| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/23/2007 | US7166786 Artificial band gap |
| 01/23/2007 | US7166546 Planarization for integrated circuits |
| 01/23/2007 | US7166545 Production method for semiconductor device |
| 01/23/2007 | US7166544 Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors |
| 01/23/2007 | US7166543 Methods for forming an enriched metal oxide surface for use in a semiconductor device |
| 01/23/2007 | US7166542 Method for fabricating passivation layer |
| 01/23/2007 | US7166541 Method of forming dielectric layer using plasma enhanced atomic layer deposition technique |
| 01/23/2007 | US7166540 Method for reducing assembly-induced stress in a semiconductor die |
| 01/23/2007 | US7166539 Wet etching method of removing silicon from a substrate |
| 01/23/2007 | US7166538 Method for fabricating semiconductor device |
| 01/23/2007 | US7166537 Miniaturized imaging device with integrated circuit connector system |
| 01/23/2007 | US7166536 Methods for plasma etching of silicon |
| 01/23/2007 | US7166535 Plasma etching of silicon carbide |
| 01/23/2007 | US7166534 Method of dry cleaning photoresist strips after via contact etching |
| 01/23/2007 | US7166533 Phase change memory cell defined by a pattern shrink material process |
| 01/23/2007 | US7166532 Method for forming a contact using a dual damascene process in semiconductor fabrication |
| 01/23/2007 | US7166531 VLSI fabrication processes for introducing pores into dielectric materials |
| 01/23/2007 | US7166530 Method of forming contact pads |
| 01/23/2007 | US7166529 Method of connecting wiring member |
| 01/23/2007 | US7166528 Methods of selective deposition of heavily doped epitaxial SiGe |
| 01/23/2007 | US7166527 Etch stop layer in poly-metal structures |
| 01/23/2007 | US7166526 Method for forming silicide film in semiconductor device |
| 01/23/2007 | US7166525 High temperature hydrogen annealing of a gate insulator layer to increase etching selectivity between conductive gate structure and gate insulator layer |
| 01/23/2007 | US7166524 Method for ion implanting insulator material to reduce dielectric constant |
| 01/23/2007 | US7166523 Silicon carbide and method of manufacturing the same |
| 01/23/2007 | US7166522 Method of forming a relaxed semiconductor buffer layer on a substrate with a large lattice mismatch |
| 01/23/2007 | US7166521 SOI wafers with 30-100 Å buried oxide (BOX) created by wafer bonding using 30-100 Å thin oxide as bonding layer |
| 01/23/2007 | US7166520 Thin handle substrate method and structure for fabricating devices using one or more films provided by a layer transfer process |
| 01/23/2007 | US7166519 Method for isolating semiconductor devices with use of shallow trench isolation method |
| 01/23/2007 | US7166518 System and method for providing a self heating adjustable TiSi2 resistor |
| 01/23/2007 | US7166517 Semiconductor device and method of manufacture thereof |
| 01/23/2007 | US7166516 Method for fabricating a semiconductor device including the use of a compound containing silicon and nitrogen to form an insulation film of SiN or SiCN |
| 01/23/2007 | US7166515 Implanted hidden interconnections in a semiconductor device for preventing reverse engineering |
| 01/23/2007 | US7166514 Semiconductor device and method of manufacturing the same |
| 01/23/2007 | US7166513 Manufacturing method a flash memory cell array |
| 01/23/2007 | US7166512 Method of fabricating non-volatile memory |
| 01/23/2007 | US7166511 Method for fabricating split gate flash memory device |
| 01/23/2007 | US7166510 Method for manufacturing flash memory device |
| 01/23/2007 | US7166509 Write once read only memory with large work function floating gates |
| 01/23/2007 | US7166508 Method for forming nonvolatile memory device including insulating film containing nitrogen (nitride) |
| 01/23/2007 | US7166507 Semiconductor device and method for forming same using multi-layered hard mask |
| 01/23/2007 | US7166506 Poly open polish process |
| 01/23/2007 | US7166505 Method for making a semiconductor device having a high-k gate dielectric |
| 01/23/2007 | US7166504 Semiconductor device manufacturing method |
| 01/23/2007 | US7166503 Method of manufacturing a TFT with laser irradiation |
| 01/23/2007 | US7166502 Method of manufacturing a thin film transistor |
| 01/23/2007 | US7166501 Method for fabricating polycrystalline silicon liquid crystal display device |
| 01/23/2007 | US7166500 Method of manufacturing a semiconductor device |
| 01/23/2007 | US7166499 Method of fabricating a thin film transistor for an array panel |
| 01/23/2007 | US7166498 Thin film transistor array substrate and manufacturing method of the same |
| 01/23/2007 | US7166497 Electronic component package and method of manufacturing same |
| 01/23/2007 | US7166496 Method of making a packaged semiconductor device |
| 01/23/2007 | US7166495 Method of fabricating a multi-die semiconductor package assembly |
