Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2013
11/26/2013US8592314 Polishing composition and polishing method
11/26/2013US8592313 Polishing method and polishing apparatus
11/26/2013US8592312 Method for depositing a conductive capping layer on metal lines
11/26/2013US8592311 Semiconductor device and method for forming passive circuit elements with through silicon vias to backside interconnect structures
11/26/2013US8592310 Methods of manufacturing a semiconductor device
11/26/2013US8592309 Laser spike annealing for GaN LEDs
11/26/2013US8592307 Modulated deposition process for stress control in thick TiN films
11/26/2013US8592306 Redundant metal barrier structure for interconnect applications
11/26/2013US8592305 Doping aluminum in tantalum silicide
11/26/2013US8592304 Method for filling metal
11/26/2013US8592303 Wiring structure and method for manufacturing the same
11/26/2013US8592302 Patterning method for fabrication of a semiconductor device
11/26/2013US8592301 Template wafer fabrication process for small pitch flip-chip interconnect hybridization
11/26/2013US8592299 Solder and electrically conductive adhesive based interconnection for CZT crystal attach
11/26/2013US8592298 Fabrication of floating guard rings using selective regrowth
11/26/2013US8592297 Wafer and method of processing wafer
11/26/2013US8592296 Gate-last fabrication of quarter-gap MGHK FET
11/26/2013US8592295 Gate-all around semiconductor nanowire FETs on bulk semiconductor wafers
11/26/2013US8592294 High temperature atomic layer deposition of dielectric oxides
11/26/2013US8592293 Schottky barrier diodes for millimeter wave SiGe BiCMOS applications
11/26/2013US8592292 Growth of multi-layer group III-nitride buffers on large-area silicon substrates and other substrates
11/26/2013US8592291 Fabrication of large-area hexagonal boron nitride thin films
11/26/2013US8592290 Cut-very-last dual-EPI flow
11/26/2013US8592289 Epitaxial wafer, method for manufacturing gallium nitride semiconductor device, gallium nitride semiconductor device and gallium oxide wafer
11/26/2013US8592288 Storage of an image in an integrated circuit
11/26/2013US8592287 Overlay alignment mark and method of detecting overlay alignment error using the mark
11/26/2013US8592286 Ultra-thin wafer system and method of manufacture thereof
11/26/2013US8592284 Semiconductor device and manufacturing method thereof
11/26/2013US8592283 Wiring structure, semiconductor device and manufacturing method thereof
11/26/2013US8592282 Nonvolatile memory elements
11/26/2013US8592281 Method of forming polysilicon resistor during replacement metal gate process and semiconductor device having same
11/26/2013US8592280 Fin field effect transistor devices with self-aligned source and drain regions
11/26/2013US8592279 Electronic device including a tapered trench and a conductive structure therein and a process of forming the same
11/26/2013US8592278 Method of manufacturing semiconductor device
11/26/2013US8592277 Method of forming low resistance gate for power MOSFET applications
11/26/2013US8592276 Fabrication method of vertical silicon nanowire field effect transistor
11/26/2013US8592275 Semiconductor device and production method thereof
11/26/2013US8592274 LDMOS with accumulation enhancement implant
11/26/2013US8592273 Method of manufacturing nonvolatile memory device
11/26/2013US8592272 Method of manufacturing non-volatile semiconductor memory device
11/26/2013US8592271 Metal-gate CMOS device and fabrication method thereof
11/26/2013US8592270 Non-relaxed embedded stressors with solid source extension regions in CMOS devices
11/26/2013US8592269 Method of manufacturing gate structure and method of manufacturing semiconductor device including the same
11/26/2013US8592268 Semiconductor structures using replacement gate and methods of manufacture
11/26/2013US8592267 Semiconductor device and manufacturing method of the same
11/26/2013US8592266 Replacement gate MOSFET with a high performance gate electrode
11/26/2013US8592265 Method for manufacturing semiconductor device having a metal gate electrode
11/26/2013US8592264 Source-drain extension formation in replacement metal gate transistor device
11/26/2013US8592263 FinFET diode with increased junction area
11/26/2013US8592262 Residue isolation process in TFT LCD fabrication
11/26/2013US8592261 Method for designing semiconductor device
11/26/2013US8592260 Process for producing a semiconductor device
