Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2003
04/03/2003US20030062548 High-voltage transistor with buried conduction layer
04/03/2003US20030062546 Semiconductor device and manufacturing method thereof
04/03/2003US20030062543 Semiconductor device and its manufacture
04/03/2003US20030062542 Electro-optical device, method for fabricating the same, and electronic apparatus
04/03/2003US20030062539 Forming lateral bipolar junction transistor in CMOS flow
04/03/2003US20030062538 Semiconductor device and electronic device using the same
04/03/2003US20030062537 Field-effect type semiconductor device for power amplifier
04/03/2003US20030062524 Light emitting device, method of driving a light emitting device, element substrate, and electronic equipment
04/03/2003US20030062522 Semiconductor device
04/03/2003US20030062521 Test element group structure
04/03/2003US20030062519 Light emitting device, electronic equipment, and organic polarizing film
04/03/2003US20030062516 Method of fabricating a three-dimensional array of active media
04/03/2003US20030062499 Electro-optical device and manufacturing method thereof
04/03/2003US20030062489 Variably shaped beam EB writing system
04/03/2003US20030062487 Pattern inspection method and system therefor
04/03/2003US20030062479 Charged particle beam scanning type automatic inspecting apparatus
04/03/2003US20030062477 Methods and apparatus for defect localization
04/03/2003US20030062400 Flip chip dip coating encapsulant
04/03/2003US20030062398 Method for manufacturing raised electrical contact pattern of controlled geometry
04/03/2003US20030062382 Method and apparatus for dispensing fluids
04/03/2003US20030062359 Multi-zone resistive heater
04/03/2003US20030062358 Semiconductor manufacturing/testing ceramic heater
04/03/2003US20030062348 Method for cutting a non-metallic substrate
04/03/2003US20030062347 Method and apparatus for deflashing of integrated circuit packages
04/03/2003US20030062344 Plasma reactor with overhead RF electrode tuned to the plasma
04/03/2003US20030062337 Shallow angle interference process and apparatus for determining real-time etching rate
04/03/2003US20030062336 Method for reworking low-K polymers used in semiconductor structures
04/03/2003US20030062335 Process for smoothing a rough surface on a substrate by dry etching
04/03/2003US20030062334 Method for forming a micro-pattern on a substrate by using capillary force
04/03/2003US20030062333 Method and apparatus for cleaning substrates
04/03/2003US20030062269 Electrochemical mechanical planarization
04/03/2003US20030062261 High purity zirconium or hafnium, sputtering target comprising the high purity zirconium of hafnium and thin film formed using the target, and method for producing high purity zirconium or hafnium and method for producing powder of high purity zirconium or hafnium
04/03/2003US20030062254 Sputtering: second metal layer portion including a material identical to the first metal layer portion and having a second thickness corresponding to 40 to 60% of the whole deposition thickness is formed on the first metal layer portion.
04/03/2003US20030062185 Ceramic multilayer circuit boards mounted on a patterned metal support substrate and method of making
04/03/2003US20030062128 Apparatus and method for plasma treatment
04/03/2003US20030062123 Method of self-latching for adhesion during self-assembly of electronic or optical components
04/03/2003US20030062116 Method and apparatus for bonding protection film onto silicon wafer
04/03/2003US20030062115 Chip element holder and method of handling chip elements
04/03/2003US20030062111 Method of manufacturing glass ceramic multilayer substrate
04/03/2003US20030062069 Apparatus and methods for removing metallic contamination from wafer containers
04/03/2003US20030062068 Improvement in removing contaminants from the surface of the wafer without damaging an insulating layer or a metal layer exposed at the surface of the wafer.
