H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2004
11/11/2004	DE4233486B4 Grabenkondensator-Speicherzelle und Verfahren zu deren Herstellung Grave capacitor memory cell and process for their preparation
11/11/2004	DE19654738B4 Verfahren zum Herstellen einer Halbleitervorrichtung A method of manufacturing a semiconductor device
11/11/2004	DE19524846B4 Verfahren zur Herstellung einer feinen, ringförmigen Ladungsspeicherelektrode in einer Halbleitervorrichtung unter Benutzung einer Phasensprungmaske A process for preparing a fine, annular charge storage electrode in a semiconductor device using a phase shifting mask
11/11/2004	DE10344562A1 Forming contacts on silicon during production of semiconductor memory devices comprises providing a silicon layer, forming a titanium liner layer on the silicon layer, forming a cobalt layer on the liner layer, and heat treating
11/11/2004	DE10340511B3 Production batch control method for monitoring production process quality during semiconductor element manufacture uses rotation cycle for obtaining test semiconductor discs from successive production runs
11/11/2004	DE10338017A1 Verfahren zum Füllen eines Kontaktdurchgangs einer Bitleitung A method for filling a contact via a bit line
11/11/2004	DE10317792A1 Maskenrohling zur Verwendung in der EUV-Lithographie und Verfahren zu dessen Herstellung Mask blank for use in the EUV lithography and a process for its preparation
11/11/2004	DE10317596A1 Verfahren zur Erzeugung von Lotkugeln auf einem elektrischen Bauelement A process for the production of solder balls on an electrical component
11/11/2004	DE10317275A1 System for cleaning of equipment used manufacture of semiconductors, using liquid in treatment chamber for cleaning, followed by drying, treatment chamber contains members for moving gases in chamber
11/11/2004	DE10307815B3 Integriertes elektronisches Bauelement mit gezielt erzeugten Nanoröhren in vertikalen Strukturen und dessen Herstellungsverfahren An integrated electronic device with selectively produced nanotubes in vertical structures and its manufacturing method
11/11/2004	DE10302632B4 Verfahren zum Erzeugen eines definierten Dotierungsgebietes in einem Halbleitermaterial A process for producing a defined doping area in a semiconductor material
11/11/2004	DE10297583T5 Soi-Bauteil mit unterschiedlichen Siliziumdicken Soi component with different thicknesses of silicon
11/11/2004	DE10297582T5 Halbleiterbauteil mit einer dünnen Oxidbeschichtung und ein Verfahren zur Herstellung desselben A semiconductor device with a thin oxide coating, and a method of manufacturing the same
11/11/2004	DE10297462T5 Optischer Lithografiekristall zur Streuungslenkung für die optische Lithografie und 160nm und Verfahren hierzu Optical lithography crystal for scattering steering for optical lithography and 160nm and method therefor
11/11/2004	DE10297447T5 Diffusionsbarriere Diffusion barrier
11/11/2004	DE10248980B4 Verfahren zur Herstellung strukturierter Schichten aus Siliziumdioxid auf senkrecht oder geneigt zu einer Substratoberfläche angeordneten Prozessflächen A process for the production of structured layers of silicon dioxide on vertical or inclined arranged to process a substrate surface areas
11/11/2004	DE102004019101A1 Verfahren zur Herstellung einer Siliziumkarbid-Halbleitervorrichtung A process for producing a silicon carbide semiconductor device
11/11/2004	DE102004018658A1 Wire Bonder mit einer Einrichtung für die Bestimmung der vektoriellen Distanz zwischen der Kapillare und dem Bilderkennungssystem und Verfahren dazu Wire Bonder with a means for determining the vectorial distance between the capillary and the image detection system and method thereof
11/11/2004	DE102004016162A1 Verfahren zum Bilden eines Metalloxidfilmes A method of forming a metal oxide film
