| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/25/2004 | US6741492 Semiconductor memory device |
| 05/25/2004 | US6741447 Wafer space supporting apparatus installed on electrostatic chuck and method for fabricating the same |
| 05/25/2004 | US6741446 Vacuum plasma processor and method of operating same |
| 05/25/2004 | US6741445 Method and system to monitor and control electro-static discharge |
| 05/25/2004 | US6741358 Exposure apparatus and device production method in which position of reference plate provided on substrate stage is measured |
| 05/25/2004 | US6741334 Exposure method, exposure system and recording medium |
| 05/25/2004 | US6741331 Lithographic apparatus with improved exposure area focus, device manufacturing method, and device manufactured thereby |
| 05/25/2004 | US6741330 Exposure device |
| 05/25/2004 | US6741329 Lithographic apparatus and device manufacturing method |
| 05/25/2004 | US6741327 Eliminating residual pattern aberration |
| 05/25/2004 | US6741320 Method for cutting liquid crystal display panel |
| 05/25/2004 | US6741297 Control signal part and liquid crystal display including the control signal |
| 05/25/2004 | US6741118 Semiconductor integrated circuit device and method of manufacturing the same |
| 05/25/2004 | US6741100 Semiconductor integrated circuit capable of high-speed circuit operation |
| 05/25/2004 | US6741093 Method of determining one or more properties of a semiconductor wafer |
| 05/25/2004 | US6741086 Member for removing foreign matter adhering to probe tip and method of manufacturing the probe tip, method of cleaning foreign matter adhering to probe tip, probe, and probing apparatus |
| 05/25/2004 | US6741085 Contact carriers (tiles) for populating larger substrates with spring contacts |
| 05/25/2004 | US6741044 Lamp lighting controlling apparatus and light emitting apparatus |
| 05/25/2004 | US6741029 Light emission apparatus and method of fabricating the same |
| 05/25/2004 | US6740998 Single motor, multi-axis stage |
| 05/25/2004 | US6740982 Microelectronic package with an attachment layer including spacer elements |
| 05/25/2004 | US6740980 Semiconductor device |
| 05/25/2004 | US6740979 Semiconductor device and LSI defect analyzing method using the same |
| 05/25/2004 | US6740977 Insulating layers in semiconductor devices having a multi-layer nanolaminate structure of SiNx thin film and BN thin film and methods for forming the same |
| 05/25/2004 | US6740976 Semiconductor device including via contact plug with a discontinuous barrier layer |
| 05/25/2004 | US6740974 Semiconductor device having capacitors provided with protective insulating film |
| 05/25/2004 | US6740969 Electronic device |
| 05/25/2004 | US6740966 Bendable; no removal required |
| 05/25/2004 | US6740964 Semiconductor package for three-dimensional mounting, fabrication method thereof, and semiconductor device |
| 05/25/2004 | US6740961 Lead frame design for chip scale package |
| 05/25/2004 | US6740955 Trench device isolation structure |
| 05/25/2004 | US6740954 Semiconductor device reducing junction leakage current and narrow width effect |
| 05/25/2004 | US6740953 High frequency integrated devices |
| 05/25/2004 | US6740952 High withstand voltage semiconductor device |
| 05/25/2004 | US6740951 Two-mask trench schottky diode |
| 05/25/2004 | US6740950 Eliminates air gap between glass and die |
| 05/25/2004 | US6740947 MRAM with asymmetric cladded conductor |
| 05/25/2004 | US6740945 Apparatus and method for contacting a conductive layer |
| 05/25/2004 | US6740944 Having thicker oxide layer at one or more gate ends |
| 05/25/2004 | US6740943 MOSFET transistor with thick and thin pad oxide films |
| 05/25/2004 | US6740942 Permanently on transistor implemented using a double polysilicon layer CMOS process with buried contact |
| 05/25/2004 | US6740941 Semiconductor device including a gate insulating film made of high-dielectric-constant material |
| 05/25/2004 | US6740939 Miniaturization; accuracy; high and low voltage zones |
| 05/25/2004 | US6740938 Transistor provided with first and second gate electrodes with channel region therebetween |
| 05/25/2004 | US6740937 Basic cells configurable into different types of semiconductor integrated circuits |
| 05/25/2004 | US6740935 Semiconductor device |
| 05/25/2004 | US6740934 ESD protection scheme for outputs with resistor loading |
| 05/25/2004 | US6740933 Semiconductor device having trench isolation structure and method of fabricating the same |
| 05/25/2004 | US6740932 Semiconductor device for improving sustaining voltage |
| 05/25/2004 | US6740931 Semiconductor device |
| 05/25/2004 | US6740927 Nonvolatile memory capable of storing multibits binary information and the method of forming the same |
| 05/25/2004 | US6740926 Planar transistor structure using isolation implants for improved Vss resistance and for process simplification |
