| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/29/2004 | US20040018710 Integrated circuitry, methods of fabricating integrated circuitry, methods of forming local interconnects, and methods of forming conductive lines |
| 01/29/2004 | US20040018709 Stereolithographic methods for securing conductive elements to contacts of semiconductor device components |
| 01/29/2004 | US20040018708 Method for manufacturing semiconductor device |
| 01/29/2004 | US20040018707 Semiconductor device fabrication method |
| 01/29/2004 | US20040018706 Method for forming a thermal conducting trench in a semiconductor structure |
| 01/29/2004 | US20040018705 Semiconductor structure and method for processing such a structure |
| 01/29/2004 | US20040018704 Multirate circular buffer and method of operating the same |
| 01/29/2004 | US20040018703 Method to overcome instability of ultra-shallow semiconductor junctions |
| 01/29/2004 | US20040018702 Semiconductor manufacturing method using two-stage annealing |
| 01/29/2004 | US20040018701 Manufacturing method for semiconductor substrate and manufacturing method for semiconductor device |
| 01/29/2004 | US20040018699 SOI wafers with 30-100 A buried oxide (box) created by wafer bonding using 30-100 A thin oxide as bonding layer |
| 01/29/2004 | US20040018698 Adjustable threshold isolation transistor |
| 01/29/2004 | US20040018697 Method and structure of interconnection with anti-reflection coating |
| 01/29/2004 | US20040018696 Method of filling an opening in a material layer with an insulating material |
| 01/29/2004 | US20040018695 Methods of forming trench isolation within a semiconductor substrate |
| 01/29/2004 | US20040018694 Methods for forming silicon dioxide layers on substrates using atomic layer deposition |
| 01/29/2004 | US20040018693 Capacitor and semiconductor device and method for fabricating the semiconductor device |
| 01/29/2004 | US20040018691 Method of fabricating W/TiN gate for MOSFETS |
| 01/29/2004 | US20040018690 Method of forming semiconductor device and semiconductor device |
| 01/29/2004 | US20040018689 Method for fabricating MOS transistors |
| 01/29/2004 | US20040018688 Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors |
| 01/29/2004 | US20040018687 Method with trench source to increase the coupling of source to floating gate in split gate flash |
| 01/29/2004 | US20040018686 Method for fabricating a buried bit line for a semiconductor memory |
| 01/29/2004 | US20040018685 Method for manufacturing a nonvolatile memory device |
| 01/29/2004 | US20040018684 Method of etching a dielectric material in the presence of polysilicon |
| 01/29/2004 | US20040018683 Method of manufacturing storage nodes of a semiconductor memory device using a two-step etching process |
| 01/29/2004 | US20040018682 Method for producing nonvolatile semiconductor memory device and the device itself |
| 01/29/2004 | US20040018681 Method for forming a semiconductor device structure in a semiconductoe layer |
| 01/29/2004 | US20040018680 Method to enhance epi-regrowth in amorphous poly CB contacts |
| 01/29/2004 | US20040018679 Storage electrode of a semiconductor memory device and method for fabricating the same |
| 01/29/2004 | US20040018678 Methods of forming capacitors including reducing exposed electrodes in semiconductor devices |
| 01/29/2004 | US20040018677 Method of manufacturing electro-optical device, electro-optical device, and electronic apparatus |
| 01/29/2004 | US20040018676 Semiconductor device having a trench isolation structure and method for fabricating the same |
| 01/29/2004 | US20040018674 Method of fabricating a gate dielectric layer with reduced gate tunnelling current and reduced boron penetration |
| 01/29/2004 | US20040018673 High fMAX deep submicron MOSFET |
| 01/29/2004 | US20040018672 Silicon on insulator (SOI) transistor and methods of fabrication |
| 01/29/2004 | US20040018671 Semiconductor processing methods of forming integrated circuitry, forming conductive lines, forming a conductive grid, forming a conductive network, forming an electrical interconnection to a node location, forming an electrical interconnection with a transistor source/drain region, and integrated circuitry |
| 01/29/2004 | US20040018670 Method of manufacturing semiconductor device |
| 01/29/2004 | US20040018668 Silicon-on-insulator device with strained device film and method for making the same with partial replacement of isolation oxide |
| 01/29/2004 | US20040018667 Method and apparatus for producing a silicon wafer chip package |
| 01/29/2004 | US20040018660 Method of fabricating multilayered UBM for flip chip interconnections by electroplating |
| 01/29/2004 | US20040018659 Method for manufacturing semiconductor device, adhesive sheet for use therein and semiconductor device |
| 01/29/2004 | US20040018658 Noise shield type multi-layered substrate and munufacturing method thereof |
| 01/29/2004 | US20040018656 Method for improving contact hole patterning |
| 01/29/2004 | US20040018654 Method and apparatus for electronically aligning capacitively coupled chip pads |
| 01/29/2004 | US20040018653 Method of measuring meso-scale structures on wafers |
| 01/29/2004 | US20040018652 Modification of circuit features that are interior to a packaged integrated circuit |
| 01/29/2004 | US20040018650 Substrate processing apparatus |
