| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/09/2004 | US6703629 Charged beam exposure apparatus having blanking aperture and basic figure aperture |
| 03/09/2004 | US6703626 Defect observed with the atomic force microscope (afm) and a pattern putting together the shape and position of the defect is extracted from and afm image. the extracted pattern is then converted to a shape format for a for an ion beam defect |
| 03/09/2004 | US6703623 Electron beam proximity exposure apparatus |
| 03/09/2004 | US6703592 System of controlling the temperature of a processing chamber |
| 03/09/2004 | US6703589 Apparatus and process for heat-treating at least one material being processed in a heat-treatment space of a heat-treatment container under a specific process-gas atmosphere of at least one process gas |
| 03/09/2004 | US6703582 Energy-efficient method and system for processing target material using an amplified, wavelength-shifted pulse train |
| 03/09/2004 | US6703560 Stress resistant land grid array (LGA) module and method of forming the same |
| 03/09/2004 | US6703328 Semiconductor device manufacturing method |
| 03/09/2004 | US6703327 High-pressure anneal process for integrated circuits |
| 03/09/2004 | US6703326 High-pressure anneal process for integrated circuits |
| 03/09/2004 | US6703325 High pressure anneal process for integrated circuits |
| 03/09/2004 | US6703324 Mechanically reinforced highly porous low dielectric constant films |
| 03/09/2004 | US6703323 Method of inhibiting pattern collapse using a relacs material |
| 03/09/2004 | US6703322 Method of forming multiple oxide layers with different thicknesses in a linear nitrogen doping process |
| 03/09/2004 | US6703321 Low thermal budget solution for PMD application using sacvd layer |
| 03/09/2004 | US6703320 Successful and easy method to remove polysilicon film |
| 03/09/2004 | US6703319 Compositions and methods for removing etch residue |
| 03/09/2004 | US6703318 Method of planarizing a semiconductor die |
| 03/09/2004 | US6703317 Method to neutralize charge imbalance following a wafer cleaning process |
| 03/09/2004 | US6703316 Method and system for processing substrate |
| 03/09/2004 | US6703315 Method of providing a shallow trench in a deep-trench device |
| 03/09/2004 | US6703314 Method for fabricating semiconductor device |
| 03/09/2004 | US6703312 Method of forming active devices of different gatelengths using lithographic printed gate images of same length |
| 03/09/2004 | US6703311 Method for estimating capacitance of deep trench capacitors |
| 03/09/2004 | US6703310 Semiconductor device and method of production of same |
| 03/09/2004 | US6703309 Method of reducing oxidation of metal structures using ion implantation, and device formed by such method |
| 03/09/2004 | US6703308 Method of inserting alloy elements to reduce copper diffusion and bulk diffusion |
| 03/09/2004 | US6703307 Method of implantation after copper seed deposition |
| 03/09/2004 | US6703306 Methods of fabricating integrated circuit memories including titanium nitride bit lines |
| 03/09/2004 | US6703305 Semiconductor device having metallized interconnect structure and method of fabrication |
| 03/09/2004 | US6703304 Dual damascene process using self-assembled monolayer and spacers |
| 03/09/2004 | US6703303 Method of manufacturing a portion of a memory |
| 03/09/2004 | US6703302 Method of making a low dielectric insulation layer |
| 03/09/2004 | US6703301 Method of preventing tungsten plugs from corrosion |
| 03/09/2004 | US6703300 Method for making multilayer electronic devices |
| 03/09/2004 | US6703299 Underfill process for flip-chip device |
| 03/09/2004 | US6703298 Self-aligned process for fabricating memory cells with two isolated floating gates |
| 03/09/2004 | US6703297 Method of removing inorganic gate antireflective coating after spacer formation |
| 03/09/2004 | US6703296 Method for forming metal salicide |
| 03/09/2004 | US6703295 Method and apparatus for self-doping contacts to a semiconductor |
| 03/09/2004 | US6703294 Method for producing a region doped with boron in a SiC-layer |
| 03/09/2004 | US6703293 Implantation at elevated temperatures for amorphization re-crystallization of Si1-xGex films on silicon substrates |
| 03/09/2004 | US6703292 Method of making a semiconductor wafer having a depletable multiple-region semiconductor material |
| 03/09/2004 | US6703291 Selective NiGe wet etch for transistors with Ge body and/or Ge source/drain extensions |
| 03/09/2004 | US6703289 Method for forming crystalline silicon layer and crystalline silicon semiconductor device |
| 03/09/2004 | US6703288 Compound crystal and method of manufacturing same |
| 03/09/2004 | US6703287 Production method for shallow trench insulation |
| 03/09/2004 | US6703286 Metal bond pad for low-k inter metal dielectric |
| 03/09/2004 | US6703285 Method for manufacturing capacitor structure, and method for manufacturing capacitor element |
| 03/09/2004 | US6703284 Methods for fabricating a compound semiconductor protection device for low voltage and high speed data lines |
