Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2004
03/03/2004EP1394843A2 Barrier layer and method of supressing diffusion during processing of semiconductor devices
03/03/2004EP1394842A1 Thin film forming apparatus cleaning method
03/03/2004EP1394841A2 Method of selective substrate bonding
03/03/2004EP1394840A2 System for transporting substrate carriers
03/03/2004EP1394839A2 Ultrasonic bonding method and device
03/03/2004EP1394812A1 Test circuit for semiconductor memory
03/03/2004EP1394808A2 Semiconductor memory
03/03/2004EP1394616A1 An alignment tool, a lithographic apparatus, an alignment method and a device manufacturing method
03/03/2004EP1394611A1 Lithographic apparatus, device manufacturing method, and device manufactured thereby
03/03/2004EP1394610A2 Microlithography reticles including high-contrast reticle-identification codes, and apparatus and methods for identifying reticles based on such codes
03/03/2004EP1394597A2 Contact structure of semiconductor device, manufacturing method thereof, thin film transistor array panel including contact structure, and manufacturing method thereof
03/03/2004EP1394590A1 Method for growing a calcium fluoride crystal
03/03/2004EP1394574A2 Optical material, and optical element, optical system and laminated diffractive optical element using it
03/03/2004EP1394573A2 Optical material, and optical element, optical system, and laminate type diffraction optical element, which are made of optical material
03/03/2004EP1394560A2 Semiconductor chip test system and test method thereof
03/03/2004EP1394533A2 Stress measurement method using x-ray diffraction analysis
03/03/2004EP1394286A1 Pretreatment of an organic layer for ALD thereof
03/03/2004EP1394164A1 Precursor containing a nitrogen compound bound to HfCl4 for hafnium oxide layer and method for forming hafnium oxide film using the precursor
03/03/2004EP1394136A1 Ceramic bonded body and its producing method, and ceramic structure for semiconductor wafer
03/03/2004EP1394128A2 Optical apparatus
03/03/2004EP1394127A1 Quartz glass member and projection aligner
03/03/2004EP1393858A2 Polishing machine
03/03/2004EP1393546A1 A tdi detecting device, a feed-through equipment and electron beam apparatus using these devices
03/03/2004EP1393432A1 Electron tunneling device
03/03/2004EP1393389A2 Laser patterning of devices
03/03/2004EP1393387A1 Organic field effect transistor, method for production and use thereof in the assembly of integrated circuits
03/03/2004EP1393382A2 Vertical metal oxide semiconductor field-effect diodes
03/03/2004EP1393381A1 Soi device with reduced junction capacitance
03/03/2004EP1393379A1 Trench schottky rectifier
03/03/2004EP1393378A2 Method for producing a stepped structure on a substrate
03/03/2004EP1393376A1 Process for making a high voltage npn bipolar device with improved ac performance
03/03/2004EP1393371A2 Electronic module and method for assembling same
03/03/2004EP1393370A2 Electronic chip and electronic chip assembly
03/03/2004EP1393368A2 Product comprising a substrate and a chip attached to the substrate
03/03/2004EP1393367A2 Integrated sensor packaging and methods of making the same
03/03/2004EP1393366A2 Method of manufacturing an electronic device
03/03/2004EP1393365A2 Method and apparatus for determining process layer conformality
03/03/2004EP1393364A2 Plastic housing comprising several semiconductor chips and a wiring modification plate, and method for producing the plastic housing in an injection-moulding mould
03/03/2004EP1393363A1 Method of manufacturing a thin film transistor
03/03/2004EP1393362A2 Method of manufacturing a trench-gate semiconductor device
03/03/2004EP1393361A2 Low temperature load and bake
03/03/2004EP1393360A1 Method and device for short-term thermal treatment of flat objects
03/03/2004EP1393359A1 Rector having a movable shuter
03/03/2004EP1393358A1 Doped silicon deposition process in resistively heated single wafer chamber
03/03/2004EP1393357A2 A method for making a metal-insulator-metal capacitor using plate-through mask techniques
03/03/2004EP1393356A2 Self-aligned double-sided vertical mimcap
03/03/2004EP1393355A2 Device for receiving plate-shaped objects and device for handling said objects
03/03/2004EP1393354A1 Method and device for the thermal treatment of substrates
03/03/2004EP1393353A2 Ultra fine pitch capillary
03/03/2004EP1393352A2 Semiconductor device, semiconductor layer and production method thereof
