| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 12/11/2003 | WO2002057858A3 Method and device for motion control |
| 12/11/2003 | WO2002056114A3 Projection system for euv lithography |
| 12/11/2003 | WO2002047160A8 Method for producing high-speed vertical npn bipolar transistors and complementary mos transistors on a chip |
| 12/11/2003 | WO2002039489A3 Method for removing etch residue resulting from a process for forming a via |
| 12/11/2003 | US20030229886 Semiconductor integrated circuit, design support apparatus, and test method |
| 12/11/2003 | US20030229881 Adjustment of masks for integrated circuit fabrication |
| 12/11/2003 | US20030229880 Test masks for lithographic and etch processes |
| 12/11/2003 | US20030229875 Use of models in integrated circuit fabrication |
| 12/11/2003 | US20030229874 Floorplanning apparatus deciding floor plan using logic seeds associated with hierarchical blocks |
| 12/11/2003 | US20030229873 Crosstalk mitigation method and system |
| 12/11/2003 | US20030229868 Electronic design for integrated circuits based process related variations |
| 12/11/2003 | US20030229838 Apparatus and method for diagnosing integrated circuit, and integrated circuit |
| 12/11/2003 | US20030229479 Dummy fill for integrated circuits |
| 12/11/2003 | US20030229464 Quality control method and system on production line for fabricating products |
| 12/11/2003 | US20030229457 Method for inspecting wafer defects of a semiconductor device |
| 12/11/2003 | US20030229412 Electronic design for integrated circuits based on process related variations |
| 12/11/2003 | US20030229411 Method for recipe format parsing |
| 12/11/2003 | US20030229410 Integrated circuit metrology |
| 12/11/2003 | US20030229190 High order silane composition, and method of forming silicon film using the composition |
| 12/11/2003 | US20030228990 Using aqueous solution of 2-ethylaminoethyl-2-ethanol |
| 12/11/2003 | US20030228989 Method of recycling fluorine using an adsorption purification process |
| 12/11/2003 | US20030228836 Subpad having robust, sealed edges |
| 12/11/2003 | US20030228830 System for manufacturing a semiconductor device, polishing slurry feeder and method for manufacturing a semiconductor device |
| 12/11/2003 | US20030228772 Lateral temperature equalizing system for large area surfaces during processing |
| 12/11/2003 | US20030228770 Method of forming a thin film with a low hydrogen content on a semiconductor device |
| 12/11/2003 | US20030228769 Method for improving adhesion between dielectric material layers |
| 12/11/2003 | US20030228768 Dielectric etching with reduced striation |
| 12/11/2003 | US20030228767 Method of manufacturing a semiconductor device including a heat treatment procedure |
| 12/11/2003 | US20030228766 Gate structure and method of manufacture |
| 12/11/2003 | US20030228765 Semiconductor device manufacture method preventing dishing and erosion during chemical mechanical polishing |
| 12/11/2003 | US20030228764 Innovative method to build a high precision analog capacitor with low voltage coefficient and hysteresis |
| 12/11/2003 | US20030228763 CMP method utilizing amphiphilic nonionic surfactants |
| 12/11/2003 | US20030228762 CMP compositions for low-k dielectric materials |
| 12/11/2003 | US20030228760 Method for forming pattern of stacked film |
| 12/11/2003 | US20030228758 Semiconductor device and manufacturing method thereof |
| 12/11/2003 | US20030228757 Optimization methods for on-chip interconnect geometries suitable for ultra deep sub-micron processes |
| 12/11/2003 | US20030228756 Method of forming a fuse |
| 12/11/2003 | US20030228755 Method for metal patterning and improved linewidth control |
| 12/11/2003 | US20030228754 Fabrication method for semiconductor hole |
| 12/11/2003 | US20030228753 Method of making a semiconductor device that has copper damascene interconnects with enhanced electromigration reliability |
| 12/11/2003 | US20030228752 Self-aligned borderless contacts |
| 12/11/2003 | US20030228751 Oxygen based cleaning operation liberates fluorine from the fluorine containing polymer layer to remove a silicon based residue. an apparatus configured to remove chamber deposits between process operations is also provided. |
| 12/11/2003 | US20030228750 Method for improving adhesion of a low k dielectric to a barrier layer |
| 12/11/2003 | US20030228749 Plating metal caps on conductive interconnect for wirebonding |
| 12/11/2003 | US20030228747 Pr2O3-based la-oxide gate dielectrics |
| 12/11/2003 | US20030228746 CVD-PVD deposition process |
| 12/11/2003 | US20030228745 Method and system for making cobalt silicide |
| 12/11/2003 | US20030228744 Manufacturing method of semiconductor device |
| 12/11/2003 | US20030228743 Pattern forming method and pattern forming device |
