Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2007
08/07/2007US7253032 Method of flattening a crystallized semiconductor film surface by using a plate
08/07/2007US7253031 Semiconductor device and manufacturing method thereof
08/07/2007US7253030 Method of fabricating high-voltage CMOS device
08/07/2007US7253029 Non-magnetic, hermetically-sealed micro device package
08/07/2007US7253028 Image sensor packaging method and structure thereof
08/07/2007US7253027 Method of manufacturing hybrid integrated circuit device
08/07/2007US7253026 Ultra-thin semiconductor package device and method for manufacturing the same
08/07/2007US7253025 Multiple substrate microelectronic devices and methods of manufacture
08/07/2007US7253024 Dual-interface IC card by laminating a plurality of foils and method of same
08/07/2007US7253023 Multilayer wiring circuit board
08/07/2007US7253022 Method for fabricating semiconductor package with multi-layer metal bumps
08/07/2007US7253021 Transfer molding apparatus and method for manufacturing semiconductor devices
08/07/2007US7253020 Deuterium alloy process for image sensors
08/07/2007US7253019 Buried, fully depletable, high fill factor photodiodes
08/07/2007US7253018 CMOS image sensor and method for fabricating the same
08/07/2007US7253017 Molding technique for fabrication of optoelectronic devices
08/07/2007US7253016 Micromechanical capacitive transducer and method for producing the same
08/07/2007US7253015 Low doped layer for nitride-based semiconductor device
08/07/2007US7253014 Fabrication of light emitting film coated fullerenes and their application for in-vivo light emission
08/07/2007US7253013 Method for manufacturing light-emitting diode
08/07/2007US7253012 Guard ring for improved matching
08/07/2007US7253011 Fabrication method of semiconductor integrated circuit device
08/07/2007US7253010 Method of deciding focal plane and method of crystallization using thereof
08/07/2007US7253009 Method of producing an integrated circuit arrangement with field-shaping electrical conductor
08/07/2007US7252927 High performance curable polymers and processes for the preparation thereof
08/07/2007US7252925 1-Alkoxy- or cycloalkoxy(poly)oxyethylenebenzimidazoles, e.g., 1-(2-methoxyethyl)-1H-benzimidazole, used to form amplified resists with excellent resolution, form precisely configured patterns with minimized roughness of sidewalls and useful in microfabrication using electron beams or deep-UV light.
08/07/2007US7252924 Positive resist composition and method of pattern formation using the same
08/07/2007US7252910 Fabrication method of semiconductor integrated circuit device and mask fabrication method
08/07/2007US7252875 Diffusion barrier with low dielectric constant and semiconductor device containing same
08/07/2007US7252872 Joined structures of ceramics
08/07/2007US7252871 Polishing pad having a pressure relief channel
08/07/2007US7252861 Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids
08/07/2007US7252807 Scrubbing modules; removal heat from air draw from confined environment
08/07/2007US7252782 Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method
08/07/2007US7252778 Etching method and etching device
08/07/2007US7252773 Clean for high density capacitors
08/07/2007US7252738 Apparatus for reducing polymer deposition on a substrate and substrate support
08/07/2007US7252737 Pedestal with integral shield
08/07/2007US7252719 High pressure processing method
08/07/2007US7252716 Gas injection apparatus for semiconductor processing system
08/07/2007US7252714 Apparatus and method for thermally controlled processing of microelectronic workpieces
08/07/2007US7252699 Forming patterned film by exposure to radiation; three-dimensional microstructure; one step
08/07/2007US7252695 aqueous acid suspension of individualized colloidal silica particles not linked to each other by siloxane bonds, and a surfactant; for mechanical chemical polishing
08/07/2007US7252575 Polishing state monitoring apparatus and polishing apparatus and method
08/07/2007US7252099 Wafer cleaning apparatus with multiple wash-heads
08/07/2007US7252098 Apparatus for cleaning and drying substrates
08/07/2007US7252097 System and method for integrating in-situ metrology within a wafer process
08/07/2007US7251883 Electronic-component alignment method and apparatus therefor
08/07/2007US7251872 Method for forming a chip package
08/07/2007CA2306568C Deposition of coatings using an atmospheric pressure plasma jet
08/07/2007CA2206346C Contoured-tub fermi-threshold field effect transistor and method of forming same