03/03/2004EP1393351A1 Method and device for doping, diffusion and oxidation of silicon wafers under reduced pressure
03/03/2004EP1393350A2 Assembly comprising heat distributing plate and edge support
03/03/2004EP1393134A2 Lighting system with a plurality of individual grids
03/03/2004EP1393133A2 Projection system for euv lithography
03/03/2004EP1393132A2 Exposure control for phase shifting photolithographic masks
03/03/2004EP1393131A1 Thick film photoresists and methods for use thereof
03/03/2004EP1393130A2 Design and layout of phase shifting photolithographic masks
03/03/2004EP1393129A2 Phase conflict resolution for photolithographic masks
03/03/2004EP1393128A1 Lithography system and method for device manufacture
03/03/2004EP1393127A1 Backside alignment system and method
03/03/2004EP1393115A1 Systems and methods for scanning a beam of light across a specimen
03/03/2004EP1393114A2 Correction of birefringence in cubic crystalline projection lenses and optical systems
03/03/2004EP1393087A1 Method for measuring fuse resistance in a fuse array
03/03/2004EP1392895A2 Semi-insulating silicon carbide without vanadium domination
03/03/2004EP1392894A2 Molecular beam epitaxy equipment
03/03/2004EP1392889A1 Anode assembly and process for supplying electrolyte to a planar substrate surface
03/03/2004EP1392885A1 Gas port sealing for cvd/cvi furnace hearth plates
03/03/2004EP1392883A1 Assemblies comprising molybdenum and aluminum; and methods of utilizing interlayers in forming target/backing plate assemblies
03/03/2004EP1392761A1 Organosilicate polymer and insulating film therefrom
03/03/2004EP1392675A1 Substituted oxime derivatives and the use thereof as latent acids
03/03/2004EP1392508A1 Anti-reflective coating composition with improved spin bowl compatibility
03/03/2004EP1392449A1 Over-clocking in a microdeposition control system to improve resolution
03/03/2004EP1187698B1 Beam shaping and projection imaging with solid state uv gaussian beam to form vias
03/03/2004EP1166324B1 Apparatus for improving plasma distribution and performance in an inductively coupled plasma
03/03/2004EP1099247B1 Method for transferring solder to a device and/or testing the device
03/03/2004EP1015831B1 Semiconductor processing furnace heating subassembly
03/03/2004EP0966752B1 Correction device for correcting the lens defects in particle-optical apparatus
03/03/2004CN1479945A Information memory and manufacturing method therefor
03/03/2004CN1479944A Method to detect surface metal contamination
03/03/2004CN1479943A Patterned buried insulator
03/03/2004CN1479942A Method for determinating endpoint and semiconductor wafer
03/03/2004CN1479941A Method for doping semiconductor layer, method for producing thin film semiconductor element and thin film semiconductor device
03/03/2004CN1479940A Observation device and its manufacturing method, exposure device and method for manufacturing micro-device
03/03/2004CN1479936A Wafer area pressure control for plasma confinement
03/03/2004CN1479923A Memory device and method for operation of the same
03/03/2004CN1479887A Methods and apparatus for obtaining data for process operation, optimization, monitoring and control
03/03/2004CN1479805A Thin film forming method and film forming device
03/03/2004CN1479804A Ultralow dielectric constant material as intralevel or interlevel dielectric in semiconductor device, method for fabricating the same, and electronic device containing the same
03/03/2004CN1479802A Alluminium alloy thin film, wiring circuit having the thin film and target material depositing the thin film
03/03/2004CN1479773A Liquid crystal polymers for flexible circuits
03/03/2004CN1479667A Edge grip aligner with buffering capabilities
03/03/2004CN1479665A Actived slurry chemical mechanical planarization system and method for implenting the same
03/03/2004CN1479567A Wiring base plate, semconductor device and its manufacturing mtehod, circuit board and electronic instrument
03/03/2004CN1479558A Organic electroluminescence panel
03/03/2004CN1479448A 半导体器件 Semiconductor devices
03/03/2004CN1479406A Plane medium transmission line and integrated circuit using the transmission line
03/03/2004CN1479385A Compound semiconductor device and its making method
03/03/2004CN1479383A Semiconductor device and its making method
03/03/2004CN1479381A Transistor with III/VI family emitter
03/03/2004CN1479380A Silicon nitride read-only memory cell for lowering secondary effect and its manufacturing method