| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/20/2004 | US20040094760 Optoelectronic circuit employing a heterojunction thyristor device to convert a digital optical signal to a digital electrical signal |
| 05/20/2004 | US20040094759 Process for fabricating ultra-low contact resistances in GaN-based devices |
| 05/20/2004 | US20040094758 Semiconductor apparatus |
| 05/20/2004 | US20040094756 Method for fabricating light-emitting diode using nanosize nitride semiconductor multiple quantum wells |
| 05/20/2004 | US20040094728 Device for sintering, removing material and/or labeling by means of electromagnetically bundled radiation and method for operating the device |
| 05/20/2004 | US20040094726 Electron beam exposure apparatus and deflection amount correction method |
| 05/20/2004 | US20040094724 Lithographic projection apparatus and reflector assembly for use therein |
| 05/20/2004 | US20040094722 Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus |
| 05/20/2004 | US20040094714 Method of determining lattice constant, method of evaluating material by using the same and electronic microscope suitable for using the same |
| 05/20/2004 | US20040094606 Capillary with contained inner chamfer |
| 05/20/2004 | US20040094601 Transfer apparatus for arraying small conductive bumps on substrate and/ or chip |
| 05/20/2004 | US20040094593 Brittle material rotating and aligning mechanism for use in a brittle material scribing and/or breaking apparatus |
| 05/20/2004 | US20040094511 Method of forming planar Cu interconnects without chemical mechanical polishing |
| 05/20/2004 | US20040094510 Fluorinated surfactants for aqueous acid etch solutions |
| 05/20/2004 | US20040094504 Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof |
| 05/20/2004 | US20040094450 Modular belt carrier for electronic components |
| 05/20/2004 | US20040094427 Includes a table with a polishing pad; the table and pad have holes forming channels for dispensing electroplating solution; plurality of electroplating anodes disposed in the channels and in contact with the electroplating solution |
| 05/20/2004 | US20040094412 Magnetron sputtering apparatus and magnetron sputtering method using the same |
| 05/20/2004 | US20040094403 Integrated plating and planarization apparatus having a variable-diameter counterelectrode |
| 05/20/2004 | US20040094400 Method of processing a surface of a workpiece |
| 05/20/2004 | US20040094322 Electronic part with a lead frame |
| 05/20/2004 | US20040094270 Plasma process chamber and system |
| 05/20/2004 | US20040094269 Methods for determining amounts and locations of differential pressure to be applied to semiconductor substrates during polishing of semiconductor device structures carried thereby and for subsequently polishing similar semiconductor device structures |
| 05/20/2004 | US20040094268 Oxidation inhibitor for wet etching processes |
| 05/20/2004 | US20040094264 Method for adhering substrates using light activatable adhesive film |
| 05/20/2004 | US20040094206 Semiconductor manufacturing apparatus enabling inspection of mass flow controller maintaining connection thereto |
| 05/20/2004 | US20040094187 Utilizes confining members having a wafer engaging end to both support and confine the semiconductor wafer using centrifugal force when the wafer and the confining members are being rotated about a rotational axis |
| 05/20/2004 | US20040094186 Method and apparatus for uniform treatment of objects in liquids |
| 05/20/2004 | US20040094183 Dense phase gases such as supercritical fluids can be used in combination with sonic energy (e.g., megasonic acoustic waves) to process substrates such as semiconductor wafers |
| 05/20/2004 | US20040094095 Substrate holder assembly |
| 05/20/2004 | US20040094094 Plasma processing device |
| 05/20/2004 | US20040094091 Apparatus and method for manufacturing a semiconductor device having hemispherical grains |
| 05/20/2004 | US20040094090 Liquid distribution unit for dividing a liquid current into a plurality of partial currents |
| 05/20/2004 | US20040094089 Film forming unit |
| 05/20/2004 | US20040094087 Spatially-arranged chemical processing station |
| 05/20/2004 | US20040094086 Production device and production method for silicon-based structure |
| 05/20/2004 | US20040094085 Process for preparing p-n junctions having a p-type ZnO film |
| 05/20/2004 | US20040094084 Method for growing GaN compound semiconductor crystal and semiconductor substrate |
| 05/20/2004 | US20040094010 Cutting device for breaking fragile materials such as semiconductor wafers or the like |
| 05/20/2004 | US20040093803 Keeping the color of the abrasive in specified ranges or stably adding fluorine |
| 05/20/2004 | US20040093725 Bond surface conditioning system for improved bondability |
| 05/20/2004 | US20040093724 Manufacturing method for fixing tin balls in connectors or IC devices |
| 05/20/2004 | US20040093721 Electronic package carrier tape |
| 05/19/2004 | EP1420461A2 Stacked photovoltaic device |
| 05/19/2004 | EP1420460A2 Photovoltaic element |
| 05/19/2004 | EP1420457A1 Insulated gate power semiconductor device with Schottky diode and manufacturing method thereof |
| 05/19/2004 | EP1420452A1 Soi wafer producing method, and wafer separating jig |
