Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2014
02/04/2014US8641931 Metal inks
02/04/2014US8641920 Polishing composition for planarizing metal layer
02/04/2014US8641916 Plasma etching apparatus, plasma etching method and storage medium
02/04/2014US8641914 Methods of improving long range order in self-assembly of block copolymer films with ionic liquids
02/04/2014US8641913 Fine pitch microcontacts and method for forming thereof
02/04/2014US8641862 High dose implantation strip (HDIS) in H2 base chemistry
02/04/2014US8641831 Non-chemical, non-optical edge bead removal process
02/04/2014US8641825 Substrate temperature regulation fixed apparatus
02/04/2014US8640943 Fabrication method of semiconductor integrated circuit device
02/04/2014CA2670527C Multicrystalline silicon solar cells
02/04/2014CA2511842C Method for the production of a semiconductor component
01/2014
01/30/2014WO2014018835A1 Innovative top-coat approach for advanced device on-wafer particle performance
01/30/2014WO2014018833A1 Enhanced cleaning process of chamber used plasma spray coating without damaging coating
01/30/2014WO2014018830A1 Chemistry compatible coating material for advanced device on-wafer particle performance
01/30/2014WO2014018740A1 Chemical precursor bubbler assembly
01/30/2014WO2014018694A2 Ion beam sample preparation apparatus and methods
01/30/2014WO2014018693A1 Ion beam sample preparation apparatus and methods
01/30/2014WO2014018462A1 Silicon carbide lamina
01/30/2014WO2014018339A1 Electrostatic charge removal for solar cell grippers
01/30/2014WO2014018337A1 Gas distribution apparatus for substrate processing systems
01/30/2014WO2014018336A1 Multi-zone quartz gas distribution apparatus
01/30/2014WO2014018275A1 Methods and apparatus for delivering process gases to a substrate
01/30/2014WO2014018273A1 Method of forming a tapered oxide
01/30/2014WO2014018238A1 Monitoring retaining ring thickness and pressure control
01/30/2014WO2014018212A1 Chambers with improved cooling devices
01/30/2014WO2014018201A1 Nanowire transistor devices and forming techniques
01/30/2014WO2014018182A1 Self-aligned 3-d epitaxial structures for mos device fabrication
01/30/2014WO2014018181A1 High mobility strained channels for fin-based transistors
01/30/2014WO2014018156A1 Monolithic integrated circuit chip integrating multiple devices
01/30/2014WO2014018084A2 Magnetically sealed wafer plating jig system and method
01/30/2014WO2014018056A1 Storing memory with negative differential resistance material
01/30/2014WO2014018027A1 Temperature control of chemical mechanical polishing
01/30/2014WO2014017979A1 Non-Abrasive Buffing De-Tape of Bleed Tape On Integrated Circuit Substrate
01/30/2014WO2014017977A1 Method and apparatus for determining coplanarity in integrated circuit packages
01/30/2014WO2014017857A1 Flexible color filter substrate using phase-change ink, and method for manufacturing same
01/30/2014WO2014017683A1 Nonvolatile memory device
01/30/2014WO2014017682A1 Magnetron sputtering device equipped with magnetron cooling portion
01/30/2014WO2014017681A1 Double-chamber magnetron sputtering device
01/30/2014WO2014017667A1 Actinic ray-sensitive or radiation-sensitive resin composition, resist film, using the same, pattern forming method, manufacturing method of electronic device, and electronic device
01/30/2014WO2014017665A1 Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device using the same, and electronic device
01/30/2014WO2014017664A1 Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the same, pattern forming method, manufacturing method of electronic device, and electronic device
01/30/2014WO2014017663A1 Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the same, pattern forming method, manufacturing method of electronic device, electronic device and resin
01/30/2014WO2014017661A1 Flow path member, and heat exchanger and semiconductor manufacturing device using same
01/30/2014WO2014017658A1 Conductive fiber-coated particle, curable composition and cured article derived from curable composition
01/30/2014WO2014017650A1 Susceptor, crystal growing apparatus, and crystal growing method
01/30/2014WO2014017638A1 Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium
01/30/2014WO2014017618A1 Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the same, pattern forming method, and method for manufacturing electronic device and electronic device using the same
01/30/2014WO2014017592A1 Graphene transistor and manufacturing method therefor
01/30/2014WO2014017587A1 Semiconductor wafer transfer jig
