Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2007
01/31/2007CN1905133A Method for forming floating gate electrode in flush memory device
01/31/2007CN1905132A Silicon carbon germanium (SiCGe) substrate for a group III nitride-based device
01/31/2007CN1905131A Semiconductor device and process for producing same
01/31/2007CN1905130A Method for manufacturing semiconductor device
01/31/2007CN1905129A Storage capacitor and its forming method and dispaly containing same
01/31/2007CN1905128A Substrate support plate transfer apparatus for fabricating organic light emitting display
01/31/2007CN1905127A Method for manufacturing a semiconductor substrate and method for manufacturing a semiconductor device
01/31/2007CN1905126A Organic electroluminescent device, and electronic devices therewith
01/31/2007CN1904742A Photoresist stripper composition and methods for forming wire structures and for fabricating thin film transistor substrate using composition
01/31/2007CN1904741A Exposure apparatus and exposure method, and method of manufacturing wiring base board
01/31/2007CN1904740A Stage apparatus, lithographic apparatus and device manufacturing method
01/31/2007CN1904739A Well photoresist pattern of semiconductor device and method for forming the same
01/31/2007CN1904738A Method for expressing side intersecting with area by selecting sub-pixel bar chart
01/31/2007CN1904737A Method and device of generating pattern, method of determining the position, measurement device, and lithographic apparatus
01/31/2007CN1904731A Method for mfg. nano-sticking paper
01/31/2007CN1904730A Structure of gluing developing apparatus and chip transmission process
01/31/2007CN1904729A Phase shift mask design for exposure to generate micro-through-hole pattern
01/31/2007CN1904728A Method for generating dense and isolated contact hole pattern by identical energy twice exposures
01/31/2007CN1904726A Method and system for designing optical shield layout and producing optical shield pattern
01/31/2007CN1904708A Method for making pixel structure
01/31/2007CN1904136A Method of forming film, patterning and method of manufacturing electronic device using thereof
01/31/2007CN1904016A Composition for removal of residue comprising cationic salts and methods using same
01/31/2007CN1903449A Coating device and coating method
01/31/2007CN1298203C Circuit apparatus
01/31/2007CN1298199C Plasma treatment method and apparatus
01/31/2007CN1298198C Inductively coupled plasma generator having lower aspect ratio
01/31/2007CN1298113C Monolithic direct converting transceiver and producing method thereof
01/31/2007CN1298057C Semiconductor device
01/31/2007CN1298056C A CMOS circuit structure situated on SOI substrate and manufacturing method thereof
01/31/2007CN1298054C Chip semiconductor device mixed formed with store and logic circuit and producing method thereof
01/31/2007CN1298053C Integrated circuit
01/31/2007CN1298052C Semiconductor device with Cu interconnection and its manufacturing method
01/31/2007CN1298050C Method for extracting layout/circuit in bipolar integrated circuit design
01/31/2007CN1298049C Graphic engine chip and its using method
01/31/2007CN1298048C Method for avoiding enlargement of top size of deep trench
01/31/2007CN1298047C Validity verification of bipolar integrated circuit design and electric network consistency comparison method
01/31/2007CN1298046C Wafer processing method by forming combination viscosity on grain surface
01/31/2007CN1298045C Method for manufacturing semiconductor device with embedded multilayer wiring structure
01/31/2007CN1298044C Semiconductor device and method of manufacturing the same
01/31/2007CN1298043C Semiconducotor device and method for isolating the same
01/31/2007CN1298042C Semiconductor with shallow slot isolation without depression and its producing method
01/31/2007CN1298041C Method for improving shallow channel isolating electricity leakage and shallow channel isolating structure
01/31/2007CN1298040C Frame for base plate
01/31/2007CN1298039C Film carrying belt testing device for mounting electronic element and testing method
01/31/2007CN1298038C Semiconductor device
01/31/2007CN1298037C Indium-containing wafer and method for production thereof
01/31/2007CN1298036C Surface checking method and surface checker
01/31/2007CN1298035C Water testing parameter analytical method
01/31/2007CN1298034C Semiconductor package and method of manufacturing the same
01/31/2007CN1298033C Anisotropic conductive adhesive, assembling method, and electrooptical device module
01/31/2007CN1298032C Submount and semiconductor device
