Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2007
01/11/2007US20070010032 Defect identification system and method for repairing killer defects in semiconductor devices
01/11/2007US20070010031 Method of treating a substrate in manufacturing a magnetoresistive memory cell
01/11/2007US20070009841 Semiconductor fabrication apparatus and pattern formation method using the same
01/11/2007US20070009836 Method of manufacturing semiconductor device
01/11/2007US20070009811 Irradiating the sample of the pattern in an electrically conductive state with an electron beam to detect a secondary electron, a reflected electron and a backscattered electron generated from the surface of the sample; acquiring an image of the sample surface and inspecting the mask pattern image
01/11/2007US20070009810 Halftone masking, phase shifter film is formed by using a reactive long throw sputtering
01/11/2007US20070009717 Electron-beam treated CDO films
01/11/2007US20070009658 Pulse nucleation enhanced nucleation technique for improved step coverage and better gap fill for WCVD process
01/11/2007US20070009651 Substrate treatment method and substrate treatment apparatus
01/11/2007US20070009345 Load port module
01/11/2007US20070009344 Integrated tool assemblies with intermediate processing modules for processing of microfeature workpieces
01/11/2007US20070008811 256 Meg dynamic random access memory
01/11/2007US20070008794 256 Meg dynamic random access memory
01/11/2007US20070008761 Memory architecture and method of manufacture and operation thereof
01/11/2007US20070008704 Package structure for a semiconductor device
01/11/2007US20070008661 Magnetic tunneling junction film structure with process determined in-plane magnetic anisotropy
01/11/2007US20070008638 Examination method and examination assistant device for quartz product of semiconductor processing apparatus
01/11/2007US20070008521 Lighting optical machine and defect inspection system
01/11/2007US20070007988 LSI inspection method and defect inspection data analysis apparatus
01/11/2007US20070007979 Probe device capable of being used for plural kinds of testers
01/11/2007US20070007669 Wire-bonding method and semiconductor package using the same
01/11/2007US20070007664 Semiconductor package with molded back side and method of fabricating the same
01/11/2007US20070007660 Mask etch processing apparatus
01/11/2007US20070007658 Method of manufacturing interconnecting structure with vias
01/11/2007US20070007657 Methods for forming conductive vias in a substrate and electronic devices and systems including an at least partially reversed oxidation injury at an interface between a conductive via and a conductive interconnect structure
01/11/2007US20070007656 Semiconductor device and methods thereof
01/11/2007US20070007654 Metal line of semiconductor device and method for forming thereof
01/11/2007US20070007649 Low cte substrates for use with low-k flip-chip package devices
01/11/2007US20070007646 Substrate treatment apparatus, substrate holding device, and semiconductor device manufacturing method
01/11/2007US20070007639 Semiconductor device, manufacturing method for semiconductor device, and electronic equipment
01/11/2007US20070007636 Parallel chip embedded printed circuit board and manufacturing method thereof
01/11/2007US20070007634 Method for manufacturing semiconductor chip package
01/11/2007US20070007633 Lead frame, resin-encapsulated semiconductor device, and method of producing the same
01/11/2007US20070007628 Electron-beam treated CDO films
01/11/2007US20070007627 Method of forming openings in an organic resin material
01/11/2007US20070007625 Method for forming a bipolar transistor device with self-aligned raised extrinsic base
01/11/2007US20070007623 Method to fabricate horizontal air columns underneath metal inductor
01/11/2007US20070007621 Fuse breakdown method adapted to semiconductor device
01/11/2007US20070007619 Semiconductor device and method for manufacturing the same
01/11/2007US20070007616 Semiconductor structure
01/11/2007US20070007610 Magneto-resistive effect element and magnetic memory
01/11/2007US20070007608 Tilted array geometry for improved MRAM switching
01/11/2007US20070007607 Semiconductor sensor and manufacturing mehtod therefor
01/11/2007US20070007606 Method for manufacturing MOS transistor
01/11/2007US20070007605 Transistor having high dielectric constant gate insulating layer and source and drain forming schottky contact with substrate
01/11/2007US20070007604 Method for forming a dielectric layer and related devices
01/11/2007US20070007601 Vertical MOSFET SRAM cell
01/11/2007US20070007596 Method to manufacture silicon quantum islands and single-electron devices
01/11/2007US20070007595 Semiconductor device with effective heat-radiation
01/11/2007US20070007594 Semiconductor device and method of manufacturing the same
01/11/2007US20070007593 Metal-oxide-semiconductor device with enhanced source electrode
01/11/2007US20070007591 Electric device comprising an ldmos transistor
01/11/2007US20070007590 Field effect transistor and manufacturing method thereof
01/11/2007US20070007589 Semiconductor device
01/11/2007US20070007588 Insulated gate semiconductor device, protection circuit and their manufacturing method
