Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2014
01/09/2014WO2014006956A1 Film-like resin laminating device
01/09/2014WO2014006942A1 Exposure apparatus
01/09/2014WO2014006935A1 Position measurement device, stage apparatus, exposure equipment, and device manufacturing method
01/09/2014WO2014006884A1 Fabrication equipment monitoring device and monitoring method
01/09/2014WO2014006818A1 Double-headed grinding device and method for double-headed grinding of workpieces
01/09/2014WO2014006807A1 Graph drawing device, graph drawing method, process management system, process management method, and readable storage medium
01/09/2014WO2014006804A1 Substrate processing equipment
01/09/2014WO2014006787A1 Electronic component mounting structure, ic card, and cof package
01/09/2014WO2014006700A1 Process for producing organic thin film
01/09/2014WO2014006699A1 Semiconductor package and method for manufacturing same
01/09/2014WO2014006682A1 Semiconductor device and method for manufacturing same
01/09/2014WO2014006614A1 Optical method and system for detecting defects in three-dimensional structures
01/09/2014WO2014006562A1 Handle for semiconductor-on-diamond wafers and method of manufacture
01/09/2014WO2014006316A1 Detachment of a self-supporting layer of silicon <100>
01/09/2014WO2014006296A1 Method for assembling and encapsulating lithium microbatteries and microbatteries produced thereby
01/09/2014WO2014005726A1 Wafer and method for producing wafers having surface structures
01/09/2014WO2014005404A1 Thin film transistor manufacturing method and array substrate manufacturing method
01/09/2014WO2014005379A1 Method for fabricating goi wafer structure
01/09/2014WO2014005371A1 Method for manufacturing semiconductor device
01/09/2014WO2014005370A1 Manufacturing method for semiconductor device
01/09/2014WO2014005362A1 Apparatus and process for baking treatment of glass substrate
01/09/2014WO2014005361A1 Semiconductor component and manufacturing method therefor
01/09/2014WO2014005360A1 Manufacturing method of semiconductor device
01/09/2014WO2014005359A1 Semiconductor component and manufacturing method therefor
01/09/2014WO2014005348A1 Manufacturing method for array substrate, array substrate and liquid crystal display device
01/09/2014WO2014005331A1 Array substrate broken line repairing device and repairing method
01/09/2014WO2014005246A1 Chemical nickel plating bump structure of wafer soldering pad and manufacturing method therefor
01/09/2014WO2013169776A3 Complementary metal-oxide-semiconductor (cmos) device and method
01/09/2014WO2013166375A4 Tool for use with dual-sided chemical mechanical planarization pad conditioner
01/09/2014WO2013139663A3 Method for producing a semiconductor wafer doped differently on both sides
01/09/2014US20140011453 Semiconductor device and method of manufacturing the same
01/09/2014US20140011373 Annealing a sacrificial layer
01/09/2014US20140011372 Film deposition method
01/09/2014US20140011371 Silicon oxide film forming method and apparatus
01/09/2014US20140011370 Method of operating film deposition apparatus and film deposition apparatus
01/09/2014US20140011369 Film deposition apparatus, and method of depositing a film
01/09/2014US20140011368 Method and apparatus of forming carbon film
01/09/2014US20140011367 Low Temperature Etching of Silicon Nitride Structures Using Phosphoric Acid Solutions
01/09/2014US20140011366 Method for manufacturing integrated circuit devices, optical devices, micromachines and mechanical precision devices having patterned material layers with line-space dimensions of 50 nm and less
01/09/2014US20140011365 Plasma processing apparatus and method
01/09/2014US20140011364 Methods of forming a pattern on a substrate
01/09/2014US20140011363 Etching method
01/09/2014US20140011362 Chemical mechanical polishing (cmp) composition comprising a non-ionic surfactant and an aromatic compound comprising at least one acid group
01/09/2014US20140011361 Chemical mechanical polishing (cmp) composition comprising a non-ionic surfactant and a carbonate salt
01/09/2014US20140011360 Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method for semiconductor device
01/09/2014US20140011359 Aqueous, nitrogen-free cleaning composition and its use for removing residues and contaminants from semiconductor substrates suitable for manufacturing microelectronic devices
01/09/2014US20140011358 Methods of forming tensile tungsten films and compressive tungsten films
01/09/2014US20140011357 Method for forming contact window