04/03/2003US20030061991 Protective shield and system for gas distribution
04/03/2003US20030061989 Semiconductor manufacturing system
04/03/2003US20030061984 Crystalline semiconductor film and production method thereof, and semiconductor device and production method thereof
04/03/2003US20030061958 Low-cost lithography
04/03/2003US20030061766 Polishing agent and method for producing planar layers
04/03/2003US20030061730 Substrate feed chamber and substrate processing apparatus
04/03/2003US20030061675 Scrubber with sonic nozzle
04/03/2003DE19655075C2 Semiconductor memory device for DRAM cell
04/03/2003CA2466882A1 Manufacturing process of integrated circuits in flip-chip technology
04/03/2003CA2461898A1 Biological control of nanoparticles
04/03/2003CA2461153A1 System and method for determining and controlling contamination
04/03/2003CA2454895A1 Methods of nanotube films and articles
04/03/2003CA2404582A1 Semiconductor processing apparatus and electrode member therefor
04/02/2003EP1298965A2 Radiation-generating devices utilizing multiple plasma-discharge sources and microlithography apparatus and methods utilizing the same
04/02/2003EP1298732A1 Periphery of high-voltage components
04/02/2003EP1298731A1 Simox substrate production process and simox substrate
04/02/2003EP1298730A2 Ferroelectric memory and method for fabricating the same
04/02/2003EP1298729A2 Memory cell
04/02/2003EP1298727A2 Nano-circuits
04/02/2003EP1298726A2 Solder composition for semiconductor bumps
04/02/2003EP1298725A2 Semiconductor device of multi-wiring structure and method of manufacturing the same
04/02/2003EP1298723A2 Electronic component in a plastic housing and components of a metallic support and method of manufacturing the same
04/02/2003EP1298722A2 Method of forming dual work function gate electrodes in a semiconductor device
04/02/2003EP1298721A2 Method of making high-voltage bipolar/CMOS/DMOS (BCD) devices
04/02/2003EP1298720A1 Method and apparatus for holding a substrate
04/02/2003EP1298719A2 Method for manufacturing and structure of semiconductor device with shallow trench collector contact region
04/02/2003EP1298718A2 Method for manufacturing and structure of semiconductor device with sinker contact region
04/02/2003EP1298717A1 Method for manufacturing a semiconductor device having a pn junction area
04/02/2003EP1298716A1 Method for roughening a surface of a semiconductor substrate
04/02/2003EP1298715A1 Water and method for storing silicon wafer
04/02/2003EP1298714A1 Method of manufacturing compound semiconductor wafer
04/02/2003EP1298713A1 Semiconductor wafer thinning method, and thin semiconductor wafer
04/02/2003EP1298712A2 Gate structure and method of forming the same
04/02/2003EP1298711A2 Manufacturing method of an integrated semiconductor arrangement and semiconductor arrangement thus produced
04/02/2003EP1298710A1 Method for protecting a tungsten element in semiconductor device fabrication
04/02/2003EP1298709A2 III-nitride epitaxial substrate, epitaxial substrate for III-nitride element and III-nitride element
04/02/2003EP1298708A2 Ring-shaped receptacle for a rotating support
04/02/2003EP1298669A2 Magnetic memory device
04/02/2003EP1298634A2 Active matrix type display device
04/02/2003EP1298548A2 Wiring modeling technique
04/02/2003EP1298513A2 Monitoring device and monitoring method for vacuum device
04/02/2003EP1298494A2 High numerical aperture projection system for microlithography
04/02/2003EP1298493A2 Coating compositions for use with an overcoated photoresist
04/02/2003EP1298492A2 Coating compositions for use with an overcoated photoresist
04/02/2003EP1298489A2 An optical proximity correction method utilizing phase-edges as sub-resolution assist features
04/02/2003EP1298234A2 Method of manufacturing a single crystal substrate
04/02/2003EP1298233A2 System and method for electroplating fine geometries
04/02/2003EP1298176A2 Stacked film insulating film and substrate for semiconductor
04/02/2003EP1298107A1 Joined ceramic article, substrate holding structure and apparatus for treating substrate
04/02/2003EP1297927A2 Polishing apparatus
04/02/2003EP1297853A1 Method of forming an oxide film on a metallic member
04/02/2003EP1297575A1 Power semiconductor component and method for producing the same
04/02/2003EP1297570A1 Semiconductor device and method of manufacturing
04/02/2003EP1297569A2 Method and apparatus for using scatterometry to perform feedback and feed-forward control
04/02/2003EP1297568A2 Bottom gate type thin film transistor, its manufacturing method and liquid crystal display device using the same
04/02/2003EP1297567A1 Hydrogen implant for buffer zone of punch-through non epi igbt
04/02/2003EP1297566A2 Substrate cleaning apparatus and method
04/02/2003EP1297564A2 Process for selectively etching doped silicon dioxide over undoped silicon dioxide and silicon nitride
04/02/2003EP1297563A1 Bottom anti-reflective coating using rapid thermal anneal with oxidizing gas
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