01/30/2014WO2014017537A1 Method for manufacturing semiconductor-wafer-processing tape and semiconductor-wafer-processing tape
01/30/2014WO2014017505A1 Resin production method and resin production apparatus
01/30/2014WO2014017473A1 Protective film-forming layer, sheet for forming protective film, and method for manufacturing semiconductor device
01/30/2014WO2014017408A1 Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film and pattern forming method using the composition, and electronic device producing method and electronic device
01/30/2014WO2014017406A1 Semiconductor device and method for producing same
01/30/2014WO2014017402A1 Test jig and manufacturing method therefor
01/30/2014WO2014017378A1 Temperature controller for semiconductor manufacturing equipment, method for calculating pid constants in semiconductor manufacturing, and method for operating temperature controller for semiconductor manufacturing equipment
01/30/2014WO2014017369A1 Method for producing hybrid substrates, and hybrid substrate
01/30/2014WO2014017368A1 Method for producing sos substrates, and sos substrate
01/30/2014WO2014017331A1 Resist upper layer film forming composition for lithography and method for manufacturing semiconductor device using same
01/30/2014WO2014017323A1 Conductive ink for reverse printing, process for producing thin-film transistor, and thin-film transistor produced by said process
01/30/2014WO2014017294A1 Adhesive composition, bonding method thereof, and separation method after bonding
01/30/2014WO2014017268A1 Resin composition and pattern forming method using the same
01/30/2014WO2014017264A1 Inspection device
01/30/2014WO2014017229A1 ZnO FILM PRODUCTION DEVICE, AND PRODUCTION METHOD
01/30/2014WO2014017195A1 Silicon carbide semiconductor device
01/30/2014WO2014017191A1 Microwave heating processing device and processing method
01/30/2014WO2014017148A1 Laminated polishing pad and method for manufacturing same
01/30/2014WO2014017132A1 Film-forming device
01/30/2014WO2014017130A1 Plasma treatment device
01/30/2014WO2014017063A1 Semiconductor substrate, method for manufacturing semiconductor substrate, and method for manufacturing composite substrate
01/30/2014WO2014016897A1 Non-contact holding device
01/30/2014WO2014016178A1 Device for irradiating a substrate
01/30/2014WO2014016147A2 Method for producing a capacitor
01/30/2014WO2014016025A1 Method for making contact between a semiconductor material and a contact layer
01/30/2014WO2014015912A1 Method for bonding substrates
01/30/2014WO2014015899A1 Method and device for permanently bonding wafers
01/30/2014WO2014015821A1 Method for removing polycrystalline silicon protecting layer on igbt back face having field termination structure
01/30/2014WO2014015820A1 Method for forming mos device passivation layer and mos device
01/30/2014WO2014015765A1 Laser annealing apparatus and laser annealing method
01/30/2014WO2014015631A1 Array panel, manufacture method thereof and display device
01/30/2014WO2014015628A1 Array substrate, method for manufacturing same, and display device
01/30/2014WO2014015627A1 Organic thin film transistor array substrate, method for manufacturing same, and display device
01/30/2014WO2014015626A1 Methods for manufacturing tft and display device, display device, and display apparatus
01/30/2014WO2014015624A1 Flatbed array substrate, sensor, and method for manufacturing flatbed array substrate
01/30/2014WO2014015622A1 Tft array substrate, manufacturing method and liquid crystal display device
01/30/2014WO2014015610A1 Flexible substrate processing device
01/30/2014WO2014015601A1 Sensor and method for manufacturing same
01/30/2014WO2014015592A1 Sensor and method for manufacturing same
01/30/2014WO2014015588A1 Sensor and manufacturing method thereof
01/30/2014WO2014015585A1 Method for manufacturing organic thin-film transistor array substrate
01/30/2014WO2014015582A1 Method for manufacturing sensor
01/30/2014WO2014015567A1 Etching device and upper electrode thereof
01/30/2014WO2014015553A1 Holding mechanism, and pushing device and conveying apparatus having same
01/30/2014WO2014015536A1 Method of fabricating semiconductor device
01/30/2014WO2014015485A1 Device bearing apparatus
01/30/2014WO2014015458A1 Composite substrate with protective layer for preventing metal from diffusing
01/30/2014WO2014015453A1 Thin film transistor, array substrate and manufacturing method thereof, and display device
01/30/2014WO2014015450A1 Semiconductor device and manufacturing method thereof
01/30/2014WO2014015449A1 Semiconductor device and manufacturing method thereof
01/30/2014WO2014015448A1 Semiconductor device and manufacturing method thereof