H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2004
11/04/2004	US20040219696 Flat panel display with high capacitance and method of manufacturing the same
11/04/2004	US20040219687 Method and apparatus for processing samples
11/04/2004	US20040219463 Easily removal of marking without defect; patterning multilayer photoresist masking layer covering marking; etching
11/04/2004	US20040219462 Multilayer; semiconconductor substrate; barrier electroconductive structure with drains, intakes; dielectrics
11/04/2004	US20040219461 Parallelism adjustment device
11/04/2004	US20040219460 Organic field effect transistor with a photostructured gate dielectric, method for the production and use thereof in organic electronics
11/04/2004	US20040219457 photopolymerization; mixture of silicone monomer, macromonomer and unsaturated compound
11/04/2004	US20040219454 Hydroxy-amino thermally cured undercoat for 193 NM lithography
11/04/2004	US20040219453 A protective coatings for photoresists, comprising an acid generator, a toluenesulfonate acid amine salt, as crosslinking agent, promoting shelf life, storage stability, consistent absorption spectra
11/04/2004	US20040219451 Heat resistance; impact strength; blend of phenolic resin, novolaks and epoxy compound; forming photoresist pattern
11/04/2004	US20040219444 Method for fabricating semiconductor device and equipment for fabricating the same
11/04/2004	US20040219443 Monitoring die positioning on wafer ; pattern with multiple die segments; masking; etching; applying photoresist; exposure to light
11/04/2004	US20040219441 Photomask for focus monitoring, method of focus monitoring, unit for focus monitoring and manufacturing method for a unit
11/04/2004	US20040219439 Reticle set, method for designing a reticle set, exposure monitoring method, inspection method for reticle set and manufacturing method for a semiconductor device
11/04/2004	US20040219435 Projecting light through a photomask using an optical projection system, sub-resolution features in clear areas adjacent to lines and spaces reduce transparency of the clear areas reduce light scattering and flare, greater degree of defocus in the pattern, less resist stripping
11/04/2004	US20040219372 Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device
11/04/2004	US20040219370 Soi wafer and its manufacturing method
11/04/2004	US20040219369 Diffusion barrier layers and methods comprising same for depositing metal films by CVD or ALD processes
11/04/2004	US20040219298 Substrate processing method and substrate processing apparatus
11/04/2004	US20040219288 Coating method
11/04/2004	US20040219245 Method of manipulating a sheet of thermoplastic material
11/04/2004	US20040219085 Purging chemical vapor deposition hazardous wastes; single apparatus for silicon hydride and perfluorocarbons; reduced carbon monoxide generation; producing silicon dioxide, carbon dioxide and ammonium fluoride safe disposal materials
11/04/2004	US20040219006 Lift pin assembly for substrate processing
11/04/2004	US20040219001 Method and apparatus for transferring a semiconductor substrate
11/04/2004	US20040218913 Annealing oven with heat transfer plate
11/04/2004	US20040218883 Method for preparing optical device and optical device
11/04/2004	US20040218645 Semiconductor laser device and method of producing the same, and optical disc unit
11/04/2004	US20040218455 Semiconductor memory device
11/04/2004	US20040218452 Thin film magnetic memory device for selectively supplying a desired data write current to a plurality of memory blocks
11/04/2004	US20040218449 Buffer device for semiconductor processing apparatus
11/04/2004	US20040218445 Non-volatile memory device
11/04/2004	US20040218419 Methods for isolating memory elements within an array
11/04/2004	US20040218413 Semiconductor memory device and manufacturing method thereof
11/04/2004	US20040218372 LSI package provided with interface module and method of mounting the same
11/04/2004	US20040218340 Electrostatic chuck for an electrically insulative substrate, and a method of using same
11/04/2004	US20040218339 Electrostatic chuck
11/04/2004	US20040218328 Fuse latch circuit
11/04/2004	US20040218323 Semiconductor device
11/04/2004	US20040218289 Mirror holding mechanism in exposure apparatus, and device manufacturing method
11/04/2004	US20040218193 Methods and apparatus for determining a position of a substrate relative to a support stage
11/04/2004	US20040218185 Position sensor, method for detecting horizontal and vertical position, alignment apparatus including position sensor, and method for horizontal and vertical alignment
11/04/2004	US20040218168 Lithographic projection assembly, substrate handling apparatus and substrate handling method
11/04/2004	US20040218167 Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method
11/04/2004	US20040218166 Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method
11/04/2004	US20040218164 Exposure apparatus