| 03/09/2004 | US6703283 Discontinuous dielectric interface for bipolar transistors |
| 03/09/2004 | US6703282 Method of reducing NMOS device current degradation via formation of an HTO layer as an underlying component of a nitride-oxide sidewall spacer |
| 03/09/2004 | US6703281 Differential laser thermal process with disposable spacers |
| 03/09/2004 | US6703279 Semiconductor device having contact of Si-Ge combined with cobalt silicide |
| 03/09/2004 | US6703278 Method of forming layers of oxide on a surface of a substrate |
| 03/09/2004 | US6703277 Reducing agent for high-K gate dielectric parasitic interfacial layer |
| 03/09/2004 | US6703276 Passivated silicon carbide devices with low leakage current and method of fabricating |
| 03/09/2004 | US6703275 Flash memory cell and method of manufacturing the same, and programming/erasing/reading method in the flash memory cell |
| 03/09/2004 | US6703274 Buried strap with limited outdiffusion and vertical transistor DRAM |
| 03/09/2004 | US6703273 Aggressive capacitor array cell layout for narrow diameter DRAM trench capacitor structures via SOI technology |
| 03/09/2004 | US6703272 Methods of forming spaced conductive regions, and methods of forming capacitor constructions |
| 03/09/2004 | US6703271 Complementary metal oxide semiconductor transistor technology using selective epitaxy of a strained silicon germanium layer |
| 03/09/2004 | US6703270 Method of manufacturing a semiconductor device |
| 03/09/2004 | US6703269 Method to form gate conductor structures of dual doped polysilicon |
| 03/09/2004 | US6703268 Method to fabricate an intrinsic polycrystalline silicon film |
| 03/09/2004 | US6703267 Method of manufacturing thin film transistor |
| 03/09/2004 | US6703266 Method for fabricating thin film transistor array and driving circuit |
| 03/09/2004 | US6703265 Semiconductor device and method of manufacturing the same |
| 03/09/2004 | US6703264 Method of manufacturing a semiconductor device |
| 03/09/2004 | US6703262 Method for planarizing circuit board and method for manufacturing semiconductor device |
| 03/09/2004 | US6703261 Semiconductor device and manufacturing the same |
| 03/09/2004 | US6703259 System and method for achieving planar alignment of a substrate during solder ball mounting for use in semiconductor fabrication |
| 03/09/2004 | US6703255 Method for fabricating a III nitride film |
| 03/09/2004 | US6703253 Method for producing semiconductor light emitting device and semiconductor light emitting device produced by such method |
| 03/09/2004 | US6703251 Semiconductor wafer |
| 03/09/2004 | US6703250 Method of controlling plasma etch process |
| 03/09/2004 | US6703249 Method of fabricating magnetic random access memory operating based on tunnel magnetroresistance effect |
| 03/09/2004 | US6703187 Method of forming a self-aligned twin well structure with a single mask |
| 03/09/2004 | US6703183 (meth)acrylic acid adamantane or norbornane ester derivatives |
| 03/09/2004 | US6703178 Comprises a polymer containing a novel lactone alicyclic unit; well-balanced outcome of etching resistance and substrate adhesion |
| 03/09/2004 | US6703171 Photomask, the manufacturing method, a patterning method, and a semiconductor device manufacturing method |
| 03/09/2004 | US6703169 Applying an organic antireflection coating over a metal-containing layer; applying a chemically-amplified positive tone or negative tone deep ultraviolet photoresist; baking; exposure to radiation; baking |
| 03/09/2004 | US6703167 Calibration using scattering bars; lithography tools |
| 03/09/2004 | US6703144 Heterointegration of materials using deposition and bonding |
| 03/09/2004 | US6703133 Polyimide silicone resin, its solution composition, and polyimide silicone resin film |
| 03/09/2004 | US6703092 Resin molded article for chamber liner |
| 03/09/2004 | US6703075 Wafer treating method for making adhesive dies |
| 03/09/2004 | US6703069 Under bump metallurgy for lead-tin bump over copper pad |
| 03/09/2004 | US6702954 Chemical-mechanical polishing slurry and method |
| 03/09/2004 | US6702950 Method for fabricating LC device using latent masking and delayed LOCOS techniques |
| 03/09/2004 | US6702910 Process for producing a chip |
| 03/09/2004 | US6702900 Wafer chuck for producing an inert gas blanket and method for using |
| 03/09/2004 | US6702899 Vacuum processing apparatus |
| 03/09/2004 | US6702898 Deposited film forming apparatus |
| 03/09/2004 | US6702892 Production device for high-quality silicon single crystals |
| 03/09/2004 | US6702865 Alignment processing mechanism and semiconductor processing device using it |
| 03/09/2004 | US6702658 Wafer polishing apparatus utilizing an Oldham's coupling mechanism for the wafer carrier |
| 03/09/2004 | US6702652 Cracking prevention |
| 03/09/2004 | US6702651 Method and apparatus for conditioning a polishing pad |
| 03/09/2004 | US6702647 Method and apparatus for wireless transfer of chemical-mechanical planarization measurements |