| 05/19/2004 | EP1420451A2 Semiconductor non-volatile memory device and method for fabricating the same |
| 05/19/2004 | EP1420447A1 Isolation material for layers in intergrated circuits with damascene archtitecture, comprising molecules having atoms at the surface only, like for example fullerenes |
| 05/19/2004 | EP1420443A2 Electrical connection device between two conductive layers of an integrated circuit |
| 05/19/2004 | EP1420442A2 Process for self-aligned manufacture of integrated electronic devices |
| 05/19/2004 | EP1420441A1 Semiconductor device and method for manufacturing the same |
| 05/19/2004 | EP1420440A1 Epitaxial wafer and production method therefor |
| 05/19/2004 | EP1420439A2 Non-thermal process for forming porous low dielectric constant films |
| 05/19/2004 | EP1420438A2 Method and apparatus for etching a deep trench |
| 05/19/2004 | EP1420437A1 METHOD OF PRODUCING SEMICONDUCTOR THIN FILM, METHOD OF PRODUCING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE, INTEGRATED CIRCUIT, ELECTROOPTICAL DEVICE AND ELECTRONIC APPARATUS |
| 05/19/2004 | EP1420436A2 Method of manufacturing high precision integrated circuit capacitors |
| 05/19/2004 | EP1420414A1 Nonvolatile memory device utilising vertical nanotube |
| 05/19/2004 | EP1420411A2 Mram with asymmetric cladded conductor |
| 05/19/2004 | EP1420314A2 Method, apparatus, data carrier and computer program module for monitoring a production process of multiple physical objects |
| 05/19/2004 | EP1420312A2 Method, apparatus, data carrier and computer program module for monitoring and regulating a production process |
| 05/19/2004 | EP1420311A1 Method and apparatus for computer-based monitoring of process parameters in a production process |
| 05/19/2004 | EP1420310A2 Method, apparatus, data carrier and computer program module for monitoring a production process |
| 05/19/2004 | EP1420301A2 Compensation of lens aberrations by illumination optimization |
| 05/19/2004 | EP1420296A2 Low vapor pressure, low debris solid target for euv production |
| 05/19/2004 | EP1420295A2 Manufacturing method of semiconductor device |
| 05/19/2004 | EP1420294A2 Method and apparatus for performing model-based layout conversion for use with dipole illumination |
| 05/19/2004 | EP1420080A2 Apparatus and method for hybrid chemical deposition processes |
| 05/19/2004 | EP1420079A1 Film-forming system and film-forming method |
| 05/19/2004 | EP1420004A2 An aluminum nitride ceramic and a member used for the production of semiconductors |
| 05/19/2004 | EP1419990A2 Method of forming a via hole through a glass wafer |
| 05/19/2004 | EP1419853A1 Apparatus and method for in-situ endpoint detection and monitoring for chemical mechanical polishing operations |
| 05/19/2004 | EP1419845A1 Method for determining the optimal bonding parameters for wire bonding |
| 05/19/2004 | EP1419534A2 Method for producing contacts and printed circuit packages |
| 05/19/2004 | EP1419532A2 Folded bit line dram with vertical ultra thin body transistors |
| 05/19/2004 | EP1419531A1 Spiral inductor having parallel-branch structure |
| 05/19/2004 | EP1419528A2 Interconnect module with reduced power distribution impedance |
| 05/19/2004 | EP1419527A1 Adhesive tape |
| 05/19/2004 | EP1419526A2 Through-via vertical interconnects, through-via heat sinks and associated fabrication methods |
| 05/19/2004 | EP1419525A2 Strip conductor arrangement and method for producing a strip conductor arrangement |
| 05/19/2004 | EP1419524A2 Method for separating electronic components from a composite |
| 05/19/2004 | EP1419523A1 Dummy structures to reduce metal recess in electropolishing process |
| 05/19/2004 | EP1419522A2 Improvement of titanium disilicide resistance in narrow active regions of semiconductor devices |
| 05/19/2004 | EP1419521A1 Xe preamorphizing implantation |
| 05/19/2004 | EP1419520A2 System and method for fast ambient gas switching in rapid thermal processing |
| 05/19/2004 | EP1419519A1 Coupled quantum dot and quantum well semiconductor device and method of making the same |
| 05/19/2004 | EP1419506A2 Control device for reversing the direction of magnetisation without an external magnetic field |
| 05/19/2004 | EP1419418A1 Electron beam processing |
| 05/19/2004 | EP1419363A2 Method and apparatus for production line screening |
| 05/19/2004 | EP1419361A1 Dynamic interferometric controlling direction of input beam |
| 05/19/2004 | EP1419360A1 Tilted interferometer |
| 05/19/2004 | EP1419357A1 Perimeter seal for backside cooling of substrates |
| 05/19/2004 | EP1419287A1 Process for controlling thin film uniformity and products produced thereby |
| 05/19/2004 | EP1419102A2 Method for producing micro-electromechanical components |
| 05/19/2004 | EP1334222B1 Cvd reactor with graphite-foam insulated, tubular susceptor |
| 05/19/2004 | EP1332039B1 Device for sintering, removing material and/or labeling by means of electromagnetically bundled radiation and method for operating the device |
| 05/19/2004 | EP1292969B1 Patterning method using a removable inorganic antireflection coating |
| 05/19/2004 | EP1149060B1 Melted alumina-zirconia ceramic grains, abrasive tools and refractory parts produced from said grains |
| 05/19/2004 | EP1102821A4 Composition and method for polishing in metal cmp |
| 05/19/2004 | EP1075337A4 Container washing apparatus |