| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/02/2004 | US6699740 Method for manufacturing a lateral double-diffused MOS transistor having stable characteristics and equal drift length |
| 03/02/2004 | US6699738 Semiconductor doping method and liquid crystal display device fabricating method using the same |
| 03/02/2004 | US6699737 Method of manufacturing a semiconductor device |
| 03/02/2004 | US6699736 Electrical coupling of a stiffener to a chip carrier |
| 03/02/2004 | US6699735 Semiconductor device and method for manufacturing the semiconductor device |
| 03/02/2004 | US6699732 Pitch compensation in flip-chip packaging |
| 03/02/2004 | US6699731 Substrate of semiconductor package |
| 03/02/2004 | US6699729 Method of forming planar color filters in an image sensor |
| 03/02/2004 | US6699728 Patterning of electrodes in oled devices |
| 03/02/2004 | US6699727 Method for prioritizing production lots based on grade estimates and output requirements |
| 03/02/2004 | US6699726 Semiconductor device and method for the manufacture thereof |
| 03/02/2004 | US6699725 Methods of fabricating ferroelectric memory devices having a ferroelectric planarization layer |
| 03/02/2004 | US6699645 Using chemically amplified resist which comprises alkali insoluble base polymer and acid generator in which patternwise exposed film of resist is developed with organic alkaline developer in presence of surfactant; peel, crack resistance |
| 03/02/2004 | US6699644 Process for forming a photoresist pattern comprising alkaline treatment |
| 03/02/2004 | US6699641 Photosensitive bottom anti-reflective coating |
| 03/02/2004 | US6699639 Projection-exposure methods and apparatus exhibiting increased throughput |
| 03/02/2004 | US6699635 Positive photosensitive composition |
| 03/02/2004 | US6699628 Synchronize movable stage, calibration plate, detectable label |
| 03/02/2004 | US6699626 Mask set for use in phase shift photolithography technique which is suitable to form random patterns |
| 03/02/2004 | US6699625 Absorber pattern that is configured to absorb extreme ultraviolet rays |
| 03/02/2004 | US6699624 Precision optical measurement of the two process layers on a semiconductor wafer, set of diffraction grating test patterns that are used in combination with rigorous diffraction grating analysis |
| 03/02/2004 | US6699552 Silicon wafer break pattern, silicon substrate |
| 03/02/2004 | US6699531 Enhancing the thermostability of a fluorine containing carbon film capable of being used as, e.g., an interlayer dielectric by reacting fluorine within film with hydrogen plasma |
| 03/02/2004 | US6699530 Method for constructing a film on a semiconductor wafer |
| 03/02/2004 | US6699524 Method and apparatus for feeding gas phase reactant into a reaction chamber |
| 03/02/2004 | US6699436 Apparatus for measuring contaminant mobile ions in dielectric materials |
| 03/02/2004 | US6699402 Chemical mechanical polishing (cmp) slurry of abrasive polishing particles, a bromide compound, a bromate compound for providing free bromine oxidizing agent and an organic acid for mediating bromate decomposition; capacitors |
| 03/02/2004 | US6699401 Kneading sic powder, compacting, calcining, purifying, impregnating with silicon in sealed vessel provided in heating furnace body |
| 03/02/2004 | US6699400 Etch process and apparatus therefor |
| 03/02/2004 | US6699399 Self-cleaning etch process |
| 03/02/2004 | US6699396 Methods for electroplating large copper interconnects |
| 03/02/2004 | US6699380 Robotic transferring between cells |
| 03/02/2004 | US6699375 Method of extending process kit consumable recycling life |
| 03/02/2004 | US6699373 Apparatus for processing the surface of a microelectronic workpiece |
| 03/02/2004 | US6699371 Fabrication method of blue light emitting ZnO thin film phosphor |
| 03/02/2004 | US6699356 Method and apparatus for chemical-mechanical jet etching of semiconductor structures |
| 03/02/2004 | US6699330 Cleaning with aqueous acetic acid containing ozone |
| 03/02/2004 | US6699329 Coating and curing system |
| 03/02/2004 | US6699304 Palladium-containing particles, method and apparatus of manufacture, palladium-containing devices made therefrom |
| 03/02/2004 | US6699299 Composition and method for polishing in metal CMP |
| 03/02/2004 | US6699115 Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus |
| 03/02/2004 | US6699022 Vacuum exhaust apparatuses and vacuum exhaust methods |
| 03/02/2004 | US6699004 Wafer rotation in wafer handling devices |
| 03/02/2004 | US6699003 Carrying device |
| 03/02/2004 | US6698992 Elastically expandable positioning device |
| 03/02/2004 | US6698991 Fabrication system with extensible equipment sets |
| 03/02/2004 | US6698944 Exposure apparatus, substrate processing unit and lithographic system, and device manufacturing method |
| 03/02/2004 | US6698735 Fluid bearings and vacuum chucks and methods for producing same |
| 03/02/2004 | US6698728 Method and apparatus for delivering precursors to a plurality of epitaxial reactor sites |
| 03/02/2004 | US6698646 Room temperature gold wire bonding |