08/03/2007WO2007026622A1 Silicon carbide semiconductor device and method for producing the same
08/02/2007WO2007087620A2 Low profile semiconductor system having a partial-cavity substrate
08/02/2007WO2007087406A2 Porous silicon dielectric
08/02/2007WO2007087377A2 Photoelectrochemical synthesis of high density combinatorial polymer arrays
08/02/2007WO2007087354A2 Cleaving wafers from silicon crystals
08/02/2007WO2007087299A2 Simultaneous formation of source/drain contacts and conductive layers on eeprom control gates
08/02/2007WO2007087249A2 Wafer level packaging to lidded chips
08/02/2007WO2007087247A2 Wafer level chip packaging
08/02/2007WO2007087213A2 Methods of implanting ions and ion sources used for same
08/02/2007WO2007087212A1 Methods of implanting ions and ion sources used for same
08/02/2007WO2007087196A2 Advanced ceramic heater for substrate processing
08/02/2007WO2007087159A1 Fin structure formation
08/02/2007WO2007087155A2 Systems and methods for forming additional metal routing in semiconductor devices
08/02/2007WO2007087127A2 Introduction of metal impurity to change workfunction of conductive electrodes
08/02/2007WO2007087067A2 Remote plasma pre-clean with low hydrogen pressure
08/02/2007WO2007086700A1 Trapping apparatus for by-product of semiconductor fabrication
08/02/2007WO2007086624A1 Cleaning apparatus of exhaust gas produced from semiconductor production process and method thereof
08/02/2007WO2007086560A1 Molecular beam cell having purge function
08/02/2007WO2007086557A1 Optical member holding apparatus, method for adjusting position of optical member, and exposure apparatus
08/02/2007WO2007086551A1 Printed-circuit board, and method for manufacturing the same
08/02/2007WO2007086529A1 Chemical mechanical polishing pad and method for manufacturing same
08/02/2007WO2007086511A1 Method and device for determining processing conditions, display and displaying method, processor, measuring instrument and aligner, substrate processing system, and program and information recording medium
08/02/2007WO2007086509A1 Method of manufacturing printed wiring board
08/02/2007WO2007086508A1 Method and apparatus for mounting solder ball
08/02/2007WO2007086458A1 Substrate processing apparatus
08/02/2007WO2007086454A1 Additive added to solution for electrolytic copper plating using anode of phosphorated copper, solution for electrolytic copper plating and method of electrolytic copper plating
08/02/2007WO2007086442A1 Method for manufacturing soi wafer
08/02/2007WO2007086400A1 Method and apparatus for inspecting sample surface
08/02/2007WO2007086398A1 Apparatus and method for inspecting sample surface
08/02/2007WO2007086393A1 Substrate processing system
08/02/2007WO2007086368A1 Thin film transistor, and active matrix substrate and display device provided with such thin film transistor
08/02/2007WO2007086356A1 Analyzing device and analyzing method
08/02/2007WO2007086325A1 Electric element, memory device and semiconductor integrated circuit
08/02/2007WO2007086316A1 Superposition management method and apparatus, processing apparatus, measurement apparatus and exposure apparatus, device fabrication system and device fabrication method, and program, and information recording medium
08/02/2007WO2007086304A1 Semiconductor device and method for fabricating same
08/02/2007WO2007086291A1 Field effect transistor
08/02/2007WO2007086285A1 Signal transmission system and semiconductor integrated circuit device
08/02/2007WO2007086278A1 Integrated circuit device
08/02/2007WO2007086276A1 Spattering device and film forming method
08/02/2007WO2007086237A1 Electronic element, current control device, arithmetic device, and display device
08/02/2007WO2007086220A1 Cata-dioptric imaging system, exposure device, and device manufacturing method
08/02/2007WO2007086212A1 Method of forming multilayered spin-on-glass film
08/02/2007WO2007086204A1 Double gate isolation structure for ccds and corresponding fabricating method
08/02/2007WO2007086203A1 Double gate isolation structure for ccds and corresponding fabricating method
08/02/2007WO2007086196A1 Method for manufacturing silicon carbide semiconductor device
08/02/2007WO2007086181A1 Positive resist composition for immersion exposure and method of forming resist pattern
08/02/2007WO2007086163A1 Process for producing semiconductor device and semiconductor device
08/02/2007WO2007086126A1 Ferroelectric memory device, method for manufacturing such ferroelectric memory device and method for manufacturing semiconductor device
08/02/2007WO2007086111A1 Method for manufacturing semiconductor device, and semiconductor device
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