H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2004
11/04/2004	DE19853093B4 Verfahren und Anordnung zur Belichtung eines Substrates Method and apparatus for exposing a substrate
11/04/2004	DE19726069B4 Halbleitereinrichtung mit einer unteren und einer oberen Elektrode und zugehöriges Herstellungsverfahren A semiconductor device comprising a lower and an upper electrode and associated production method
11/04/2004	DE19640006B4 Verfahren zum Herstellen eines elektronischen Bauelements A method for fabricating an electronic device
11/04/2004	DE10348200A1 Halbleitervorrichtung mit einem Kondensator und Verfahren zur Herstellung desselben Of the same semiconductor device with a capacitor and methods for producing
11/04/2004	DE10317268A1 Empty tank replacement method for resist tank used in semiconductor photolithography system has capacitive level and bubble sensors and machine readable code on tank
11/04/2004	DE10315639A1 Verfahren und Vorrichtung zur Prüfung einer Drahtbondverbindung Method and apparatus for testing a wire bond
11/04/2004	DE10314876A1 Verfahren zum mehrstufigen Herstellen von Diffusionslötverbindungen für Leistungsbauteile mit Halbleiterchips A method for multistage manufacturing Diffusionslötverbindungen for power devices with semiconductor chips
11/04/2004	DE10314502A1 Ein Verfahren zum Beschichten einer Halbleiterstruktur A method of coating a semiconductor structure
11/04/2004	DE10314172A1 Anordnung aus einem elektrischen Bauelement auf einem Substrat und Verfahren zum Herstellen der Anordnung Arrangement of an electrical component on a substrate and method of manufacturing the arrangement
11/04/2004	DE10297300T5 Mehrere Halbleiterbauteile in einem monolithischen Flip-Chip A plurality of semiconductor devices in a monolithic flip-chip
11/04/2004	DE10297225T5 Plättchenbefestigungsklebstoffe für Halbleiteranwendungen, Verfahren zur Herstellung von Halbleiterbauelementen und nach derartigen Verfahren hergestellte Halbleiterbauelemente Die attach adhesives for semiconductor applications, to processes for the production of semiconductor components and manufactured by such a method, semiconductor devices
11/04/2004	DE10297224T5 Plättchenbefestigungsklebstoffe für Halbleiteranwendungen, Verfahren zur Herstellung von Halbleiterbauelementen und nach derartigen Verfahren hergestellte Halbleiterbauelemente Die attach adhesives for semiconductor applications, to processes for the production of semiconductor components and manufactured by such a method, semiconductor devices
11/04/2004	DE10232914B4 Wiederverwendbarer Trägerwafer und Verfahren zur Herstellung desselben A reusable carrier wafer and method for manufacturing the same
11/04/2004	DE10230146B4 Verfahren zum Bearbeiten eines scheibenförmigen Werkstückes A method for processing a disk-shaped workpiece
11/04/2004	DE10214743A1 Struktur und Verfahren zur verbesserten Isolation in Grabenspeicherzellen Structure and method for improved insulation in grave memory cells
11/04/2004	DE102004014953A1 Verfahren zur Herstellung eines Glassubstrats für einen Maskenrohling und Verfahren zur Herstellung eines Maskenrohlings A process for producing a glass substrate for a mask blank and process for the production of a mask blank
11/04/2004	DE102004012555A1 Verfahren zur Ausbildung einer integrierten Schaltung A method of forming an integrated circuit
11/04/2004	DE10121011B4 Verfahren zur maskenlosen Kontaktlochdotierung bei DRAMs/eDRAMs und entsprechend hergestellter Speicherchip Method for maskless contact hole doping in DRAMs / eDRAMs and correspondingly produced memory chip
11/04/2004	CA2521079A1 Method of producing membrane electrode assemblies
11/03/2004	EP1473778A1 Flat panel display
11/03/2004	EP1473774A1 Semiconductor device and its manufacturing method
11/03/2004	EP1473773A1 Efficient Protection Structure for Reverse Pin-to-Pin Electrostatic Discharge
11/03/2004	EP1473770A1 Low dielectric constant interconnect insulator having fullerene additive
11/03/2004	EP1473768A2 TFT matrix panel
11/03/2004	EP1473767A2 Method of forming conductive line for semiconductor device using carbon nanotube and semiconductor device manufactured using the method
11/03/2004	EP1473766A2 Selectively doped trench device isolation
11/03/2004	EP1473765A2 Semiconductor wafer treatment by brushing before bonding
11/03/2004	EP1473764A2 Multifunction support for substrat
11/03/2004	EP1473763A1 Manufacturing method of a lead frame for power semiconductor electronic devices, separating the leads and downsetting the die pad in one step
11/03/2004	EP1473762A2 Method of removing sealant used for the protection of electric or electronic part
11/03/2004	EP1473761A1 Method for depositing metal films
11/03/2004	EP1473760A2 Technique for nano-lines fabrication
11/03/2004	EP1473759A2 Semiconductor device
11/03/2004	EP1473736A2 Ferroelectric non-volatile memory device
11/03/2004	EP1473735A1 Dual-junction magnetic memory device and read method
11/03/2004	EP1473734A1 Magnetic memory cell
11/03/2004	EP1473598A2 Lithographic apparatus, device manufacturing methods, mask and method of characterising a mask and/or pellicle
11/03/2004	EP1473596A2 Lithographic apparatus and method for optimizing an illumination source using photolithographic simulations
