2 Quartz glass member for use in dry etching and dry etching system equipped with the same
12/01/1999EP0961174A2 Compositions and methods involving direct write optical lithography
12/01/1999EP0961169A1 Photosensitive polymer composition, method for forming relief patterns, and electronic parts
12/01/1999EP0961149A2 Catadioptric objective for projection with adaptive mirror and projection exposure method
12/01/1999EP0960958A2 Method for producing hydrogenated silicon oxycarbide films
12/01/1999EP0960869A2 Dielectric compositions stable to reduction and dynamic random access memories with such dielectric compositions
12/01/1999EP0960694A1 Wafer polishing apparatus and backing pad for wafer polishing
12/01/1999EP0960440A1 A SCHOTTKY DIODE OF SiC AND A METHOD FOR PRODUCTION THEREOF
12/01/1999EP0960439A1 Antifuse based on silicided polysilicon bipolar transistor
12/01/1999EP0960437A1 In-situ deposition of stop layer and dielectric layer during formation of local interconnects
12/01/1999EP0960436A1 Method of preparing silicon carbide wafers for epitaxial growth
12/01/1999EP0960435A1 Apparatus and methods for minimizing as-deposited stress in tungsten silicide films
12/01/1999EP0960434A1 Device for processing semiconductor wafers
12/01/1999EP0960429A1 Correction device for correcting the spherical aberration in particle-optical apparatus
12/01/1999EP0960356A1 Methods and apparatus for integrating optical and interferometric lithography to produce complex patterns
12/01/1999EP0959719A1 A brush assembly apparatus
12/01/1999EP0925609A4 Stacked read-only memory
12/01/1999EP0891634A4 A semiconductor processing method for forming a contact pedestal for a storage node of a capacitor in integrated circuitry
12/01/1999EP0864158B1 Power supply independent current source for flash eprom erasure
12/01/1999EP0842307A4 System for the plasma treatment of large area substrates
12/01/1999EP0760159B1 Fast magnetic scanning of heavy ion beams
12/01/1999EP0748427B1 Apparatus and method for protecting chemical bath seals
12/01/1999EP0744083A4 Clampless vacuum heat transfer station
12/01/1999EP0731982B1 A method of treating a semiconductor wafer
12/01/1999EP0724777B1 Manufacture of electronic devices comprising thin-film circuitry
12/01/1999EP0602200B1 Method for forming an immage of a mask pattern
12/01/1999CN1237274A Semiconductor, semiconductor chip mounting substrate, methods of manufacturing device and substrate, adhesive and adhesive double coated film
12/01/1999CN1237273A Method of producing thin semiconductor film and apparatus thereof
12/01/1999CN1237272A Silicon carbide substrate, process for producing the same, and semiconductor element containing silicon carbide substrate
12/01/1999CN1237186A Thermosetting resin compositions useful as underfill sealants
12/01/1999CN1236999A SOI semiconductor device and method for manufacturing the same
12/01/1999CN1236998A Field effect transistor
12/01/1999CN1236996A Memory cell structure with piled grids and its manufacture method
12/01/1999CN1236994A Film capacitor and its manufacturing method
12/01/1999CN1236993A DRAM cell capacitor and method for fabricating thereof
12/01/1999CN1236992A Method for fabricating DRAM cell capacitor
12/01/1999CN1236991A Method for manufacturing capacitor structure of high-density DRAM
12/01/1999CN1236990A Methods of fabricating integrated circuit memory devices and integrated circuit memory devices so fabricated
12/01/1999CN1236989A Semiconductor device and method of manufacturing it
12/01/1999CN1236988A System and method of manufacturing semicustom integrated circuits using reticle primitives
12/01/1999CN1236987A Method for fabricating ferroelectric integrated circuits
12/01/1999CN1236986A Method of fabricating ferroelectric integrated circuit using oxygen to inhibit and repair hydrogen degradation
12/01/1999CN1236985A Method of determining lines between nodes and semiconductor integrated circuit device designed therethrough
12/01/1999CN1236984A Process for forming fine wiring
12/01/1999CN1236983A Method for manufacturing DRAM structure
12/01/1999CN1236981A Film transistor and its making method
12/01/1999CN1236980A Method for fabricating oxide film
12/01/1999CN1236979A Method for forming electric connection structure on semiconductor chip
12/01/1999CN1236978A Method for forming flat intermetal dielectric layer
12/01/1999CN1236977A Semicoductor device washing apparatus and method of washing semiconductor devices
12/01/1999CN1236976A Electron-beam cell projection aperture formation method
12/01/1999CN1236975A 互联系统及其生产方法 Interconnected system and production method
12/01/1999CN1236974A Method of manufacturing semiconductor memory device using two etching patterns
12/01/1999CN1236973A Patterning method in semiconductor device fabricating process
12/01/1999CN1236889A Cooling/heating apparatus for semiconductor processing liquid
12/01/1999CN1047027C Input/output transistors with optimized ESD protection
12/01/1999CN1047026C Arrangement for avoiding stripping of welding backing metal
12/01/1999CN1047025C Glassivation method for large mesa power semiconductor device
12/01/1999CN1046990C Rotative fluid equipment
12/01/1999CN1046972C Crochralski growing apparatus and device for suppressing growth striation of long large-diameter monocrystalline silicon
11/1999
11/30/1999US5996108 Memory system
11/30/1999US5996101 Test pattern generating method and test pattern generating system
11/30/1999US5995912 Database and method for measurement correction for cross-sectional carrier profiling techniques
11/30/1999US5995878 Method and apparatus for generating exposure data of semiconductor integrated circuit
11/30/1999US5995732 Method and apparatus of verifying reliability of an integrated circuit against electromigration
11/30/1999US5995647 Method of producing clear potential contrast image through scanning with electron beam for diagnosis of semiconductor device and electron beam testing system used therein
11/30/1999US5995582 X-ray reduction exposure apparatus and device manufacturing method using the same
11/30/1999US5995527 Indium nitride
11/30/1999US5995432 Semiconductor memory device having N-channel MOS transistor for pulling up PMOS sources of sense amplifiers
11/30/1999US5995427 Semiconductor memory device having test mode
11/30/1999US5995409 Electrically-programmable read-only memory fabricated using a dynamic random access memory fabrication process and methods for programming same
11/30/1999US5995374 Resin-coated mount substrate and method of producing the same
11/30/1999US5995359 Electronic component and method of manufacturing same
11/30/1999US5995357 Ceramic member-electric power supply connector coupling structure
11/30/1999US5995234 Method and apparatus for the alignment of a substrate
11/30/1999US5995226 Optical apparatus for measuring profiles of a wafer
11/30/1999US5995225 Method for measuring orthogonality in a stage of an exposure apparatus
11/30/1999US5995220 Semiconductor package inspection apparatus
11/30/1999US5995219 Pattern defect inspection apparatus
11/30/1999US5995218 Method for inspecting defects of wafer and inspection equipment thereof
11/30/1999US5995216 Pattern inspection apparatus
11/30/1999US5995203 Scanning exposure apparatus in which light exposure is a function of the speed of the mask or substrate stage
11/30/1999US5995200 Multiple image reticle for forming layers
11/30/1999US5995199 Position measurement method for measuring a position of an exposure mask and exposure method for transferring an image of the pattern formed in an exposure mask
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