| 03/02/2004 | US6698488 Apparatus for sticking a tape onto a semiconductor wafer and method of sticking the tape |
| 03/02/2004 | US6698486 Apparatus for removing wafer ring tape |
| 03/02/2004 | US6698469 Cylinder cabinet and method of purging remaining gas in the pipe thereof |
| 03/02/2004 | US6698439 Processing apparatus with sealing mechanism |
| 03/02/2004 | US6698416 Film frame substrate fixture |
| 03/02/2004 | US6698088 Universal clamping mechanism |
| 03/02/2004 | US6698086 Method for the linear configuration of metallic fuse sections on wafers |
| 03/02/2004 | US6698084 Method for manufacturing radio frequency module components with surface acoustic wave element |
| 03/02/2004 | US6698082 Micro-electromechanical switch fabricated by simultaneous formation of a resistor and bottom electrode |
| 03/02/2004 | CA2323255C Gas shower unit for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus |
| 03/02/2004 | CA2154357C Microstructures and single-mask, single-crystal process for fabrication thereof |
| 02/26/2004 | WO2004017481A1 Sensor protection circuit |
| 02/26/2004 | WO2004017432A1 Nitride semiconductor and fabrication method thereof |
| 02/26/2004 | WO2004017431A1 Nitride semiconductor led and fabrication method thereof |
| 02/26/2004 | WO2004017423A2 Sensor arrangement |
| 02/26/2004 | WO2004017421A1 Micro t-shaped electrode fabricating method |
| 02/26/2004 | WO2004017419A1 Vertical gate semiconductor device with a self-aligned structure |
| 02/26/2004 | WO2004017418A1 Semiconductor integrated circuit device and method for fabricating the same |
| 02/26/2004 | WO2004017417A1 Field effect transistor, associated use, and associated production method |
| 02/26/2004 | WO2004017416A1 Insulated gate field-effect transistor and its manufacturing method, and imaging device and its manufacturing method |
| 02/26/2004 | WO2004017415A1 Bipolar transistor for avoiding thermal runaway |
| 02/26/2004 | WO2004017414A1 Method of making a vertical gate semiconductor device |
| 02/26/2004 | WO2004017412A1 Semiconductor device and method for forming |
| 02/26/2004 | WO2004017410A1 Ferroelectric memory and its manufacturing method |
| 02/26/2004 | WO2004017409A1 Method for modifying the impedance of semiconductor devices using a focused heating source |
| 02/26/2004 | WO2004017407A1 Surface-mounted semiconductor component and method for the production thereof |
| 02/26/2004 | WO2004017404A1 Use of metal oxide masks for treating surfaces in the production of microchips |
| 02/26/2004 | WO2004017403A1 Method for forming a dual gate oxide device using a metal oxide and resulting device |
| 02/26/2004 | WO2004017402A1 Semiconductor device and method for manufacturing same |
| 02/26/2004 | WO2004017401A1 Semiconductor component with trench insulation and corresponding production method |
| 02/26/2004 | WO2004017400A1 Assembly comprising a semiconductor chip and support therefor, in addition to method for a bonded wiring connection |
| 02/26/2004 | WO2004017398A2 Semiconductor-on-insulator device and method of its manufacture |
| 02/26/2004 | WO2004017397A1 Method for manufacturing semiconductor device |
| 02/26/2004 | WO2004017396A1 Method of forming insulation film on semiconductor substrate |
| 02/26/2004 | WO2004017395A1 Isolated complementary mos devices in epi-less substrate |
| 02/26/2004 | WO2004017394A1 Method for the vertical structuring of substrates in semiconductor process technology by means of non-conforming deposition |
| 02/26/2004 | WO2004017393A2 Prevention of lateral oxidation in a transistor utilizing an ultra thin oxygen-diffusion barrier |
| 02/26/2004 | WO2004017392A1 Laser application method |
| 02/26/2004 | WO2004017391A1 Ferroelectric memory, semiconductor device, production method for ferroelectric memory, and production method for semiconductor device |
| 02/26/2004 | WO2004017390A1 Method and compositions for hardening photoresist in etching processes |
| 02/26/2004 | WO2004017389A2 Method for performing real time arcing detection |
| 02/26/2004 | WO2004017387A2 Vision system |
| 02/26/2004 | WO2004017385A2 Device for rapid heat treatment comprising inside the reaction chamber cold-walled halogen infrared lamps |
| 02/26/2004 | WO2004017384A1 Device for etching semiconductors with a large surface area |
| 02/26/2004 | WO2004017383A2 Low termperature deposition of silicon oxides and oxynitrides |
| 02/26/2004 | WO2004017382A2 Process and system for laser crystallization processing of film regions on a substrate to provide substantial uniformity within areas in such regions and edge areas thereof, and a structure of such film regions |
| 02/26/2004 | WO2004017381A2 Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and structure of such film regions |
| 02/26/2004 | WO2004017380A2 A single-shot semiconductor processing system and method having various irradiation patterns |
| 02/26/2004 | WO2004017379A2 Process and system for processing a thin film sample and thin film structure |
| 02/26/2004 | WO2004017378A2 Atomic layer deposition of high k metal silicates |