01/31/2007CN1298031C Encapsulation process for raising effect area of sticking crystal
01/31/2007CN1298030C Precisively butting apparatus for photoelectric device package
01/31/2007CN1298029C RF desk-top silicon diode electrophoretic depositional glass conformal passivation film preparation method
01/31/2007CN1298028C Method and device for heat treatment
01/31/2007CN1298027C 等离子体处理装置 Plasma processing apparatus
01/31/2007CN1298026C Method for modifying formation procedure for fabricating cumulate texture of controlling grid of flash memory
01/31/2007CN1298025C Method for fabricating capacitor of semiconductor memory device
01/31/2007CN1298024C Wafer self rotary device of strong stream oxygen ion injector
01/31/2007CN1298023C Method for producing group III nitride compound semiconductor and group III nitride compound semiconductor device
01/31/2007CN1298022C Digital alloy composite substrate for mercury-cadmium tellurium epitaxial growth and preparing method
01/31/2007CN1298021C SOI wafer and process for producing it
01/31/2007CN1298020C Composite substrate for epitaxy growth of gallium nitride
01/31/2007CN1298019C Film pattern forming method and device, and active matrix substrate manufacturing method
01/31/2007CN1298018C End effector assembly
01/31/2007CN1298017C Lifting and supporting device, coating and etching method and apparatus
01/31/2007CN1297866C Reset method and reset system for integrated circuit
01/31/2007CN1297854C Optical mask transfering method
01/31/2007CN1297838C Chip transmitting equipment in chip processing system for two-dimentional display
01/31/2007CN1297834C Optical projection system
01/31/2007CN1297690C Appts. for silicon anisotropic corrosion
01/31/2007CN1297451C Glass base plate transporting box
01/31/2007CN1297405C Nozzle block tester, liquid drop ejector, electro-optic device and manufacturing method thereof
01/30/2007US7171645 Semiconductor device, method of generating pattern for semiconductor device, method of manufacturing semiconductor device and device of generating pattern used for semiconductor device
01/30/2007US7171641 Voltage change reflecting delay calculation method, and voltage change reflecting delay calculation system
01/30/2007US7171632 Apparatus, method and program for designing semiconductor integrated circuit
01/30/2007US7171592 Self-testing circuit in semiconductor memory device
01/30/2007US7171284 Optical metrology model optimization based on goals
01/30/2007US7171095 Optical device and method of manufacturing the same
01/30/2007US7171038 Method and apparatus for inspecting a substrate
01/30/2007US7171035 Alignment mark for e-beam inspection of a semiconductor wafer
01/30/2007US7171034 Method and system for phase/amplitude error detection of alternating phase shifting masks in photolithography
01/30/2007US7170916 Selectively etchable heterogeneous composite distributed Bragg reflector
01/30/2007US7170911 Wavelength conversion apparatus
01/30/2007US7170867 Radio frequency data communications device
01/30/2007US7170791 Programming verification method of nonvolatile memory cell, semiconductor memory device, and portable electronic apparatus having the semiconductor memory device
01/30/2007US7170786 Deep wordline trench to shield cross coupling between adjacent cells for scaled NAND
01/30/2007US7170770 Nonvolatile ferroelectric perpendicular electrode cell, FeRAM having the cell and method for manufacturing the cell
01/30/2007US7170736 Capacitor having low resistance electrode including a thin silicon layer
01/30/2007US7170729 Semiconductor integrated circuit device
01/30/2007US7170694 Magnetically positioned precision holder for optical components
01/30/2007US7170686 Illumination optical system, exposure apparatus, and device manufacturing method using the same
01/30/2007US7170683 Reflection element of exposure light and production method therefor, mask, exposure system, and production method of semiconductor device
01/30/2007US7170682 Projection aligner, aberration estimating mask pattern, aberration quantity estimating method, aberration eliminating filter and semiconductor manufacturing method
01/30/2007US7170604 Overlay metrology method and apparatus using more than one grating per measurement direction
01/30/2007US7170603 Position detection apparatus and exposure apparatus
01/30/2007US7170593 Method of reviewing detected defects
01/30/2007US7170586 Lithographic apparatus and device manufacturing method
01/30/2007US7170585 Projection lens and microlithographic projection exposure apparatus
01/30/2007US7170580 Lithographic apparatus, projection system, method of projecting and device manufacturing method