Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2003
12/11/2003WO2002057858A3 Method and device for motion control
12/11/2003WO2002056114A3 Projection system for euv lithography
12/11/2003WO2002047160A8 Method for producing high-speed vertical npn bipolar transistors and complementary mos transistors on a chip
12/11/2003WO2002039489A3 Method for removing etch residue resulting from a process for forming a via
12/11/2003US20030229886 Semiconductor integrated circuit, design support apparatus, and test method
12/11/2003US20030229881 Adjustment of masks for integrated circuit fabrication
12/11/2003US20030229880 Test masks for lithographic and etch processes
12/11/2003US20030229875 Use of models in integrated circuit fabrication
12/11/2003US20030229874 Floorplanning apparatus deciding floor plan using logic seeds associated with hierarchical blocks
12/11/2003US20030229873 Crosstalk mitigation method and system
12/11/2003US20030229868 Electronic design for integrated circuits based process related variations
12/11/2003US20030229838 Apparatus and method for diagnosing integrated circuit, and integrated circuit
12/11/2003US20030229479 Dummy fill for integrated circuits
12/11/2003US20030229464 Quality control method and system on production line for fabricating products
12/11/2003US20030229457 Method for inspecting wafer defects of a semiconductor device
12/11/2003US20030229412 Electronic design for integrated circuits based on process related variations
12/11/2003US20030229411 Method for recipe format parsing
12/11/2003US20030229410 Integrated circuit metrology
12/11/2003US20030229190 High order silane composition, and method of forming silicon film using the composition
12/11/2003US20030228990 Using aqueous solution of 2-ethylaminoethyl-2-ethanol
12/11/2003US20030228989 Method of recycling fluorine using an adsorption purification process
12/11/2003US20030228836 Subpad having robust, sealed edges
12/11/2003US20030228830 System for manufacturing a semiconductor device, polishing slurry feeder and method for manufacturing a semiconductor device
12/11/2003US20030228772 Lateral temperature equalizing system for large area surfaces during processing
12/11/2003US20030228770 Method of forming a thin film with a low hydrogen content on a semiconductor device
12/11/2003US20030228769 Method for improving adhesion between dielectric material layers
12/11/2003US20030228768 Dielectric etching with reduced striation
12/11/2003US20030228767 Method of manufacturing a semiconductor device including a heat treatment procedure
12/11/2003US20030228766 Gate structure and method of manufacture
12/11/2003US20030228765 Semiconductor device manufacture method preventing dishing and erosion during chemical mechanical polishing
12/11/2003US20030228764 Innovative method to build a high precision analog capacitor with low voltage coefficient and hysteresis
12/11/2003US20030228763 CMP method utilizing amphiphilic nonionic surfactants
12/11/2003US20030228762 CMP compositions for low-k dielectric materials
12/11/2003US20030228760 Method for forming pattern of stacked film
12/11/2003US20030228758 Semiconductor device and manufacturing method thereof
12/11/2003US20030228757 Optimization methods for on-chip interconnect geometries suitable for ultra deep sub-micron processes
12/11/2003US20030228756 Method of forming a fuse
12/11/2003US20030228755 Method for metal patterning and improved linewidth control
12/11/2003US20030228754 Fabrication method for semiconductor hole
12/11/2003US20030228753 Method of making a semiconductor device that has copper damascene interconnects with enhanced electromigration reliability
12/11/2003US20030228752 Self-aligned borderless contacts
12/11/2003US20030228751 Oxygen based cleaning operation liberates fluorine from the fluorine containing polymer layer to remove a silicon based residue. an apparatus configured to remove chamber deposits between process operations is also provided.
