| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/26/2007 | US20070171349 Manufacturing method of display device |
| 07/26/2007 | US20070171337 Liquid crystal display device and method of fabricating the same |
| 07/26/2007 | US20070170951 Control system and method of semiconductor inspection system |
| 07/26/2007 | US20070170601 Semiconductor device and manufacturing method of them |
| 07/26/2007 | US20070170600 Semiconductor device and manufacturing method thereof |
| 07/26/2007 | US20070170595 Semiconductor device components with conductive vias and systems including the components |
| 07/26/2007 | US20070170594 Insulating tube, semiconductor device employing the tube, and method of manufacturing the same |
| 07/26/2007 | US20070170592 Apparatus for solder crack deflection |
| 07/26/2007 | US20070170591 Semiconductor device and method for fabricating the same |
| 07/26/2007 | US20070170590 Method of fabricating semiconductor device |
| 07/26/2007 | US20070170588 Connection structure and fabrication method for the same |
| 07/26/2007 | US20070170574 Buried via technology for three dimensional integrated circuits |
| 07/26/2007 | US20070170571 Low profile semiconductor system having a partial-cavity substrate |
| 07/26/2007 | US20070170569 In-line apparatus and method for manufacturing double-sided stacked multi-chip packages |
| 07/26/2007 | US20070170566 Semiconductor Device and Method of Manufacturing the Same, Circuit Board, and Electronic Instrument |
| 07/26/2007 | US20070170560 Apparatus and methods for packaging integrated circuit chips with antennas formed from package lead wires |
| 07/26/2007 | US20070170552 Ultra thin TCS (SiCl4) cell nitride for DRAM capacitor with DCS (SiH2cl2) interface seeding layer |
| 07/26/2007 | US20070170551 Semiconductor devices with oxide coatings selectively positioned over exposed features including semiconductor material and solutions for forming the coatings |
| 07/26/2007 | US20070170547 Semiconductor device and method for fabricating the same |
| 07/26/2007 | US20070170546 Back end thin film capacitor having both plates of thin film resistor material at single metallization layer |
| 07/26/2007 | US20070170542 Method of filling a high aspect ratio trench isolation region and resulting structure |
| 07/26/2007 | US20070170538 Process for the fabricating an electronic integrated circuit and electronic integrated circuit thus obtained |
| 07/26/2007 | US20070170537 Method and device for wavelength-sensitive photo-sensing |
| 07/26/2007 | US20070170530 Wafer encapsulated microelectromechanical structure and method of manufacturing same |
| 07/26/2007 | US20070170526 Thin-film transistor and manufacturing method thereof |
| 07/26/2007 | US20070170522 Semiconductor device and method for fabricating the same |
| 07/26/2007 | US20070170519 Driver for Driving a Load Using a Charge Pump Circuit |
| 07/26/2007 | US20070170516 Triple-well cmos devices with increased latch-up immunity and methods of fabricating same |
| 07/26/2007 | US20070170515 Structure and method for enhanced triple well latchup robustness |
| 07/26/2007 | US20070170513 Semiconductor Device and Manufacturing Method Thereof |
| 07/26/2007 | US20070170508 Semiconductor device and method of manufacturing the semiconductor device |
| 07/26/2007 | US20070170503 Composite substrate and method of fabricating the same |
| 07/26/2007 | US20070170502 Semiconductor device and method for manufacturing the same |
| 07/26/2007 | US20070170501 MOS Transistors Including Silicide Layers on Source/Drain Regions |
| 07/26/2007 | US20070170496 Nrom flash memory devices on ultrathin silicon |
| 07/26/2007 | US20070170494 Nonvolatile memory device and method for fabricating the same |
| 07/26/2007 | US20070170490 Nonvolatile memory device and method of fabricating the same |
| 07/26/2007 | US20070170488 Capacitor of semiconductor device and method for fabricating the same |
| 07/26/2007 | US20070170487 Storage capacitor for semiconductor memory cells and method of manufacturing a storage capacitor |
| 07/26/2007 | US20070170486 Semiconductor device having self-aligned contact and method of fabricating the same |
