Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2004
02/03/2004US6686223 Method for fabricating multi-chip package semiconductor device
02/03/2004US6686221 Method for forming packaged semiconductor device having stacked die
02/03/2004US6686220 Retrograde well structure for a CMOS imager
02/03/2004US6686217 Compound semiconductor device manufacturing method
02/03/2004US6686215 Method of producing an electroluminescence display device
02/03/2004US6686214 Method of aligning a photolithographic mask to a crystal plane
02/03/2004US6686213 Programmable capacitor for an integrated circuit
02/03/2004US6686212 Method to deposit a stacked high-κ gate dielectric for CMOS applications
02/03/2004US6686211 Method for manufacturing non-volatile memory device and non-volatile memory and semiconductor device
02/03/2004US6686210 Methods for controlling the crystallographic texture of thin films with anisotropic ferroelectric polarization or permittivity
02/03/2004US6686130 Radiation with light during development of photoresist; calibration
02/03/2004US6686129 Partial photoresist etching
02/03/2004US6686128 Method of fabricating patterned layers of material upon a substrate
02/03/2004US6686123 Photoresist monomer, polymer thereof and photoresist composition containing the same
02/03/2004US6686120 Thermal acid generator and a method of forming a pattern using the same. the photoresist composition includes about 100 parts by weight of an alkali-soluble acryl copolymer, about 5-100 parts by weight of 1,2-quinonediazide compound, about
02/03/2004US6686108 Improve resolution of patterns; reduce size difference of patterns in the coarse region and fine region; improve size accuracy of patterns existing at the boundary of the coarse region and fine region.
02/03/2004US6686107 Method for producing a semiconductor device
02/03/2004US6686103 Fused silica pellicle
02/03/2004US6686101 For use in projecting a circuit pattern on a photosensitive resist covered wafer having a transparent substrate with a reflective or dielectric layer thereon.
02/03/2004US6686099 Shade patterns
02/03/2004US6686059 Semiconductor device manufacturing method and semiconductor device
02/03/2004US6686052 Friction agitation joining; forming grooves
02/03/2004US6686015 Transferable resilient element for packaging of a semiconductor chip and method therefor
02/03/2004US6685983 Cured vitrified host polymer, decomposing the porogen which is a nitrogenous polymer
02/03/2004US6685848 Method and apparatus for dry-etching half-tone phase-shift films half-tone phase-shift photomasks and method for the preparation thereof and semiconductor circuits and method for the fabrication thereof
02/03/2004US6685847 Method for observing cross-sectional structure of sample
02/03/2004US6685844 Deep reactive ion etching process and microelectromechanical devices formed thereby
02/03/2004US6685841 Nanostructured devices for separation and analysis
02/03/2004US6685817 Controlling thickness of plating over a width of a substrate
02/03/2004US6685815 Covering substrate supported within housing with electrolyte, displacing portion of electrolyte from housing prior to electrically biasing substrate, electrically biasing substrate
02/03/2004US6685800 Apparatus for generating inductively coupled plasma
02/03/2004US6685799 Variable efficiency faraday shield
02/03/2004US6685797 Semiconductor device manufacturing system for etching a semiconductor by plasma discharge
02/03/2004US6685796 CMP uniformity
02/03/2004US6685779 Method and a system for sealing an epitaxial silicon layer on a substrate
02/03/2004US6685777 Paste applicator and paste application method for die bonding
02/03/2004US6685774 Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition
02/03/2004US6685773 Crystal growth method for nitride semiconductor, nitride semiconductor light emitting device, and method for producing the same
02/03/2004US6685757 Polishing composition
02/03/2004US6685548 Grooved polishing pads and methods of use
02/03/2004US6685543 Compensating chemical mechanical wafer polishing apparatus and method
02/03/2004US6685539 Processing tool, method of producing tool, processing method and processing apparatus
02/03/2004US6685537 Punching or drilling apertures on scouring surfaces, then filling with acrylated resins and curing to from radiation transparent openings for in situ monitoring of wafers during abrasion
02/03/2004US6685467 System using hot and cold fluids to heat and cool plate
02/03/2004US6685454 Apparatus for filling a gap between spaced layers of a semiconductor
02/03/2004US6685422 Pneumatically actuated flexure gripper for wafer handling robots
02/03/2004US6685419 Mobile elevator transporter for semi-automatic wafer transfer