| 01/29/2004 | US20040018649 Method of fabricating polysilicon film by excimer laser annealing process |
| 01/29/2004 | US20040018647 Method for controlling the extent of notch or undercut in an etched profile using optical reflectometry |
| 01/29/2004 | US20040018646 Resist pattern formation method |
| 01/29/2004 | US20040018645 Semiconductor constructions and methods of forming semiconductor constructions |
| 01/29/2004 | US20040018452 Prepassivation before cleaning |
| 01/29/2004 | US20040018451 Controlling thickness of antireflective layer; soluble in developer; heat crosslinkabel polymer |
| 01/29/2004 | US20040018445 Chemical amplification type positive resist composition |
| 01/29/2004 | US20040018442 Resist composition comprising photosensitive polymer having lactone in its backbone |
| 01/29/2004 | US20040018437 Prevention damage; isolation patterns of light blocking and light transmission zones; photolithography |
| 01/29/2004 | US20040018435 Photomask for forming small contact hole array and methods of fabricating and using the same |
| 01/29/2004 | US20040018434 Transferring image to photosensitive film; semiconductor for photolithography |
| 01/29/2004 | US20040018392 Method of increasing mechanical properties of semiconductor substrates |
| 01/29/2004 | US20040018363 Silica substrate overcoated with dielectric |
| 01/29/2004 | US20040018347 Web process interconnect in electronic assemblies |
| 01/29/2004 | US20040018346 Uniformity of photoresist patterns; crosslinked polysiloxane |
| 01/29/2004 | US20040018320 Method of manufacturing a device |
| 01/29/2004 | US20040018319 Improving modulus and material hardness of a dielectric material by curing; use in integrated circuit dielectrics, semiconductor chips |
| 01/29/2004 | US20040018307 Methods of forming atomic layers of a material on a substrate by sequentially introducing precursors of the material |
| 01/29/2004 | US20040018305 Apparatus for depositing a multilayer coating on discrete sheets |
| 01/29/2004 | US20040018142 Method for generating ultrapure steam by oxidation of hydrogen in a closed torch with separate feed lines for hydrogen and oxygen and a discharge line for discharging the steam which is formed to a process chamber. |
| 01/29/2004 | US20040018127 Comprises segmented chuck including segmented electrodes isolated from each other by insulating connections, and radio frequency drivers |
| 01/29/2004 | US20040018070 Compact and high throughput semiconductor fabrication system |
| 01/29/2004 | US20040018008 Heating configuration for use in thermal processing chambers |
| 01/29/2004 | US20040017718 Non-volatile semiconductor memory device conducting read operation using a reference cell |
| 01/29/2004 | US20040017716 Dynamic RAM-and semiconductor device |
| 01/29/2004 | US20040017712 Circuit for non-destructive, self-normalizing reading-out of MRAM memory cells |
| 01/29/2004 | US20040017710 Test key for detecting overlap between active area and deep trench capacitor of a DRAM and detection method thereof |
| 01/29/2004 | US20040017706 MRAM configuration |
| 01/29/2004 | US20040017701 Semiconductor switching circuit device |
| 01/29/2004 | US20040017672 Multileveled printed circuit board unit including substrate interposed between stacked bumps |
| 01/29/2004 | US20040017668 Leadframeless package structure and method |
| 01/29/2004 | US20040017664 Semiconductor memory module |
| 01/29/2004 | US20040017623 Deformable mirror with high-bandwidth servo for rigid body control |
| 01/29/2004 | US20040017575 Optimized model and parameter selection for optical metrology |
| 01/29/2004 | US20040017574 Model and parameter selection for optical metrology |
| 01/29/2004 | US20040017561 Method of detecting and classifying scratches and particles on thin film disks or wafers |
| 01/29/2004 | US20040017555 Method for improving image quality and for increasing writing speed during exposure of light-sensitive layers |
| 01/29/2004 | US20040017554 Projection exposure system |
| 01/29/2004 | US20040017551 Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method using the apparatus, and semiconductor manufacturing factory |
| 01/29/2004 | US20040017536 Display device |
| 01/29/2004 | US20040017419 Method of forming a through-substrate interconnect |
| 01/29/2004 | US20040017408 Apparatus and method of material deposition using comressed fluids |
| 01/29/2004 | US20040017365 Image display device having a drive circuit employing improved active elements |
| 01/29/2004 | US20040017340 Display device and method of manufacturing the same |
| 01/29/2004 | US20040017279 Wiring structure |
| 01/29/2004 | US20040017248 Semiconductor integrated circuit device enabling to produce a stable constant current even on a low power-source voltage |
| 01/29/2004 | US20040017245 Gate driving circuit in power module |
| 01/29/2004 | US20040017222 Heterogeneous interconnection architecture for programmable logic devices |
| 01/29/2004 | US20040017217 Semiconductor device having test element groups |
| 01/29/2004 | US20040017214 Low-current pogo probe card |
| 01/29/2004 | US20040017167 Vibration control device, stage device and exposure apparatus |
| 01/29/2004 | US20040017157 Method of and apparatus for performing circuit-processing, method of and apparatus for controlling the motion of the circuit-processing performing apparatus, and information storage medium |