| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/16/2007 | US7163830 Method for temporarily engaging electronic component for test |
| 01/16/2007 | US7163829 Method of integration testing for packaged electronic components |
| 01/16/2007 | US7163828 Electrode, method of manufacturing the same, ferroelectric memory, and semiconductor device |
| 01/16/2007 | US7163826 Method of fabricating multi layer devices on buried oxide layer substrates |
| 01/16/2007 | US7163780 Disposing on a substrate surface a B-staged dielectric matrix comprising dielectric matrix materials and a removable porogen; curing; patterning the dielectric matrix material; depositing a metal layer; removing porogen |
| 01/16/2007 | US7163778 Anti-reflection film material and a substrate having an anti-reflection film and a method for forming a pattern |
| 01/16/2007 | US7163776 Positive-working resist composition |
| 01/16/2007 | US7163755 Magneto-resistive element |
| 01/16/2007 | US7163751 Coating compositions for use with an overcoated photoresist |
| 01/16/2007 | US7163721 Method to plasma deposit on organic polymer dielectric film |
| 01/16/2007 | US7163719 Method of depositing thin film using hafnium compound |
| 01/16/2007 | US7163644 For planarizing the surface of a substrate, storage stability |
| 01/16/2007 | US7163641 Method of forming high aspect ratio apertures |
| 01/16/2007 | US7163638 Forming an insulating film on a substrate material, forming a contact hole in the insulating film, and coating a region where a transparent conductive film is to be formed with a liquid containing a precursor of the transparent conductive film liquid coats any unnecessary insulating film formed, annealin |
| 01/16/2007 | US7163614 Methods of and apparatus for making high aspect ratio microelectromechanical structures |
| 01/16/2007 | US7163613 Method of manufacturing a semiconductor device by forming plating layers having differing thicknesses |
| 01/16/2007 | US7163603 Plasma source assembly and method of manufacture |
| 01/16/2007 | US7163602 Apparatus for generating planar plasma using concentric coils and ferromagnetic cores |
| 01/16/2007 | US7163597 Ensures an efficient contact area even in case where the area of an adherend to be adhered is decreased and thus makes it possible to avoid adhesion failures such as chip-scattering or chipping |
| 01/16/2007 | US7163588 Processing a workpiece using water, a base, and ozone |
| 01/16/2007 | US7163587 Reactor assembly and processing method |
| 01/16/2007 | US7163585 Method and apparatus for an improved optical window deposition shield in a plasma processing system |
| 01/16/2007 | US7163450 Abrasive pad |
| 01/16/2007 | US7163448 Chemical/mechanical polishing method for STI |
| 01/16/2007 | US7163393 Heat treatment jig for semiconductor silicon substrate |
| 01/16/2007 | US7163301 Method and apparatus for managing actinic intensity transients in a lithography mirror |
| 01/16/2007 | US7163197 Liquid substance supply device for vaporizing system, vaporizer, and vaporization performance appraisal method |
| 01/16/2007 | US7163110 Adjustable cassette for accommodating substrates and method for adjusting same |
| 01/16/2007 | US7163104 Tray for semiconductor device and semiconductor device |
| 01/16/2007 | US7163053 Heat exchanger |
| 01/16/2007 | US7163033 Substrate bonding apparatus for liquid crystal display device panel |
| 01/16/2007 | US7163019 Method of reducing water spotting and oxide growth on a semiconductor structure |
| 01/16/2007 | US7163018 Single wafer cleaning method to reduce particle defects on a wafer surface |
| 01/16/2007 | US7163017 Polysilicon etch useful during the manufacture of a semiconductor device |
| 01/16/2007 | US7162906 Method and apparatus for removing a carrier part from a carrier |
| 01/16/2007 | US7162881 Thermophoretic wand to protect front and back surfaces of an object |
| 01/16/2007 | US7162796 Method of making an interposer with contact structures |
| 01/16/2007 | US7162794 Manufacturing method for multilayer ceramic elements |
| 01/16/2007 | US7162765 Seal system for irrigated scrubber mandrel assembly |
| 01/16/2007 | CA2274071C Affinity based self-assembly systems and devices for photonic and electronic applications |
| 01/11/2007 | WO2007005925A1 Clamp for use in processing semiconductor workpieces |
| 01/11/2007 | WO2007005870A1 Power interconnect structure for balanced bitline capacitance in a memory array |
| 01/11/2007 | WO2007005823A2 Semiconductor wafer cutting blade and method |
| 01/11/2007 | WO2007005817A1 Transistor with improved tip profile and method of manufacture thereof |
| 01/11/2007 | WO2007005731A2 Machining nanometer-sized tips from multi-walled nanotubes |
| 01/11/2007 | WO2007005724A2 Fpga circuits and methods considering process variations |
| 01/11/2007 | WO2007005697A2 Block contact architectures for nanoscale channel transistors |
| 01/11/2007 | WO2007005695A1 Integrated circuit die containing metal- and particle-filled through-silicon vias |
| 01/11/2007 | WO2007005639A2 Lead frame isolation using laser technology |
| 01/11/2007 | WO2007005636A2 Semiconductor failure analysis tool |