11/11/2004	DE102004014923A1 Verfahren zum Bereitstellen einer Dreifach-Wanne in einem epitaktisch basierten CMOS- oder BiCMOS-Prozess A method for providing a triple-well in a epitaxially-based CMOS or BiCMOS process
11/11/2004	DE102004014422A1 Wire Bonder Wire Bonder
11/11/2004	DE102004006586A1 Photomaskenrohling, Photomaske sowie Verfahren und Vorrichtung zu deren Herstellung A photomask blank, a photomask and method and apparatus for the preparation thereof
11/11/2004	DE102004006456A1 Integrierte Schaltung und zugehöriges Schnittstellenverfahren Integrated circuit and associated interface method
11/11/2004	DE102004002407A1 Chemisch-mechanisches Polierverfahren (CMP-Verfahren) unter Verwendung feststehender Schleifkissen Chemical-mechanical polishing (CMP) process using fixed abrasive pad
11/11/2004	CA2770379A1 Method of fabricating semiconductor device
11/11/2004	CA2522820A1 Silicon carbide power devices with self-aligned source and well regions and methods of fabricating same
11/11/2004	CA2519690A1 Bidirectional thermal trimming of electrical resistance
11/11/2004	CA2500182A1 Method of fabricating semiconductor device
11/10/2004	EP1475845A1 Ohmic contacts using Ni-based solid solution for p-type GaN in LEDs
11/10/2004	EP1475839A1 Semiconductor device and its manufacturing method
11/10/2004	EP1475838A1 Semiconductor device and its manufacturing method
11/10/2004	EP1475837A1 Semiconductor device manufacturing method
11/10/2004	EP1475831A2 Method of producing TAB tape carrier
11/10/2004	EP1475830A2 Fabrication method of a bipolar transistor
11/10/2004	EP1475829A1 Silicon epitaxial wafer and its production method
11/10/2004	EP1475828A1 Cvd method and device for forming silicon-containing insulation film
11/10/2004	EP1475826A2 Nitride semiconductor wafer and method of processing nitride semiconductor wafer
11/10/2004	EP1475825A1 Processing device and processing method
11/10/2004	EP1475823A1 Heat treatment device and heat treatment method
11/10/2004	EP1475822A1 Cleaning gas and etching gas
11/10/2004	EP1475821A2 Wafer heating apparatus having electrostatic adsorption function
11/10/2004	EP1475820A1 Electrode for plasma processes and method for manufacture and use thereof
11/10/2004	EP1475807A2 High efficiency collector for laser plasma EUV source
11/10/2004	EP1475805A2 Semiconductor memory device
11/10/2004	EP1475671A1 Method of preparing components for a lithographic apparatus
11/10/2004	EP1475670A2 Lithographic apparatus and device manufacturing method
11/10/2004	EP1475668A1 Method of preparing components for a lithographic apparatus
11/10/2004	EP1475667A1 Lithographic apparatus and device manufacturing method
11/10/2004	EP1475666A1 Substrate holder for lithographic apparatus
11/10/2004	EP1475664A2 Mask, mask blank, and methods of producing these
11/10/2004	EP1475663A2 Mask blank for use in EUV-lithography and its process of manufacture
11/10/2004	EP1475461A1 Methods for etching an aluminum-containing layer
11/10/2004	EP1475460A1 Anodized substrate support
11/10/2004	EP1475457A2 Metal barrier film production apparatus, metal barrier film production method, metal film production method, and metal film production apparatus
11/10/2004	EP1475456A2 Metal barrier film production apparatus, metal barrier film production method, metal film production method, and metal film production apparatus
11/10/2004	EP1475455A2 Metal barrier film production apparatus, metal barrier film production method, metal film production method, and metal film production apparatus
11/10/2004	EP1475454A2 Metal barrier film production apparatus, metal barrier film production method, metal film production method, and metal film production apparatus
11/10/2004	EP1475453A2 Metal barrier film production apparatus, metal barrier film production method, metal film production method, and metal film production apparatus
11/10/2004	EP1475179A2 Electrode assembly for the removal of surface oxides by electron attachment