| 07/26/2007 | US20070170485 Semiconductor memory device and method for fabricating the same |
| 07/26/2007 | US20070170484 Semiconductor device and its manufacturing method |
| 07/26/2007 | US20070170477 Solid state imaging device and method for manufacturing the same |
| 07/26/2007 | US20070170473 Apparatus using manhattan geometry having non-manhattan current flow |
| 07/26/2007 | US20070170466 Method for producing compound semiconductor wafer and compound semiconductor device |
| 07/26/2007 | US20070170464 Transistor gate electrode having conductor material layer |
| 07/26/2007 | US20070170444 Integrated LED Chip to Emit Multiple Colors and Method of Manufacturing the Same |
| 07/26/2007 | US20070170435 Liquid crystal display panel and fabricating method thereof |
| 07/26/2007 | US20070170434 Thin film transistor, thin film transistor substrate, processes for producing the same, liquid crystal display using the same, and related devices and processes; and sputtering target, transparent electroconductive film formed by use of this,transparent electrode, and related devices and processes |
| 07/26/2007 | US20070170433 Multilevel semiconductor device and method of manufacturing the same |
| 07/26/2007 | US20070170432 Thin film transistor array substrate and method of fabricating the same |
| 07/26/2007 | US20070170374 Pattern area value calculating method, proximity effect correcting method, and charged particle beam writing method and apparatus |
| 07/26/2007 | US20070170159 Laser beam machining method, laser beam machining apparatus, and laser beam machining product |
| 07/26/2007 | US20070170154 Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device |
| 07/26/2007 | US20070170149 Vacuum Processing Apparatus And Vacuum Processing Method Of Sample |
| 07/26/2007 | US20070170148 Methods for in-situ generation of reactive etch and growth specie in film formation processes |
| 07/26/2007 | US20070170088 Container, container producing method, substrate processing device, and semiconductor device producing method |
| 07/26/2007 | US20070169895 Suction unit |
| 07/26/2007 | US20070169890 Exhaust processing method, plasma processing method and plasma processing apparatus |
| 07/26/2007 | US20070169889 Methods and apparatus for selectively coupling process tools to abatement reactors |
| 07/26/2007 | US20070169816 Passivating layer for photovoltaic cells |
| 07/26/2007 | US20070169795 Apparatus for cleaning substrates |
| 07/26/2007 | US20070169704 Apparatus for shielding process chamber port having dual zone and optical access features |
| 07/26/2007 | US20070169703 Advanced ceramic heater for substrate processing |
| 07/26/2007 | US20070169700 Sensing system and method for determining the alignment of a substrate holder in a batch reactor |
| 07/26/2007 | US20070169699 Method and Apparatus for Depositing a Magnetoresistive Multilayer Film |
| 07/26/2007 | US20070169697 Method of manufacturing capacitor of semiconductor device by simplifying process of forming dielectric layer and apparatus thereof |
| 07/26/2007 | US20070169696 Two-step post nitridation annealing for lower eot plasma nitrided gate dielectrics |
| 07/26/2007 | US20070169694 Feedback control of sub-atmospheric chemical vapor deposition processes |
| 07/26/2007 | US20070169689 Manufacturing method of aluminum nitride single crystal and aluminum nitride single crystal |
| 07/26/2007 | US20070169688 Method for manufacturing silicon wafer |
| 07/26/2007 | US20070169421 CMP abrasive, method for polishing substrate and method for manufacturing semiconductor device using the same, and additive for CMP abrasive |
| 07/26/2007 | US20070169343 Methods of fabricating substrates including one or more conductive vias |
| 07/26/2007 | DE4391302B4 Verfahren zur Herstellung eines Halbleiters mit einer guten Intrinsic-Getterung A process for producing a semiconductor device with a good intrinsic gettering |
| 07/26/2007 | DE4233792B4 Substrat für ein Matrix-Flüssigkristallelement A substrate for a matrix liquid crystal element |
| 07/26/2007 | DE19906067B4 Halbleitersensor für physikalische Größen und Verfahren zu dessen Herstellung A semiconductor sensor of physical quantities and methods for its preparation |