| 01/11/2007 | WO2007005617A2 Electrically conducting polymer glue, devices made therewith and methods of manufacture |
| 01/11/2007 | WO2007005489A2 Method and system for determining optical properties of semiconductor wafers |
| 01/11/2007 | WO2007005312A1 Material systems for dielectrics and metal electrodes and methods for formation thereof |
| 01/11/2007 | WO2007005263A2 Semiconductor die package and method for making the same |
| 01/11/2007 | WO2007005228A2 Hermetic seals for micro-electromechanical system devices |
| 01/11/2007 | WO2007005204A2 System and method for critical dimension reduction and pitch reduction |
| 01/11/2007 | WO2007005196A2 Scalable uniform thermal plate |
| 01/11/2007 | WO2007005191A1 Source side injection storage device with spacer gates and method therefor |
| 01/11/2007 | WO2007005136A1 Technique for forming contact insulation layers silicide regions with different characteristics |
| 01/11/2007 | WO2007005088A2 Vaporizable metalorganic compounds for deposition of metals and metal-containing thin films |
| 01/11/2007 | WO2007004995A1 Radiation crosslinker |
| 01/11/2007 | WO2007004986A1 An integrated circuit package and a method for manufacturing an integrated circuit package |
| 01/11/2007 | WO2007004890A1 Reduction of attraction forces between silicon wafers |
| 01/11/2007 | WO2007004808A1 Apparatus for trapping residual product of semiconductor manufacturing process |
| 01/11/2007 | WO2007004782A1 Pad conditioner and error detecting apparatus for the same |
| 01/11/2007 | WO2007004768A1 Method of controlling active layer of iii-nitride semiconductor light emitting device |
| 01/11/2007 | WO2007004666A1 Thin film transistor, wiring board and method for manufacturing such thin film transistor and wiring board |
| 01/11/2007 | WO2007004660A1 Device with mounted electronic parts, method of producing the same, protection circuit module of secondary battery, and battery package |
| 01/11/2007 | WO2007004658A1 Printed wiring board |
| 01/11/2007 | WO2007004657A1 Printed wiring board |
| 01/11/2007 | WO2007004612A1 Method of producing substrate under controlling organic matter concentration in stripping liquor |
| 01/11/2007 | WO2007004609A1 Method of forming spherical body, method of joining fine lines and laser processing device |
| 01/11/2007 | WO2007004607A1 Method for cutting workpiece |
| 01/11/2007 | WO2007004576A1 Plasma treatment apparatus and plasma treatment method |
| 01/11/2007 | WO2007004567A1 Exposure apparatus, exposure method, device manufacturing method, and system |
| 01/11/2007 | WO2007004566A1 Compound, positive resist composition and method for forming resist pattern |
| 01/11/2007 | WO2007004552A1 Exposure apparatus and method, exposure apparatus maintenance method, and device manufacturing method |
| 01/11/2007 | WO2007004551A1 Container transporting apparatus and container transporting system |
| 01/11/2007 | WO2007004550A1 Method and apparatus for manufacturing semiconductor wafer |
| 01/11/2007 | WO2007004535A1 Semiconductor device and method for manufacturing same |
| 01/11/2007 | WO2007004528A1 Method for designing structure of silicon carbide electrostatic induction transistor |
| 01/11/2007 | WO2007004485A1 Washing device and washing method |
| 01/11/2007 | WO2007004444A1 Semiconductor memory |
| 01/11/2007 | WO2007004443A1 Method for forming tungsten film, film-forming apparatus, storage medium and semiconductor device |
| 01/11/2007 | WO2007004431A1 Method of forming high-resolution pattern and apparatus therefor |
| 01/11/2007 | WO2007004418A1 Semiconductor integrated circuit device |
| 01/11/2007 | WO2007004413A1 Translating/turning 2-degree-of-freedom stage device and 3-degree-of-freedom stage device using the same |
| 01/11/2007 | WO2007004381A1 METHOD FOR MANUFACTURING SiOCH FILM, PLASMA CVD APPARATUS AND SiOCH FILM |
| 01/11/2007 | WO2007004358A1 Exposure apparatus |
| 01/11/2007 | WO2007004295A1 Semiconductor device and method for manufacturing same |
| 01/11/2007 | WO2007004289A1 Testing circuit, wafer, measuring apparatus, device manufacturing method and display device |
| 01/11/2007 | WO2007004281A1 Paste composition and solar cell element using same |
| 01/11/2007 | WO2007004272A1 Method for predicting distribution of impurity concentration and program for determining impurity concentration |
| 01/11/2007 | WO2007004258A1 Semiconductor device and fabrication method thereof |
| 01/11/2007 | WO2007004256A1 Semiconductor device and method for manufacturing same |
| 01/11/2007 | WO2007004096A2 Methods of fabricating crystalline silicon film and thin film transistors |
| 01/11/2007 | WO2007003639A2 Substrate, in particular made of silicon carbide, coated with a thin stoichiometric film of silicon nitride, for making electronic components, and method for obtaining such a film |
| 01/11/2007 | WO2007003638A1 Highly oxygen-sensitive silicon layer and method for obtaining same |
| 01/11/2007 | WO2007003489A1 Method for producing a structured parylene coating, and corresponding structured parylene coating |
| 01/11/2007 | WO2007003479A1 Method and apparatus for evacuating an enclosure |