Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2014
01/14/2014US8629044 Method of producing silicon wafer, epitaxial wafer and solid state image sensor, and device for producing silicon wafer
01/14/2014US8629043 Methods for de-bonding carriers
01/14/2014US8629042 Method for stacking semiconductor dies
01/14/2014US8629041 Method for manufacturing semiconductor device
01/14/2014US8629040 Methods for epitaxially growing active regions between STI regions
01/14/2014US8629039 Substrate fins with different heights
01/14/2014US8629038 FinFETs with vertical fins and methods for forming the same
01/14/2014US8629037 Forming a protective film on a back side of a silicon wafer in a III-V family fabrication process
01/14/2014US8629036 Integrated semiconductor devices with amorphous silicon beam, methods of manufacture and design structure
01/14/2014US8629035 Method of manufacturing semiconductor device
01/14/2014US8629034 Nonvolatile memory element and production method thereof and storage memory arrangement
01/14/2014US8629033 Method for manufacturing semiconductor device
01/14/2014US8629032 Non-volatile memory cell structure and a method of fabricating the same
01/14/2014US8629031 Method for manufacturing SOI substrate and semiconductor device
01/14/2014US8629030 Method for manufacturing SOI substrate
01/14/2014US8629029 Vertical SOI bipolar junction transistor and manufacturing method thereof
01/14/2014US8629028 Metal oxide semiconductor field effect transistor (MOSFET) gate termination
01/14/2014US8629026 Source tip optimization for high voltage transistor devices
01/14/2014US8629025 Semiconductor device and method for fabricating semiconductor device
01/14/2014US8629024 Methods of manufacturing semiconductor devices and transistors
01/14/2014US8629023 CMOS image sensor having double gate insulator therein and method for manufacturing the same
01/14/2014US8629022 Asymmetric FET including sloped threshold voltage adjusting material layer and method of fabricating same
01/14/2014US8629021 Integration scheme for an NMOS metal gate
01/14/2014US8629020 Semiconductor device and method of fabricating the same
01/14/2014US8629019 Method of forming self aligned contacts for a power MOSFET
01/14/2014US8629018 Methods of forming NAND memory constructions
01/14/2014US8629017 Structure and method to form EDRAM on SOI substrate
01/14/2014US8629016 Multiple transistor types formed in a common epitaxial layer by differential out-diffusion from a doped underlayer
01/14/2014US8629015 Manufacturing of electronic components
01/14/2014US8629014 Replacement metal gate structures for effective work function control
01/14/2014US8629013 Junction leakage reduction through implantation
01/14/2014US8629012 Method for forming antimony-based FETs monolithically
01/14/2014US8629011 Epitaxial silicon CMOS-MEMS microphones and method for manufacturing
01/14/2014US8629010 Carbon nanotube transistor employing embedded electrodes
01/14/2014US8629009 Programmable high-k/metal gate memory device
01/14/2014US8629008 Electrical isolation structures for ultra-thin semiconductor-on-insulator devices
01/14/2014US8629007 Method of improving replacement metal gate fill
01/14/2014US8629006 Hybrid integrated circuits and their methods of fabrication
01/14/2014US8629005 Methods of manufacture of bottom port surface mount silicon condenser microphone packages
01/14/2014US8629004 Method of manufacturing semiconductor modules and semiconductor module
01/14/2014US8629003 Epoxy encapsulating and lamination adhesive and method of making same
01/14/2014US8629002 Manufacturing method of semiconductor device
01/14/2014US8629001 Semiconductor device and method of manufacturing semiconductor device
01/14/2014US8629000 Thin film transistor, method for manufacturing the same, and semiconductor device
01/14/2014US8628998 Annealing methods for backside illumination image sensor chips
01/14/2014US8628995 Tandem thin-film silicon solar cell and method for manufacturing the same
01/14/2014US8628994 Semiconductor light-emitting device and method for manufacturing the same
01/14/2014US8628993 Method for using laser ablation process for forming solar cell components
01/14/2014US8628992 Methods to pattern diffusion layers in solar cells and solar cells made by such methods
01/14/2014US8628991 Solar cell and method for manufacturing the same
01/14/2014US8628990 Image device and methods of forming the same
01/14/2014US8628989 Tri-gate field-effect transistors formed by aspect ration trapping
01/14/2014US8628988 Conformal metallization process for the fabrication of semiconductor laser devices
