Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2007
01/18/2007US20070015372 Etching solution, method of forming a pattern using the same, method of manufacturing a multiple gate oxide layer using the same and method of manufacturing a flash memory device using the same
01/18/2007US20070015371 Etching radical controlled gas chopped deep reactive ion etching
01/18/2007US20070015370 Manufacturing method for semiconductor device
01/18/2007US20070015369 Method of manufacturing a semiconductor device
01/18/2007US20070015368 Method of reducing silicon damage around laser marking region of wafers in sti cmp process
01/18/2007US20070015367 Electrochemical fabrication methods including use of surface treatments to reduce overplating and/or planarization during formation of multi-layer three-dimensional structures
01/18/2007US20070015366 Semiconductor device and programming method
01/18/2007US20070015365 Method and apparatus for enhanced CMP planarization using surrounded dummy design
01/18/2007US20070015364 Method for avoiding exposure of void caused by dielectric gap-filling, and fabricating process and structure of dielectric film
01/18/2007US20070015363 Electronic board and manufacturing method thereof, electro-optical device, and electronic apparatus
01/18/2007US20070015362 Semiconductor device having storage nodes and its method of fabrication
01/18/2007US20070015361 Manufacturing method of micro-electro-mechanical device
01/18/2007US20070015360 Contact clean by remote plasma and repair of silicide surface
01/18/2007US20070015359 Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects
01/18/2007US20070015358 Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects
01/18/2007US20070015357 Process of adhesive bonding with patternable polymers for producing microstructure devices on a wafer assembly
01/18/2007US20070015356 Method for forming contact hole in semiconductor device
01/18/2007US20070015355 Methods for forming interconnect structures
01/18/2007US20070015354 Method for manufacturing electronic device and electronic device
01/18/2007US20070015353 Electrically connecting substrate with electrical device
01/18/2007US20070015352 Method of realizing thermosonic wire bonding between metal wires and copper pads by depositing a thin film to surface of semiconductor chip with copper pads
01/18/2007US20070015351 Process or making a semiconductor device having a roughened surface
01/18/2007US20070015350 Methods of manufacturing carbon nanotubes
01/18/2007US20070015349 Method of producing a composite multilayer
01/18/2007US20070015348 Crosspoint resistor memory device with back-to-back Schottky diodes
01/18/2007US20070015346 Mixed orientation and mixed material semiconductor-on-insulator wafer
01/18/2007US20070015345 Lateral growth method for defect reduction of semipolar nitride films
01/18/2007US20070015344 Method for Making a Semiconductor Device Including a Strained Superlattice Between at Least One Pair of Spaced Apart Stress Regions
01/18/2007US20070015343 Method for dicing a semiconductor wafer
01/18/2007US20070015342 Fabrication method of semiconductor circuit device
01/18/2007US20070015341 Method of making mems wafers
01/18/2007US20070015340 Method and structure for interfacing electronic devices
01/18/2007US20070015339 Methods of forming trench isolation in the fabrication of integrated circuitry, methods of fabricating memory circuitry, integrated circuitry and memory integrated circuitry
01/18/2007US20070015338 Substrate applicable to both wire bonding and flip chip bonding, smart card modules having the substrate and methods for fabricating the same
01/18/2007US20070015337 Semiconductor device and method for fabricating the same
01/18/2007US20070015336 Method of making a multi-electrode double layer capacitor having hermetic electrolyte seal
01/18/2007US20070015335 Production method for antenna and production device for antenna
01/18/2007US20070015334 Method for forming a fully silicided gate and devices obtained thereof
01/18/2007US20070015333 Method for manufacturing silicon carbide semiconductor devices
01/18/2007US20070015332 Non-volatile memory with asymmetrical doping profile
01/18/2007US20070015331 Nor flash memory cell with high storage density
01/18/2007US20070015330 Metal/semiconductor/metal (MSM) back-to-back Schottky diode
01/18/2007US20070015329 Metal/ZnOx/metal current limiter
01/18/2007US20070015328 MSM binary switch memory device
01/18/2007US20070015327 Method of fabricating a trench capacitor dram device
01/18/2007US20070015326 Integrated circuit and fabrication process
01/18/2007US20070015325 Manufacturing method for an integrated semiconductor structure and corresponding integrated semiconductor structure
01/18/2007US20070015324 Fabrication method for single and dual gate spacers on a semiconductor device
01/18/2007US20070015323 Semiconductor device and method of manufacturing the same