| 12/11/2003 | US20030228742 Method of forming salicide |
| 12/11/2003 | US20030228741 Method to perform deep implants without scattering to adjacent areas |
| 12/11/2003 | US20030228740 Method of fabricating semiconductor device, and developing apparatus using the method |
| 12/11/2003 | US20030228739 Wafer cutting using laser marking |
| 12/11/2003 | US20030228738 Abrasive particles to clean semiconductor wafers during chemical mechanical planarization |
| 12/11/2003 | US20030228737 Method of fabricating a drain isolated LDMOS device |
| 12/11/2003 | US20030228736 Semiconductor device and manufacturing method thereof |
| 12/11/2003 | US20030228735 Mosfet fabrication method |
| 12/11/2003 | US20030228734 Method for manufacturing semiconductor device |
| 12/11/2003 | US20030228733 Manufacturing method have a pillar-like lower capacitor electrode |
| 12/11/2003 | US20030228732 Tank-isolated-drain-extended power device |
| 12/11/2003 | US20030228731 Method for manufacturing semiconductor device |
| 12/11/2003 | US20030228730 Method of forming a distributed power device with low voltage collector protection |
| 12/11/2003 | US20030228729 In line self protecting multiple output power IC architecture |
| 12/11/2003 | US20030228728 Disabling flash memory to protect memory contents |
| 12/11/2003 | US20030228727 Stress-induced bandgap-shifted semiconductor photoelectrolytic/photocatalytic/photovoltaic surface and method for making same |
| 12/11/2003 | US20030228726 Magnetoresistive memory device assemblies |
| 12/11/2003 | US20030228725 Semiconductor device and method for manufacturing thereof |
| 12/11/2003 | US20030228724 Method of manufacturing semiconductor device |
| 12/11/2003 | US20030228723 Laser irradiation method and method of manufacturing a semiconductor device |
| 12/11/2003 | US20030228722 Method of forming doped regions in the bulk substrate of an SOI substrate to control the operational characteristics of transistors formed thereabove, and an integrated circuit device comprising same |
| 12/11/2003 | US20030228721 Integrated system on a chip protection circuit |
| 12/11/2003 | US20030228720 Semiconductor device and a method of manufacturing the same |
| 12/11/2003 | US20030228719 Method of manufacturing micro-semiconductor element |
| 12/11/2003 | US20030228715 Active matrix backplane for controlling controlled elements and method of manufacture thereof |
| 12/11/2003 | US20030228714 Dummy fill for integrated circuits |
| 12/11/2003 | US20030228713 Methods of forming magnetoresistive memory device assemblies |
| 12/11/2003 | US20030228712 Method of forming ferroelectric memory cell |
| 12/11/2003 | US20030228711 Methods of forming magnetoresistive memory device assemblies |
| 12/11/2003 | US20030228710 Multilayer dielectric tunnel barrier used in magnetic tunnel junction devices, and its method of fabrication |
| 12/11/2003 | US20030228532 Calibration time for cutting patterned masking; etching; determination width |
| 12/11/2003 | US20030228529 Lithography; substrate overcoated with buffer; prevent electrostatics discharging |
| 12/11/2003 | US20030228528 Photomask blank manufacturing method |
| 12/11/2003 | US20030228474 Silicon oxynitride overcoated with polymeric photoresists |
| 12/11/2003 | US20030228467 Targeted deposition of nanotubes |
| 12/11/2003 | US20030228416 Plasma vapor deposition; supplying gas; high frequency voltage |
| 12/11/2003 | US20030228248 Aggregation of particles; mixing with diluent, roasting, water washing |
| 12/11/2003 | US20030228050 Method for pattern inspection |
| 12/11/2003 | US20030228049 Apparatus and method for inspecting pattern |
| 12/11/2003 | US20030228048 Pattern image comparison method, pattern image comparison device, and program |
| 12/11/2003 | US20030228045 Apparatus and method for inspecting pattern |
| 12/11/2003 | US20030227954 Line-narrowed gas laser system |
| 12/11/2003 | US20030227951 Electrically pumped, polycrystalline ZnO laser and a method of fabricating the same |
| 12/11/2003 | US20030227821 Chemical supply apparatus |
| 12/11/2003 | US20030227813 Semiconductor apparatus which prevents generating noise and being influenced by noise |
| 12/11/2003 | US20030227803 Ferroelectric memory device and method of manufacturing the same |
| 12/11/2003 | US20030227802 Semiconductor memory device and method for manufacturing the device |
| 12/11/2003 | US20030227799 Tunnel magnetoresistive effect element, method of manufacturing tunnel magnetoresistive effect element and magnetic memory device |
| 12/11/2003 | US20030227787 Cam cell |
| 12/11/2003 | US20030227737 Method and apparatus for fabricating a protective layer on a chuck |
| 12/11/2003 | US20030227693 Projection optical system and projection exposure device which uses same |