11/03/2004	EP1473384A1 Vaporizer
11/03/2004	EP1473383A2 Method for producing polycrystalline silicon germanium and suitable for micromachining
11/03/2004	EP1473380A2 Metal barrier film production apparatus, metal barrier film production method, metal film production method, and metal film production apparatus
11/03/2004	EP1473379A2 Metal barrier film production apparatus, metal barrier film production method, metal film production method, and metal film production apparatus
11/03/2004	EP1473109A1 Solder film manufacturing method, heat sink furnished with solder film, and semiconductor device and heat sink junction
11/03/2004	EP1472916A1 Electronic assembly having composite electronic contacts for attaching a package substrate to a printed circuit board
11/03/2004	EP1472789A1 Intergrated circuit and battery powered electronic device
11/03/2004	EP1472750A1 Method of producing organic semiconductor device
11/03/2004	EP1472744A1 Organic semiconductor device and method
11/03/2004	EP1472742A2 Memory cell
11/03/2004	EP1472741A2 Band gap compensated hbt
11/03/2004	EP1472738A2 Bitline structure and method for production thereof
11/03/2004	EP1472737A1 Capacitor-less 1-transistor dram cell and method for producing the same
11/03/2004	EP1472732A1 Device for connecting an ic terminal to a reference potential
11/03/2004	EP1472731A1 Discrete semiconductor component
11/03/2004	EP1472729A1 Heat sink for semiconductor components or similar devices, method for producing the same and tool for carrying out said method
11/03/2004	EP1472725A1 Method and structure for forming an hbt
11/03/2004	EP1472724A2 Semiconductor device and method of manufacturing the same
11/03/2004	EP1472723A1 Device for producing inductively coupled plasma and method thereof
11/03/2004	EP1472722A2 Method for producing a memory cell
11/03/2004	EP1472721A2 Method for the production of a memory cell and structure thereof
11/03/2004	EP1472720A2 System for substrate processing with meniscus, vacuum, ipa vapor, drying manifold
11/03/2004	EP1472719A2 Reactor assembly and processing method
11/03/2004	EP1472576A2 Sulfonate derivatives and the use therof as latent acids
11/03/2004	EP1472574A1 Spin-on anti-reflective coatings for photolithography
11/03/2004	EP1472564A1 Method for correction of oscillation-induced image defects in a lens
11/03/2004	EP1472562A1 Multi-faceted mirror
11/03/2004	EP1472509A1 Method and apparatus for determining liquid flow rate
11/03/2004	EP1472498A1 Continuous process furnace
11/03/2004	EP1472159A1 Wafer carrier door and latching mechanism with hourglass shaped key slot
11/03/2004	EP1472152A1 Door and two-position spring biased latching mechanism
11/03/2004	EP1472047A1 Advanced chemical mechanical polishing system with smart endpoint detection
11/03/2004	EP1472018A1 Copper polishing cleaning solution
11/03/2004	EP1472017A1 Method for cleaning an article
11/03/2004	EP1345733B1 Methods for making reinforced wafer polshing pads and apparatuses implementing the same
11/03/2004	EP1320854B1 Illumination system particularly for microlithography
11/03/2004	EP1230828B1 Method for obtaining an extreme ultraviolet radiation source and its use in lithography
11/03/2004	EP1212476B1 Dielectric films and methods of forming same
11/03/2004	EP1169162B1 Method and apparatus for plating and polishing a semiconductor substrate
11/03/2004	EP1026208B1 Anti-reflective coating composition
11/03/2004	EP0914494B1 Capped porous thin films
11/03/2004	EP0781419B1 Method and device for making connection
11/03/2004	EP0706582B9 Improved compositions and methods for polishing
11/03/2004	CN2653841Y Flip-chip package load board
11/03/2004	CN2653692Y Semiconductor section bar with ALAS oxide layer
11/03/2004	CN2653554Y Adjustable mask plate adsorptive table of yellow light micro image equipment machine
11/03/2004	CN1543679A Process for ultra-thin body soi devices that incorporate epi silicon tips and article made thereby
11/03/2004	CN1543678A Functional device and production method therefor
11/03/2004	CN1543676A Scalable self-aligned dual floating gate memory cell array and methods of forming the array
11/03/2004	CN1543675A Microelectronic package having a bumpless laminated interconnection layer
11/03/2004	CN1543673A Robot hand
11/03/2004	CN1543672A Use of ammonia for etching organic low-K dielectrics
11/03/2004	CN1543670A Chemical mechanical polishing pad having wave shaped grooves
11/03/2004	CN1543669A Chemical mechanical polishing pad having holes and or grooves
11/03/2004	CN1543668A Forming a semiconductor structure using a combination of planarizing methods and electropolishing
11/03/2004	CN1543667A Method and system for single ion implantation
11/03/2004	CN1543666A Dry developing method
11/03/2004	CN1543665A Methods of forming metal-comprising materials and capacitor electrodes; and capacitor constructions
11/03/2004	CN1543664A Silicone resins and porous materials produced therefrom
11/03/2004	CN1543663A Smif load port interface including smart port door
11/03/2004	CN1543662A Adjustable dual frequency voltage dividing plasma reactor
11/03/2004	CN1543651A Memory circuit with memory elements overlying driver cells

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