01/18/2007US20070015322 Method of forming doped regions in the bulk substrate of an soi substrate to control the operational characteristics of transistors formed thereabove, and an integrated circuit device comprising same
01/18/2007US20070015321 Manufacturing method for semiconductor device
01/18/2007US20070015320 Method of making a polycrystalline thin film, a mask pattern used in the same and a method of making a flat panel display device using the same
01/18/2007US20070015319 Method for forming contact hole and method for fabricating thin film transistor plate using the same
01/18/2007US20070015318 Method of manufacturing a thin film transistor
01/18/2007US20070015317 Method of forming metal line and contact plug of flash memory device
01/18/2007US20070015316 Folded frame carrier for MOSFET BGA
01/18/2007US20070015315 Semiconductor device and manufacturing method thereof
01/18/2007US20070015314 Adhesive/Spacer Island Structure for Multiple Die Package
01/18/2007US20070015313 Submount of semiconductor laser diode, method of manufacturing the same, and semiconductor laser diode assembly using the submount
01/18/2007US20070015312 Method for forming bump protective collars on a bumped wafer
01/18/2007US20070015311 Structure of mounting electronic component and method of mounting the same
01/18/2007US20070015310 Polyceramic-coated tool for applying a flowable composition
01/18/2007US20070015309 Electronic part manufacturing method
01/18/2007US20070015308 Schottky diode structure to reduce capacitance and switching losses and method of making same
01/18/2007US20070015307 Method for manufacturing semiconductor device
01/18/2007US20070015306 Manufacturing method of P type group III nitride semiconductor layer and light emitting device
01/18/2007US20070015305 Semiconductor device with micro-lens and method of making the same
01/18/2007US20070015304 Low compressive TiNx, materials and methods of making the same
01/18/2007US20070015303 Nanotube device structure and methods of fabrication
01/18/2007US20070015302 Semiconductor device and method of manufacturing thereof
01/18/2007US20070015301 Multi spectral sensor
01/18/2007US20070015300 Method for fabricating a light-emitting device
01/18/2007US20070015299 Co-doping for fermi level control in semi-insulating group III nitrides
01/18/2007US20070015298 Optical element, optical module and method for manufacturing the same
01/18/2007US20070015297 Failure analysis vehicle for yield enhancement with self test at speed burnin capability for reliability testing
01/18/2007US20070015296 Methods and systems for characterizing semiconductor materials
01/18/2007US20070015295 Methods and systems for characterizing semiconductor materials
01/18/2007US20070015294 Novel structure/method to fabricate a high-performance magnetic tunneling junction MRAM
01/18/2007US20070015293 TMR device with surfactant layer on top of CoFexBy/CoFez inner pinned layer
01/18/2007US20070015153 Surface treatment
01/18/2007US20070015069 mask includes multiple transmissive areas having a plurality of first slits for adjusting energy of the laser illumination passing through the mask; and an opaque area; for laser illumination to convert amorphous silicon into polysilicon
01/18/2007US20070015067 Filter exposure apparatus, and device manufacturing method
01/18/2007US20070015065 Euv exposure mask blanks and their fabrication process, and euv exposure mask
01/18/2007US20070014923 Method of Electroless Deposition of Thin Metal and Dielectric Films with Temperature Controlled Stages of Film Growth
01/18/2007US20070014915 Method of Surface Treating Substrates and Method of Manufacturing III-V Compound Semiconductors
01/18/2007US20070014172 Memory device capable of performing high speed reading while realizing redundancy replacement
01/18/2007US20070014169 Semiconductor memory device and semiconductor integrated circuit
01/18/2007US20070014112 Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method
01/18/2007US20070014073 Transfer-ESC based on a wafer
01/18/2007US20070013903 System for detection of wafer defects
01/18/2007US20070013859 Wiring and method of manufacturing the same, and wiring board and method of manufacturing the same
01/18/2007US20070013405 Test head docking system and method
01/18/2007US20070013397 Inspection system, inspection method, and method for manufacturing semiconductor device
01/18/2007US20070013394 Dual feedback control system for maintaining the temperature of an ic-chip near a set-point
01/18/2007US20070013284 Plasma accelerating apparatus and plasma processing system having the same
01/18/2007US20070013084 Bumped die and wire bonded board-on-chip package
01/18/2007US20070013083 Semiconductor device and a manufacturing method of the same
01/18/2007US20070013069 Wiring structure and method for manufacturing the same
01/18/2007US20070013067 Electronic component mounting method and apparatus
01/18/2007US20070013060 Stacked Semiconductor Package having Adhesive/Spacer Structure and Insulation