01/14/2014US8628987 Manufacturing methods of thin film transistor, liquid crystal display device, and semiconductor device
01/14/2014US8628985 Light emitting devices with improved light extraction efficiency
01/14/2014US8628983 Light emitting diode and method of fabricating the same
01/14/2014US8628982 Method of depositing and inspecting an organic light emitting display panel
01/14/2014US8628981 Method of manufacturing a ferroelectric-capacitor memory device including recovery annealing
01/14/2014US8628676 Plasma etching method
01/14/2014US8628675 Method for reduction of voltage potential spike during dechucking
01/14/2014US8628674 Method for trimming a structure obtained by the assembly of two plates
01/14/2014US8628640 Plasma processing unit and high-frequency electric power supplying unit
01/14/2014US8628616 Vapor-phase process apparatus, vapor-phase process method, and substrate
01/14/2014US8628378 Method for holding and polishing a substrate
01/14/2014US8628290 Manipulator having a three-ring bearing between two outer pivot arms and a platform
01/14/2014US8628288 Substrate transport apparatus with active edge gripper
01/14/2014US8627783 Combined wafer area pressure control and plasma confinement assembly
01/14/2014US8627720 Acceleration sensor
01/09/2014WO2014008515A1 Methods for fabricating semiconductor memory with process induced strain
01/09/2014WO2014008419A1 Stair step formation using at least two masks
01/09/2014WO2014008252A1 Apparatus and method for rounded ono formation in a flash memory device
01/09/2014WO2014008241A1 Composite substrate for layered heaters
01/09/2014WO2014008230A1 Sinker with reduced width
01/09/2014WO2014008161A1 Radical oxidation process for fabricating a nonvolatile charge trap memory device
01/09/2014WO2014008160A2 Sonos ono stack scaling
01/09/2014WO2014008111A1 Compliant monopolar micro device transfer head with silicon electrode
01/09/2014WO2014008110A1 Compliant bipolar micro device transfer head with silicon electrodes
01/09/2014WO2014008077A1 Substrate support for substrate backside contamination control
01/09/2014WO2014008043A2 Processes relating to cleanspace fabricators
01/09/2014WO2014008009A1 Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems
01/09/2014WO2014007924A1 Low-k dielectric damage repair by vapor-phase chemical exposure
01/09/2014WO2014007761A1 Method of preparing an electrically conductive material, and an electrically conductive material
01/09/2014WO2014007758A1 Use of vacuum chucks to hold a wafer or wafer sub-stack
01/09/2014WO2014007619A1 Device and method for separating, at least partially drying and inspecting electronic components
01/09/2014WO2014007594A1 Source container and reactor for vapor deposition
01/09/2014WO2014007572A1 Substrate-processing apparatus
01/09/2014WO2014007472A1 Plasma generation apparatus and plasma generation method
01/09/2014WO2014007361A1 Method of forming pattern and actinic-ray- or radiation-sensitive resin composition for use in the method
01/09/2014WO2014007339A1 POLYCRYSTALLINE CaF2 MEMBER, MEMBER FOR PLASMA TREATMENT DEVICE, PLASMA TREATMENT DEVICE, AND PROCESS FOR PRODUCING FOCUSING RING
01/09/2014WO2014007263A1 Coating liquid for dopant diffusion, method for applying same, method for producing semiconductor using same, and semiconductor
01/09/2014WO2014007250A1 Method for producing zinc oxide thin film, method for manufacturing thin film transistor, zinc oxide thin film, thin film transistor, and transparent oxide wiring line
01/09/2014WO2014007116A1 Process for producing adhesive sheet having adhesive layer divided into individual pieces, process for producing wiring substrate using adhesive sheet, process for producing semiconductor device, and apparatus for producing adhesive sheet
01/09/2014WO2014007084A1 Semiconductor inspection system and method for preventing condensation at interface part
01/09/2014WO2014007081A1 Substrate treatment system, substrate treatment device, data processing method and storage medium
01/09/2014WO2014007079A1 Method for manufacturing semiconductor device using organic underlayer film-forming composition for solvent development lithography processes
01/09/2014WO2014007066A1 Plasma processing device
01/09/2014WO2014007063A1 Polishing solution, preservation solution and polishing method for cmp
01/09/2014WO2014007028A1 Film forming method and film forming device
01/09/2014WO2014007017A1 Overlay error measuring device and computer program for causing computer to measure pattern
01/09/2014WO2014006995A1 Gas cluster irradiation mechanism, substrate processing device using same, and gas cluster irradiation method