11/04/2004	US20040218163 Projection optical system
11/04/2004	US20040218160 Holding mechanism in exposure apparatus, and device manufacturing method
11/04/2004	US20040218157 Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system
11/04/2004	US20040218112 Electro-optical device
11/04/2004	US20040218109 Flat panel display
11/04/2004	US20040218108 Liquid crystal display panel
11/04/2004	US20040218076 Test pixel and test pixel array for evaluating pixel quality in CMOS image sensor
11/04/2004	US20040217952 Display device
11/04/2004	US20040217840 Method for making high-performance RF integrated circuits
11/04/2004	US20040217839 Integrated inductor and electronic circuit incorporating the same
11/04/2004	US20040217802 Semiconductor device
11/04/2004	US20040217776 Semiconductor integrated circuit including first and second switching transistors having operation states corresponding to operation states of first and second logic circuits
11/04/2004	US20040217775 Apparatus and methods for silicon-on-insulator transistors in programmable logic devices
11/04/2004	US20040217714 Electroluminescent display device
11/04/2004	US20040217689 Display device
11/04/2004	US20040217650 Semiconductor integrated circuit device
11/04/2004	US20040217545 Methods and apparatus for positioning a substrate relative to a support stage
11/04/2004	US20040217530 Indexing rotatable chuck for a probe station
11/04/2004	US20040217488 Ribbon bonding
11/04/2004	US20040217487 Test structure for detecting bonding-induced cracks
11/04/2004	US20040217485 Stacked flip chip package
11/04/2004	US20040217484 Self-aligned, integrated circuit contact
11/04/2004	US20040217482 Structure and method for low-stress concentration solder bumps
11/04/2004	US20040217481 Structures and methods to enhance copper metallization
11/04/2004	US20040217480 Semiconductor device including dual damascene interocnnections
11/04/2004	US20040217479 Semiconductor device and design method thereof
11/04/2004	US20040217478 Semiconductor device and manufacturing process therefor
11/04/2004	US20040217476 System and device including a barrier layer
11/04/2004	US20040217475 A structure for forming a laser circuit having low penetration ohmic contact providing impurity gettering and the resultant laser circuit
11/04/2004	US20040217474 Semiconductor device
11/04/2004	US20040217473 Wafer level package, wafer level packaging procedure for making wafer level package
11/04/2004	US20040217470 Circuit substrates, semiconductor devices, semiconductor manufacturing apparatuses, methods for manufacturing circuit substrates, and methods for manufacturing semiconductor devices
11/04/2004	US20040217466 Function module and its manufacturing method
11/04/2004	US20040217462 Semiconductor device and process for fabrication of the same
11/04/2004	US20040217460 Bumpless semiconductor device
11/04/2004	US20040217459 Ball grid array interposer, packages and methods
11/04/2004	US20040217458 Packaged IC using insulated wire
11/04/2004	US20040217456 Circuit substrates, semiconductor devices, semiconductor manufacturing apparatus methods for manufacturing circuit substrates, and methods for manufacturing semiconductor devices
11/04/2004	US20040217455 Wiring glass substrate and method of manufacturing the wiring glass substrate, conductive paste and semiconductor module used for wiring glass substrate, and method of forming wiring substrate and conductor
11/04/2004	US20040217453 Semiconductor device, semiconductor wafer, semiconductor module, and a method of manufacturing semiconductor device
11/04/2004	US20040217452 Semiconductor chip arrangement and a method for its production
11/04/2004	US20040217450 Leadframe-based non-leaded semiconductor package and method of fabricating the same
11/04/2004	US20040217448 Semiconductor device
11/04/2004	US20040217447 Method for realizing microchanels in an integrated structure
11/04/2004	US20040217446 Method and apparatus for preparing a plurality of dice in wafers
11/04/2004	US20040217445 Thin film capacity element-use composition, high-permittivity insulation film, thin film capacity element and thin film multilayer capacitor
11/04/2004	US20040217444 Method and apparatus utilizing monocrystalline insulator
11/04/2004	US20040217443 Semiconductor device with inductive component and method of making
11/04/2004	US20040217442 Semiconductor device
11/04/2004	US20040217440 Method of forming an inductor with continuous metal deposition
11/04/2004	US20040217438 SOI single crystalline chip structure with multi-thickness silicon layer
11/04/2004	US20040217437 Inverted isolation formed with spacers
11/04/2004	US20040217434 Integrated circuit devices having an epitaxial pattern with a void region formed therein and methods of forming the same
11/04/2004	US20040217433 Doping of semiconductor fin devices
11/04/2004	US20040217432 Semiconductor device

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