12/11/2003US20030228750 Method for improving adhesion of a low k dielectric to a barrier layer
12/11/2003US20030228749 Plating metal caps on conductive interconnect for wirebonding
12/11/2003US20030228747 Pr2O3-based la-oxide gate dielectrics
12/11/2003US20030228746 CVD-PVD deposition process
12/11/2003US20030228745 Method and system for making cobalt silicide
12/11/2003US20030228744 Manufacturing method of semiconductor device
12/11/2003US20030228743 Pattern forming method and pattern forming device
12/11/2003US20030228742 Method of forming salicide
12/11/2003US20030228741 Method to perform deep implants without scattering to adjacent areas
12/11/2003US20030228740 Method of fabricating semiconductor device, and developing apparatus using the method
12/11/2003US20030228739 Wafer cutting using laser marking
12/11/2003US20030228738 Abrasive particles to clean semiconductor wafers during chemical mechanical planarization
12/11/2003US20030228737 Method of fabricating a drain isolated LDMOS device
12/11/2003US20030228736 Semiconductor device and manufacturing method thereof
12/11/2003US20030228735 Mosfet fabrication method
12/11/2003US20030228734 Method for manufacturing semiconductor device
12/11/2003US20030228733 Manufacturing method have a pillar-like lower capacitor electrode
12/11/2003US20030228732 Tank-isolated-drain-extended power device
12/11/2003US20030228731 Method for manufacturing semiconductor device
12/11/2003US20030228730 Method of forming a distributed power device with low voltage collector protection
12/11/2003US20030228729 In line self protecting multiple output power IC architecture
12/11/2003US20030228728 Disabling flash memory to protect memory contents
12/11/2003US20030228727 Stress-induced bandgap-shifted semiconductor photoelectrolytic/photocatalytic/photovoltaic surface and method for making same
12/11/2003US20030228726 Magnetoresistive memory device assemblies
12/11/2003US20030228725 Semiconductor device and method for manufacturing thereof
12/11/2003US20030228724 Method of manufacturing semiconductor device
12/11/2003US20030228723 Laser irradiation method and method of manufacturing a semiconductor device
12/11/2003US20030228722 Method of forming doped regions in the bulk substrate of an SOI substrate to control the operational characteristics of transistors formed thereabove, and an integrated circuit device comprising same
12/11/2003US20030228721 Integrated system on a chip protection circuit
12/11/2003US20030228720 Semiconductor device and a method of manufacturing the same
12/11/2003US20030228719 Method of manufacturing micro-semiconductor element
12/11/2003US20030228715 Active matrix backplane for controlling controlled elements and method of manufacture thereof
12/11/2003US20030228714 Dummy fill for integrated circuits
12/11/2003US20030228713 Methods of forming magnetoresistive memory device assemblies
12/11/2003US20030228712 Method of forming ferroelectric memory cell
12/11/2003US20030228711 Methods of forming magnetoresistive memory device assemblies
12/11/2003US20030228710 Multilayer dielectric tunnel barrier used in magnetic tunnel junction devices, and its method of fabrication
12/11/2003US20030228532 Calibration time for cutting patterned masking; etching; determination width
12/11/2003US20030228529 Lithography; substrate overcoated with buffer; prevent electrostatics discharging
12/11/2003US20030228528 Photomask blank manufacturing method
12/11/2003US20030228474 Silicon oxynitride overcoated with polymeric photoresists
12/11/2003US20030228467 Targeted deposition of nanotubes
12/11/2003US20030228416 Plasma vapor deposition; supplying gas; high frequency voltage
12/11/2003US20030228248 Aggregation of particles; mixing with diluent, roasting, water washing
12/11/2003US20030228050 Method for pattern inspection
12/11/2003US20030228049 Apparatus and method for inspecting pattern
12/11/2003US20030228048 Pattern image comparison method, pattern image comparison device, and program
12/11/2003US20030228045 Apparatus and method for inspecting pattern
12/11/2003US20030227954 Line-narrowed gas laser system
12/11/2003US20030227951 Electrically pumped, polycrystalline ZnO laser and a method of fabricating the same
12/11/2003US20030227821 Chemical supply apparatus
12/11/2003US20030227813 Semiconductor apparatus which prevents generating noise and being influenced by noise
12/11/2003US20030227803 Ferroelectric memory device and method of manufacturing the same
12/11/2003US20030227802 Semiconductor memory device and method for manufacturing the device
12/11/2003US20030227799 Tunnel magnetoresistive effect element, method of manufacturing tunnel magnetoresistive effect element and magnetic memory device
12/11/2003US20030227787 Cam cell
12/11/2003US20030227737 Method and apparatus for fabricating a protective layer on a chuck
12/11/2003US20030227693 Projection optical system and projection exposure device which uses same