| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/03/2004 | US6686223 Method for fabricating multi-chip package semiconductor device |
| 02/03/2004 | US6686221 Method for forming packaged semiconductor device having stacked die |
| 02/03/2004 | US6686220 Retrograde well structure for a CMOS imager |
| 02/03/2004 | US6686217 Compound semiconductor device manufacturing method |
| 02/03/2004 | US6686215 Method of producing an electroluminescence display device |
| 02/03/2004 | US6686214 Method of aligning a photolithographic mask to a crystal plane |
| 02/03/2004 | US6686213 Programmable capacitor for an integrated circuit |
| 02/03/2004 | US6686212 Method to deposit a stacked high-κ gate dielectric for CMOS applications |
| 02/03/2004 | US6686211 Method for manufacturing non-volatile memory device and non-volatile memory and semiconductor device |
| 02/03/2004 | US6686210 Methods for controlling the crystallographic texture of thin films with anisotropic ferroelectric polarization or permittivity |
| 02/03/2004 | US6686130 Radiation with light during development of photoresist; calibration |
| 02/03/2004 | US6686129 Partial photoresist etching |
| 02/03/2004 | US6686128 Method of fabricating patterned layers of material upon a substrate |
| 02/03/2004 | US6686123 Photoresist monomer, polymer thereof and photoresist composition containing the same |
| 02/03/2004 | US6686120 Thermal acid generator and a method of forming a pattern using the same. the photoresist composition includes about 100 parts by weight of an alkali-soluble acryl copolymer, about 5-100 parts by weight of 1,2-quinonediazide compound, about |
| 02/03/2004 | US6686108 Improve resolution of patterns; reduce size difference of patterns in the coarse region and fine region; improve size accuracy of patterns existing at the boundary of the coarse region and fine region. |
| 02/03/2004 | US6686107 Method for producing a semiconductor device |
| 02/03/2004 | US6686103 Fused silica pellicle |
| 02/03/2004 | US6686101 For use in projecting a circuit pattern on a photosensitive resist covered wafer having a transparent substrate with a reflective or dielectric layer thereon. |
| 02/03/2004 | US6686099 Shade patterns |
| 02/03/2004 | US6686059 Semiconductor device manufacturing method and semiconductor device |
| 02/03/2004 | US6686052 Friction agitation joining; forming grooves |
| 02/03/2004 | US6686015 Transferable resilient element for packaging of a semiconductor chip and method therefor |
| 02/03/2004 | US6685983 Cured vitrified host polymer, decomposing the porogen which is a nitrogenous polymer |
| 02/03/2004 | US6685848 Method and apparatus for dry-etching half-tone phase-shift films half-tone phase-shift photomasks and method for the preparation thereof and semiconductor circuits and method for the fabrication thereof |
| 02/03/2004 | US6685847 Method for observing cross-sectional structure of sample |
| 02/03/2004 | US6685844 Deep reactive ion etching process and microelectromechanical devices formed thereby |
| 02/03/2004 | US6685841 Nanostructured devices for separation and analysis |
| 02/03/2004 | US6685817 Controlling thickness of plating over a width of a substrate |
| 02/03/2004 | US6685815 Covering substrate supported within housing with electrolyte, displacing portion of electrolyte from housing prior to electrically biasing substrate, electrically biasing substrate |
| 02/03/2004 | US6685800 Apparatus for generating inductively coupled plasma |
| 02/03/2004 | US6685799 Variable efficiency faraday shield |
| 02/03/2004 | US6685797 Semiconductor device manufacturing system for etching a semiconductor by plasma discharge |
| 02/03/2004 | US6685796 CMP uniformity |
| 02/03/2004 | US6685779 Method and a system for sealing an epitaxial silicon layer on a substrate |
| 02/03/2004 | US6685777 Paste applicator and paste application method for die bonding |
| 02/03/2004 | US6685774 Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition |
| 02/03/2004 | US6685773 Crystal growth method for nitride semiconductor, nitride semiconductor light emitting device, and method for producing the same |
| 02/03/2004 | US6685757 Polishing composition |
| 02/03/2004 | US6685548 Grooved polishing pads and methods of use |
| 02/03/2004 | US6685543 Compensating chemical mechanical wafer polishing apparatus and method |
| 02/03/2004 | US6685539 Processing tool, method of producing tool, processing method and processing apparatus |
| 02/03/2004 | US6685537 Punching or drilling apertures on scouring surfaces, then filling with acrylated resins and curing to from radiation transparent openings for in situ monitoring of wafers during abrasion |
| 02/03/2004 | US6685467 System using hot and cold fluids to heat and cool plate |
| 02/03/2004 | US6685454 Apparatus for filling a gap between spaced layers of a semiconductor |
| 02/03/2004 | US6685422 Pneumatically actuated flexure gripper for wafer handling robots |
| 02/03/2004 | US6685419 Mobile elevator transporter for semi-automatic wafer transfer |