11/10/2004	EP1474959A1 Method for embedding a component in a base and forming a contact
11/10/2004	EP1474871A1 Multi power supply circuit protection apparatus and method
11/10/2004	EP1474869A1 Digital electronic circuit with low power consumption
11/10/2004	EP1474832A1 Method and system for molecular charge storage field effect transistor
11/10/2004	EP1474831A2 Cellular mosfet devices and their manufacture
11/10/2004	EP1474830A2 Trench-gate semiconductor devices and their manufacture
11/10/2004	EP1474829A1 Thin films, structures having thin films, and methods of forming thin films
11/10/2004	EP1474827A1 Eliminating substrate noise by an electrically isolated high-voltage i/o transistor
11/10/2004	EP1474826A1 Polysilicon bipolar transistor and method for producing the same
11/10/2004	EP1474825A2 Method and device to form high quality oxide layers of different thickness in one processing step
11/10/2004	EP1474824A2 Group iii nitride semiconductor crystal, production method thereof and group iii nitride semiconductor epitaxial wafer
11/10/2004	EP1474823A2 Metal-insulator-metal (mim) capacitor structure and methods of fabricating same
11/10/2004	EP1474811A1 Etching solution for forming an embedded resistor
11/10/2004	EP1474806A2 Antiferromagnetically stabilized pseudo spin valve for memory applications
11/10/2004	EP1474796A1 Plasma display panel having trench discharge cell and method of fabricating the same
11/10/2004	EP1474729A1 System and method for point of use delivery, control and mixing chemical and slurry for cmp/cleaning system
11/10/2004	EP1474725A1 Photo-sensitive composition
11/10/2004	EP1474724A1 Halogenated anti-reflective coatings
11/10/2004	EP1474545A2 Plating device and method
11/10/2004	EP1474543A2 In-line deposition processes for circuit fabrication
11/10/2004	EP1474542A1 Aperture masks for circuit fabrication
11/10/2004	EP1474510A2 Compositions and methods for the detection, diagnosis and therapy of hematological malignancies
11/10/2004	EP1474264A1 A plasma processing apparatus and method
11/10/2004	EP1474251A2 Integrated system for processing semiconductor wafers
11/10/2004	EP1335998B1 Atomic layer doping apparatus and method
11/10/2004	EP1330561B1 Integrated phase separator for ultra high vacuum system
11/10/2004	EP1314197A4 High reliability non-conductive adhesives for non-solder flip chip bondings and flip chip bonding method using the same
11/10/2004	EP1234133B1 Compact gate valve
11/10/2004	EP1153430B1 Method for galvanically forming conductor structures of high-purity copper in the production of integrated circuits
11/10/2004	EP1086191A4 Methods and apparatus for cleaning semiconductor substrates after polishing of copper film
11/10/2004	EP1042805B1 Process for producing a memory cell array
11/10/2004	EP0914678B1 Method of filling trenches in a substrate
11/10/2004	EP0888701A4 Thin film fabrication technique for implantable electrodes
11/10/2004	EP0721591B1 Device for testing an integrated circuit
11/10/2004	CN1545736A Vertical metal oxide silicon field effect semiconductor diodes
11/10/2004	CN1545734A Method of forming ferroelectric film, ferroelectric memory, method of manufacturing the same, semiconductor device, and method of manufacturing the same
11/10/2004	CN1545733A Method of forming ferroelectric film, ferroelectric memory, method of manufacturing the same, semiconductor device, and method of manufacturing the same
11/10/2004	CN1545732A Etching process for micromachining crystalline materials and devices fabricated thereby
11/10/2004	CN1545729A 胶粘带 Adhesive tape
11/10/2004	CN1545728A Semiconductor device, method for manufacturing the same, and plating solution
11/10/2004	CN1545727A Semiconductor device, its manufacturing method, and radio communication device

1 ... 4093 4094 4095 4096 4097 4098 4099 4100 4101 4102 4103 4104 4105 4106 4107 4108 4109 4110 4111 4112 4113 ... 6590