01/11/2007US20070007586 Method of forming a charge-trapping memory device
01/11/2007US20070007581 Non-planar non-volatile memory cell with an erase gate, an array therefor, and a method of making same
01/11/2007US20070007575 Nonvolatile memory cell with multiple floating gates formed after the select gate
01/11/2007US20070007572 Capacitor fabrication methods and capacitor constructions
01/11/2007US20070007571 Semiconductor device with a buried gate and method of forming the same
01/11/2007US20070007569 Semiconductor memory device comprising magneto resistive element and its manufacturing method
01/11/2007US20070007567 Semiconductor substrate and production process thereof
01/11/2007US20070007552 Self-aligned dual stressed layers
01/11/2007US20070007551 Semiconductor integrated circuit
01/11/2007US20070007550 Semiconductor device and manufacturing method thereof
01/11/2007US20070007548 Method of forming nitride films with high compressive stress for improved pfet device performance
01/11/2007US20070007544 Semiconductor devices having self aligned semiconductor mesas and contact layers
01/11/2007US20070007543 Semiconductor light emitting device and manufacturing method therefor
01/11/2007US20070007536 Thin film magnetic memory device capable of conducting stable data read and write operations
01/11/2007US20070007529 Semiconductor device and method for forming the same
01/11/2007US20070007524 Thin film transistor plate and method of fabricating the same
01/11/2007US20070007509 Strained semiconductor structures
01/11/2007US20070007506 Layered resistance variable memory device and method of fabrication
01/11/2007US20070007248 Compositions and methods for chemical mechanical polishing silica and silicon nitride
01/11/2007US20070007247 Processing method for semiconductor wafer
01/11/2007US20070007246 Manufacture of semiconductor device with CMP
01/11/2007US20070007245 Silicon wafer reclamation method and reclaimed wafer
01/11/2007US20070007244 Detection of loss of plasma confinement
01/11/2007US20070007242 Method and system for producing crystalline thin films with a uniform crystalline orientation
01/11/2007US20070007241 Methods of making and modifying porous devices for biomedical applications
01/11/2007US20070007238 Simplified etching technique for producing multiple undercut profiles
01/11/2007US20070007196 Filter cartridge for fluid for treating surface of electronic device substrate
01/11/2007US20070007128 Silicon film forming apparatus
01/11/2007US20070007123 Silicon dot forming method and silicon dot forming apparatus
01/11/2007US20070006972 Wafer pre-clean reactor cable termination for selective suppression/reflection of source and bias frequency cross products
01/11/2007US20070006971 Plasma generation and control using a dual frequency rf source
01/11/2007US20070006894 Contacting the substrate with a process solution of surfactants; reducing the number of defects in the manufacture of semiconductor devices; reducting dynamic surface tension while minimizing foaming
01/11/2007US20070006806 Wafer Support Tool for Heat Treatment and Heat Treatment Apparatus
01/11/2007US20070006805 Method and System for Applying an Adhesive Substance on an Electronic Device
01/11/2007US20070006799 Silicon wafer support fixture with roughended surface
01/11/2007US20070006796 Crystallization apparatus and crystallization method
01/11/2007US20070006776 Films which cause no shift in capacitance or voltage when exposed to an electric field, have regularly aligned uniform micropores, used as an optically functional material or an electronically functional material
01/11/2007DE4315012B4 Verfahren zur Herstellung von Sensoren und Sensor A process for the production of sensors and sensor
01/11/2007DE4223667B4 Verfahren zur Herstellung eines β-Siliciumcarbidpulvers und dessen Verwendung für Halbleiterbauelement-Herstellungseinrichtungen A process for preparing a β-silicon carbide powder and its use for semiconductor device manufacturing facilities
01/11/2007DE19734059B4 Anordnung für Schattenwurflithographie Arrangement of shadows lithography
01/11/2007DE19537285B4 Verfahren zur Herstellung eines Halbleiterelements mit einer flexiblen Anordnung, Halbleiterelement, Feldeffektsensor mit beweglichem Gate, Verfahren zur Verwendung eines Transistors mit beweglichem Gate als Sensor, sowie kapazitiver Sensor A process for producing a semiconductor element with a flexible arrangement, the semiconductor element, field effect sensor with a movable gate, method of using a transistor as a sensor with a movable gate, and a capacitive sensor
01/11/2007DE112005000512T5 Verfahren zur Verringerung der Ausbildung von STI-Einkerbungen während der Halbleiterherstellung A method for reducing the formation of STI notches during the semiconductor manufacturing
01/11/2007DE112005000504T5 Mehrschichtüberlagerungsmessungs- und Korrekturtechnik für die IC-Herstellung Mehrschichtüberlagerungsmessungs- and correction technique for the IC fabrication
01/11/2007DE112005000410T5 Einrichtung einer Entsprechung und einer Rückverfolgbarkeit zwischen Wafern und Solarzellen Establishment of a correspondence and traceability between wafers and solar cells
01/11/2007DE10391511B4 Transportrollen und Transportsystem für flaches Transportgut Transport rollers and conveyor system for flat cargo