01/09/2014US20140011356 Plasma System, Chuck and Method of Making a Semiconductor Device
01/09/2014US20140011355 Method of Making Metal/Semiconductor Compound Thin Film
01/09/2014US20140011354 Post deposition treatments for cvd cobalt films
01/09/2014US20140011353 Film deposition method
01/09/2014US20140011352 Metal wire etchant and method of forming metal wire using the same
01/09/2014US20140011351 Metal Layer End-Cut Flow
01/09/2014US20140011348 Wafer Alignment System and Method
01/09/2014US20140011347 Process for contact doping
01/09/2014US20140011346 Cluster ion implantation of arsenic and phosphorus
01/09/2014US20140011345 Method of growing epitaxial layers on a substrate
01/09/2014US20140011343 Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device
01/09/2014US20140011342 Methods and apparatuses for forming semiconductor films
01/09/2014US20140011341 Methods of forming finfet devices with alternative channel materials
01/09/2014US20140011340 Method of Forming a CMOS Device with a Stressed-Channel NMOS Transistor and a Strained-Channel PMOS Transistor
01/09/2014US20140011339 Method for removing native oxide and residue from a germanium or iii-v group containing surface
01/09/2014US20140011338 Multi-step and asymmetrically shaped laser beam scribing
01/09/2014US20140011337 Multi-layer mask for substrate dicing by laser and plasma etch
01/09/2014US20140011336 Laser processing method and apparatus
01/09/2014US20140011334 Semiconductor device with vertical channel transistor and method for fabricating the same
01/09/2014US20140011333 Polycrystalline silicon efuse and resistor fabrication in a metal replacement gate process
01/09/2014US20140011331 Semiconductor Device and Fabrication Method Thereof
01/09/2014US20140011328 Strained silicon and strained silicon germanium on insulator
01/09/2014US20140011324 Hybrid Bonding Systems and Methods for Semiconductor Wafers
01/09/2014US20140011323 Processes relating to cleanspace fabricators
01/09/2014US20140011307 Method of large-area circuit layout recognition
01/09/2014US20140011306 Inspecting method and inspecting equipment
01/09/2014US20140011305 Polishing apparatus and polishing method
01/09/2014US20140011304 Measurement of lateral diffusion of implanted ions in doped well region of semiconductor devices
01/09/2014US20140011302 Spacer for a gate electrode having tensile stress and a method of forming the same
01/09/2014US20140011301 System and Method for Through Silicon Via Yield
01/09/2014US20140011300 Control method of multi-chip package memory device
01/09/2014US20140011299 Manufacturing apparatus and method of liquid crystal panel
01/09/2014US20140011153 Pedestal construction with low coefficient of thermal expansion top
01/09/2014US20140011026 Adhesive tape for processing semiconductor wafer and the like
01/09/2014US20140011025 Adhesive tape for processing semiconductor wafer etc
01/09/2014US20140010495 Method for fabricating silicon photonic waveguides
01/09/2014US20140009992 Alternative 3d stacking scheme for drams atop gpus
01/09/2014US20140009829 Method for partitioning and incoherently summing a coherent beam
01/09/2014US20140009215 Touch interface using patterned bulk amorphous alloy
01/09/2014US20140009214 Circuits, devices, methods and applications related to silicon-on-insulator based radio-frequency switches
01/09/2014US20140009212 Body-gate coupling to improve linearity of radio-frequency switch
01/09/2014US20140009205 Switching device having a discharge circuit for improved intermodulation distortion performance
01/09/2014US20140009203 Switch linearization by non-linear compensation of a field-effect transistor
01/09/2014US20140008880 Electrostatic chuck device
01/09/2014US20140008855 Apparatus and method for supporting a workpiece during processing
01/09/2014US20140008821 Sealing resin sheet, method for producing electronic component package and electronic component package
01/09/2014US20140008819 Substrate structure, semiconductor package and methods of fabricating the same
01/09/2014US20140008816 Substrate, method of manufacturing substrate, semiconductor device, and electronic apparatus
01/09/2014US20140008814 Substrate for semiconductor package and process for manufacturing
01/09/2014US20140008812 Semiconductor reflow processing for feature fill
01/09/2014US20140008811 Device package with rigid interconnect structure connecting die and substrate and method thereof
01/09/2014US20140008810 Method for forming through silicon via with wafer backside protection