| 01/23/2007 | US7166494 Method of fabricating a semiconductor stacked multi-package module having inverted second package |
| 01/23/2007 | US7166493 Package with integrated inductor and/or capacitor |
| 01/23/2007 | US7166492 Integrated circuit carrier apparatus method and system |
| 01/23/2007 | US7166491 Thermoplastic fluxing underfill composition and method |
| 01/23/2007 | US7166490 Semiconductor device with terminals, and method of manufacturing the same |
| 01/23/2007 | US7166489 Complementary metal oxide semiconductor image sensor and method for fabricating the same |
| 01/23/2007 | US7166488 Metal MEMS devices and methods of making same |
| 01/23/2007 | US7166487 Manufacturing method of optical devices |
| 01/23/2007 | US7166486 Optical modulator, optical modulator manufacturing method, light information processing apparatus including optical modulator, image formation apparatus including optical modulator, and image projection and display apparatus including optical modulator |
| 01/23/2007 | US7166485 Superlattice nanocrystal Si-SiO2 electroluminescence device |
| 01/23/2007 | US7166484 Method for fabricating image sensor with inorganic microlens |
| 01/23/2007 | US7166483 High brightness light-emitting device and manufacturing process of the light-emitting device |
| 01/23/2007 | US7166482 Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof |
| 01/23/2007 | US7166481 Method for evaluating and modifying solder attach design for integrated circuit packaging assembly |
| 01/23/2007 | US7166480 Particle control device and particle control method for vacuum processing apparatus |
| 01/23/2007 | US7166479 Methods of forming magnetic shielding for a thin-film memory element |
| 01/23/2007 | US7166419 Compositions substrate for removing etching residue and use thereof |
| 01/23/2007 | US7166416 Protecting groups in polymers, photoresists and processes for microlithography |
| 01/23/2007 | US7166409 Multipass multiphoton absorption method and apparatus |
| 01/23/2007 | US7166362 Film-forming composition, production process therefor, and porous insulating film |
| 01/23/2007 | US7166261 Method of patterning products using chemical reaction |
| 01/23/2007 | US7166250 Poly(arylene ether) dielectrics |
| 01/23/2007 | US7166247 Foamed mechanical planarization pads made with supercritical fluid |
| 01/23/2007 | US7166233 Introducing process gas into reactor chamber, creating plasma within chamber by establishing an RF electromagnetic field within chamber and allowing the field to interact with the process gas |
| 01/23/2007 | US7166232 Method for producing a solid body including a microstructure |
| 01/23/2007 | US7166204 Tilt mechanism for tilting the head portion so that the substrate held by the head portion is inclined relative to a horizontal plane; prevents air bubbles from remaining on the surface to be plated. |
| 01/23/2007 | US7166187 Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling |
| 01/23/2007 | US7166186 Laser decapsulation apparatus and method |
| 01/23/2007 | US7166185 Forming system for insulation film |
| 01/23/2007 | US7166184 Multi-stage type processing apparatus |
| 01/23/2007 | US7166183 Apparatus and method for treating edge of substrate |
| 01/23/2007 | US7166170 Cylinder-based plasma processing system |
| 01/23/2007 | US7166167 Laser CVD device and laser CVD method |
| 01/23/2007 | US7166166 Method and apparatus for an improved baffle plate in a plasma processing system |
| 01/23/2007 | US7166165 Barrier coating for vitreous materials |
| 01/23/2007 | US7166019 Flexible membrane for a polishing head and chemical mechanical polishing (CMP) apparatus having the same |
| 01/23/2007 | US7166018 Apparatus and method for feeding slurry |
| 01/23/2007 | US7166017 Slurry for CMP, polishing method and method of manufacturing semiconductor device |
| 01/23/2007 | US7166015 Apparatus and method for controlling fluid material composition on a polishing pad |
| 01/23/2007 | US7166014 Chemical mechanical planarization process control utilizing in-situ conditioning process |
| 01/23/2007 | US7166010 Buffer layers for organic electroluminescent devices and methods of manufacture and use |
| 01/23/2007 | US7165927 Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
| 01/23/2007 | US7165711 Substrate alignment method and apparatus |
| 01/23/2007 | US7165669 Method and device for carrying out working steps on miniaturized modules |
| 01/23/2007 | US7165566 Method of forming a microstructure using maskless lithography |
| 01/23/2007 | US7165565 Megasonic wafer cleaning tank with reflector for improved wafer edge cleaning |
| 01/23/2007 | US7165560 Oxidizing an incompletely oxidized compound containing at least a metal and silicon and formed on a surface of a substrate; removing the oxidized compound by wet etching,wherein first step includes irradiating the compound with ultraviolet light in an oxygen-containing atmosphere |