| 05/25/2004 | US6740925 Memory device comprising single transistor having functions of RAM and ROM and methods for operating and manufacturing the same |
| 05/25/2004 | US6740924 Semiconductor integrated circuit device and the method of producing the same |
| 05/25/2004 | US6740923 Capacitor structure |
| 05/25/2004 | US6740922 Interdigitated capacitor and method of manufacturing thereof |
| 05/25/2004 | US6740920 Vertical MOSFET with horizontally graded channel doping |
| 05/25/2004 | US6740919 Ram |
| 05/25/2004 | US6740918 Semiconductor memory device |
| 05/25/2004 | US6740917 Integrated semiconductor memory fabrication method |
| 05/25/2004 | US6740916 Contact structure for integrated circuit devices |
| 05/25/2004 | US6740915 CMOS imager cell having a buried contact |
| 05/25/2004 | US6740913 MOS transistor using mechanical stress to control short channel effects |
| 05/25/2004 | US6740912 Semiconductor device free of LLD regions |
| 05/25/2004 | US6740910 Field-effect transistor, circuit configuration and method of fabricating a field-effect transistor |
| 05/25/2004 | US6740909 Self aligned symmetric intrinsic process and device |
| 05/25/2004 | US6740902 Semiconductor package for series-connected diodes |
| 05/25/2004 | US6740901 Production of semiconductor integrated circuit |
| 05/25/2004 | US6740896 Sensitivity adjusting method for pattern inspection apparatus |
| 05/25/2004 | US6740895 Method and apparatus for emission lithography using patterned emitter |
| 05/25/2004 | US6740893 Optical instrument, and device manufacturing method |
| 05/25/2004 | US6740891 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 05/25/2004 | US6740856 Preformed heating element and method of making |
| 05/25/2004 | US6740853 Multi-zone resistance heater |
| 05/25/2004 | US6740842 Radio frequency power source for generating an inductively coupled plasma |
| 05/25/2004 | US6740823 Solder bonding method, and electronic device and process for fabricating the same |
| 05/25/2004 | US6740811 Electric terminal for an electronic device |
| 05/25/2004 | US6740685 A thermosetting resin contains an acetylenic oligomer or polymer with multi-phenyl adamantane ring, and bonded with porogen which can decompose to form pore; use as dielectric substrate in microchips, circuit boards |
| 05/25/2004 | US6740629 Comprises a component for rendering a water-insoluble compound containing a metal atom or its ion separated from a surface to be polished water-soluble |
| 05/25/2004 | US6740605 Process for reducing hydrogen contamination in dielectric materials in memory devices |
| 05/25/2004 | US6740604 Method of separating two layers of material from one another |
| 05/25/2004 | US6740603 Control of Vmin transient voltage drift by maintaining a temperature less than or equal to 350° C. after the protective overcoat level |
| 05/25/2004 | US6740602 Method of forming low-dielectric constant film on semiconductor substrate by plasma reaction using high-RF power |
| 05/25/2004 | US6740601 HDP-CVD deposition process for filling high aspect ratio gaps |
| 05/25/2004 | US6740598 Wiring layer dry etching method and semiconductor device manufacturing method |
| 05/25/2004 | US6740597 Methods of removing at least some of a material from a semiconductor substrate |
| 05/25/2004 | US6740596 Manufacturing method of active matrix substrate |
| 05/25/2004 | US6740595 Etch process for recessing polysilicon in trench structures |
| 05/25/2004 | US6740594 Method for removing carbon-containing polysilane from a semiconductor without stripping |
| 05/25/2004 | US6740593 Semiconductor processing methods utilizing low concentrations of reactive etching components |
| 05/25/2004 | US6740592 Shallow trench isolation scheme for border-less contact process |
| 05/25/2004 | US6740591 Slurry and method for chemical mechanical polishing of copper |
| 05/25/2004 | US6740590 Aqueous dispersion, aqueous dispersion for chemical mechanical polishing used for manufacture of semiconductor devices, method for manufacture of semiconductor devices, and method for formation of embedded writing |
| 05/25/2004 | US6740589 Composition for polishing semiconductor wafer, semiconductor circuit wafer, and method for producing the same |
| 05/25/2004 | US6740588 Smooth metal semiconductor surface and method for making the same |
| 05/25/2004 | US6740587 Semiconductor device having a metal silicide layer and method for manufacturing the same |
| 05/25/2004 | US6740586 Vapor delivery system for solid precursors and method of using same |
| 05/25/2004 | US6740585 Barrier formation using novel sputter deposition method with PVD, CVD, or ALD |
| 05/25/2004 | US6740584 Semiconductor device and method of fabricating the same |
| 05/25/2004 | US6740583 Semiconductor processing methods of forming integrated circuitry and semiconductor processing methods of forming dynamic random access memory (DRAM) circuitry |