| 02/03/2004 | US6685073 Method and apparatus for stretching and processing saw film tape after breaking a partially sawn wafer |
| 02/03/2004 | US6684891 Applying cleaning fluid to the wafer, positioning a vibration transmitter adjacent the wafer with a transducer coupled to the transmitter, energizing transducer to vibrate transmitter to transmit vibration into fluid to loosen particles |
| 02/03/2004 | US6684890 Megasonic cleaner probe system with gasified fluid |
| 02/03/2004 | US6684889 Method and device for treating a substrate |
| 02/03/2004 | US6684699 Micromechanical device |
| 02/03/2004 | US6684652 Method of and an apparatus for regulating the temperature of an electrostatic chuck |
| 02/03/2004 | US6684523 Particle removal apparatus |
| 02/03/2004 | US6684496 Forming chip packages by positioning and connecting die pads to frame supports, then encapsulating in plastics and hardening to form protective coatings; electrical and electronic apparatus |
| 02/03/2004 | US6684447 Cleaning sponge roller |
| 02/03/2004 | CA2290764C Method of forming dielectric thin film pattern and method of forming laminate pattern comprising dielectric thin film and conductive thin film |
| 01/29/2004 | WO2004010752A1 Method for fastening microtool components to objects |
| 01/29/2004 | WO2004010745A1 Capillary tubing |
| 01/29/2004 | WO2004010741A1 Active matrix organic el display device and manufacturing method thereof |
| 01/29/2004 | WO2004010512A2 Heteroatom-containing diamondoid transistors |
| 01/29/2004 | WO2004010508A1 Nonvolatile semiconductor storage device and manufacturing method |
| 01/29/2004 | WO2004010507A1 Method for producing a t-gate structure and an associated field effect transistor |
| 01/29/2004 | WO2004010506A1 Image sensor and image sensor module |
| 01/29/2004 | WO2004010505A1 Soi wafer and production method therefor |
| 01/29/2004 | WO2004010504A1 Method for processing soi substrate |
| 01/29/2004 | WO2004010503A1 Ferroelectric gate device |
| 01/29/2004 | WO2004010502A1 Hybrid integrated circuit device |
| 01/29/2004 | WO2004010499A1 Module component |
| 01/29/2004 | WO2004010496A1 Hetero integration of semiconductor materials on silicon |
| 01/29/2004 | WO2004010495A1 Production method for semiconductor device |
| 01/29/2004 | WO2004010494A2 Method for transferring an electrically active thin layer |
| 01/29/2004 | WO2004010493A1 Method of preventing shift of alignment marks during rapid thermal processing |
| 01/29/2004 | WO2004010492A1 Opening/closing device of substrate holding container |
| 01/29/2004 | WO2004010491A1 Probe device, probe card channel information creation program, and probe card channel information creation device |
| 01/29/2004 | WO2004010490A1 Indium-containing wafer and method for production thereof |
| 01/29/2004 | WO2004010489A1 Vertical junction field effect transistor and method for fabricating the same |
| 01/29/2004 | WO2004010488A1 Semiconductor device |
| 01/29/2004 | WO2004010487A1 Semiconductor abrasive, process for producing the same and method of polishing |
| 01/29/2004 | WO2004010486A1 High temperature anisotropic etching of multi-layer structures |
| 01/29/2004 | WO2004010485A2 Semiconductor element with stress-carrying semiconductor layer and corresponding production method |
| 01/29/2004 | WO2004010484A1 Method for fabricating a notch gate structure of a field effect transistor |
| 01/29/2004 | WO2004010483A1 Illuminating optical system, exposure system and exposure method |
| 01/29/2004 | WO2004010482A1 Dual chamber vacuum processing system |
| 01/29/2004 | WO2004010481A1 Method of manufacture of a multi-layered substrate with a thin single crystalline layer |
| 01/29/2004 | WO2004010480A1 Apparatus and method for thermally isolating a heat chamber |
| 01/29/2004 | WO2004010479A1 Re-usable carrier wafer and method for producing the same |
| 01/29/2004 | WO2004010477A2 Adaptive electropolishing using thickness measurements and removal of barrier and sacrificial layers |
| 01/29/2004 | WO2004010476A2 Substrate processing apparatus |
| 01/29/2004 | WO2004010475A2 Method of reducing internal stress in materials |
| 01/29/2004 | WO2004010473A2 Bubbler for substrate processing |
| 01/29/2004 | WO2004010471A2 In-situ formation of metal insulator metal capacitors |
| 01/29/2004 | WO2004010470A2 Method to overcome instability of ultra-shallow semiconductor junctions |
| 01/29/2004 | WO2004010469A2 Atomic layer deposition of multi-metallic precursors |
| 01/29/2004 | WO2004010468A2 Low temperature ozone anneal of gate and capacitor dielectrics |
| 01/29/2004 | WO2004010467A2 Low temperature dielectric deposition using aminosilane and ozone |
| 01/29/2004 | WO2004010466A2 Metal organic chemical vapor deposition and atomic layer deposition of metal oxynitride and metal silicon oxynitride |
| 01/29/2004 | WO2004010465A2 Thin dielectric formation by steam oxidation |
| 01/29/2004 | WO2004010464A2 Methods of electrochemically treating semiconductor substrates, and methods of forming capacitor constructions |
| 01/29/2004 | WO2004010462A2 Infrared thermopile detector system for semiconductor process monitoring and control |