11/26/2013US8592259 Method of fabricating a wafer level semiconductor package having a pre-formed dielectric layer
11/26/2013US8592258 Semiconductor package and method of attaching semiconductor dies to substrates
11/26/2013US8592257 Method for manufacturing semiconductor modules
11/26/2013US8592254 Microelectronic devices with improved heat dissipation and methods for cooling microelectronic devices
11/26/2013US8592253 Hybrid layers for use in coatings on electronic devices or other articles
11/26/2013US8592252 Semiconductor device and method of forming through hole vias in die extension region around periphery of die
11/26/2013US8592251 Method for manufacturing semiconductor device
11/26/2013US8592249 Photovoltaic solar cell
11/26/2013US8592248 Etching method for use with thin-film photovoltaic panel
11/26/2013US8592247 Method of fabricating avalanche photodiode
11/26/2013US8592246 Methods of manufacturing a solar cell module
11/26/2013US8592245 Substrate bias for CMOS imagers
11/26/2013US8592244 Pixel sensor cells and methods of manufacturing
11/26/2013US8592243 Method for forming buffer layer in dye-sensitized solar cell
11/26/2013US8592242 Etching growth layers of light emitting devices to reduce leakage current
11/26/2013US8592241 Method for packaging an electronic device assembly having a capped device interconnect
11/26/2013US8592240 Method for manufacturing semiconductor light-emitting element
11/26/2013US8592239 Process and materials for making contained layers and devices made with same
11/26/2013US8592238 Array substrate for liquid crystal display device and method of fabricating the same
11/26/2013US8592237 Method of manufacturing a thin film transistor including forming bus line patterns in a substrate and filling with metal
11/26/2013US8592236 Method for manufacture of optically pumped, surface-emitting semiconductor laser device
11/26/2013US8592235 Method for preparing phosphor and light emitting device
11/26/2013US8592234 Method for manufacturing a LED
11/26/2013US8592233 Substrate for integrated modules
11/26/2013US8592231 LED package structure and manufacturing method, and LED array module
11/26/2013US8592230 Method for patterning a substrate using ion assisted selective depostion
11/26/2013US8592228 Sealing structure and method of manufacturing the same
11/26/2013US8592227 Hybrid quantum dot/protein nanostructure, methods of making, and methods of use thereof
11/26/2013US8592107 Method and apparatus of providing overlay
11/26/2013US8592106 Methods of manufacturing a mask blank substrate, a mask blank, a photomask, and a semiconductor device
11/26/2013US8592030 Silicone adhesive for semiconductor element
11/26/2013US8591809 Substrate transfer container, gas purge monitoring tool, and semiconductor manufacturing equipment with the same
11/26/2013US8591715 Electrodeposition composition and method for coating a semiconductor substrate using the said composition
11/26/2013US8591699 Method and system for supplying a cleaning gas into a process chamber
11/26/2013US8591697 Transmission electron microscopy sample etching fixture
11/26/2013US8591655 Apparatus for the preparation of film
11/26/2013US8591650 Method for forming crystalline semiconductor film, method for manufacturing thin film transistor, and method for manufacturing display device
11/26/2013US8591647 Production of a GaN bulk crystal substrate and a semiconductor device formed thereon
11/26/2013US8590956 Substrate handling system for aligning and orienting substrates during a transfer operation
11/26/2013US8590548 Liquid processing apparatus for substrate, method for generating processing liquid, and computer readable recording medium storing program for generating processing liquid therein
11/26/2013US8590485 Small form factor plasma source for high density wide ribbon ion beam generation
11/26/2013US8590484 Semiconductor device manufacturing method and substrate processing apparatus
11/26/2013US8590389 MEMS pressure sensor device and manufacturing method thereof
11/26/2013CA2602808C Process for the formation of miniaturized getter deposits and getter deposits so obtained
11/26/2013CA2595402C Multilayer circuit devices and manufacturing methods using electroplated sacrificial structures
11/21/2013WO2013173770A1 Method of fabricating high efficiency cigs solar cells
11/21/2013WO2013173743A2 Aqueous clean solution with low copper etch rate for organic residue removal improvement
11/21/2013WO2013173738A1 Composition and process for stripping photoresist from a surface including titanium nitride