02/03/2004US6685073 Method and apparatus for stretching and processing saw film tape after breaking a partially sawn wafer
02/03/2004US6684891 Applying cleaning fluid to the wafer, positioning a vibration transmitter adjacent the wafer with a transducer coupled to the transmitter, energizing transducer to vibrate transmitter to transmit vibration into fluid to loosen particles
02/03/2004US6684890 Megasonic cleaner probe system with gasified fluid
02/03/2004US6684889 Method and device for treating a substrate
02/03/2004US6684699 Micromechanical device
02/03/2004US6684652 Method of and an apparatus for regulating the temperature of an electrostatic chuck
02/03/2004US6684523 Particle removal apparatus
02/03/2004US6684496 Forming chip packages by positioning and connecting die pads to frame supports, then encapsulating in plastics and hardening to form protective coatings; electrical and electronic apparatus
02/03/2004US6684447 Cleaning sponge roller
02/03/2004CA2290764C Method of forming dielectric thin film pattern and method of forming laminate pattern comprising dielectric thin film and conductive thin film
01/2004
01/29/2004WO2004010752A1 Method for fastening microtool components to objects
01/29/2004WO2004010745A1 Capillary tubing
01/29/2004WO2004010741A1 Active matrix organic el display device and manufacturing method thereof
01/29/2004WO2004010512A2 Heteroatom-containing diamondoid transistors
01/29/2004WO2004010508A1 Nonvolatile semiconductor storage device and manufacturing method
01/29/2004WO2004010507A1 Method for producing a t-gate structure and an associated field effect transistor
01/29/2004WO2004010506A1 Image sensor and image sensor module
01/29/2004WO2004010505A1 Soi wafer and production method therefor
01/29/2004WO2004010504A1 Method for processing soi substrate
01/29/2004WO2004010503A1 Ferroelectric gate device
01/29/2004WO2004010502A1 Hybrid integrated circuit device
01/29/2004WO2004010499A1 Module component
01/29/2004WO2004010496A1 Hetero integration of semiconductor materials on silicon
01/29/2004WO2004010495A1 Production method for semiconductor device
01/29/2004WO2004010494A2 Method for transferring an electrically active thin layer
01/29/2004WO2004010493A1 Method of preventing shift of alignment marks during rapid thermal processing
01/29/2004WO2004010492A1 Opening/closing device of substrate holding container
01/29/2004WO2004010491A1 Probe device, probe card channel information creation program, and probe card channel information creation device
01/29/2004WO2004010490A1 Indium-containing wafer and method for production thereof
01/29/2004WO2004010489A1 Vertical junction field effect transistor and method for fabricating the same
01/29/2004WO2004010488A1 Semiconductor device
01/29/2004WO2004010487A1 Semiconductor abrasive, process for producing the same and method of polishing
01/29/2004WO2004010486A1 High temperature anisotropic etching of multi-layer structures
01/29/2004WO2004010485A2 Semiconductor element with stress-carrying semiconductor layer and corresponding production method
01/29/2004WO2004010484A1 Method for fabricating a notch gate structure of a field effect transistor
01/29/2004WO2004010483A1 Illuminating optical system, exposure system and exposure method
01/29/2004WO2004010482A1 Dual chamber vacuum processing system
01/29/2004WO2004010481A1 Method of manufacture of a multi-layered substrate with a thin single crystalline layer
01/29/2004WO2004010480A1 Apparatus and method for thermally isolating a heat chamber
01/29/2004WO2004010479A1 Re-usable carrier wafer and method for producing the same
01/29/2004WO2004010477A2 Adaptive electropolishing using thickness measurements and removal of barrier and sacrificial layers
01/29/2004WO2004010476A2 Substrate processing apparatus
01/29/2004WO2004010475A2 Method of reducing internal stress in materials
01/29/2004WO2004010473A2 Bubbler for substrate processing
01/29/2004WO2004010471A2 In-situ formation of metal insulator metal capacitors
01/29/2004WO2004010470A2 Method to overcome instability of ultra-shallow semiconductor junctions
01/29/2004WO2004010469A2 Atomic layer deposition of multi-metallic precursors
01/29/2004WO2004010468A2 Low temperature ozone anneal of gate and capacitor dielectrics
01/29/2004WO2004010467A2 Low temperature dielectric deposition using aminosilane and ozone
01/29/2004WO2004010466A2 Metal organic chemical vapor deposition and atomic layer deposition of metal oxynitride and metal silicon oxynitride
01/29/2004WO2004010465A2 Thin dielectric formation by steam oxidation
01/29/2004WO2004010464A2 Methods of electrochemically treating semiconductor substrates, and methods of forming capacitor constructions
01/29/2004WO2004010462A2 Infrared thermopile detector system for semiconductor process monitoring and control