| 07/26/2007 | DE112005001736T5 A method of manufacturing a plurality of electronic assembles A method of manufacturing a Plurality of electronic assembles |
| 07/26/2007 | DE10335385B9 ROM-Speicherzelle und -Baustein sowie Entwurfsverfahren hierfür ROM memory cell and building block design and method therefor |
| 07/26/2007 | DE10330456B4 Vorrichtung zum Erstellen einer Oberflächenstruktur auf einem Wafer Apparatus for creating a surface structure on a wafer |
| 07/26/2007 | DE10311699B4 LOMOS-Hochfrequenztransistor und Verfahren zum Herstellen desselben Thereof lomos high frequency transistor and methods for making |
| 07/26/2007 | DE102007001594A1 Masken-ROM, Halbleiterbauelement und Herstellungsverfahren Mask ROM, semiconductor device and manufacturing method |
| 07/26/2007 | DE102007001455A1 Elektronisches Bauelement und Verfahren für dessen Montage Electronic device and method for its assembly |
| 07/26/2007 | DE102006061028A1 Statischer Direktzugriffsspeicher und Verfahren zur Herstellung desselben Static random access memory and method of manufacturing the same |
| 07/26/2007 | DE102006061023A1 CMOS-Bildsensor und Verfahren zu dessen Herstellung CMOS image sensor and method for its production |
| 07/26/2007 | DE102006060800A1 Verfahren zum Bilden eines Grabens A method of forming a trench |
| 07/26/2007 | DE102006060768A1 Gehäusegruppe für Geräte hoher Leistungsdichte Housing group for supplies, high power density |
| 07/26/2007 | DE102006052140A1 Ladungsteilchenstrahl-Schreibverfahren und -Schreibvorrichtung, Positionsabweichungsmessverfahren und Positionsmessvorrichtung A charged-writing process and writing device, position deviation measurement method and position measuring device |
| 07/26/2007 | DE102006023088A1 Power semiconductor component has power semiconductor chip arranged on region of flat conductor frame planned as chip pads, power semiconductor chip is connected with chip pad by plumb bob layer |
| 07/26/2007 | DE102006003464A1 Verfahren zur Erzeugung einer Siliciumschicht auf einer Substratoberfläche durch Gasphasenabscheidung A method for producing a silicon film on a substrate surface by vapor deposition |
| 07/26/2007 | DE102006003283A1 Fabricating method for semiconductor component e.g. solar cell, involves forming diffusion-inhibiting layer, partial removal of layer in highly doped region, formation of dopant source and diffusion of dopant from dopant source |
| 07/26/2007 | DE102006001885A1 Accurate fixing microcomponents such as ionizing radiation detectors onto carriers (e.g. in tomographic devices) involves use of a melt adhesive |
| 07/26/2007 | DE102006001792A1 Semiconductor module, has semiconductor chip stack arranged on wiring substrate, where heat conducting layer e.g. foil with anisotropic heat conducting particles is arranged between semiconductor chips |
| 07/26/2007 | DE102005032074B4 Halbleiterbauelement mit Feldstopp Semiconductor device with a field stop |
| 07/26/2007 | DE102005002707B4 Verfahren zur Herstellung elektrischer Verbindungen in einem Halbleiterbauteil mittels koaxialer Mikroverbindungselemente A method of making electrical connections in a semiconductor device by means of micro-coaxial connectors |
| 07/26/2007 | DE102004062392B4 Verfahren zum Bilden einer Metallverdrahtung einer Halbleitervorrichtung A method of forming a metal wiring of a semiconductor device |
| 07/26/2007 | DE102004007105B4 Verfahren zum Unterdrücken eines Lithographievorgangs am Rand einer Halbleiterscheibe A method of suppressing a lithography process at the edge of a semiconductor wafer |
| 07/26/2007 | DE10138103B4 Verfahren zum Strukturieren einer Fotolackschicht auf einem Halbleitersubstrat A method for patterning a photoresist layer on a semiconductor substrate |
| 07/26/2007 | DE10120383B4 Verfahren zur Metallisierung von Siliziumscheiben durch Aufsputtern Process for the metallization of silicon wafers by sputtering |
| 07/26/2007 | CA2637737A1 Method of etching a silicon-based material |
| 07/26/2007 | CA2634068A1 Methods of fabricating transistors including supported gate electrodes and related devices |